CN220555628U

CN220555628U - Get device of putting tool FOUP

Info

Publication number: CN220555628U
Application number: CN202321562364.XU
Authority: CN
Inventors: 杨光潮
Original assignee: Semiconductor Integrated Display Technology Co Ltd
Current assignee: Semiconductor Integrated Display Technology Co Ltd
Priority date: 2023-06-19
Filing date: 2023-06-19
Publication date: 2024-03-05
Anticipated expiration: 2033-06-19

Abstract

The utility model discloses a device for taking and placing a jig FOUP, which comprises a frame, a clean cover for placing the jig FOUP, a first lifting mechanism arranged on the frame and used for controlling the lifting of the clean cover, a telescopic fork arm used for forking the jig FOUP in the clean cover and a second lifting mechanism arranged on the frame and used for controlling the lifting of the telescopic fork arm. The device for taking and placing the jig FOUP can finish taking and placing the jig FOUP, ensure the stability of taking and placing the jig FOUP, increase a clean cover for protecting the jig FOUP and avoid the influence of external environment; but also can reduce the problems of pollution, scratch and the like brought by personnel.

Description

Get device of putting tool FOUP

Technical Field

The utility model belongs to the technical field of semiconductors, and particularly relates to a device for taking and placing a jig FOUP.

Background

Currently, in the silicon-based Micro OLED Micro display industry, a jig FOUP (front end opening type wafer conveying box) needs to be transported among various devices, the types of the device ports (loading and unloading ports) are not uniform, and a common trolley cannot realize the picking and placing of the FOUP corresponding to different devices.

Moreover, the existing jig FOUP is manually taken, placed and carried by personnel, no standardized carrying operation mode exists, the personnel directly contact the jig FOUP in the carrying process, dust carried by the personnel can influence the cleanliness of the jig FOUP, and the cleanliness of an internal wafer is further influenced. When people take, put and carry the tool FOUP, the tool FOUP can incline in the carrying process due to the fact that the operation modes of the people are difficult to unify, and the problem of overlarge vibration quantity causes bad scratch and chip risks of the wafer.

Therefore, in order to meet the requirements of picking, placing and transporting the tool FOUP in the micro display industry, the picking, placing and transporting problems of the tool FOUP are urgent.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides a device for picking and placing a jig FOUP, and aims to protect the jig FOUP from the external environment in the picking and placing process.

In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows: the device for taking and placing the jig FOUP comprises a frame, a clean cover for placing the jig FOUP, a first lifting mechanism arranged on the frame and used for controlling the lifting of the clean cover, a telescopic fork arm used for forking the jig FOUP in the clean cover and a second lifting mechanism arranged on the frame and used for controlling the lifting of the telescopic fork arm.

The first lifting mechanism comprises a first rocker rotatably arranged on the frame, a lifting platform for placing the cleaning cover, a lifting executing mechanism connected with the lifting platform and a first power transmission mechanism connected with the first rocker and the lifting executing mechanism.

The first power transmission mechanism comprises a belt transmission mechanism and a first screw rod transmission mechanism, the upper end of the belt transmission mechanism is connected with the first rocker, the lower end of the belt transmission mechanism is connected with a screw rod of the first screw rod transmission mechanism, and a nut of the first screw rod transmission mechanism is connected with the lifting executing mechanism.

The lifting executing mechanism is a scissor arm type lifting mechanism.

The second lifting mechanism comprises a second rocker rotatably arranged on the frame, a second screw rod transmission mechanism connected with the telescopic fork arm and a second power transmission mechanism connected with the second rocker and the second screw rod transmission mechanism.

The telescopic fork arm comprises a supporting sliding table connected with the second lifting mechanism, a push-pull rod movably arranged on the supporting sliding table and two fork arm bodies connected with the push-pull rod and matched with the push-pull rod for forking the jig FOUP in the clean cover, and the supporting sliding table is positioned above the clean cover.

