CN220524987U - Angular velocity sensor - Google Patents

Abstract

The application provides an angular velocity sensor, belongs to sensor technical field. The angular velocity sensor includes two driving modules arranged in a first direction, two sensing modules arranged in a second direction, a sensing mode mechanical amplifying structure, and two synchronous levers. The sensing mode mechanical amplifying structure is respectively connected with the two driving modules at two sides of the first direction, and the sensing mode mechanical amplifying structure is respectively connected with the two sensing modules at two sides of the second direction. The two driving modules are respectively connected with the end parts of the two synchronous levers at the two sides of the second direction. The synchronous lever comprises a body, a connecting structure and a first elastic connecting piece, wherein the first end of the first elastic connecting piece is connected with the connecting structure, and the second end of the first elastic connecting piece is connected with the body. The first elastic connecting piece has the structure of buckling between first end and second end, and this application can adjust the elasticity coefficient of first elastic connecting piece through setting up the structure of buckling on first elastic connecting piece to save the consumption when driving first elastic connecting piece.

Description

Angular velocity sensor

Technical Field

The application relates to the technical field of sensors, in particular to an angular velocity sensor.

Background

An angular velocity sensor is an important device for measuring the rotational velocity of an object by using the inertial force when the object rotates. It has wide application in many fields including aerospace, automotive industry, industrial automation, etc.

The structural member in the angular velocity sensor generates certain power consumption in the process of moving or rotating. Since a large power consumption is disadvantageous in saving the measurement cost of the angular velocity sensor, it is necessary to study how to reduce the power consumption of the angular velocity sensor.

Disclosure of Invention

In view of the above problems, embodiments of the present application provide an angular velocity sensor, which can save power consumption when driving a synchronous lever to rotate, and is beneficial to saving the measurement cost of the angular velocity sensor.

In a first aspect of the embodiments of the present application, there is provided an angular velocity sensor including two driving modules arranged in a first direction, two sensing modules arranged in a second direction, a sensing mode mechanical amplifying structure, and two synchronous levers, the second direction being perpendicular to the first direction. The two sensing modules are positioned between the two driving modules along the first direction; the two sides of the sensing mode mechanical amplifying structure in the first direction are respectively connected with the two driving modules, and the two sides of the sensing mode mechanical amplifying structure in the second direction are respectively connected with the two sensing modules. One side of the two driving modules in the second direction is respectively connected with the end part of one synchronous lever, and the other side of the two driving modules in the second direction is respectively connected with the end part of the other synchronous lever.

The synchronous lever comprises a body, a connecting structure and a first elastic connecting piece, wherein the first end of the first elastic connecting piece is connected with the connecting structure, the second end of the first elastic connecting piece is connected with the body, and the connecting structure is connected to the anchoring structure; the first elastic connecting piece is provided with a bending structure between the first end and the second end, and the bending structure is used for adjusting the elastic coefficient of the first elastic connecting piece.

Through above-mentioned scheme, the setting of buckling structure is equivalent to placing a plurality of sub-first elastic connection spare side by side in limited and the same space, and the elastic coefficient of first elastic connection spare can be adjusted through placing side by side of these a plurality of sub-first elastic connection spare to reach the effect of saving the consumption when driving first elastic connection spare, in order to do benefit to saving angular velocity sensor's measuring cost.

In some embodiments, the number of the first elastic connectors is plural, and the plural first elastic connectors are spaced apart from the edge of the connection structure.

Through the scheme, when the driving module drives the body of the synchronous lever to rotate, the stress on each first elastic connecting piece is balanced, so that the synchronous lever is guaranteed to rotate around the rotating shaft only, and displacement in other directions can not be generated, and the accuracy of measuring the angular velocity by the angular velocity sensor is improved conveniently.

In some embodiments, the first resilient connector is configured as an S-shape, a W-shape, or a V-shape.

Through the scheme, the first elastic connecting pieces in the several shapes are bent between the first end and the second end, so that a bending structure can be formed between the first end and the second end of the first elastic connecting piece, the elastic coefficient of the first elastic connecting piece can be conveniently adjusted, and the rigidity of the first elastic connecting piece in the non-rotary motion direction is ensured.

In some embodiments, the bending structure includes at least one connecting portion and a plurality of bending portions, and two ends of each connecting portion are respectively connected to one bending portion. The plurality of bending parts have the same structure.

Through the scheme, the integral elastic coefficient of the first elastic connecting piece can be conveniently and rapidly determined according to the elastic coefficients of the plurality of bending parts, so that the elastic coefficient of the first elastic connecting piece can be conveniently adjusted to a required value, and the efficiency of adjusting the elastic coefficient of the first elastic connecting piece can be improved.

