CN220543863U - Silicon wafer transmission mechanism - Google Patents

Abstract

The utility model provides a silicon wafer transmission mechanism, which aims to solve the technical problem that when the product offset is larger than the resetting range in the conventional silicon wafer transmission, products can only be removed or can collide with the resetting mechanism to damage the products. The conveying mechanism comprises a straight conveying belt driven by a first driving mechanism and a climbing conveying belt arranged beside the straight conveying belt and driven by a second driving mechanism; the correcting mechanism is arranged beside the straight conveying belt and the climbing conveying belt and is used for adjusting the angle of the silicon wafer; wherein, the straight conveying belt and the climbing conveying belt are arranged along the advancing direction of the material; at least a portion of the climbing conveyor belt forms a height difference in height with the straight conveyor belt. The utility model designs the transmission mechanism into a high-low layered structure, so that adjacent silicon wafers are staggered in height after being transmitted by straight and climbing, gaps between adjacent products do not exist after the silicon wafers are staggered in height, the deflectable angle of the products is enlarged, and the normalization range is also enlarged.

Description

Silicon wafer transmission mechanism

Technical Field

The utility model relates to the technical field of silicon wafer transmission, in particular to a silicon wafer transmission mechanism.

Background

At present, in order to improve productivity in silicon wafer production, during transmission, gaps between products are smaller and smaller, and the correcting mechanism is arranged at two ends of the silicon wafer, the inclined silicon wafer is corrected by inwards retracting, the angle of the product which can be offset is smaller due to smaller gaps, the inwards retracting range is smaller, and when the offset of the product is larger than the correcting range, the product can only be removed or can collide with the correcting mechanism to damage the product, so that the qualification rate of the product is reduced. A silicon wafer buffer memory with publication number CN210122328U discloses a transmission mechanism, which comprises a plurality of groups of conveyor belts arranged in parallel along the horizontal direction, and in the transmission mechanism, when the silicon wafers are transmitted, the gap between the silicon wafers can affect the correction of the silicon wafers by the correction mechanism.

Disclosure of Invention

Aiming at the situation, in order to overcome the defects of the prior art, the utility model aims to provide the silicon wafer transmission mechanism, which solves the technical problems that when the product offset is larger than the normalization range in the prior silicon wafer transmission, the product can only be removed or can collide with the normalization mechanism to damage the product, and the qualification rate of the product is reduced.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

a silicon wafer transport mechanism, comprising: a straight conveying belt driven by the first driving mechanism, and a climbing conveying belt arranged beside the straight conveying belt and driven by the second driving mechanism; the correcting mechanism is arranged beside the straight conveying belt and the climbing conveying belt and is used for adjusting the angle of the silicon wafer; wherein, the straight conveying belt and the climbing conveying belt are arranged along the advancing direction of the material; at least a part of the climbing conveyor belt and the straight conveyor belt form a height difference in height. The utility model designs the transmission mechanism into a high-low layered structure, one is straight transmission, the adjacent silicon wafers are transmitted in a climbing way, so that the adjacent silicon wafers are staggered in height after being transmitted in a straight and climbing way, gaps between adjacent products are not present after the silicon wafers are staggered in height, the offsetable angle of the products is enlarged, the righting range is enlarged, namely, the silicon wafers with large angles can be transmitted to the rear end after being righted, and the qualification rate of the products is effectively improved.

Optionally, at least a portion of the climbing conveyor belt is higher in height than the straight conveyor belt.

Optionally, the righting mechanism specifically includes: the straight righting component and the climbing righting component are arranged on the base; the straight correcting component is arranged at one end of the straight conveying belt, and the climbing correcting component is arranged at one end of the climbing conveying belt; the number and the height of the straight correcting components are matched with those of the straight conveying belt, and the number and the height of the climbing correcting components are matched with those of the climbing conveying belt.

Optionally, the straightening and righting assembly or the climbing and righting assembly each has a pair of righting singlets that can be relatively close to or apart from each other.

Optionally, the correcting single piece is connected with a driving component arranged on the frame; the normalization units can be relatively close to or far away from each other under the drive of the drive assembly.

