CN220624875U - Box-type annealing furnace - Google Patents
Box-type annealing furnace Download PDFInfo
- Publication number
- CN220624875U CN220624875U CN202322355547.0U CN202322355547U CN220624875U CN 220624875 U CN220624875 U CN 220624875U CN 202322355547 U CN202322355547 U CN 202322355547U CN 220624875 U CN220624875 U CN 220624875U
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- annealing furnace
- temperature sensor
- temperature
- sliding
- box
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- 238000000137 annealing Methods 0.000 title claims abstract description 106
- 238000010438 heat treatment Methods 0.000 claims abstract description 22
- 230000005855 radiation Effects 0.000 claims abstract description 8
- 238000007789 sealing Methods 0.000 claims description 20
- 238000003860 storage Methods 0.000 claims description 14
- 239000000523 sample Substances 0.000 claims description 5
- 238000012545 processing Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000009826 distribution Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 210000000481 breast Anatomy 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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Abstract
The utility model relates to the technical field of annealing furnaces, in particular to a box-type annealing furnace, which comprises: annealing furnace, door frame, temperature sensor, heat radiation fin and upper heating pipe; the door frame is arranged at one end of the annealing furnace, and electric sliding rails are fixedly arranged at two sides of the door frame; according to the box-type annealing furnace, the temperature inside the annealing furnace can be detected in real time through the temperature sensor and the controller which are arranged inside the annealing furnace, the temperature of the inner chamber of the annealing furnace is controlled according to different temperatures required by device processing, the phenomenon that the temperature inside the annealing furnace is too high or too low to meet the standard required by device processing is prevented from influencing device production and processing is avoided, the upper layer heating pipe and the lower layer heating pipe which are arranged inside the annealing furnace can heat devices on the opposite baffle plates in multiple directions to enable the heated area of the devices to be more uniform, and the use of the fan assists the circulation of hot air inside the annealing furnace to enable the temperature distribution inside the annealing furnace to be more uniform.
Description
Technical Field
The utility model relates to the technical field of annealing furnaces, in particular to a box-type annealing furnace.
Background
Annealing furnaces are a process used in manufacturing that involves heating multiple semiconductor wafers to affect their electrical properties, designed for different effects, and can heat the wafers to activate, convert films to films or films to wafer substrate interfaces, densify deposited films, change the state of the films grown, repair implanted damage, move dopants or transfer dopants from one film to another or from films into the wafer substrate.
Patent application number CN201620591666.3 discloses a high-uniformity box annealing furnace, comprising a box annealing furnace, wherein the box annealing furnace is a cube-type box annealing furnace with a square horizontal section; heating elements are arranged on the peripheral walls of the hearth of the box-type annealing furnace, and heat-conducting plates are arranged outside the heating elements; the utility model can meet the requirements of higher annealing temperature, accurate temperature control and uniform temperature field, is provided with a special tool and an annealing method, and can realize the precise annealing of optical glass and components.
However, the high-uniformity box annealing furnace does not describe in detail how to control and regulate the temperature of the box annealing furnace, and how to know the temperature inside the box annealing furnace in the control and regulation process, so that the temperature heated inside the annealing furnace is controlled and regulated differently according to different processed devices.
Therefore, there is a need to provide a new solution to overcome the above-mentioned drawbacks.
Disclosure of Invention
The utility model aims to provide a box-type annealing furnace which can effectively solve the technical problems.
