CN220752520U - Template positioning device - Google Patents
Template positioning device Download PDFInfo
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- CN220752520U CN220752520U CN202322092700.5U CN202322092700U CN220752520U CN 220752520 U CN220752520 U CN 220752520U CN 202322092700 U CN202322092700 U CN 202322092700U CN 220752520 U CN220752520 U CN 220752520U
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- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 description 13
- 239000000758 substrate Substances 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 6
- 239000002086 nanomaterial Substances 0.000 description 5
- 230000000007 visual effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000001015 X-ray lithography Methods 0.000 description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004038 photonic crystal Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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Abstract
The utility model discloses a template positioning device, which comprises a supporting plate, a left-right adjusting unit, a front-back adjusting unit and a camera unit, wherein the template comprises a pattern area, an edge area and a plurality of marks, the marks are positioned in the edge area of the template, and the left-right adjusting unit, the front-back adjusting unit and the camera unit are arranged on the supporting plate; the left-right adjusting unit and the front-back adjusting unit comprise an adjusting handle, an adjusting screw rod fixedly connected with the adjusting handle, two connecting rods and two guide rails respectively fixedly connected with the two connecting rods, and the two connecting rods are connected to the adjusting screw rod; the support plate is provided with a plurality of groups of camera units, each group of camera units comprises a mounting plate, a camera, a connecting plate and a light source, and each group of camera units is connected with the left-right adjusting unit and the front-back adjusting unit. The template positioning device lays a foundation for realizing automatic production of nano-imprinting with high efficiency.
Description
Technical Field
The utility model relates to the field of micro-nano machining, in particular to a template positioning device.
Background
The nano imprinting technology is a nano structure manufacturing technology based on a nano scale template, specifically, a template structure inscribed by technologies such as electron beam lithography, X-ray lithography or extreme ultraviolet lithography is transferred onto a substrate in a mechanical contact manner, the transferred medium is usually a layer of thin imprinting glue, the imprinting glue is solidified by a method such as heating, cooling or irradiation, and then the copying of the transferred structure is completed by a process such as plasma etching. Compared with the traditional photoetching technology, the structure scale of the nanoimprint technology is not limited by the wavelength of light waves, and the resolution ratio is high; compared with electron beam lithography, X-ray lithography or extreme ultraviolet lithography, the nano imprinting technology has low equipment cost and high production efficiency. Nanoimprint technology has been widely used in biomedical applications, high density storage, photonic crystals, solar cells, fabrication of high precision printed circuit boards and other semiconductor devices, and the like.
The nanoimprint technology mostly adopts a mode of manually carrying materials, stacks a substrate and a template with a nanostructure on a workbench, and then applies pressure load to the substrate and the template to finish the transfer of the nanostructure. Along with the gradual maturation of the nanoimprint technology, the industrialization requirement of nanoimprint is gradually obvious, and the requirement of automatic production of nanoimprint is also gradually increased, so that the substrate and the template with the nanostructure are required to be positioned, and the automatic feeding of the substrate and the template is realized. CN201310682870.7 proposes a technique for alignment by using a visual and multidirectional driving mechanism, which has a complex adjustment structure, large accumulated error, and difficulty in ensuring precision and efficiency. CN201010300052.2 proposes a method for positioning a substrate and a template in an imprinting process by pushing a two-degree-of-freedom platform by using a piezoelectric ceramic driver, and the efficiency of the method is low in an automation production line due to the complexity of an adjusting mechanism.
Therefore, the existing nanoimprint technology generally adopts a manual mode to place the bonded substrate and template on an imprint table, takes out the substrate or template after imprinting, and is free from application research in the aspect of automatic loading and positioning of the substrate or template. The research on the alignment of the substrate and the template has been focused on the alignment of the substrate and the template in the imprinting process or the alignment of multiple imprints in the imprinting process, and the structure is complex and the efficiency is low.