Optionally, the driving assembly includes: synchronous pulley, synchronous belt and motor; one end of the synchronous belt wheel is in power connection with the motor, and the other end of the synchronous belt wheel is wound on the synchronous belt wheel; the synchronous belt is provided with two opposite sections, one of the straightening and correcting assembly and the climbing and correcting assembly is arranged on one section of the synchronous belt, and the other correcting assembly is arranged on the other section of the synchronous belt.

Optionally, the normalization single piece comprises a guide wheel seat and a guide wheel; the lower end of the guide wheel seat is connected with the synchronous belt through a connecting piece, and the upper end of the guide wheel seat is rotationally connected with the guide wheel.

Optionally, the climbing conveyor belt sequentially comprises a horizontal feeding section, an ascending section, a horizontal conveying section and a descending section; the righting mechanism is arranged at the horizontal conveying section.

Optionally, the horizontal conveying section of the climbing conveyor belt is higher in height than the straight conveyor belt.

Optionally, at least two straight transmission belts are arranged, and a climbing transmission belt is arranged between two adjacent straight transmission belts.

Optionally, the flat conveyor belts are three groups, and the climbing conveyor belts are two groups.

Optionally, the flat conveyer belt includes two sets of first belts that are parallel to each other, and the interval sets up, be provided with first driving pulley and a plurality of first driven pulley of installing on first support frame on two sets of first belts respectively, first driving pulley coaxial coupling is on the first transmission shaft of transmission shaft, a plurality of first driven pulley distribute in the both ends and the middle part position department of first belt, the first transmission shaft of the transmission shaft of three sets of flat conveyer belts passes through the shaft coupling and links to each other, the whole connection first actuating mechanism after all the first transmission shaft connection of transmission shaft.

Optionally, the climbing transmission belt includes two sets of second belts that are parallel to each other and the interval sets up, is provided with second driving pulley and a plurality of second driven pulley of installing on the second support frame on two sets of second belts respectively, and second driving pulley coaxial coupling is on transmission shaft second transmission shaft, and the transmission shaft second transmission shaft of two sets of climbing transmission belts passes through the shaft coupling and links to each other, and the whole connection second actuating mechanism after all transmission shaft second transmission shaft connection.

Compared with the prior art, the utility model has the beneficial effects that:

in order to maximize the righting range of the product, the utility model designs the transmission mechanism into a structure with high and low layering, one is straight transmission, and the adjacent silicon wafers are transmitted in a climbing way, so that the adjacent silicon wafers are staggered in height after being transmitted in a straight and climbing way, the gaps between the adjacent silicon wafers are not existed after the silicon wafers are staggered in height, the offsetable angle of the product is enlarged, the righting range is enlarged, namely, the large-angle silicon wafers can be transmitted to the rear end after being righted, and the high and low layering can effectively improve the qualification rate of the product.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural view of the present utility model.

Fig. 2 is a side view of the present utility model.

Fig. 3 is a schematic structural view of a flat conveyor belt according to the present utility model.

Fig. 4 is a schematic structural view of a climbing conveyor belt according to the present utility model.

Fig. 5 is a schematic structural view of the resetting mechanism in the utility model.

Reference numerals:

1. a flat conveyor belt; 11. a first belt; 12. a first drive pulley; 13. a first driven pulley; 14. a first drive shaft; 15. a coupling;

2. a first driving mechanism;

3. climbing a conveying belt; 3a, a horizontal feeding section; 3b, an ascending slope section; 3c, a horizontal conveying section; 3d, a downhill section; 31. a second belt; 32. a second drive pulley; 33. a second driven pulley; 34. a second drive shaft;

4. a second driving mechanism;

5. a straightening and righting component; 50. a connecting piece; 51. a guide wheel seat; 52. a guide wheel;

6. climbing and righting component;

7. a first support frame; 71. a first support beam;

8. a second support frame; 81. a second support beam;

9. a frame;

10. a drive assembly; 101. a synchronous pulley; 102. a synchronous belt; 103. a motor; 104. a slide rail.