In order to achieve the purpose of the utility model, the following technical scheme is adopted: a box annealing furnace comprising: annealing furnace, door frame, temperature sensor, heat radiation fin and upper heating pipe;
the door frame is arranged at one end of the annealing furnace, electric sliding rails are fixedly arranged at two sides of the door frame, one side of each electric sliding rail is movably connected with a sealing door, an auxiliary lifting handle is welded at one side of each sealing door, and a first sliding block is fixedly arranged at the other side of each sealing door;
the temperature sensor is arranged on one side of the annealing furnace, the temperature measuring probe is fixedly arranged at one end of the temperature sensor, and the controller is fixedly arranged at the other end of the temperature sensor;
the upper heating pipe is fixedly arranged in the annealing furnace, the lower heating pipe is further arranged in the annealing furnace, sliding grooves are formed in the surfaces of two sides of the inner wall of the annealing furnace, one side of each sliding groove is movably connected with a storage baffle plate, two sides of each storage baffle plate are fixedly provided with a second sliding block, and a fan is arranged at the lower end of the inner part of the annealing furnace
Further, the sealing door forms a sliding structure through the first sliding block and the electric sliding rail, and the first sliding block and the electric sliding rail are matched for use.
Further, the annealing furnace comprises a temperature sensor electrically connected with the annealing furnace and a controller connected with the temperature sensor.
Further, the radiating fins are arranged at the upper end of the annealing furnace, and the radiating fins are distributed at equal intervals at the upper end of the annealing furnace.
Further, the object placing baffle plate forms a sliding structure through the second sliding block and the sliding groove, and the inner wall size of the sliding groove is matched with the outer wall size of the second sliding block.
Compared with the prior art, the utility model has the following beneficial effects: according to the box-type annealing furnace, the temperature inside the annealing furnace can be detected in real time through the temperature sensor and the controller which are arranged inside the annealing furnace, the temperature of the inner chamber of the annealing furnace is controlled according to different temperatures required by device processing, the phenomenon that the temperature inside the annealing furnace is too high or too low to meet the standard required by device processing is prevented from influencing the device production and processing is avoided, the upper layer heating pipe and the lower layer heating pipe which are arranged inside the annealing furnace can heat devices on the opposite baffle plates in multiple directions to enable the heated area of the devices to be more uniform, and the use of the fan assists the circulation of hot air inside the annealing furnace to enable the temperature distribution inside the annealing furnace to be more uniform.
Drawings
The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model.
FIG. 1 is a schematic view of a box annealing furnace according to the present utility model;
FIG. 2 is a schematic diagram of a temperature sensor and a controller according to the present utility model;
FIG. 3 is a schematic structural view of the annealing furnace sealing door of the utility model in an open-close mode;
FIG. 4 is a schematic view showing the structure of the inside of the annealing furnace of the present utility model.
In the figure: 1. annealing furnace; 2. a door frame; 3. an electric slide rail; 4. sealing the door; 5. an auxiliary handle; 6. a first slider; 7. a temperature sensor; 8. a temperature measurement probe; 9. a controller; 10. a heat radiation fin; 11. an upper layer heating pipe; 12. a lower layer heating pipe; 13. a chute; 14. a storage breast board; 15. a second slider; 16. a fan.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the following description will be made in detail with reference to the technical solutions in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments.
