CN220753396U - Automatic throwing device for frequency-adjustable semiconductor material corrosion process - Google Patents
Automatic throwing device for frequency-adjustable semiconductor material corrosion process Download PDFInfo
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- CN220753396U CN220753396U CN202322104134.5U CN202322104134U CN220753396U CN 220753396 U CN220753396 U CN 220753396U CN 202322104134 U CN202322104134 U CN 202322104134U CN 220753396 U CN220753396 U CN 220753396U
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 230000007797 corrosion Effects 0.000 title claims abstract description 29
- 238000005260 corrosion Methods 0.000 title claims abstract description 29
- 239000000463 material Substances 0.000 title claims abstract description 25
- 239000004065 semiconductor Substances 0.000 title claims abstract description 25
- 238000009434 installation Methods 0.000 claims abstract description 5
- 239000003638 chemical reducing agent Substances 0.000 claims description 4
- 230000017525 heat dissipation Effects 0.000 claims description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000003814 drug Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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Abstract
The utility model discloses an automatic throwing device for a frequency-adjustable semiconductor material corrosion process, which comprises a machine table housing, wherein a cup seat is arranged on the machine table housing, a beaker is clamped on the cup seat, an installation box positioned behind the beaker is arranged on the machine table housing, a linear sliding assembly is arranged in the installation box, the linear sliding assembly is connected with a clamping assembly for clamping a lifting basket, a power assembly is arranged in the machine table housing, and the power assembly is matched with the linear sliding assembly through a swinging connecting rod so as to drive the clamping lifting basket on the clamping assembly to throw up and down in the beaker. Compared with the prior art, the utility model has the advantages that: compared with the traditional manual throwing mode, the automatic throwing device for the frequency-adjustable semiconductor material corrosion process has the advantages of automation, adjustable frequency control, miniaturization design, improvement of working efficiency and the like, is beneficial to improving the stability, uniformity and safety of the corrosion process, and meets the requirements of the small semiconductor material corrosion process.
Description
Technical Field
The utility model relates to the technical field of semiconductor material corrosion equipment, in particular to an automatic throwing device for a frequency-adjustable semiconductor material corrosion process.
Background
In some small-sized semiconductor material corrosion processes, the large groove body is not required to be corroded, only the large groove body is required to be corroded in the beaker, in order to ensure the corrosion uniformity, the vertical throwing operation is required in the corrosion process, the vertical shaking operation is manually carried out in the past through manpower, the shaking frequency is not uniform when the labor shakes up and down, the corrosive liquid medicine is easy to splash out of the beaker to hurt people, the corrosion time is overlong, and the fatigue of the human body is too tired when the labor shakes.
Disclosure of Invention
The utility model aims to overcome the technical defects and provide an automatic throwing device for a frequency-adjustable semiconductor material corrosion process.
In order to solve the technical problems, the technical scheme provided by the utility model is as follows: the utility model provides an automatic throwing of adjustable frequency semiconductor material corruption technology moves device, includes the board housing, be equipped with the cup on the board housing, the card is equipped with the beaker on the cup, be equipped with the mounting box that is located the beaker rear on the board housing, be equipped with sharp slip assembly in the mounting box, sharp slip assembly is connected with the centre gripping assembly that is used for the centre gripping basket, the inside power assembly that is equipped with of board housing, thereby the power assembly drives the centre gripping basket on the centre gripping assembly through rocking connecting rod and the cooperation of sharp slip assembly and throws from top to bottom in the beaker.
Further, the linear sliding assembly consists of a sliding block and a linear sliding rail, the linear sliding rail is arranged on the inner wall of the mounting box, the sliding block is arranged on the sliding block in a sliding manner, and a connecting rod connecting block is arranged on the sliding block;
the power assembly consists of a servo motor and a speed reducer, wherein an output shaft of the servo motor is connected with a swinging flange, an eccentric end of the swinging flange is hinged with the lower end of the swinging connecting rod, and one end of the swinging connecting rod, which is far away from the swinging flange, is hinged with the connecting rod connecting block.
Further, the swinging connecting rod consists of a positive wire connecting rod, a negative wire connecting rod and a middle nut sleeve, wherein the positive wire connecting rod and the negative wire connecting rod are respectively connected to two ends of the middle nut sleeve, and the positive wire connecting rod and the negative wire connecting rod are respectively hinged with the connecting rod connecting block and the eccentric end of the swinging flange.