In some embodiments, the first end of the first resilient connecting element is connected to the connection structure face and the second end of the first resilient connecting element is connected to the body face.

Through above-mentioned scheme, the area of contact of junction between first end and the connection structure of first elastic connection spare is great, and the connection reliability of this junction is higher, has reduced when synchronous lever rotates around the anchor structure, takes place the possibility of connection inefficacy between first end and the connection structure of first elastic connection spare. In addition, the contact area of the connection part between the second end of the first elastic connecting piece and the body is larger, the connection reliability of the connection part is higher, and the possibility of connection failure between the second end of the first elastic connecting piece and the body is reduced when the synchronous lever rotates around the anchoring structure.

In some embodiments, the synchronizing lever includes a limit structure for limiting an angle of the body as it rotates about the anchoring structure.

Through the scheme, the rotation angle of the body around the anchoring structure can be limited, so that the possibility of interference with the driving module during rotation of the synchronous lever is reduced, and the synchronous lever or the driving module is protected from larger external mechanical impact.

In some embodiments, the limiting structure includes an extension member coupled to the connection structure and a limiting member coupled to the body, an end of the extension member distal from the connection structure being positioned in a rotational path of the limiting member.

Through the scheme, in the process that the limiting piece rotates along with the body of the synchronous lever, the limiting piece can touch the extending piece. Because extension piece fixed connection is in connection structure, and connection structure is motionless throughout at synchronous lever pivoted in-process, consequently when the extension piece was touched to the locating part, the extension piece can hinder the locating part to continue the rotation of original direction to play the effect of restricting the angle when the body rotates around the anchor structure.

In some embodiments, the number of the limiting members is two, and the end of the extending member away from the connecting structure is located between the two limiting members.

Through above-mentioned scheme for limit structure can restrict the angle when the body rotates around anchor structure in different directions.

In some embodiments, the end of the extension away from the connection structure is located on a perpendicular bisector of the line connecting the two stoppers.

Through above-mentioned scheme, the extension piece keeps away from the end of connection structure and the distance between two locating parts equal, and the angle that allows the body of synchronizing lever to rotate along different directions is the same. Under the condition that the angles of rotation of the body of the synchronous lever along different directions are the same, the moving amplitude of the two driving modules connected to the two ends of the body of the synchronous lever in the second direction is the same, so that the accuracy of measuring the angular speed by the angular speed sensor is conveniently ensured.

In some embodiments, the drive mode motion of the two drive modules and the sense mode motion of the two sense modules are mechanically decoupled.

By the scheme, the driving mode movement of the driving module and the sensing mode movement of the sensing module are not influenced, and the reliability and the working performance of the angular velocity sensor can be remarkably improved.

The foregoing description is only an overview of the technical solutions of the embodiments of the present application, and may be implemented according to the content of the specification, so that the technical means of the embodiments of the present application can be more clearly understood, and the following detailed description of the present application will be presented in order to make the foregoing and other objects, features and advantages of the embodiments of the present application more understandable.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of an angular velocity sensor according to an embodiment of the present application.

Fig. 2 is a schematic diagram of FEM simulation corresponding to fig. 1.

Fig. 3 is a schematic structural diagram of a synchronous lever according to an embodiment of the present application.

Fig. 4 is a schematic structural diagram of a first elastic connection member according to an embodiment of the present application.

Fig. 5 is a schematic view of a part of the structure of an angular velocity sensor according to an embodiment of the present application.

FIG. 6 is a schematic view of the combination of the synchronizing lever, the first drive bobbin carriage and the third movable pivot of FIG. 1.

Fig. 7 is a schematic view of a structure of the driving module in the angular velocity sensor of fig. 1 when it moves.

Fig. 8 is a schematic diagram of FEM simulation corresponding to fig. 7.

Fig. 9 is a schematic view of a structure of the sensor module in the angular velocity sensor of fig. 1 when it moves.

Fig. 10 is a schematic diagram of FEM simulation corresponding to fig. 9.

Fig. 11 is a schematic structural diagram of a combined sensor of angular velocity according to an embodiment of the present application.

Reference numerals illustrate:

1. a driving module; 11. a first mass; 12. a second mass; 13. a first drive bobbin; 14. a second drive bobbin; 15. a third drive bobbin carriage; 16. a fourth drive bobbin carriage; 2. a sensing module; 21. a first sensing shuttle frame; 22. a second sensing shuttle frame; 3. a sensing mode mechanical amplifying structure; 31. a first movable pivot; 32. a second movable pivot; 4. a synchronizing lever; 41. a body; 42. a connection structure; 43. a first elastic connection member; 431. a bending structure; 4311. a connection part; 4312. a bending part; 44. a limit structure; 441. an extension member; 442. a limiting piece; 45. an anchor structure; 5. a second elastic connection member; 6. a third movable pivot; 7. a fourth movable pivot; 8. a flexure; 100. an angular velocity sensor; x, second direction; y, first direction; z, the extension direction of the anchoring structure.