Disclosure of Invention
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a template positioner, includes backup pad, controls adjustment unit, front and back adjustment unit and camera unit, and the template includes pattern area, marginal zone and a plurality of mark, and a plurality of marks are located the marginal zone of template, control adjustment unit, front and back adjustment unit and camera unit setting in the backup pad. Wherein,
the left-right adjusting unit and the front-back adjusting unit comprise an adjusting handle, an adjusting screw rod fixedly connected with the adjusting handle, two connecting rods and two guide rails respectively fixedly connected with the two connecting rods, and the two connecting rods are connected to the adjusting screw rod;
the support plate is provided with a plurality of groups of camera units, each group of camera units comprises a mounting plate, a camera, a connecting plate and a light source, and each group of camera units is connected with the left-right adjusting unit and the front-back adjusting unit.
As a further scheme of the utility model: the left and right adjusting unit comprises a left adjusting handle, a left adjusting screw rod fixedly connected with the left adjusting handle, a left connecting rod, a left guide rail, a right connecting rod and a right guide rail, wherein the rotating shaft of the left adjusting screw rod can rotate through the left adjusting handle, the left adjusting screw rod comprises a left end moving block and a right end moving block, the left connecting rod is fixedly connected with the left end moving block, the right connecting rod is fixedly connected with the right end moving block, and the left guide rail and the right guide rail are respectively arranged on the left connecting rod and the right connecting rod.
As a further scheme of the utility model: the left end movable block and the right end movable block are mutually close to or far away from each other through the rotation of the left adjusting screw, two movable blocks and a fixed block are arranged on the left guide rail and the right guide rail, the fixed block of the left guide rail is fixedly connected with the left connecting rod, and the fixed block of the right guide rail is fixedly connected with the right connecting rod.
As a further scheme of the utility model: the front-back adjusting unit comprises a front adjusting handle, a front adjusting screw fixedly connected with the front adjusting handle, a front connecting rod, a front guide rail, a rear connecting rod and a rear guide rail, wherein the rotating shaft of the front adjusting screw can rotate through the front adjusting handle, the front adjusting screw comprises a front end moving block and a rear end moving block, the front connecting rod is fixedly connected with the front end moving block, the rear connecting rod is fixedly connected with the rear end moving block, and the front guide rail and the rear guide rail are respectively arranged on the front connecting rod and the rear connecting rod.
As a further scheme of the utility model: the front end moving block and the rear end moving block are mutually close to or far away from each other through the rotation of the front adjusting screw, two moving blocks and a fixed block are arranged on the front guide rail and the rear guide rail, the fixed block of the front guide rail is fixedly connected with the front connecting rod, and the fixed block of the rear guide rail is fixedly connected with the rear connecting rod.
As a further scheme of the utility model: the camera units are four groups, namely a first group of camera units, a second group of camera units, a third group of camera units and a fourth group of camera units, and the mounting plates of the camera units of each group are provided with two orthogonal mounting surfaces, wherein one mounting surface of the first group of camera units is fixedly connected with one moving block of the left guide rail of the left and right adjusting unit, and the other mounting surface is fixedly connected with one moving block of the front guide rail of the front and rear adjusting unit; one mounting surface of the second group of camera units is fixedly connected with one moving block of the left guide rail of the left-right adjusting unit, and the other mounting surface is fixedly connected with one moving block of the rear guide rail of the front-rear adjusting unit; one mounting surface of the third group of camera units is fixedly connected with one moving block of the right guide rail of the left-right adjusting unit, and the other mounting surface is fixedly connected with one moving block of the front guide rail of the front-rear adjusting unit; one mounting surface of the fourth group of camera units is fixedly connected with one moving block of the right guide rail of the left-right adjusting unit, and the other mounting surface is fixedly connected with one moving block of the rear guide rail of the front-rear adjusting unit.
As a further scheme of the utility model: the cameras and the connecting plates of each group of camera units are fixedly installed on the mounting plates of the group of camera units, and the light source of each group of camera units is fixedly installed on the connecting plates of the group of camera units and is positioned above the cameras of the group of camera units.
