CN220691720U - Multi-degree-of-freedom decoupling positioning platform - Google Patents
Multi-degree-of-freedom decoupling positioning platform Download PDFInfo
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- CN220691720U CN220691720U CN202321851544.XU CN202321851544U CN220691720U CN 220691720 U CN220691720 U CN 220691720U CN 202321851544 U CN202321851544 U CN 202321851544U CN 220691720 U CN220691720 U CN 220691720U
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Abstract
The utility model provides a multi-degree-of-freedom decoupling positioning platform which comprises a workbench, first driving parts symmetrically arranged on the upper side and the lower side of the workbench, second driving parts symmetrically arranged on the left side and the right side of the workbench, and a moving platform arranged in the middle of the workbench, wherein the first driving parts comprise two symmetrically arranged secondary amplifying mechanisms and piezoelectric ceramics connected with input plates of the secondary amplifying mechanisms, output rods of the two secondary amplifying mechanisms are respectively connected with vertexes of the upper side or the lower side of the moving platform, the second driving parts comprise a primary amplifying mechanism and piezoelectric ceramics connected with input plates of the primary amplifying mechanism, and output rods of the two primary amplifying mechanisms are respectively connected with midpoints of the left side or the right side of the moving platform. The multi-degree-of-freedom decoupling positioning platform solves the problems that the positioning platform in the prior art is low in precision and translation in the X and Y axes cannot reach the expected maximum value at the same time.
Description
Technical Field
The utility model relates to the technical field of precise positioning, in particular to a multi-degree-of-freedom decoupling positioning platform.
Background
The precise micro-positioning technology is an important component of advanced manufacturing technology and is also one of key technologies of nano technology. In recent years, the demands of high-end and precise instruments which are independently researched and developed in the fields of biomedical engineering, semiconductors, nano functional materials, chip manufacturing and the like in China are urgent. The atomic force microscope represents high speed, the high-precision measuring instrument is an important part in high-end precision manufacturing, the precision and the performance of the high-precision instrument are greatly dependent on the precision and the performance of the nano positioning platform behind the high-precision instrument, and the research of the high-precision nano positioning platform has extremely important significance for the research and the development of the high-precision measuring instrument.
However, the positioning platform in the prior art is usually driven by power by adopting a servo motor, a precise screw rod and the like, but the transmission scheme has the problems of thread gaps and transmission friction, so that the positioning precision of the positioning platform can only reach the micrometer level, and the positioning precision is not high enough. The existing positioning platform capable of moving towards the X axis and the Y axis and rotating around the Z axis is mainly designed to distribute three drivers at 120 degrees, so that movement in three directions is realized, and the shape of the mechanism is generally a circle. However, this design has the problems of large coupling error and complex control, and cannot be completely decoupled in the X and Y directions, i.e., the translation in the X and Y directions cannot reach the expected maximum value at the same time.
Disclosure of Invention
Based on the above, the utility model aims to provide a multi-degree-of-freedom decoupling positioning platform, which aims to solve the problems that the positioning platform in the prior art has low precision and the translation in the X and Y directions cannot reach the expected maximum value at the same time.
The utility model provides a multi-degree-of-freedom decoupling positioning platform, which comprises a workbench, first driving parts symmetrically arranged on the upper side and the lower side of the workbench, second driving parts symmetrically arranged on the left side and the right side of the workbench, and a moving platform arranged in the middle of the workbench, wherein the first driving parts comprise two symmetrically arranged secondary amplifying mechanisms and piezoelectric ceramics connected with input boards of the secondary amplifying mechanisms, output rods of the two secondary amplifying mechanisms are respectively connected with vertexes of the upper side or the lower side of the moving platform, the second driving parts comprise a primary amplifying mechanism and the piezoelectric ceramics connected with the input boards of the primary amplifying mechanisms, and the output rods of the two primary amplifying mechanisms are respectively connected with midpoints of the left side or the right side of the moving platform.