And the frame is provided with a locating pin.

The device for taking and placing the jig FOUP can finish taking and placing the jig FOUP, ensure the stability of taking and placing the jig FOUP, increase a clean cover for protecting the jig FOUP and avoid the influence of external environment; but also can reduce the problems of pollution, scratch and the like brought by personnel.

Drawings

The present specification includes the following drawings, the contents of which are respectively:

FIG. 1 is a schematic diagram of a device for picking and placing a fixture FOUP according to the present utility model;

FIG. 2 is a schematic diagram showing a first usage status of a device for picking and placing a tool FOUP according to the present utility model;

FIG. 3 is a schematic diagram showing a second usage status of the device for picking and placing a tool FOUP according to the present utility model;

FIG. 4 is a schematic view showing a raised state of the clean hood;

FIG. 5 is a schematic view of the telescoping boom in an extended state;

FIG. 6 is a schematic view of the telescoping yoke in a contracted state;

FIG. 7 is a schematic illustration of the arrangement of rockers;

marked in the figure as: 1. a frame; 2. a clean hood; 3. a positioning pin; 4. a push-pull rod; 5. supporting a sliding table; 6. a yoke body; 7. jig FOUP; 8. a first rocker; 9. a second rocker; 10. a belt drive mechanism; 11. a screw rod; 12. a nut; 13. a screw rod; 14. a universal wheel; 15. a lifting executing mechanism; 16. a movable stop lever.

Detailed Description

The following detailed description of the embodiments of the utility model, given by way of example only, is presented in the accompanying drawings to aid in a more complete, accurate and thorough understanding of the concepts and aspects of the utility model, and to aid in its practice, by those skilled in the art.

It should be noted that, in the following embodiments, the "first", "second" and "third" do not represent an absolute distinction between structures and/or functions, and do not represent a sequential order of execution, but are merely for convenience of description.

As shown in fig. 1 to 6, the utility model provides a device for picking and placing a jig FOUP, which comprises a frame 1, a clean cover 2 for placing the jig FOUP7, a first lifting mechanism arranged on the frame 1 and used for controlling the lifting of the clean cover 2, a telescopic fork arm used for forking the jig FOUP7 in the clean cover 2, and a second lifting mechanism arranged on the frame 1 and used for controlling the lifting of the telescopic fork arm.

Specifically, as shown in fig. 1 to 4, the first lifting mechanism includes a first rocker 8 rotatably provided on the frame 1, a lifting platform for placing the clean hood 2, a lifting actuator 15 connected to the lifting platform, and a first power transmission mechanism connected to the first rocker 8 and the lifting actuator 15. The clean cover 2 is an upper end opening and hollow structure, the lifting platform is horizontally arranged, the lifting executing mechanism 15 is used for controlling the lifting platform to move along the horizontal direction, and the lifting platform drives the clean cover 2 to lift.

As shown in fig. 4, preferably, the first power transmission mechanism comprises a belt transmission mechanism 10 and a first screw transmission mechanism, wherein the upper end of the belt transmission mechanism 10 is connected with a first rocker 8, the lower end of the belt transmission mechanism 10 is connected with a screw rod 11 of the first screw transmission mechanism, a nut 12 of the first screw transmission mechanism is connected with a lifting executing mechanism 15, the nut 12 and the screw rod 11 form screw transmission, the screw rod 11 is rotatably arranged at the bottom of the frame 1, and the screw rod 11 is horizontally arranged.

As shown in fig. 4, preferably, the lifting actuator 15 is a scissor arm lifting mechanism, which is composed of two scissor arms connected in a rotating manner, the lower ends of the two scissor arms of the lifting actuator 15 are respectively connected with the nut 12 and the frame 1 in a rotating manner, and the lower ends of the two scissor arms are connected with the lifting platform. When the first rocker 8 rotates, the belt transmission mechanism 10 is driven to operate, the belt transmission mechanism 10 drives the first screw transmission mechanism screw rod 11 to rotate, the nut 12 of the first screw transmission mechanism drives the lifting executing mechanism 15 to operate, and the two shearing fork arms rotate, so that the lifting platform and the cleaning cover 2 on the lifting platform can be lifted.

