CN220559568U

CN220559568U - Photoresist spraying device

Info

Publication number: CN220559568U
Application number: CN202322077501.7U
Authority: CN
Inventors: 安礼余; 王定国
Original assignee: Yuhongyan Technology Suzhou Co ltd
Current assignee: Yuhongyan Technology Suzhou Co ltd
Priority date: 2023-08-03
Filing date: 2023-08-03
Publication date: 2024-03-08
Anticipated expiration: 2033-08-03

Abstract

The utility model discloses a photoresist spraying device which comprises a supporting box body, wherein the bottom of the supporting box body is fixedly connected with a supporting column, the bottom of the supporting column is fixedly connected with a fixed plate, the inside of the fixed plate is in threaded connection with a fixed screw, the inside of the supporting box body is provided with a storage groove, the inside of the storage groove is fixedly connected with a partition plate, one side of the storage groove is provided with a cover plate, one side of the cover plate is hinged with a hinge, the supporting box body is hinged with the cover plate through the hinge, one side of the cover plate is fixedly connected with a handle, the inside of the supporting box body is provided with a placing groove, the device enables a sliding plate to slide in a sliding groove formed in a bearing plate through rotating a rotating handle, and the sliding plate is fixedly connected with a pushing plate so as to realize horizontal movement of the pushing plate.

Description

Photoresist spraying device

Technical Field

The utility model relates to the technical field of spraying equipment, in particular to a photoresist spraying device.

Background

Photoresist is one of key materials for micro-pattern processing in microelectronic technology, particularly development of large-scale and ultra-large-scale integrated circuits in recent years is greatly promoted, research, development and application of photoresist are greatly promoted, the printing industry is another important field of photoresist application, under the condition of the prior art, photoresist spraying work needs to be manually completed, working efficiency is low, labor intensity of workers is high, and great influence is brought to photoresist spraying work.

The utility model provides photoresist spraying equipment, which structurally comprises a spraying table, wherein a fixing frame is arranged on the spraying table, a pusher is arranged on the fixing frame, a pushing rod is arranged at the lower end of the pusher, and a device box is arranged at the lower end of the pushing rod.

The applicant has found the following disadvantages when implementing the above scheme

1. In the application, the device capable of clamping the workpiece is not arranged, so that the situation that the photoresist is sprayed and deviated easily occurs in the photoresist spraying process, the workpiece is damaged, and the practicability of the device is reduced.

2. The device can't carry out the placing of instrument in the use to can't place the instrument to infrequently use, the device can't carry out the removal of spraying head in the use spraying process, and then in the device spraying process, can't carry out effectual spraying position adjustment according to the specific condition of work piece, and then reduced the practicality of device.

Disclosure of Invention

The photoresist spraying device comprises a supporting box body, wherein a supporting column is fixedly connected to the bottom of the supporting box body, a fixing plate is fixedly connected to the bottom of the supporting column, a fixing screw is connected to the inner thread of the fixing plate, a storage groove is formed in the supporting box body, a partition plate is fixedly connected to the inner part of the storage groove, a cover plate is installed on one side of the storage groove, a hinge is hinged to one side of the cover plate, the supporting box body is hinged to the cover plate through the hinge, a handle is fixedly connected to one side of the cover plate, a placing groove is formed in the supporting box body, and classification storage during working and placing can be effectively performed through the arrangement of the partition plate.

As the preferred scheme, the board is placed to the top fixedly connected with of supporting box, the top fixedly connected with protection casing of supporting box, the protection door is installed to one side of protection casing, protection casing and protection door are articulated through the hinge, through setting up the protection door, are favorable to carrying out the opening of device when protecting the device inside.

As a preferable scheme, the inside of protection door has seted up the observation window, one side fixedly connected with door handle of protection door, the bottom fixedly connected with top sleeve of protection casing.

As the preferable scheme, telescopic link has been cup jointed to telescopic link's inside, telescopic link's bottom fixedly connected with roof, the bottom fixed mounting of roof has driving motor, is favorable to the device to carry out high regulation through setting up telescopic link.

As a preferable scheme, a bearing is arranged on one side of the driving motor, a fixed sleeve is sleeved on the periphery of the bearing, and a limiting plate is fixedly connected to the bottom of the top plate.

As the preferable scheme, one side fixedly connected with threaded rod of bearing, the movable block is installed to the periphery of threaded rod, the spraying head is installed to the bottom of movable block, is favorable to the device to carry out horizontal migration through setting up the movable block.

As the preferable scheme, the top fixedly connected with bearing plate of board is placed, the spout has been seted up to the inside of bearing plate, the inside sliding connection of spout has the slide, the top fixedly connected with workstation of bearing plate.