Detailed Description

Hereinafter, only certain exemplary embodiments are briefly described. As will be recognized by those of skill in the pertinent art, the described embodiments may be modified in numerous different ways without departing from the spirit or scope of the embodiments of the present utility model. Accordingly, the drawings and description are to be regarded as illustrative in nature and not as restrictive.

In the description of the embodiments of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," "end," "side," etc. indicate or are based on the orientation or positional relationship shown in the drawings, merely for convenience of describing the embodiments of the present application and for simplicity of description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the embodiments of the present application.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

In the embodiments of the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured" and the like are to be construed broadly and include, for example, either permanently connected, removably connected, or integrally formed; the device can be mechanically connected, electrically connected and communicated; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the embodiments of the present application will be understood by those of ordinary skill in the art according to the specific circumstances.

In the examples of the present application, unless explicitly specified and limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, or may include both the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

The following disclosure provides many different implementations, or examples, for implementing different configurations of embodiments of the present utility model. In order to simplify the disclosure of embodiments of the present application, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the embodiments of the present application. Furthermore, the present application embodiments may repeat reference numerals and/or letters in the various examples, which are for the purpose of brevity and clarity, and which do not in themselves indicate the relationship between the various embodiments and/or arrangements discussed.

Embodiments of the present utility model will be described in detail below with reference to the accompanying drawings.

As shown in fig. 1 to 5, an embodiment of the present utility model provides a silicon wafer transmission mechanism, including: straight conveyer belt 1, first actuating mechanism 2, climbing conveyer belt 3, second actuating mechanism 4 and mechanism of reforming.

The straight conveyor belt 1 is driven by a first driving mechanism 2, the climbing conveyor belt 3 is arranged beside the straight conveyor belt 1, and the climbing conveyor belt 3 is driven by a second driving mechanism 4; the correcting mechanism is arranged beside the straight conveying belt 1 and the climbing conveying belt 3 and is used for adjusting the angle of the silicon wafer; the straight conveying belt 1 and the climbing conveying belt 3 are arranged along the advancing direction of materials, and at least one part of the climbing conveying belt 3 and the straight conveying belt 1 form a height difference in height. At least a part of the climbing conveyor belt 3 is higher in height than the straight conveyor belt.

In one embodiment, a plurality of groups of straight conveyor belts 1 are sequentially arranged in parallel along the horizontal direction; the multiple groups of straight conveying belts 1 are connected with a first driving mechanism 2, and the first driving mechanism 2 drives the multiple groups of straight conveying belts 1 to synchronously move; a climbing conveyor belt 3 is arranged between two adjacent straight conveyor belts 1, the climbing conveyor belt 3 is connected with a second driving mechanism 4, and the second driving mechanism 4 drives the climbing conveyor belt 3 to move; one end of the straight conveying belt 1 and one end of the climbing conveying belt 3 are provided with a correcting mechanism for correcting and limiting silicon wafers in the silicon wafer conveying process.

The number of the straight conveying belts 1 and the climbing conveying belts 3 can be flexibly configured according to the needs, such as two groups of straight conveying belts 1 and one group of climbing conveying belts 3, three groups of straight conveying belts 1 and two groups of climbing conveying belts 3, four groups of straight conveying belts 1 and three groups of climbing conveying belts 3, five groups of straight conveying belts 1 and four groups of climbing conveying belts 3 … ….

In this embodiment, three sets of straight conveyor belts 1 and two sets of climbing conveyor belts 3 are preferred. The following description of the embodiments mainly exemplifies this case.

Specifically, referring to fig. 1 to 5, three sets of flat conveyor belts 1 are mounted on a first support frame 7. The three groups of straight conveying belts 1 are sequentially arranged in parallel along the X-axis direction on the horizontal plane, and the conveying belts move along the Y-axis direction on the horizontal plane. The first driving mechanism 2 is in driving connection with the three groups of straight conveying belts 1 and drives the three groups of straight conveying belts 1 to synchronously move.