Further, the clamping assembly comprises a clamping block, the clamping block is connected with the sliding block through a clamping connecting block, the clamping basket is installed in a spigot of the clamping block, and one side of the clamping block is provided with a locking buckle for locking the clamping basket.
Further, the front end of the mounting box is provided with a guide strip opening, and the clamping connecting block penetrates through the guide strip opening.
Further, the cup seat is of a hollow structure of an inner ring and is welded on the table top of the machine table housing.
Further, a central control panel is arranged at the front end of the machine table housing, and a control screen is arranged on the central control panel.
Further, heat dissipation holes are formed in two sides of the machine table housing.
Compared with the prior art, the utility model has the advantages that:
1. automatic throwing: in the traditional corrosion process, the beaker is required to be manually rocked up and down by relying on manpower in the throwing process, so that the throwing frequency is uneven, the corrosive liquid medicine splashes out of the beaker, and even the operation personnel are injured. The utility model provides an automatic throwing moves device through the design of power assembly and rocking connecting rod, can realize that centre gripping basket is thrown automatically from top to bottom in the beaker to effectively eliminated the unstable factor that the manual work rocked, improved the homogeneity and the security of throwing and moved.
2. Adjustable frequency control: the automatic throwing device is provided with a power assembly consisting of a servo motor and a speed reducer, and the rotating speed of the power assembly can be adjusted through a control screen on a central control panel. The method ensures that operators can flexibly adjust the frequency of throwing according to different process requirements, thereby realizing accurate control of the corrosion process.
3. Work efficiency is improved: because the device can throw automatically and move, operating personnel no longer need manual rocking the beaker, consequently alleviateed operating personnel's physical burden and tired, improved work efficiency, reduced work risk simultaneously.
In summary, compared with the traditional manual polishing mode, the automatic polishing device for the frequency-adjustable semiconductor material corrosion process has the advantages of automation, adjustable frequency control, miniaturization design, improvement of working efficiency and the like, is beneficial to improving the stability, uniformity and safety of the corrosion process, and meets the requirements of the small semiconductor material corrosion process.
Drawings
FIG. 1 is a schematic diagram of an automatic throwing device for a frequency-adjustable semiconductor material etching process;
FIG. 2 is a view of the present application with a portion of the housing removed;
FIG. 3 is a front view of the present application;
FIG. 4 is a cross-sectional view taken along the direction A-A in FIG. 3;
FIG. 5 is a schematic view of the construction of the rocking link of the present application;
FIG. 6 is a schematic view of a linear slide assembly of the present application;
FIG. 7 is a schematic view of the structure of the clamping assembly of the present application;
as shown in the figure: 1. the machine comprises a machine table housing, 2, a power assembly, 3, a swinging flange, 4, a swinging connecting rod, 4-1, a positive wire connecting rod, 4-2, a negative wire connecting rod, 4-3, a middle nut sleeve, 5, a connecting rod connecting block, 6, a linear sliding assembly, 6-1, a sliding block, 6-2, a linear sliding rail, 7, a clamping connecting block, 701, an upper U-shaped fastener, 702, an upper locking nut, 8, a clamping assembly, 8-1, a clamping block, 9, a cup holder, 10, a beaker, 11, a basket, 12, a middle control panel, 13, a control screen, 14 and an installation box.
Detailed Description
The present utility model will be described in further detail with reference to the accompanying drawings.
Specific embodiments of the present utility model will be further described below with reference to the accompanying drawings. Wherein like parts are designated by like reference numerals.
It should be noted that the words "front", "rear", "left", "right", "upper" and "lower" used in the following description refer to directions in the drawings, and the words "inner" and "outer" refer to directions toward or away from, respectively, the geometric center of a particular component.
In order to make the contents of the present utility model more clearly understood, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.
Referring to fig. 1-7, an automatic throwing device for a frequency-adjustable semiconductor material corrosion process comprises a machine housing 1, wherein a cup seat 9 is arranged on the machine housing 1, a beaker 10 is clamped on the cup seat 9, a mounting box 14 positioned behind the beaker 10 is arranged on the machine housing 1, a linear sliding assembly 6 is arranged in the mounting box 14, the linear sliding assembly 6 is connected with a clamping assembly 8 for clamping a basket 11, a power assembly 2 is arranged in the machine housing 1, and the power assembly 2 is matched with the linear sliding assembly 6 through a swinging connecting rod 4 so as to drive the clamping basket 11 on the clamping assembly 8 to throw up and down in the beaker 10.
