CN220603561U - Can realize CIS probe card needle point protection device - Google Patents

Abstract

The utility model discloses a device capable of realizing CIS probe card tip protection, which comprises: a base, wherein a boss integrating a plurality of probe test heads is formed in the middle of the base; the protective cover is arranged on the base and covers the boss; at least two surface walls on the periphery of the boss and the surface walls in the protective cover form a clamping structure, so that the protective cover and the boss are in clamping connection; the utility model can solve the problems that the probe tip is easily touched in the delivery and transportation process of the probe card, thereby damaging the probe tip and affecting the use of the probe card.

Description

Can realize CIS probe card needle point protection device

Technical Field

The utility model relates to the technical field of probes, in particular to a device capable of realizing CIS probe card tip protection.

Background

The probe card is a test interface, and is mainly used for testing bare chips, connecting a tester with a tested chip, and testing parameters of the tested chip through transmission signals. The probe card is an important part required to be used in the process of testing a semiconductor wafer, and is also an important part in the chip industry chain. Whether chip design verification or wafer manufacturing CP, package finished product FT, a test flow is required. Because the pin arrangement, size, pitch variation, frequency variation, test current, and test machine of each chip are different, a customized probe card is required for different chips.

When the probe card is used, the probes on the probe card are directly contacted with the welding pads or the convex blocks on the chip to lead out the chip signals, and then the probe card is matched with a testing instrument to achieve the aim of automatic measurement. In the process of delivery and transportation, the probe card is easy to touch the needle point, so that the needle point is damaged, and the use of the probe card is affected.

Disclosure of Invention

In order to overcome the above disadvantages, an object of the present utility model is to provide a tip protection device for a CIS probe card.

In order to achieve the above purpose, the technical scheme adopted by the utility model comprises the following steps:

a base, wherein a boss integrating a plurality of probe test heads is formed in the middle of the base;

the protective cover is arranged on the base and covers the boss;

at least two surface walls on the periphery of the boss and the surface walls in the protective cover form a clamping structure, so that the protective cover is in clamping connection with the boss.

The application forms the joint structure of mutually supporting on the outside surface through setting up inboard table wall and the boss of protection casing, after the protection casing lock joint is on the boss, the joint structure that sets up on protection casing and the boss can form the joint to both to make the protection casing form the protection to a plurality of probe test heads of integrating in a department on the boss, effectively avoid the striking that the probe card needle point received in handling, with this life that improves the probe card.

In the preferred technical scheme of the probe card tip protection device, the clamping structure comprises limit grooves formed in at least two side parts of the boss and limit blocks arranged on the surface wall of the inner side of the protective cover; or, for seting up the spacing groove of the inner wall of at least both sides of protection casing to and the stopper of setting up at boss week side surface wall, pass through the stopper stretches into the spacing groove so that the protection casing with the boss forms the block and connects.

In the preferred technical scheme of the probe card tip protection device, the side part of the protective cover is provided with an ear plate.

In the preferred technical scheme of the probe card tip protection device, the cross sections of the limiting groove and the limiting block are arc-shaped structures.

In the preferred technical scheme of the probe card tip protection device, a rubber layer is arranged on the outer surface of the limiting block.

In the preferred technical scheme of the probe card tip protection device, the protection cover is provided with a step layer, and when the protection cover is connected to the boss, the step layer abuts against the top surface of the boss and enables the probe testing head to be located in an area surrounded by the step layer.

In a preferred embodiment of the probe card tip protection device, the shield is limited to the base by a screw.

In the preferred technical scheme of the probe card tip protection device, the protection cover is made of hard plastic.

The utility model has the beneficial effects that the limiting block protruding from the inner side of the protective cover is arranged to enter the limiting groove formed in the side wall of the boss, so that the protective cover is limited on the boss, the clamping connection of the limiting block and the boss is realized, the structure is simple, the installation is convenient, and when the probe card tip is required to be used for detecting the chip parameters, the external force acts on the protective cover along the radial direction, so that the protective cover is separated from the boss.

Drawings

FIG. 1 is a schematic view of a base and a shield separated;

FIG. 2 is a schematic view of a base structure;

FIG. 3 is a schematic structural view of a protective cover;

in the figure: base 1, probe test head 2, boss 3, protection casing 4, spacing groove 5, stopper 6, otic placode 7, ladder layer 8, accommodation space 81, screw 9.

Detailed Description

Preferred embodiments of the present utility model are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present utility model, and are not intended to limit the scope of the present utility model.

It should be noted that, in the description of the present utility model, terms such as "upper", "lower", "left", "right", "front", "rear", and the like, which indicate directions or positional relationships, are based on the directions or positional relationships shown in the drawings, are merely for convenience of description, and do not indicate or imply that the apparatus or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

Furthermore, it should be noted that, in the description of the present utility model, unless explicitly stated and limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected. The specific meaning of the above terms in the present utility model can be understood by those skilled in the art according to the specific circumstances.

As shown in fig. 1 to 3, a tip protection device for a CIS probe card of the present utility model includes: a base 1, the middle of which forms a boss 3 integrating a plurality of probe test heads 2; a shield 4 provided on the base 1 and covering the boss 3; at least two surface walls on the periphery of the boss 3 and the surface walls in the protective cover 4 form a clamping structure, so that the protective cover 4 and the boss 3 form clamping connection.