According to the multi-degree-of-freedom decoupling positioning platform, the piezoelectric ceramics are arranged to drive the first driving part and the second driving part, so that the moving platform can independently move in the X-axis and the Y-axis directions and can rotate around the Z-axis, and further the problems of low precision of the positioning platform caused by thread clearance and transmission friction brought by transmission of a servo motor, a precise screw rod and the like are solved. And through the first drive part that sets up from top to bottom symmetry and the second drive part that sets up bilateral symmetry for the location platform is square and moves through four drive parts drive moving platform wholly, makes the location platform can reach the maximum value that expects simultaneously in the flattening of X axle and Y axle two directions. Specifically, the piezoelectric ceramic drives the first-stage amplifying mechanism at the left side or the right side, so that the moving platform can move in the X-axis direction; the piezoelectric ceramics drives two same-side two-stage amplifying mechanisms at the upper side or the lower side, so that the moving platform can move in the Y-axis direction; the two diagonally arranged secondary amplifying mechanisms are driven by the piezoelectric ceramics, so that the movable platform can rotate around the Z axis. Therefore, the utility model solves the problems that the positioning platform in the prior art has low precision and the translation in the X and Y axes can not reach the expected maximum value at the same time.
In addition, the multi-degree-of-freedom decoupling positioning platform provided by the utility model can also have the following additional technical characteristics:
preferably, the first-stage amplifying mechanism is a first amplifying unit, the first amplifying unit comprises two amplifying subunits which are vertically symmetrically distributed, and two output blocks which are respectively connected with two sides of the amplifying subunits, one of the output blocks is connected with the workbench, the other output block is connected with the mobile platform through the output rod, the amplifying subunits comprise an input plate and lever arms which are symmetrically arranged on the left side and the right side of the input plate, and two ends of each lever arm are respectively connected with the input plate and the output blocks through straight beam type flexible hinges.
Preferably, a mounting groove for placing the piezoelectric ceramic is formed in the primary amplifying mechanism, so that the upper end and the lower end of the piezoelectric ceramic are respectively connected with the two input plates.
Preferably, the secondary amplifying mechanism comprises a first amplifying unit and a second amplifying unit connected with the output block of the first amplifying unit through a perfect circle type flexible hinge, and the second amplifying unit is arranged on one side of the first amplifying unit close to the moving platform.
Preferably, the second amplifying unit includes an output plate and an intermediate link, one end of the output plate is connected with the output block and the intermediate link of the first amplifying unit respectively through the right circular flexible hinge, the other end of the output plate is connected with the top point of the upper side or the lower side of the mobile platform through the output rod, and one end of the intermediate link, which is far away from the output plate, is connected with the workbench through the right circular flexible hinge.
Preferably, the output plate comprises a vertical portion and a horizontal portion, two sides of the vertical portion are respectively connected with the output block and the middle connecting rod through right circular flexible hinges, and one side vertex of the horizontal portion, far away from the vertical portion, is connected with the mobile platform through the output rod.
Preferably, the middle part of the input board protrudes outwards from the piezoelectric ceramic connection, and two sides of the input board are respectively connected with the two lever arms through the straight beam type flexible hinge.
Preferably, the workbench is provided with screw holes, and the first driving part and the second driving part are fixed on the workbench through the cooperation of bolts and the screw holes.
Drawings
Fig. 1 is a schematic structural diagram of a multi-degree-of-freedom decoupling positioning platform according to a first embodiment of the present utility model;
FIG. 2 is an enlarged view of a portion of FIG. 1 at A;
FIG. 3 is an enlarged view of a portion of FIG. 1 at B;
description of main reference numerals:
| working table | 10 | First driving part | 20 |
| Second driving part | 30 | Mobile platform | 40 |
| Two-stage amplifying mechanism | 21 | Input board | 22 |
| Piezoelectric ceramics | 23 | Output rod | 24 |
| Primary amplifying mechanism | 31 | Amplifying subunit | 311 |
| Output block | 312 | Lever arm | 313 |
| Straight beam type flexible hinge | 314 | Mounting groove | 315 |
| Perfect round flexible hinge | 211 | Second amplifying unit | 212 |
| Output board | 2121 | Intermediate connecting rod | 2122 |
| Screw hole | 11 |
The utility model will be further described in the following detailed description in conjunction with the above-described figures.