Detailed Description

For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the description of the applications herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having" and any variations thereof in the description and claims of the present application and in the description of the drawings are intended to cover a non-exclusive inclusion.

Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the present application. The appearances of the phrase "an embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.

The azimuth words appearing in the following description are all directions shown in the drawings, and do not limit the specific structure of the angular velocity sensor of the present application. For example, in the description of the present application, the terms "upper," "lower," "inner," "outer," and the like indicate an orientation or positional relationship based on that shown in the drawings, merely for convenience of description and to simplify the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.

Further, expressions of directions indicating the operation and configuration of the respective members of the angular velocity sensor of the present embodiment, such as the first direction, the second direction, and the like, are not absolute but relative, and although these indications are appropriate when the respective members of the angular velocity sensor are in the positions shown in the drawings, when these positions are changed, these directions should be interpreted differently to correspond to the changes.

Furthermore, the terms first, second and the like in the description and in the claims of the present application or in the above-described figures, are used for distinguishing between different objects and not for describing a particular sequential order, and may be used to expressly or implicitly include one or more such features.

In the description of the present application, unless otherwise indicated, the meaning of "plurality" means two or more (including two), and similarly, "plural sets" means two or more (including two).

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly, e.g., the terms "connected" or "coupled" of a mechanical structure may refer to a physical connection, e.g., the physical connection may be a fixed connection, e.g., by a fastener, such as a screw, bolt, or other fastener; the physical connection may also be a detachable connection, such as a snap-fit or snap-fit connection; the physical connection may also be an integral connection, such as a welded, glued or integrally formed connection. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art in a specific context.

In order to better understand the technical solutions of the present application, the following description will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings.

Fig. 1 is a schematic structural diagram of an angular velocity sensor according to an embodiment of the present application, fig. 2 is a schematic FEM simulation diagram corresponding to fig. 1, and fig. 3 is a schematic structural diagram of a synchronous lever 4 according to an embodiment of the present application, as shown in fig. 1 to 3, where the angular velocity sensor includes: two driving modules 1 arranged along a first direction Y, two sensing modules 2 arranged along a second direction X, which is perpendicular to the first direction Y, a sensing mode mechanical amplifying structure 3, and two synchronizing levers 4.

The two sensing modules 2 are located between the two driving modules 1 along the first direction Y; the two sides of the sensing mode mechanical amplifying structure 3 in the first direction Y are respectively connected with the two driving modules 1, and the two sides of the sensing mode mechanical amplifying structure 3 in the second direction X are respectively connected with the two sensing modules 2. One side of the two drive modules 1 in the second direction X is connected to the end of one synchronizing lever 4, and the other side of the two drive modules 1 in the second direction X is connected to the end of the other synchronizing lever 4.

Wherein the synchronizing lever 4 comprises a body 41, a connecting structure 42 and a first elastic connecting piece 43, a first end of the first elastic connecting piece 43 is connected with the connecting structure 42, a second end of the first elastic connecting piece 43 is connected with the body 41, and the connecting structure 42 is connected to an anchoring structure 45; the first elastic connecting piece 43 has a bending structure 431 between the first end and the second end, and the bending structure 431 is used for adjusting the elastic coefficient of the first elastic connecting piece 43.

As shown in fig. 1, one drive module 1 includes a first mass 11, a first drive shuttle frame 13, and a second drive shuttle frame 14 aligned in a second direction X, and the other drive module 1 includes a second mass 12, a third drive shuttle frame 15, and a fourth drive shuttle frame 16 aligned in the second direction X.

Wherein one side of the first mass 11 in the second direction X is connected to a first drive shuttle frame 13 and the other side of the first mass 11 in the second direction X is connected to a second drive shuttle frame 14, the first drive shuttle frame 13 and the second drive shuttle frame 14 being adapted to generate a drive mode movement of the first mass 11 in a direction of the drive mode movement. Second mass 12 is connected on one side in second direction X to third drive shuttle frame 15, second mass 12 is connected on the other side in second direction X to fourth drive shuttle frame 16, third drive shuttle frame 15 and fourth drive shuttle frame 16 are used to produce drive mode motion of second mass 12 in the direction of drive mode motion.

One sensing module 2 comprises a first sensing shuttle frame 21 and the other sensing module 2 comprises a second sensing shuttle frame 22. The first and second sensing shuttle 21, 22 are located between the first and second masses 11, 12 along the first direction Y such that the two sensing modules 2 are located between the two driving modules 1 along the first direction Y.

Sense mode mechanical amplifying structure 3 is located between first mass 11 and second mass 12 in first direction Y and between first sense bobbin 21 and second sense bobbin 22 in second direction X.