As a further scheme of the utility model: the device also comprises a template carrying unit, wherein the template carrying unit is a manipulator or a robot, the template carrying unit carries the template to the upper part of the template positioning device, and the central position of the mark of the template is the same as the central position of the visual field area of the camera unit.
As a further scheme of the utility model: the device also comprises a controller unit, wherein the controller unit controls the camera unit to take a picture and operate the mark of the template, and the current accurate position of the template is determined.
As a further scheme of the utility model: the device also comprises a calculating unit, the calculating unit compares the current accurate position with the preset position, a displacement compensation value of the template carrying unit is calculated, and the template carrying unit corrects the template position according to the displacement compensation value.
As a further scheme of the utility model: the mark of the template is round, point, triangle or square; the number of marks is the same as the number of camera units; the adjusting screw is driven by a handle or a motor.
Compared with the prior art, the template positioning device provided by the utility model realizes substrate feeding positioning required by automatic production of nano imprinting through the template with the circular mark, the left and right adjusting unit with the movable block capable of approaching or separating, and the front and rear adjusting unit with the movable block capable of approaching or separating, has a simple structure and high positioning efficiency, and can be compatible with products with various sizes and specifications.
Drawings
Fig. 1 is a schematic structural view of a template positioning device.
Fig. 2 is a schematic view of an operating state of the template positioning device.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Embodiments of the present utility model are illustrated in the accompanying drawings, in which like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The terms "first," "second," "third," and the like in the description and in the claims and drawings, if any, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the objects so described may be interchanged where appropriate. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. The directional terms mentioned in this utility model are, for example: upper, lower, left, right, front, rear, inner, outer, side, etc., are only with reference to the directions of the drawings. The embodiments described below by referring to the drawings are exemplary only for explaining the present utility model and are not to be construed as limiting the present utility model. Furthermore, the present utility model in various examples repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, does not in itself dictate a relationship between the various embodiments and/or configurations discussed. In addition, the present utility model provides examples of various specific processes and materials, but one of ordinary skill in the art will recognize the application of other processes and/or the use of other materials.
In an embodiment of the present utility model, as shown in fig. 1-2, a template positioning device 1 is provided, which includes a support plate 10, a left-right adjusting unit 20, a front-rear adjusting unit 30, and a camera unit 40, wherein a template 50 includes a pattern area 51, an edge area 52, and a plurality of marks 53, and the plurality of marks 53 are located in the edge area 52 of the template. Preferably, the marks 53 of the template are circles, dots, triangles or squares, the number of marks 53 being the same as the number of the camera units 40; the left-right adjusting unit 20, the front-rear adjusting unit 30, and the camera unit 40 are provided on the support plate 10. Wherein the method comprises the steps of
The left-right adjusting unit 20 and the front-rear adjusting unit 30 each comprise an adjusting handle, an adjusting screw fixedly connected with the adjusting handle, two connecting rods and two guide rails respectively fixedly connected with the two connecting rods, and the two connecting rods are connected to the adjusting screw. The support plate 10 is provided with a plurality of sets of camera units 40, each set of camera units 40 includes a mounting plate 41, a camera 42, a connection plate 43 and a light source 44, and each set of camera units 40 is connected with the left-right adjusting unit 20 and the front-rear adjusting unit 30.
Preferably, the adjusting screws of the left and right adjusting unit 20 and the front and rear adjusting unit 30 are not limited to being driven by an adjusting handle, but the adjusting screws of the left and right adjusting unit 20 and the front and rear adjusting unit 30 may be fixedly connected to a motor and driven by the motor.