The two groups of straight conveyer belts 1 are adjacent, and a climbing conveyer belt 3 is arranged between the two groups of straight conveyer belts 1, namely, the climbing conveyer belts 3 are two groups, the two groups of climbing conveyer belts 3 are arranged along the X-axis direction on the horizontal plane, and the moving direction of the conveyer belts is the same as that of the three groups of straight conveyer belts 1, namely, the conveyer belts also move along the Y-axis direction on the horizontal plane. The two sets of climbing conveyor belts 3 are mounted on a second support frame 8. The second driving mechanism 4 is in driving connection with the two groups of climbing conveyor belts 3 and drives the climbing conveyor belts 3 to synchronously move.

Further, the climbing conveyor belt 3 includes a horizontal feeding section 3a, an ascending section 3b, a horizontal conveying section 3c, and a descending section 3d in this order. Specifically, one end of the horizontal feeding section 3a is in butt joint with a silicon wafer assembly line, the other end of the horizontal feeding section is in butt joint with the lower end of the ascending section 3b, the upper end of the ascending section 3b is in butt joint with one end of the horizontal conveying section 3c, the other end of the horizontal conveying section 3c is in butt joint with the upper end of the descending section 3d, the descending section 3d conveys the silicon wafer to a target position, and the resetting mechanism is arranged at the position of the horizontal conveying section 3 c.

Further, the righting mechanism comprises a straight righting component 5 matched with the straight conveying belt 1 and a climbing righting component 6 matched with the climbing conveying belt 3. Namely, one end of each group of straight conveying belts 1 is provided with a straight correcting component 5, and the height of the straight correcting component 5 is matched with the height of the straight conveying belts 1 and is used for correcting and limiting silicon chips on the straight conveying belts 1; the one end of every group climbing conveyer belt 3 all is provided with climbing and reforms subassembly 6, and the height of climbing and reforms the subassembly 6 and the high looks adaptation of climbing conveyer belt 3, and climbing and reforms subassembly 6 and set up in the one end that is close to the horizontal transfer section 3c of downhill section 3d, and climbing and reforms subassembly 6 and lie in the top of straight reforming subassembly 5 for the silicon chip on the climbing conveyer belt 3 is reform spacingly.

Optionally, the first driving mechanism 2 and the second driving mechanism 4 preferably use motors, the types and types of the motors can be changed according to the needs, and one motor drives three groups of straight conveying belts 1 or two groups of climbing conveying belts 3 to convey silicon wafers along the Y-axis direction.

Through straight transmission band and climbing transmission band with the design of transmission setting into high low layering, one is straight transmission, and adjacent just climbs the slope transmission, will have the dislocation in the height through straight transmission and climbing transmission back like this adjacent product, after the product height staggers, the clearance of adjacent product just does not exist like this, but the angle grow of product skew, and the scope of reforming also grows.

In one embodiment, the three sets of straightening and straightening assemblies 5 and the two sets of climbing and straightening assemblies 6 are moved by a driving assembly 10 provided on the frame 9.

In particular, either the straightening and righting assembly 5 or the climbing and righting assembly 6 has a pair of righting singlets that can be relatively close to or apart from each other. The restoring single piece is connected with a driving component 10 arranged on the frame 9, and the restoring single piece can be relatively close to or deviate from each other under the driving of the driving component 10.