In this embodiment, the power assembly 2 is composed of a servo motor and a speed reducer, wherein an output shaft of the servo motor is connected with a swinging flange 3, an eccentric end of the swinging flange 3 is hinged with a lower end of a swinging connecting rod 4, one end of the swinging connecting rod 4 away from the swinging flange 3 is hinged with a connecting rod connecting block 5, and when the servo motor is started, the swinging flange 3 starts to rotate to drive the swinging connecting rod 4 to generate up-and-down reciprocating motion, and the up-and-down reciprocating motion is transmitted to the linear sliding assembly 6. The linear sliding assembly 6 consists of a sliding block 6-1 and a linear sliding rail 6-2. The slide block 6-1 is slidably disposed on the linear slide rail 6-2, and the linear slide rail 6-2 is mounted on the inner wall of the mounting box 14. The slide block 6-1 is provided with a connecting rod connecting block 5 which is connected with the swinging connecting rod 4. Thus, the movement of the rocking link 4 is transmitted to the linear slider 6-1 to reciprocate up and down on the linear slide 6-2.
In the embodiment, the swinging connecting rod 4 consists of a positive wire connecting rod 4-1, a negative wire connecting rod 4-2 and a middle nut sleeve 4-3, wherein the positive wire connecting rod 4-1 and the negative wire connecting rod 4-2 are respectively connected with two ends of the middle nut sleeve 4-3, and the positive wire connecting rod 4-1 and the negative wire connecting rod 4-2 are respectively hinged with the connecting rod connecting block 5 and the eccentric end of the swinging flange 3.
In this embodiment, the movement of the clamping assembly 8 is driven by the slider 6-1 of the linear sliding assembly 6 and the clamping connection block 7. The clamping block 8-1 is connected with the sliding block 6-1 through the clamping connecting block 7, and the clamping basket 11 is arranged in a spigot of the clamping block 8-1. When the slide block 6-1 reciprocates up and down on the linear slide rail 6-2, the clamping connecting block 7 also moves up and down along with the slide block, so that the clamping assembly 8 and the lifting basket 11 are driven to throw up and down in the beaker 10, and an operator can lock the lifting basket 11 through the locking buckle 8-2, so that the lifting basket cannot be separated from the clamping assembly 8 in the throwing process, and stable throwing motion is kept.
In this embodiment, the front end of the mounting box 14 is provided with a guide strip opening and the clamping connection block 7 penetrates the guide strip opening.
In the embodiment, the cup seat 9 is of a hollow structure of an inner ring and is welded on the table top of the machine table housing 1, so that the beaker 10 can be clamped.
In this embodiment, the front end of the machine housing 1 is provided with a central control panel 12, the central control panel 12 is provided with a control screen 13, and the control screen 13 is convenient for an operator to set the rotation speed of the power assembly 2, so as to control the rotation speed of the power assembly 2, thereby controlling the throwing frequency.
In this embodiment, both sides of the machine housing 1 are provided with heat dissipation holes, which facilitate heat dissipation of the whole device.
Working principle:
1) After pouring the corrosive solution into the beaker 10, installing the beaker 10 in the cup seat 9 and clamping;
2) Mounting a basket 11 carrying semiconductor materials at the seam allowance of a clamping block 8-1 on a clamping assembly 8, and then screwing a locking buckle 8-2 to fix the basket 11;
3) Starting the power assembly 2 to rotate, and simultaneously driving the swing flange 3 to rotate, wherein the rotating acting force is transmitted to the swing connecting rod 4, so that the swing connecting rod 4 generates up-and-down reciprocating motion;
4) The sliding block 6-1 on the linear sliding assembly 6 is driven by acting force to reciprocate up and down, and the clamping connecting block 7 drives the clamping assembly 8 to reciprocate up and down synchronously;
5) Simultaneously, the basket 11 fixed by the clamping assembly 8 is driven to reciprocate up and down, and the semiconductor material placed on the basket 11 follows the basket 11 to reciprocate up and down in the corrosive liquid medicine in the beaker 10;
6) An operator can set the rotating speed of the power assembly 2 through the control screen 13 on the central control panel 12, and the rotating speed of the power assembly 2 is controlled, so that the throwing frequency is controlled; the operator can also set the working time of the polishing industry to meet the corrosion process requirements, so that the corrosion of the semiconductor material is relatively uniform.