Detailed Description
In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. Several embodiments of the utility model are presented in the figures. This utility model may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "mounted" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1 to 3, a multi-degree-of-freedom decoupling positioning platform according to a first embodiment of the present utility model includes a workbench 10, first driving members 20 symmetrically disposed on upper and lower sides of the workbench 10, second driving members 30 symmetrically disposed on left and right sides of the workbench 10, and a moving platform 40 disposed in the middle of the workbench 10, wherein:
the first driving part 20 comprises two symmetrically arranged secondary amplifying mechanisms 21 and piezoelectric ceramics 23 connected with input plates 22 of the secondary amplifying mechanisms 21, output rods 24 of the two secondary amplifying mechanisms 21 are respectively connected with the top points of the upper side or the lower side of the movable platform 40, the second driving part 30 comprises a primary amplifying mechanism 31 and piezoelectric ceramics 23 connected with the input plates 22 of the primary amplifying mechanism 31, and the output rods 24 of the two primary amplifying mechanisms 31 are respectively connected with the middle points of the left side or the right side of the movable platform 40.
It can be appreciated that the piezoelectric ceramic 23 is provided to drive the first driving component 20 and the second driving component 30, so that the moving platform 40 can independently move in the directions of the X axis and the Y axis and can rotate around the Z axis, and further the problems of low precision of the positioning platform caused by thread clearance and transmission friction caused by transmission of a servo motor, a precise screw rod and the like are overcome. And through the first driving part 20 and the second driving part 30 which are arranged symmetrically up and down and are arranged symmetrically left and right, the whole positioning platform is square and the moving platform 40 is driven to move through four driving parts, so that the flatness of the positioning platform in the X axis and the Y axis can reach the expected maximum value at the same time. Specifically, the piezoelectric ceramic 23 drives the first-stage amplification mechanism 31 on the left or right side to move the movable platform 40 in the X-axis direction; the piezoelectric ceramics 23 drives the two same-side two-stage amplifying mechanisms 21 on the upper side or the lower side, so that the movable platform 40 can move in the Y-axis direction; the moving platform 40 can be rotated around the Z axis by driving the two diagonally arranged two-stage amplification mechanisms 21 by the piezoelectric ceramics 23. Therefore, the utility model solves the problems that the positioning platform in the prior art has low precision and the translation in the X and Y axes can not reach the expected maximum value at the same time.
Specifically, the first-stage amplifying mechanism 31 is a first amplifying unit, the first amplifying unit includes two amplifying subunits 311 symmetrically distributed up and down, and two output blocks 312 respectively connected to two sides of the two amplifying subunits, one output block 312 is connected to the workbench 10, the other output block 312 is connected to the mobile platform 40 through the output lever 24, the amplifying subunit 311 includes an input board 22, and lever arms 313 symmetrically disposed on left and right sides of the input board 22, and two ends of the lever arms 313 are respectively connected to the input board 22 and the output blocks 312 through straight beam type flexible hinges 314. Further, the first-stage amplifying mechanism 31 is provided with a mounting groove 315 for placing the piezoelectric ceramic 23 therein, so that the upper and lower ends of the piezoelectric ceramic 23 are respectively connected to the two input boards 22. In addition, the middle part of the input board 22 protrudes outwards from the piezoelectric ceramic 23 to be connected, and two sides of the input board 22 are respectively connected with two lever arms 313 through straight beam type flexible hinges 314. Specifically, when the moving platform 40 needs to move in the X-axis direction, the piezoelectric ceramic 23 in any one of the first-stage amplifying mechanisms 31 works, the piezoelectric ceramic 23 transmits displacement to the input plates 22 at the upper and lower ends, two sides of the two input plates 22 are respectively connected with one ends of two lever arms 313 through the straight beam type flexible hinges 314, the straight beam type flexible hinges 314 rotate to drive the lever arms 313 to rotate, and since the other ends of the lever arms 313 are connected with the output blocks 312 through the straight beam type flexible hinges 314, the lever arms 313 rotate to drive the output blocks 312 to transmit the displacement to the output rods 24, and the output rods 24 push the moving platform 40, so that the moving platform 40 moves in the X-axis direction.