In one embodiment, the normalization unit includes a guide wheel seat 51 and a guide wheel 52, the lower end of the guide wheel seat 51 is connected with the synchronous belt 102 through a connecting piece 50, and the upper end of the guide wheel seat 51 is rotatably connected with the guide wheel 52. Specifically, the top of the guide wheel seat 51 is rotatably connected with a plurality of guide wheels 52 through a rotation shaft, and the horizontal plane where the guide wheels 52 of a pair of straightening single pieces on the straightening assembly 5 or the climbing straightening assembly 6 are positioned is basically level with the conveying surface of the silicon wafer on the straightening conveying belt 1 or the climbing conveying belt 3. When the silicon wafer straightening and correcting device is used, the pair of guide wheel seats 51 of the straightening and correcting assembly 5 move in opposite directions or in opposite directions through the driving assembly 10, and when the silicon wafer on the straightening and correcting assembly 1 is conveyed between the pair of guide wheels 52, the driving assembly 10 drives the pair of guide wheel seats 51 to simultaneously approach the silicon wafer, and the silicon wafer is limited and corrected. The structural principle of the climbing and righting assembly 6 is basically the same as that of the straightening and righting assembly 5, specifically, a pair of guide wheel seats of the climbing and righting assembly 6 move in opposite directions or in opposite directions through a driving assembly 10, and when a silicon wafer on the climbing and righting assembly 3 is conveyed between the pair of guide wheels, the driving assembly 10 drives the pair of guide wheel seats to approach the silicon wafer at the same time, and limits and rightes the silicon wafer.

In an embodiment, the driving assembly 10 drives the pair of guide wheel bases to move towards or away from each other, which may be the conventional art, and the straightening assembly 5 and the climbing and straightening assembly 6 may also be other conventional structures, so long as the height is adapted to the conveyor belt.

In one embodiment, the drive assembly 10 includes a synchronous pulley 101, a synchronous belt 102, and a motor 103. One end of the synchronous pulley 101 is in power connection with the motor 103, the other end of the synchronous pulley 101 is wound on the synchronous pulley 101, the synchronous belt 102 is provided with two opposite sections, one of the climbing normalization units 6 is arranged on one section of the synchronous belt 102, and the other normalization unit is arranged on the other section of the synchronous belt 102.

Optionally, the driving assembly 10 further includes a sliding rail 104, where the sliding rail 104 is disposed on the frame 9 below the two-wheeled synchronous pulley 101, and the bottom of the guide wheel seat is slidably connected with the sliding rail 104, so that the angle of the guide wheel seat is limited when the guide wheel seat horizontally displaces, avoiding rotation of the guide wheel seat in other directions, and enhancing the stability of horizontal sliding of the guide wheel seat.

The guide wheel seat is connected with the belt synchronous belt 102 through the connecting component connecting piece 50, and when the motor 103 drives the belt synchronous belt 102 to work, a pair of straightening single pieces of the straightening and straightening component 5 and a pair of straightening single pieces of the climbing and straightening component realize synchronous movement and are mutually close to or far away from each other so as to limit and straighten the silicon wafer.

In an embodiment, the flat conveyor belt 1 comprises two groups of first belts 11 which are parallel to each other and are arranged at intervals, a first driving pulley 12 and a plurality of first driven pulleys 13 are respectively arranged on the two groups of first belts 11, the first belts 11 are wound on the first driving pulley 12 and the plurality of first driven pulleys 13, the first driving pulley 12 and the plurality of first driven pulleys 13 are arranged on a first supporting beam 71 of the first supporting frame 7, the first driving pulleys 12 are coaxially connected on a first transmission shaft 14, the plurality of first driven pulleys 13 are distributed at two ends and the middle position of the first belts 11, the first transmission shafts 14 of the three groups of flat conveyor belts 1 are connected through a coupler 15, the whole body after all the first transmission shafts 14 are connected is connected with the first driving mechanism 2, and the first belts 11 are driven by the first driving mechanism 2 to rotate around a plurality of pulleys to convey silicon wafers on the belts. The first belt 11 of the two sets is driven by the first driving pulley 12 and the first driven pulley 13. The synchronous movement of the two groups of first belts 11 is known in the art, and the implementation and operation principle thereof are not described here.