Referring to fig. 1, a square boss 3 formed on a base 1 is a PCB board, a protective cover 4 has a structure adapted to the boss 3, and a mutually matched clamping structure is formed on the inner side surface wall of the protective cover 4 and the outer side surface of the boss 3, when the protective cover 4 is fastened on the boss 3, the clamping structures arranged on the protective cover 4 and the boss 3 can form a clamping connection to the protective cover 4, so that the protective cover 4 forms protection to a plurality of probe test heads 2 integrated on the boss 3, the probe points are effectively prevented from being impacted in the carrying process, and the service life of the probe card is prolonged.

In one embodiment, the clamping structure is a limiting groove 5 arranged on at least two side parts of the boss 3 and a limiting block 6 arranged on the inner side surface wall of the protective cover 4; the limiting block 6 stretches into the limiting groove 5 so that the protective cover 4 and the boss 3 form clamping connection.

Referring to fig. 1 and 3, after the protective cover 4 is mounted on the boss 3, a limiting block 6 protruding from the inner side of the protective cover 4 enters a limiting groove 5 formed in the side wall of the boss 3, so that the protective cover 4 is limited on the boss 3, and the protective cover is connected with the boss 3 in a clamping manner. When the probe card tip is required to be used for detecting the chip parameters, external force is applied to the protective cover 4 along the radial direction, so that the protective cover 4 is separated from the boss 3.

In other possible embodiments, the engaging structure is a limiting groove 5 formed on at least two side inner walls of the protective cover 4, and a limiting block 6 disposed on a peripheral side surface wall of the boss 3. This embodiment differs from the above embodiment in that the limiting positions of the limiting groove 5 and the boss 3 are mutually shifted, but the same effect is achieved.

In one or more embodiments, the shield 4 is provided with an ear panel 7 on the side.

Referring to fig. 1 and 3, the ear plate 7 is provided to facilitate the worker to disengage the shield 4 from the boss 3. In addition, the ear plate 7 is positioned on the same side of the protective cover 4 as the limiting block 6 and the limiting groove 5.

In one or more embodiments, the limiting groove 5 and the limiting block 6 have arc-shaped cross sections.

Referring to fig. 1, 2 and 3, it can be understood that the limiting block 6 with the arc structure is easy to enter or exit the limiting groove 5 with the arc structure, and meanwhile, the limiting block and the limiting groove can form clamping limitation on the boss 3 and the protective cover 4.

In one or more embodiments, the outer surface of the stopper 6 is provided with a rubber layer. The rubber layer is used for improving the friction force of the contact of the limiting block 6 and the limiting groove 5, and further improving the clamping connection strength of the boss 3 and the protective cover 4.

In one or more embodiments, the shield 4 is provided with a step layer 8, and when the shield 4 is attached to the boss 3, the step layer 8 abuts the top surface of the boss 3 and positions the probe test head 2 in the area surrounded by the step layer 8.

Referring to fig. 3, the middle part of the step layer 8 of the protective cover 4 surrounds to form a rectangular accommodating space 81, when the protective cover 4 is clamped with the connecting boss 3, the step layer 8 is abutted against the top surface of the boss 3, and the probe card tip is positioned in the accommodating space 81.

In one or more embodiments, the shield 4 is constrained to the base 1 by screws 9.

Referring to fig. 1, 2 and 3, a screw hole is formed in the base 1, and a screw 9 passes through the protective cover 4 to be screwed in the screw hole, so that the protective cover 4 is fixed on the base 1; by the mode, the fixing of the protective cover 4 is further enhanced, the problem that the protective cover 4 is separated from the boss 3 in the transportation process is avoided, and the protection of the probe card tip is effectively formed.

In one or more embodiments, the shield 4 is made of a rigid plastic.

The above embodiments are only for illustrating the technical concept and features of the present utility model, and are intended to enable those skilled in the art to understand the content of the present utility model and to implement the same, but are not intended to limit the scope of the present utility model, and all equivalent changes or modifications made according to the spirit of the present utility model should be included in the scope of the present utility model.

Claims (8)

1. A device for protecting a tip of a CIS probe card, comprising:

a base, wherein a boss integrating a plurality of probe test heads is formed in the middle of the base;

the protective cover is arranged on the base and covers the boss;

at least two surface walls on the periphery of the boss and the surface walls in the protective cover form a clamping structure, so that the protective cover is in clamping connection with the boss.

2. The achievable CIS probe card tip protection device of claim 1, wherein:

the clamping structure is a limiting groove formed in at least two side parts of the boss and a limiting block arranged on the surface wall of the inner side of the protective cover; or, for seting up the spacing groove of the inner wall of at least both sides of protection casing to and the stopper of setting up at boss week side surface wall, pass through the stopper stretches into the spacing groove so that the protection casing with the boss forms the block and connects.

3. The achievable CIS probe card tip protection device of claim 1, wherein: the side part of the protective cover is provided with an ear plate.

4. The achievable CIS probe card tip protection device of claim 2, wherein: the cross sections of the limiting groove and the limiting block are arc-shaped structures.

5. The achievable CIS probe card tip protection device of claim 2 or 4, wherein: and a rubber layer is arranged on the outer surface of the limiting block.

6. The achievable CIS probe card tip protection device of claim 1, wherein: the protection casing is provided with the ladder layer, works as the protection casing is connected behind the boss, the ladder layer butt the boss top surface makes the probe test head is located the region that the ladder layer surrounds and forms.

7. The achievable CIS probe card tip protection device of claim 1, wherein: the shield is constrained to the base by screws.

8. The achievable CIS probe card tip protection device of claim 1, wherein: the protective cover is made of hard plastic.