In the description of the present utility model, it should be understood that the terms "center," "lateral," "longitudinal," "front," "rear," "left," "right," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the scope of the present utility model. When an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an mechanism is considered to be "connected" to another mechanism, it may be directly connected to the other mechanism or there may be a centering mechanism present at the same time. When an element is considered to be "disposed on" another element, it may be disposed directly on the other element or there may be a centering element present at the same time. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
As shown in fig. 1 to 4, a box annealing furnace of the present utility model includes: an annealing furnace 1, a door frame 2, a temperature sensor 7, heat radiation fins 10 and an upper layer heating pipe 11;
the door frame 2 is arranged at one end of the annealing furnace 1, electric sliding rails 3 are fixedly arranged at two sides of the door frame 2, a sealing door 4 is movably connected to one side of the electric sliding rails 3, an auxiliary lifting handle 5 is welded to one side of the sealing door 4, and a first sliding block 6 is fixedly arranged at the other side of the sealing door 4;
the temperature sensor 7 is arranged on one side of the annealing furnace 1, the temperature measuring probe 8 is fixedly arranged at one end of the temperature sensor 7, and the controller 9 is fixedly arranged at the other end of the temperature sensor 7;
the upper layer heating pipe 11 is fixedly arranged in the annealing furnace 1, the lower layer heating pipe 12 is also arranged in the annealing furnace 1, sliding grooves 13 are formed in the surfaces of two sides of the inner wall of the annealing furnace 1, one side of each sliding groove 13 is movably connected with a storage baffle plate 14, a sliding structure is formed between each storage baffle plate 14 and each sliding groove 13 through a second sliding block 15, the inner wall size of each sliding groove 13 is matched with the outer wall size of each second sliding block 15, the arranged second sliding blocks 15 and the sliding grooves 13 assist operators to take out the storage baffle plates 14 so as to take down devices on the corresponding storage baffle plates 14, and then the storage baffle plates 14 are pushed back into the annealing furnace 1, so that the use safety of the annealing furnace 1 is improved, scalding during manual deep taking of the annealing furnace 1 is prevented, the second sliding blocks 15 are fixedly arranged on two sides of each storage baffle plate 14, and a fan 16 is arranged at the lower end of the inner part of the annealing furnace 1
The sealing door 4 forms a sliding structure between the first sliding block 6 and the electric sliding rail 3, the first sliding block 6 and the electric sliding rail 3 are matched for use, the first sliding block 6 is matched with the electric sliding rail 3 to drive the sealing door 4 to lift up and down, the manual lifting time is removed, and the annealing furnace 1 is more flexible in the use process.
Specifically, the temperature sensor 7 monitors the internal temperature of the annealing furnace 1 in real time through the temperature measuring probe 8, so that the temperature sensor 7 transmits the sensed temperature to the controller 9, the controller 9 can adjust the internal temperature of the annealing furnace 1 to a proper degree according to the temperature required by the device processing by an operator, for example, 80 degrees and other temperatures, when the temperature sensed by the temperature sensor 7 is greater than 80 degrees, the controller 9 is convenient to react, so that the annealing furnace 1 is controlled to perform temperature adjustment control, the temperature of the annealing furnace 1 is controlled to 80 degrees, the temperature sensor 7 electrically connected with the annealing furnace 1 comprises the temperature sensor 7, and the controller 9 connected with the temperature sensor 7, and the temperature sensor 7 and the controller 9 can be matched to clearly know the internal temperature of the annealing furnace 1 so as to accurately adjust the indoor temperature of the annealing furnace 1 according to different temperatures required by different devices during processing.
Preferably, the heat radiation fins 10 are installed at the upper end of the annealing furnace 1, the heat radiation fins 10 are distributed at equal intervals at the upper end of the annealing furnace 1, and the heat radiation fins 10 are installed on the annealing furnace 1 to rapidly reduce the temperature inside the annealing furnace 1 under the condition that the annealing furnace 1 is not used.
Working principle: the utility model firstly moves the annealing furnace 1 to a designated position, then turns on an external power supply of the annealing furnace 1, thereby turning on a switch of an electric sliding rail 3, enabling the electric sliding rail 3 to drive a sealing door 4 to slide upwards, manually turning off the switch of the electric sliding rail 3 after the sealing door 4 slides to the designated position, then extracting a storage baffle 14 through the assistance of a second sliding block 15 and a sliding groove 13, thereby placing a device to be processed on the storage baffle 14, after all the devices are placed, manually pushing the storage baffle 14 back into the annealing furnace 1, then turning on the switch of the electric sliding rail 3 again, enabling the electric sliding rail 3 to drive the sealing door 4 to descend, turning off the switch of the electric sliding rail 3 after the sealing door 4 descends to completely close a feed inlet, and continuously heating the temperature inside the annealing furnace 1 by an upper layer heating pipe 11 and a lower layer heating pipe 12 when the power switch of the annealing furnace 1 is turned on, in the working process of the annealing furnace 1, the temperature sensor 7 is connected with the annealing furnace 1 through wires, so that the controller 9 is connected with the temperature sensor 7, then the temperature sensor 7 and a switch of the controller 9 are turned on, so that the temperature inside the annealing furnace 1 can be monitored in real time, the processing of devices is prevented from being influenced by the excessively high temperature or the excessively low temperature, the switch of the fan 16 is turned on when the annealing furnace 1 is used, the fan 16 blows away the hot air inside the annealing furnace 1 to even the temperature inside the annealing furnace 1, the switch of the annealing furnace 1 can be turned off after the devices are processed, the sealing door 4 is turned on after the temperature of the annealing furnace 1 is reduced, the object placing baffle 14 is pulled out, the devices are taken down, and finally, when the annealing furnace 1 is not used, the power switch of the annealing furnace 1 is turned off, the model of the electric sliding rail 3 is as follows: FSK30, model of temperature sensor 7 is: ST-CW800C, the controller 9 is a microprocessor, and the fan 16 is of the type: g12038HA2SL.