In an embodiment, the two sets of climbing belts 3 include two sets of second belts 31 parallel to each other and arranged at intervals, the two sets of second belts 31 are respectively provided with a second driving pulley 32 and a plurality of second driven pulleys 33, the second belts are wound on the second driving pulley 32 and the plurality of second driven pulleys 33, the second driving pulley 32 and the plurality of second driven pulleys 33 are arranged on a second supporting beam 81 of the second supporting frame 8, the second driving pulley 32 is coaxially connected to a second transmission shaft 34, the plurality of second driven pulleys 33 are distributed at the horizontal feeding section 3a, the ascending section 3b, the horizontal conveying section 3c and the descending section 3d of the climbing belts 3, the second transmission shafts 34 of the two sets of climbing belts 3 are connected through a coupling, the whole body after all the second transmission shafts 34 are connected is connected with a second driving mechanism 4, and the second belts 31 are driven by the second driving mechanism 4 to revolve around the plurality of pulleys to convey silicon wafers on the belts. The synchronous movement of the two sets of second belts 31 driven by the second driving pulley 32 and the second driven pulley 33 is known in the art, and the implementation process and the working principle thereof are not described herein.

The details of this embodiment are not described in detail, and are known in the art.

The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any person skilled in the art will readily recognize that various changes and substitutions are possible within the scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims (10)

1. A silicon wafer transport mechanism, comprising:

a flat conveyor belt (1) driven by a first drive mechanism (2), and

a climbing conveyor belt (3) arranged beside the flat conveyor belt (1) and driven by a second driving mechanism (4);

the correcting mechanism is arranged beside the straight conveying belt (1) and the climbing conveying belt (3) and is used for adjusting the angle of the silicon wafer;

wherein,

the straight conveying belt (1) and the climbing conveying belt (3) are arranged along the advancing direction of the materials;

at least a part of the climbing conveyor belt (3) and the straight conveyor belt (1) form a height difference in height.

2. Silicon wafer transport mechanism according to claim 1, characterized in that at least a part of the climbing transport belt (3) is higher in height than the straight transport belt (1).

3. The silicon wafer transport mechanism according to claim 2, wherein the righting mechanism specifically comprises:

a straightening and correcting component (5) and a climbing and correcting component (6);

the straight correcting component is arranged at one end of the straight conveying belt (1), and the climbing correcting component (6) is arranged at one end of the climbing conveying belt (3);

wherein,

the number and the height of the straight correcting components (5) are matched with those of the straight conveying belt (1), and the number and the height of the climbing correcting components (6) are matched with those of the climbing conveying belt (3).

4. A silicon wafer transport mechanism according to claim 3, wherein:

the straightening and righting assembly (5) and the climbing and righting assembly (6) are provided with a pair of righting singlets which can be relatively close to or deviate from each other.

5. The silicon wafer transport mechanism according to claim 4, wherein:

the correcting single piece is connected with a driving component (10) arranged on the frame (9);

the normalization units can be relatively close to or far away from each other under the drive of the drive assembly (10).

6. The silicon wafer transport mechanism of claim 5, wherein:

the drive assembly (10) comprises: a synchronous pulley (101), a synchronous belt (102) and a motor (103);

one end of the synchronous pulley (101) is in power connection with the motor (103), and the other end of the synchronous pulley is wound on the synchronous pulley (101);

the synchronous belt (102) is provided with two opposite sections, one of the straightening and correcting component (5) or the climbing and correcting component (6) is arranged on one section of the synchronous belt (102), and the other correcting and correcting component is arranged on the other section of the synchronous belt (102).

7. The silicon wafer transport mechanism of claim 5, wherein:

the normalization single piece comprises a guide wheel seat (51) and a guide wheel (52);

the lower end of the guide wheel seat (51) is connected with a synchronous belt (102) of the driving assembly (10) through a connecting piece (50), and the upper end of the guide wheel seat (51) is rotationally connected with the guide wheel (52).

8. The silicon wafer transport mechanism of claim 2, wherein:

the climbing conveyor belt (3) sequentially comprises a horizontal feeding section (3 a), an ascending section (3 b), a horizontal conveying section (3 c) and a descending section (3 d);

the righting mechanism is arranged at the horizontal conveying section (3 c).

9. Silicon wafer transport mechanism according to claim 8, characterized in that the horizontal conveying section (3 c) of the climbing conveyor belt (3) is higher in height than the straight conveyor belt (1).

10. The silicon wafer transport mechanism of claim 1, wherein: at least two straight conveying belts (1) are arranged, and a climbing conveying belt (3) is arranged between two adjacent straight conveying belts (1).