Further, the left and right adjusting unit 20 includes a left adjusting handle 22, a left adjusting screw 21 fixedly connected with the left adjusting handle 22, a left connecting rod 23, a left guide rail 24, a right connecting rod 25 and a right guide rail 26, the left adjusting screw 21 is disposed on the support plate 10, a rotation shaft of the left adjusting screw 21 is rotatable through the left adjusting handle 22, the left adjusting screw 21 includes two moving blocks, which are a left end moving block and a right end moving block, respectively, which move toward or away from each other by rotation of the left adjusting screw 21. The left link 23 is disposed on and fixedly connected with the left end moving block of the left adjusting screw 21, the right link 25 is disposed on and fixedly connected with the right end moving block of the left adjusting screw 21, and the left guide rail 24 and the right guide rail 26 are disposed on the left link 23 and the right link 25, respectively.
Further, two moving blocks and a fixed block are respectively arranged on the left guide rail 24 and the right guide rail 26, the fixed block of the left guide rail 24 is fixedly connected with the left connecting rod 23, and the fixed block of the right guide rail 26 is fixedly connected with the right connecting rod 25.
Further, the front and rear adjusting unit 30 includes a front adjusting handle 32, a front adjusting screw 31 fixedly connected with the front adjusting handle 32, a front link 33, a front rail 34, a rear link 35, and a rear rail 36, the front adjusting screw 31 is disposed on the support plate 10, a rotation shaft of the front adjusting screw 31 is rotatable by the front adjusting handle 32, and the front adjusting screw 31 includes two moving blocks, a front moving block and a rear moving block, respectively, which move toward or away from each other by rotation of the front adjusting screw 31. The front link 33 is disposed on and fixedly connected with the front end moving block of the front adjusting screw 31, the rear link 35 is disposed on and fixedly connected with the rear end moving block of the front adjusting screw 31, and the front guide rail 34 and the rear guide rail 36 are disposed on the front link 33 and the rear link 35, respectively.
Further, two moving blocks and a fixed block are respectively arranged on the front guide rail 34 and the rear guide rail 36, the fixed block of the front guide rail 34 is fixedly connected with the front connecting rod 33, and the fixed block of the rear guide rail 36 is fixedly connected with the rear connecting rod 35.
Further, the template positioning device 1 comprises a plurality of sets of camera units 40, preferably four sets of camera units 40, namely a first set of camera units 40, a second set of camera units 40, a third set of camera units 40 and a fourth set of camera units 40, and the mounting plates 41 of each set of camera units 40 have two orthogonal mounting surfaces. One mounting surface of the first group camera unit 40 is fixedly connected with one moving block of the left rail 24 of the left-right adjusting unit 20, and the other mounting surface is fixedly connected with one moving block of the front rail 34 of the front-rear adjusting unit 30. One mounting surface of the second group camera unit 40 is fixedly connected to one moving block of the left rail 24 of the left-right adjusting unit 20, and the other mounting surface is fixedly connected to one moving block of the rear rail 36 of the front-rear adjusting unit 30. One mounting surface of the third group camera unit 40 is fixedly connected to one moving block of the right rail 26 of the left-right adjusting unit 20, and the other mounting surface is fixedly connected to one moving block of the front rail 34 of the front-rear adjusting unit 30. One mounting surface of the fourth group camera unit 40 is fixedly connected to one moving block of the right rail 26 of the left and right adjusting unit 20, and the other mounting surface is fixedly connected to one moving block of the rear rail 36 of the front and rear adjusting unit 30.
Further, the cameras 42 and the connection plates 43 of each group of the camera units 40 are arranged on the mounting plates 41 of the corresponding group of the camera units 40, and fixedly mounted on the mounting plates 41 of the group of the camera units 40.
Further, the light source 44 of each group of camera units 40 is arranged on the connection plate 43 of the group of camera units 40, and is fixedly mounted on the connection plate 43 of the group of camera units 40. Preferably, the light source 44 of each set of camera units 40 is located above the cameras 42 of the set of camera units 40.
Further, the second, third and fourth sets of camera units 40, 40 have the same or symmetrical features and the same or symmetrical arrangement as the first set of camera units 40.