Standard parts used in the utility model can be purchased from the market, special-shaped parts can be customized according to the description of the specification and the drawings, the specific connection modes of all parts adopt conventional means such as mature bolts, rivets and welding in the prior art, the machinery, the parts and the equipment adopt conventional modes in the prior art, and the circuit connection adopts conventional connection modes in the prior art, so that details are not described in detail in the specification, and the utility model belongs to the prior art known to the person skilled in the art.
It will be understood that modifications and variations will be apparent to those skilled in the art from the foregoing description, and it is intended that all such modifications and variations be included within the scope of the following claims.
Claims (5)
1. A box annealing furnace, comprising: annealing furnace, door frame, temperature sensor, heat radiation fin and upper heating pipe;
the door frame is arranged at one end of the annealing furnace, electric sliding rails are fixedly arranged at two sides of the door frame, one side of each electric sliding rail is movably connected with a sealing door, an auxiliary lifting handle is welded at one side of each sealing door, and a first sliding block is fixedly arranged at the other side of each sealing door;
the temperature sensor is arranged on one side of the annealing furnace, the temperature measuring probe is fixedly arranged at one end of the temperature sensor, and the controller is fixedly arranged at the other end of the temperature sensor;
the upper heating pipe is fixedly arranged in the annealing furnace, the lower heating pipe is further arranged in the annealing furnace, sliding grooves are formed in the surfaces of two sides of the inner wall of the annealing furnace, one side of each sliding groove is movably connected with a storage baffle plate, two sides of each storage baffle plate are fixedly provided with second sliding blocks, and a fan is arranged at the lower end of the inner part of the annealing furnace.
2. The box annealing furnace according to claim 1, wherein the sealing door forms a sliding structure between the first sliding block and the electric sliding rail, and the first sliding block and the electric sliding rail are matched for use.
3. The lehr of claim 1 including a temperature sensor electrically connected to the lehr and a controller connected to the temperature sensor.
4. The box-type annealing furnace according to claim 1, wherein the heat radiating fins are arranged at the upper end of the annealing furnace, and the heat radiating fins are distributed at equal intervals at the upper end of the annealing furnace.
5. The box annealing furnace according to claim 1, wherein the object placing baffle plate forms a sliding structure between the second sliding block and the sliding groove, and the size of the inner wall of the sliding groove is matched with that of the outer wall of the second sliding block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322355547.0U CN220624875U (en) | 2023-08-31 | 2023-08-31 | Box-type annealing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322355547.0U CN220624875U (en) | 2023-08-31 | 2023-08-31 | Box-type annealing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220624875U true CN220624875U (en) | 2024-03-19 |
Family
ID=90216605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322355547.0U Active CN220624875U (en) | 2023-08-31 | 2023-08-31 | Box-type annealing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220624875U (en) |
-
2023
- 2023-08-31 CN CN202322355547.0U patent/CN220624875U/en active Active
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