In practical use, the piezoelectric ceramics 23 may be specifically used in the forms of PSt150/7/20VS12, PSt150/10/20VS15, etc.
By way of example and not limitation, in some alternative embodiments, the secondary amplification mechanism 21 includes a first amplification unit, and a second amplification unit 212 coupled to an output block 312 of the first amplification unit via a right circular flexible hinge 211, the second amplification unit 212 being disposed on a side of the first amplification unit proximate to the mobile platform 40. Since the second driving part 30 is to control both the movement of the moving stage 40 in the Y-axis direction and the rotation of the moving stage 40 about the Z-axis, a larger force is required, and therefore the two-stage amplifying mechanism 21 is required to amplify the displacement of the piezoelectric ceramics 23 in multiple stages. Wherein one amplification unit in the secondary amplification mechanism 21 also adopts the first amplification unit for the purpose of reducing the kinds of parts for easy management.
In addition, the second amplifying unit 212 includes an output plate 2121 and an intermediate link 2122, one end of the output plate 2121 is connected to the output block 312 of the first amplifying unit and the intermediate link 2122 through a perfect circle type flexible hinge 211, respectively, the other end is connected to the vertex of the upper side or the lower side of the moving platform 40 through an output rod 24, and one end of the intermediate link 2122 remote from the output plate 2121 is connected to the table 10 through a perfect circle type flexible hinge 211. Specifically, when the moving platform 40 needs to move in the Y-axis direction, the two piezoceramics 23 in the two secondary amplifying mechanisms 21 of any one of the second driving components 30 work, the piezoceramics 23 transmit displacement to the input plates 22 at the upper end and the lower end, two sides of the two input plates 22 are respectively connected with one ends of the two lever arms 313 through the straight beam type flexible hinges 314, the straight beam type flexible hinges 314 rotate to drive the lever arms 313 to rotate, the other ends of the lever arms 313 are connected with the output blocks 312 through the straight beam type flexible hinges 314, one of the output blocks 312 is connected with the output plate 312 of the second amplifying unit 212 through the right circular type flexible hinges 211, and one end of the output plate 312 is connected with the middle connecting rod 2122 through the right circular type flexible hinges 211, so that the lever arms 313 rotate to drive the output block 312 to drive the output plate 2121 and the middle connecting rod 2122 to rotate through the right circular type flexible hinges 211, and the other ends of the output plate 2121 can push the moving platform 40 to move in the Y-axis direction. When the moving platform 40 needs to rotate around the Z axis, only two secondary amplifying mechanisms 21 diagonally arranged are required to drive in the above manner, so that two vertices of the diagonal of the moving platform 40 are both moved in a dislocation manner along the Y axis direction, and the moving platform 40 can rotate around the Z axis.
Specifically, the output plate 2121 includes a vertical portion and a horizontal portion, wherein two sides of the vertical portion are respectively connected to the output block 312 and the intermediate link 2122 through a perfect circular flexible hinge 211, and one side vertex of the horizontal portion, which is far from the vertical portion, is connected to the moving platform 40 through the output rod 24. The vertical portion of the output plate 2121 is connected to the output block 312 and the intermediate link 2122 through two right circular flexible hinges 211, respectively, so that the displacement is amplified twice at the vertical portion, and then the displacement pushes the moving platform 40 to move through the output rod 24 via the tail end of the horizontal portion.
Further, the table 10 is provided with screw holes 11, and the first driving member 20 and the second driving member 30 are fixed to the table 10 by engaging the screw holes 11 with bolts.