Further, the template positioning device 1 further comprises a template handling unit, preferably a manipulator or a robot, which handles the template 50 above the template positioning device 1, and the center position of the mark 53 of the template 50 is the same as the center position of the field of view area of the camera unit 40.
Further, the template positioning device 1 further comprises a controller, and the controller controls the camera unit 40 to take a picture of the mark 53 of the template and calculate the mark to determine the current accurate position of the template. Preferably, the controller unit is a PLC, a PC, or the like.
Further, the template positioning device 1 further comprises a calculating unit, the calculating unit compares the current accurate position with a preset position, calculates a displacement compensation value of the template carrying unit, and the template carrying unit corrects the template position according to the displacement compensation value.
Compared with the prior art, the utility model has the beneficial effects that: the current position of the template is accurately obtained through four groups of camera units and the corresponding templates with circular marks, and the accurate correction of the position of the template can be realized. The center position of the visual field area of the four groups of camera units can be adjusted through the left-right adjusting unit and the front-back adjusting unit, so that the camera is applicable to products with various sizes and specifications, and is simple in structure and convenient and quick to operate.
In one embodiment, the pattern area 51 of the template 50 for the template positioning device 1 is a nanostructure area, the template 50 has four marks 53, each mark 53 is circular in shape, and the four circular marks 53 are located in the edge area 52 of the template and are symmetrically distributed.
The working principle of the template positioning device 1 is as follows:
first, according to the size of the template 50 and the corresponding position of the circular mark 53, wherein the size of the template 50 may be any size such as 100mm, 150mm, 200mm, etc., the left adjustment handle 22 of the left and right adjustment unit 20 is adjusted to move the left and right camera units 40 closer to or farther away from each other until the left and right field of view distances between the left and right camera units 40 and 40 are equal to or close to the left and right field of view distances between the circular mark 53 of the template. The front adjustment handle 32 of the front-rear adjustment unit 30 is adjusted to move the front two-group camera unit 40 toward or away from the rear two-group camera unit 40 until the front-rear field of view distance of the front two-group camera unit 40 and the rear two-group camera unit 40 is equal to or close to the front-rear distance of the circular mark 53 of the template. At this time, the center position size of the field of view area of the four camera units 40 is the same as or close to the center position size of the 50 four circular marks 53 of the template.
Secondly, the template 50 is carried from the previous process to the upper part of the positioning device through the template carrying unit, the center positions of the four circular marks 53 of the template are the same as or are close to the center positions of the visual field areas of the four groups of camera units 40, and the camera units 40 are controlled by the controller to take pictures and calculate the circular marks 53 of the template, so that the current accurate position of the template 50 is obtained.
Finally, the current accurate position of the template 50 is compared with the set position, a displacement compensation value of a template carrying unit is calculated, and the template carrying unit corrects the position of the template 50 according to the displacement compensation value, so that the loading and positioning of the template 50 are completed, and the template 50 is carried to a later process.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (9)
1. The device comprises a supporting plate, a left-right adjusting unit, a front-back adjusting unit and a camera unit, wherein the template comprises a pattern area, an edge area and a plurality of marks, and the marks are positioned in the edge area of the template; wherein,
the left-right adjusting unit and the front-back adjusting unit comprise adjusting handles, adjusting screws fixedly connected with the adjusting handles, two connecting rods and two guide rails respectively fixedly connected with the two connecting rods, and the two connecting rods are connected to the adjusting screws;
the camera units are arranged on the supporting plate, each camera unit comprises a mounting plate, a camera, a connecting plate and a light source, and each camera unit is connected with the left-right adjusting unit and the front-back adjusting unit.
2. The template positioning device according to claim 1, wherein the left and right adjusting units comprise a left adjusting handle, a left adjusting screw fixedly connected with the left adjusting handle, a left connecting rod, a left guide rail, a right connecting rod and a right guide rail, a rotating shaft of the left adjusting screw can rotate through the left adjusting handle, the left adjusting screw comprises a left end moving block and a right end moving block, the left connecting rod is fixedly connected with the left end moving block, the right connecting rod is fixedly connected with the right end moving block, and the left guide rail and the right guide rail are respectively arranged on the left connecting rod and the right connecting rod.