As the preferred scheme, the inside threaded connection of slide has twist grip, slide carries out swing joint through twist grip with the workstation, one side fixedly connected with push plate of slide, one side fixedly connected with stripper plate of push plate is favorable to the device to carry out the extrusion when the work piece spraying through setting up the stripper plate.

Advantageous effects

Compared with the prior art, the utility model provides a photoresist spraying device, which has the following beneficial effects:

1. this device is through rotating twist grip, makes the slide inside the spout of seting up of slide in the bearing plate inside slide, because slide carries out fixed connection with the push plate, and then realizes the horizontal migration of push plate, through the fixed connection of push plate and stripper plate, is convenient for realize that the push plate promotes the stripper plate and carries out horizontal migration to realized the stripper plate to the clamp of work piece, be convenient for to the fixed of work piece, be favorable to improving the practicality of device.

2. This device drives the bearing through driving motor, and inside fixed sleeve that cup joints in limiting plate is inside rotates, because bearing and threaded rod are installed to realize the rotation of threaded rod, drive the movable block and remove when being convenient for realize that the threaded rod rotates through the movable block of threaded rod peripheral installation, and then realize that the movable block drives the spraying head and remove, realized the certainty to device spraying position, be favorable to improving the practicality of device.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a side view of the structure of the present utility model;

FIG. 3 is a schematic view of the structure of the supporting box of the present utility model;

FIG. 4 is a schematic view of a spray head according to the present utility model;

fig. 5 is a schematic view of the structure of the workbench of the utility model.

In the figure: 1. supporting the box body; 2. a support column; 3. a fixing plate; 4. a set screw; 5. a storage groove; 6. a partition plate; 7. a cover plate; 8. a hinge; 9. a grip; 10. a placement groove; 11. placing a plate; 12. a protective housing; 13. a protective door; 14. an observation window; 15. a door handle; 16. a top sleeve; 17. a telescopic rod; 18. a top plate; 19. a driving motor; 20. a bearing; 21. a fixed sleeve; 22. a limiting plate; 23. a threaded rod; 24. a moving block; 25. a spray head; 26. a bearing plate; 27. a chute; 28. a slide plate; 29. a work table; 30. rotating the handle; 31. a pushing plate; 32. and extruding the plate.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1

Referring to fig. 1-3, a photoresist spraying device, including supporting box 1, the bottom fixedly connected with support column 2 of supporting box 1, the bottom fixedly connected with fixed plate 3 of support column 2, the inside threaded connection of fixed plate 3 has fixed screw 4, the inside of supporting box 1 has seted up storage tank 5, the inside fixedly connected with division board 6 of storage tank 5, cover plate 7 is installed to one side of storage tank 5, one side of cover plate 7 articulates there is hinge 8, supporting box 1 articulates through hinge 8 with cover plate 7, one side fixedly connected with handle 9 of cover plate 7, the standing groove 10 has been seted up to the inside of supporting box 1, the top fixedly connected with of supporting box 1 places board 11, the top fixedly connected with protection casing 12 of supporting box 1, protection casing 12's one side is installed to protection casing 12, protection casing 12 articulates through hinge 8 with protection door 13, the inside of protection door 13 has seted up observation window 14, one side fixedly connected with 15 of protection door 13, be favorable to realizing opening to protection door 13's door handle's one side articulates with hinge 8, thereby carry out the inside detection of device door handle 14 through hinge 8, be favorable to carrying out the inside detection of motor, the inside detection device is favorable to be connected with top plate 18 through the inside detection window 14, top plate is connected with top plate 18, top plate 18 is fixed connection is fixed with top plate 17, top plate is fixed bottom is connected with top plate 18, top plate 18 is fixed, top plate 18 is connected with top plate 18.

In the embodiment of the utility model, the storage of tools can be effectively carried out through the storage groove 5, so that the tools can be used next time, and the classification storage of the tools can be realized through the partition plate 6 fixedly connected inside the storage groove 5.

Example 2

Referring to fig. 1-5, a bearing 20 is installed on one side of a driving motor 19, a fixing sleeve 21 is sleeved on the periphery of the bearing 20, a limiting plate 22 is fixedly connected to the bottom of a top plate 18, a threaded rod 23 is fixedly connected to one side of the bearing 20, a moving block 24 is installed on the periphery of the threaded rod 23, a spraying head 25 is installed on the bottom of the moving block 24, the moving block 24 rotates through the threaded rod 23, so that the moving block 24 moves on the periphery of the threaded rod 23, the moving block 24 drives the spraying head 25 to move, a bearing plate 26 is fixedly connected to the top of a placing plate 11, a sliding groove 27 is formed in the bearing plate 26, a sliding plate 28 is slidably connected to the inside of the sliding groove 27, a workbench 29 is fixedly connected to the top of the bearing plate 26, a rotating handle 30 is connected to the sliding plate 28 through the rotating handle 30, a pushing plate 31 is fixedly connected to one side of the sliding plate 28, and a squeezing plate 32 is fixedly connected to one side of the pushing plate 31.