In summary, in the multi-degree-of-freedom decoupling positioning platform according to the above embodiment of the present utility model, the piezoelectric ceramic 23 is provided to drive the first driving component 20 and the second driving component 30, so that the moving platform 40 can independently move in two directions of the X and Y axes and can rotate around the Z axis, thereby overcoming the problem of low precision of the positioning platform caused by screw gaps and transmission friction due to transmission of the servo motor and the precision screw rod. And through the first driving part 20 and the second driving part 30 which are arranged symmetrically up and down and are arranged symmetrically left and right, the whole positioning platform is square and the moving platform 40 is driven to move through four driving parts, so that the flatness of the positioning platform in the X axis and the Y axis can reach the expected maximum value at the same time. Specifically, the piezoelectric ceramic 23 drives the first-stage amplification mechanism 31 on the left or right side to move the movable platform 40 in the X-axis direction; the piezoelectric ceramics 23 drives the two same-side two-stage amplifying mechanisms 21 on the upper side or the lower side, so that the movable platform 40 can move in the Y-axis direction; the moving platform 40 can be rotated around the Z axis by driving the two diagonally arranged two-stage amplification mechanisms 21 by the piezoelectric ceramics 23. Therefore, the utility model solves the problems that the positioning platform in the prior art has low precision and the translation in the X and Y axes can not reach the expected maximum value at the same time.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing examples illustrate only a few embodiments of the utility model and are described in detail herein without thereby limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (8)
1. The utility model provides a multi freedom decoupling zero location platform, its characterized in that includes workstation, symmetry set up first drive part of workstation upper and lower both sides, symmetry set up the second drive part of workstation left and right sides is in with the mobile platform of setting in the middle of the workstation, first drive part includes two second grade amplification mechanism that the symmetry set up, and with the piezoceramics that the input board of second grade amplification mechanism is connected, two the output pole of second grade amplification mechanism respectively with the summit of mobile platform upside or downside is connected, second drive part includes one grade amplification mechanism, and with the one grade amplification mechanism the input board is connected piezoceramics, two the output pole of one grade amplification mechanism respectively with the midpoint of mobile platform left side or right side limit is connected.
2. The multi-degree-of-freedom decoupling positioning platform of claim 1, wherein the primary amplifying mechanism is a first amplifying unit, the first amplifying unit comprises two amplifying subunits which are symmetrically distributed up and down, and two output blocks which are respectively connected with two sides of the amplifying subunits, one output block is connected with the workbench, the other output block is connected with the mobile platform through the output rod, the amplifying subunits comprise an input plate, and lever arms which are symmetrically arranged at the left side and the right side of the input plate, and two ends of each lever arm are respectively connected with the input plate and the output block through straight beam type flexible hinges.
3. The multi-degree-of-freedom decoupling positioning platform of claim 2, wherein a mounting groove for placing the piezoelectric ceramic is formed in the primary amplifying mechanism, so that the upper end and the lower end of the piezoelectric ceramic are respectively connected with the two input boards.
4. A multiple degree of freedom decoupling positioning platform according to claim 3, wherein the secondary amplifying mechanism comprises the first amplifying unit and a second amplifying unit connected with the output block of the first amplifying unit through a perfect circle flexible hinge, the second amplifying unit being disposed on a side of the first amplifying unit close to the moving platform.
5. The multiple degree of freedom decoupling positioning platform of claim 4 wherein the second amplifying unit includes an output plate and an intermediate link, one end of the output plate is connected to the output block and the intermediate link of the first amplifying unit respectively by the right circular flexible hinge, the other end is connected to the top of the upper side or the lower side of the moving platform by the output rod, and one end of the intermediate link away from the output plate is connected to the working platform by the right circular flexible hinge.
6. The multiple degree of freedom decoupling positioning platform of claim 5 wherein the output plate includes a vertical portion and a horizontal portion, the two sides of the vertical portion are respectively connected with the output block and the intermediate link by the right circular flexible hinge, and the vertex of a side of the horizontal portion away from the vertical portion is connected with the moving platform by the output rod.
7. A multi-degree-of-freedom decoupling positioning platform according to claim 3, wherein the middle part of the input board protrudes outwards from the piezoelectric ceramic connection, and two sides of the input board are respectively connected with two lever arms through the straight beam type flexible hinge.
8. A multiple degree of freedom decoupling positioning stage according to any one of claims 1 to 7, wherein screw holes are provided in the stage to which the first and second drive members are secured by bolts engaging the screw holes.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202321851544.XU CN220691720U (en) | 2023-07-14 | 2023-07-14 | Multi-degree-of-freedom decoupling positioning platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202321851544.XU CN220691720U (en) | 2023-07-14 | 2023-07-14 | Multi-degree-of-freedom decoupling positioning platform |
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