As shown in fig. 1 to 3 and 7, the second lifting mechanism includes a second rocker 9 rotatably provided on the frame 1, a second screw transmission mechanism connected to the telescopic fork arm, and a second power transmission mechanism connected to the second rocker 9 and the second screw transmission mechanism. The second rocker 9 is located above the first rocker 8, the rotation center line of the first rocker 8 is parallel to the rotation center line of the second rocker 9, a screw rod 13 of the second screw rod transmission mechanism is vertically arranged on the frame 1, the input end of the second power transmission mechanism is connected with the second rocker 9, the output end of the second power transmission mechanism is connected with the screw rod 13 of the second screw rod transmission mechanism, and the screw rod 13 is connected with the telescopic fork arm and forms spiral transmission. The second power transmission mechanism is arranged inside the frame 1 and is used for transmitting the power of the second rocker 9 to the screw rod 13 and driving the screw rod 13 of the second screw rod transmission mechanism to rotate, and the screw rod 13 drives the telescopic fork arm to move on the frame 1 along the vertical direction, so that the lifting control of the telescopic fork arm is realized. The second power transmission mechanism has various forms and may be a gear transmission mechanism such as a worm gear mechanism.

As shown in fig. 1 to 3, 5 and 6, the telescopic fork arm comprises a supporting sliding table 5 connected with the second lifting mechanism, a push-pull rod 4 movably arranged on the supporting sliding table 5, and two fork arm bodies 6 connected with the push-pull rod 4 and matched with the jig FOUP7 used for forking the cleaning cover 2, wherein the supporting sliding table 5 is positioned above the cleaning cover 2. The supporting sliding table 5 is movably arranged on the frame 1, and the supporting sliding table 5 is in threaded connection with a screw rod 13 of the second screw rod transmission mechanism, so that screw transmission is formed. The two fork arm bodies 6 are connected with the push-pull rod 4, the two fork arm bodies 6 and the push-pull rod 4 are movably arranged on the supporting sliding table 5, the moving directions of the two fork arm bodies 6 and the push-pull rod 4 are parallel to the length direction of the screw rod 11 of the first screw rod transmission mechanism, the push-pull rod 4 can move after receiving the acting force applied by an operator and drives the two fork arm bodies 6 to synchronously move, the two fork arm bodies 6 extend out of the supporting sliding table 5 or are stored in the supporting sliding table 5, a certain distance is reserved between the two fork arm bodies 6, and the two fork arm bodies 6 can pick up the mushroom heads of the jig FOUP7 through forking.

As shown in fig. 1 to 3, a positioning pin 3 is provided on the frame 1, the positioning pin 3 is used for positioning the frame 1 when the jig FOUP7 is taken and placed, and the positioning pin 3 is used for being inserted into a positioning hole provided on the production equipment. The bottom of frame 1 sets up universal wheel 14, and universal wheel 14 sets up a plurality ofly, conveniently promotes to get the device of putting tool FOUP7 and wholly remove.

The process of taking the jig FOUP7 is as follows:

(1) firstly, pushing a device for taking and placing a jig FOUP7 to a formulated equipment Port position for positioning, and inserting a positioning pin 3 into a positioning hole arranged on production equipment;

(2) the heights of the cleaning cover 2 and the telescopic fork arms are adjusted to proper positions by rotating the first rocker 8 and the second rocker 9;

(3) pushing the push-pull rod 4 to extend the two fork arm bodies 6 from the supporting sliding table 5, and forking the two fork arm bodies 6 below the mushroom heads of the jig FOUP 7;

(4) the movable stop lever 16 arranged at the front end of the fork arm body 6 is put down;