3. The template positioning device according to claim 2, wherein the left end moving block and the right end moving block are close to each other or far away from each other through rotation of a left adjusting screw, two moving blocks and a fixed block are arranged on the left guide rail and the right guide rail, the fixed block of the left guide rail is fixedly connected with the left connecting rod, and the fixed block of the right guide rail is fixedly connected with the right connecting rod.
4. The template positioning device according to claim 1, wherein the front-rear adjusting unit comprises a front adjusting handle, a front adjusting screw fixedly connected with the front adjusting handle, a front connecting rod, a front guide rail, a rear connecting rod and a rear guide rail, a rotating shaft of the front adjusting screw can rotate through the front adjusting handle, the front adjusting screw comprises a front end moving block and a rear end moving block, the front connecting rod is fixedly connected with the front end moving block, the rear connecting rod is fixedly connected with the rear end moving block, and the front guide rail and the rear guide rail are respectively arranged on the front connecting rod and the rear connecting rod.
5. The template positioning device according to claim 4, wherein the front end moving block and the rear end moving block are close to each other or far away from each other by rotation of a front adjusting screw, two moving blocks and a fixed block are arranged on the front guide rail and the rear guide rail, the fixed block of the front guide rail is fixedly connected with the front connecting rod, and the fixed block of the rear guide rail is fixedly connected with the rear connecting rod.
6. The template positioning device according to claim 1, wherein the camera units are four groups, namely a first group of camera units, a second group of camera units, a third group of camera units and a fourth group of camera units, and each group of mounting plates of the camera units are provided with two orthogonal mounting surfaces, wherein one mounting surface of the first group of camera units is fixedly connected with one moving block of a left guide rail of a left and right adjusting unit, and the other mounting surface is fixedly connected with one moving block of a front guide rail of a front and rear adjusting unit; one mounting surface of the second group of camera units is fixedly connected with one moving block of the left guide rail of the left-right adjusting unit, and the other mounting surface is fixedly connected with one moving block of the rear guide rail of the front-rear adjusting unit; one mounting surface of the third group of camera units is fixedly connected with one moving block of the right guide rail of the left-right adjusting unit, and the other mounting surface is fixedly connected with one moving block of the front guide rail of the front-rear adjusting unit; one mounting surface of the fourth group of camera units is fixedly connected with one moving block of the right guide rail of the left-right adjusting unit, and the other mounting surface is fixedly connected with one moving block of the rear guide rail of the front-rear adjusting unit.
7. The template positioning device of claim 6, wherein the cameras and the connection plates of each set of camera units are fixedly mounted on the mounting plates of the set of camera units, and the light sources of each set of camera units are fixedly mounted on the connection plates of the set of camera units and above the cameras of the set of camera units.
8. The template positioning device according to claim 1, further comprising a template handling unit, the template handling unit being a manipulator or a robot, the template handling unit handling the template above the template positioning device, and a center position of a mark of the template is the same as a center position of a field of view area of the camera unit.
9. The template positioning device according to claim 1, wherein the marks of the template are circles, dots, triangles or squares; the number of the marks is the same as the number of the camera units; the adjusting screw is driven by a handle or a motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322092700.5U CN220752520U (en) | 2023-08-04 | 2023-08-04 | Template positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322092700.5U CN220752520U (en) | 2023-08-04 | 2023-08-04 | Template positioning device |
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| Publication Number | Publication Date |
|---|---|
| CN220752520U true CN220752520U (en) | 2024-04-09 |
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| CN202322092700.5U Active CN220752520U (en) | 2023-08-04 | 2023-08-04 | Template positioning device |
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| CN (1) | CN220752520U (en) |
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- 2023-08-04 CN CN202322092700.5U patent/CN220752520U/en active Active
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