The utility model and its embodiments have been described above with no limitation, and the actual construction is not limited to the embodiments of the utility model as shown in the drawings. In summary, if one of ordinary skill in the art is informed by this disclosure, a structural manner and an embodiment similar to the technical solution should not be creatively devised without departing from the gist of the present utility model.
Claims (8)
1. The utility model provides an automatic throwing of adjustable frequency semiconductor material corrosion process moves device, its characterized in that, including board housing (1), be equipped with cup (9) on board housing (1), the card is equipped with beaker (10) on cup (9), be equipped with mounting box (14) at beaker (10) rear on board housing (1), be equipped with sharp slip assembly (6) in mounting box (14), sharp slip assembly (6) are connected with clamping assembly (8) that are used for centre gripping basket (11), board housing (1) inside is equipped with power assembly (2), thereby power assembly (2) are through rocking connecting rod (4) and the cooperation of sharp slip assembly (6) drive centre gripping basket (11) on clamping assembly (8) and throw in beaker (10) from top to bottom.
2. The automatic throwing device for the frequency-adjustable semiconductor material corrosion process according to claim 1, wherein the linear sliding assembly (6) consists of a sliding block (6-1) and a linear sliding rail (6-2), the linear sliding rail (6-2) is arranged on the inner wall of the installation box (14), the sliding block (6-1) is arranged on the sliding block (6-1) in a sliding manner, and a connecting rod connecting block (5) is arranged on the sliding block (6-1);
the power assembly (2) consists of a servo motor and a speed reducer, wherein an output shaft of the servo motor is connected with a swinging flange (3), an eccentric end of the swinging flange (3) is hinged with the lower end of a swinging connecting rod (4), and one end, far away from the swinging flange (3), of the swinging connecting rod (4) is hinged with a connecting rod connecting block (5).
3. The automatic throwing device for the frequency-adjustable semiconductor material corrosion process according to claim 2, wherein the swinging connecting rod (4) consists of a positive wire connecting rod (4-1), a reverse wire connecting rod (4-2) and a middle nut sleeve (4-3), the positive wire connecting rod (4-1) and the reverse wire connecting rod (4-2) are respectively connected to two ends of the middle nut sleeve (4-3), and the positive wire connecting rod (4-1) and the reverse wire connecting rod (4-2) are respectively hinged to eccentric ends of the connecting rod connecting block (5) and the swinging flange (3).
4. The automatic throwing device for the frequency-adjustable semiconductor material corrosion process according to claim 2, wherein the clamping assembly (8) comprises a clamping block (8-1), the clamping block (8-1) is connected with the sliding block (6-1) through a clamping connecting block (7), the clamping basket (11) is installed in a spigot of the clamping block (8-1), and a locking buckle (8-2) for locking the clamping basket (11) is arranged on one side of the clamping block (8-1).
5. The automatic throwing device for the frequency-adjustable semiconductor material corrosion process according to claim 4, wherein a guide strip opening is formed in the front end of the installation box (14) and the clamping connecting block (7) penetrates through the guide strip opening.
6. The automatic throwing device for the frequency-adjustable semiconductor material corrosion process according to claim 1, wherein the cup holder (9) is of an inner ring hollow structure and is welded on the table top of the machine table housing (1).
7. The automatic throwing device for the frequency-adjustable semiconductor material corrosion process according to claim 1, wherein a central control panel (12) is arranged at the front end of the machine table cover (1), and a control screen (13) is arranged on the central control panel (12).
8. The automatic throwing device for the frequency-adjustable semiconductor material corrosion process according to claim 7, wherein heat dissipation holes are formed in two sides of the machine housing (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322104134.5U CN220753396U (en) | 2023-08-07 | 2023-08-07 | Automatic throwing device for frequency-adjustable semiconductor material corrosion process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322104134.5U CN220753396U (en) | 2023-08-07 | 2023-08-07 | Automatic throwing device for frequency-adjustable semiconductor material corrosion process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220753396U true CN220753396U (en) | 2024-04-09 |
Family
ID=90552590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322104134.5U Active CN220753396U (en) | 2023-08-07 | 2023-08-07 | Automatic throwing device for frequency-adjustable semiconductor material corrosion process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220753396U (en) |
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2023
- 2023-08-07 CN CN202322104134.5U patent/CN220753396U/en active Active
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