In the embodiment of the utility model, the extrusion plate 32 is arranged, so that the workpiece is clamped and fixed in the using process of the device, and the workpiece is prevented from shaking to cause errors in spraying.

The working principle of the utility model is as follows: firstly, remove the device to appointed position, through the fixed plate 3 of device bottom fixed connection, the fixed screw 4 through the inside threaded connection of fixed plate 3 carries out the device and is fixed on ground, avoid the device to appear rocking, through pulling door handle 15, because protection door 13 articulates through hinge 8 with protection casing 12, thereby realize opening of protection door 13, through rotating rotary handle 30, thereby make slide 28 inside spout 27 that the bearing plate 26 was seted up, because slide 28 carries out fixed connection with push plate 31, thereby realize the horizontal migration of push plate 31, through the fixed connection of push plate 31 and stripper plate 32, and then realize push plate 31 promotion stripper plate 32 carries out the horizontal migration, thereby the clamp of stripper plate 32 to the work piece is convenient for to the fixing of work piece, thereby the practicality of device has been improved, carry out fixed connection through bearing plate 26 and place board 11, thereby realize the fixing of device, drive bearing 20 rotation through driving motor 19, because bearing 20 is at the inside fixed sleeve 21 of limiting plate 22 cup joint inside threaded rod, install through bearing 20 and 23, thereby realize threaded rod 23's rotation, through 23 peripheral installation's movable block 24, thereby realize the movable block 24 carries out the horizontal migration to the movable head when the movable block 24, thereby realize the spray coating device is realized at the top of the movable head 25, and the spray coating device is realized, the spray coating position is realized at the top is realized, and the movable head is moved to the movable head is realized to the spray coating device is moved to the height is realized to the movable head 25, and is realized.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a photoresist spraying device, includes supporting box (1), its characterized in that: the utility model discloses a support box, including support box (1), apron (7) are installed to the inside fixedly connected with division board (6) of accomodating groove (5), apron (7) are installed to one side of accomodating groove (5), one side of apron (7) articulates has hinge (8), support box (1) and apron (7) are articulated through hinge (8), one side fixedly connected with handle (9) of apron (7), standing groove (10) are seted up to the inside of support box (1).

2. The photoresist spraying apparatus according to claim 1, wherein: the top fixedly connected with of supporting box body (1) places board (11), the top fixedly connected with protection casing (12) of supporting box body (1), protection door (13) are installed to one side of protection casing (12), protection casing (12) are articulated through hinge (8) with protection door (13).

3. A photoresist spraying apparatus according to claim 2, wherein: the inside of protection door (13) has seted up observation window (14), one side fixedly connected with door handle (15) of protection door (13), the bottom fixedly connected with top sleeve (16) of protection casing (12).

4. A photoresist spraying apparatus according to claim 3, wherein: the inside of top sleeve (16) has cup jointed telescopic link (17), the bottom fixedly connected with roof (18) of telescopic link (17), the bottom fixed mounting of roof (18) has driving motor (19).

5. The photoresist spraying apparatus according to claim 4, wherein: one side of the driving motor (19) is provided with a bearing (20), the periphery of the bearing (20) is sleeved with a fixed sleeve (21), and the bottom of the top plate (18) is fixedly connected with a limiting plate (22).

6. The photoresist spraying apparatus according to claim 5, wherein: one side of the bearing (20) is fixedly connected with a threaded rod (23), a moving block (24) is arranged on the periphery of the threaded rod (23), and a spraying head (25) is arranged at the bottom of the moving block (24).

7. A photoresist spraying apparatus according to claim 2, wherein: the top fixedly connected with bearing plate (26) of placing board (11), spout (27) have been seted up to the inside of bearing plate (26), the inside sliding connection of spout (27) has slide (28), the top fixedly connected with workstation (29) of bearing plate (26).

8. The photoresist spraying apparatus according to claim 7, wherein: the inside threaded connection of slide (28) has twist grip (30), slide (28) and workstation (29) carry out swing joint through twist grip (30), one side fixedly connected with push plate (31) of slide (28), one side fixedly connected with stripper plate (32) of push plate (31).