(5) the telescopic fork arm and the forked jig FOUP7 are lifted upwards by rotating the second rocker 9;

(6) the push-pull rod 4 is pulled back to retract the two fork arm bodies 6, and the two fork arm bodies 6 drive the jig FOUP7 to synchronously move;

(7) the second rocker 9 is rotated again to control the telescopic fork arm and the forked jig FOUP7 to descend;

(8) by rotating the first rocker 8, the cleaning hood 2 is controlled to rise, and finally the cleaning hood 2 covers the jig FOUP7, so that the action of taking the jig FOUP7 is completed.

The process of placing the jig FOUP7 is as follows:

(2) the cleaning cover 2 is controlled to descend by rotating the first rocker 8;

(3) the telescopic fork arm and the forked jig FOUP7 are lifted upwards by rotating the second rocker 9;

(4) continuously adjusting the height of the telescopic fork arm to a proper position;

(5) pushing the push-pull rod 4 to extend the two fork arm bodies 6 from the supporting sliding table 5 to the positioning position of the jig FOUP 7;

(6) raising the movable stop lever 16 at the front end of the fork arm;

(7) the second rocker 9 is rotated again to control the telescopic fork arm and the forked jig FOUP7 to descend, and the jig FOUP7 is placed on the equipment Port;

(8) the push-pull rod 4 is pulled back to retract the two fork arm bodies 6, so that the FOUP placing action is completed.

The utility model is described above by way of example with reference to the accompanying drawings. It will be clear that the utility model is not limited to the embodiments described above. As long as various insubstantial improvements are made using the method concepts and technical solutions of the present utility model; or the utility model is not improved, and the conception and the technical scheme are directly applied to other occasions and are all within the protection scope of the utility model.

Claims

1. Get device of putting tool FOUP, its characterized in that: the cleaning device comprises a frame, a cleaning cover for placing a jig FOUP, a first lifting mechanism arranged on the frame and used for controlling the lifting of the cleaning cover, a telescopic fork arm for forking the jig FOUP in the cleaning cover and a second lifting mechanism arranged on the frame and used for controlling the lifting of the telescopic fork arm.

2. The pick and place fixture FOUP apparatus of claim 1, wherein: the first lifting mechanism comprises a first rocker rotatably arranged on the frame, a lifting platform for placing the cleaning cover, a lifting executing mechanism connected with the lifting platform and a first power transmission mechanism connected with the first rocker and the lifting executing mechanism.

3. The pick and place fixture FOUP apparatus of claim 2, wherein: the first power transmission mechanism comprises a belt transmission mechanism and a first screw rod transmission mechanism, the upper end of the belt transmission mechanism is connected with the first rocker, the lower end of the belt transmission mechanism is connected with a screw rod of the first screw rod transmission mechanism, and a nut of the first screw rod transmission mechanism is connected with the lifting executing mechanism.

4. A pick and place fixture FOUP apparatus according to claim 3, wherein: the lifting executing mechanism is a scissor arm type lifting mechanism.

5. The apparatus for picking and placing a fixture FOUP according to any one of claims 1 to 4, wherein: the second lifting mechanism comprises a second rocker rotatably arranged on the frame, a second screw rod transmission mechanism connected with the telescopic fork arm and a second power transmission mechanism connected with the second rocker and the second screw rod transmission mechanism.

6. The apparatus for picking and placing a fixture FOUP according to any one of claims 1 to 4, wherein: the telescopic fork arm comprises a supporting sliding table connected with the second lifting mechanism, a push-pull rod movably arranged on the supporting sliding table and two fork arm bodies connected with the push-pull rod and matched with the push-pull rod for forking the jig FOUP in the clean cover, and the supporting sliding table is positioned above the clean cover.

7. The apparatus for picking and placing a fixture FOUP according to any one of claims 1 to 4, wherein: and the frame is provided with a locating pin.