The fact that the two sides of the sensing-mode mechanical amplifying structure 3 in the first direction Y are connected to the two driving modules 1 respectively means that one side of the sensing-mode mechanical amplifying structure 3 in the first direction Y is connected to the first mass 11 and the other side of the sensing-mode mechanical amplifying structure 3 in the first direction Y is connected to the second mass 12. The two sides of the sensing-mode mechanical amplification structure 3 in the second direction X are respectively connected with the two sensing modules 2, which means that one side of the sensing-mode mechanical amplification structure 3 in the second direction X is connected with the first sensing bobbin holder 21, and the other side of the sensing-mode mechanical amplification structure 3 in the second direction X is connected with the second sensing bobbin holder 22.

The connection of one side of the two drive modules 1 in the second direction X to the end of one synchronizing lever 4 means that the side of the first drive shuttle frame 13 facing away from the first mass 11 is connected to the first end of the first synchronizing lever and the side of the third drive shuttle frame 15 facing away from the second mass 12 is connected to the second end of the first synchronizing lever.

The connection of the other side of the two drive modules 1 in the second direction X to the end of the further synchronizing lever 4 means that the side of the second drive shuttle frame 14 facing away from the first mass 11 is connected to the first end of the second synchronizing lever and the side of the fourth drive shuttle frame 16 facing away from the second mass 12 is connected to the second end of the second synchronizing lever.

The first synchronizing lever and the second synchronizing lever have the same structure, and the structure of the synchronizing lever 4 will be described in detail.

The connection structure 42 is fixedly connected to the substrate of the angular velocity sensor through the anchor structure 45, and when the body 41 of the synchronizing lever 4 rotates, the positions of the connection structure 42 and the anchor structure 45 relative to the substrate are fixed. The body 41, the connecting structure 42 and the first elastic connection 43 of the synchronizing lever 4 may be formed after etching on a complete silicon wafer. The body 41, the connection structure 42 and the first elastic connection 43 are in the same structural layer, and the anchoring structure 45 is between the structural layer and the substrate. Wherein the anchoring structure 45 may serve as a rotation axis of the synchronizing lever 4, the extending direction Z, the first direction Y and the second direction X of the anchoring structure are perpendicular to each other.

The first end of the first elastic connection member 43 is connected to the connection structure 42, and the second end of the first elastic connection member 43 is connected to the body 41, so that the body 41 is connected to the connection structure 42 through the first elastic connection member 43. In the case that the anchor structure 45 is fixedly coupled to the substrate, the body 41 is coupled to the coupling structure 42 through the first elastic coupling member 43, then coupled to the anchor structure 45 through the coupling structure 42, and finally coupled to the substrate through the anchor structure 45. The provision of the first elastic connection 43 allows the body 41 of the synchronizing lever 4 to rotate around the anchoring structure 45, but inhibits the body 41 from undergoing a linear translation.

Wherein the anchoring structure 45 may be cylindrical or prismatic, and the connecting structure 42 may be circular, square, hexagonal, octagonal, etc. The cross-sectional area of the anchoring structure 45 may be equal to the cross-sectional area of the connecting structure 42, and in practice, it is also generally the case that the cross-sectional area of the anchoring structure 45 is smaller than the cross-sectional area of the connecting structure 42 (as shown in fig. 3), which is not limited in the embodiment of the present application.

From hooke's law, the elastic coefficient of the first elastic connection element 43 is equal to the force exerted on the first elastic connection element 43 divided by the deformation of the first elastic connection element 43. It can be seen that the spring rate of the first resilient connecting element 43 is proportional to the force exerted on the first resilient connecting element 43. In other words, in the case where the deformation amount of the first elastic connection member 43 is constant, the larger the elastic coefficient of the first elastic connection member 43 is, the larger the force that needs to be applied to the first elastic connection member 43, whereas the smaller the elastic coefficient of the first elastic connection member 43 is, the smaller the force that needs to be applied to the first elastic connection member 43 is. Therefore, power consumption in driving the body 41 can be saved by adjusting the elastic coefficient of the first elastic connection 43.

Illustratively, as shown in fig. 3, the first elastic connection 43 may have a bending structure 431 between the first end and the second end to adjust and optimize the elastic coefficient of the first elastic connection 43 by providing the bending structure 431.

In summary, the first elastic connection member 43 in the synchronization lever 4 is bent to form a bending structure 431 between the first end and the second end of the first elastic connection member 43. The arrangement of the bending structure 431 is equivalent to arranging a plurality of sub-elastic connecting pieces side by side in a limited and same space, and the elastic coefficient of the first elastic connecting piece 43 can be adjusted and optimized by arranging the plurality of sub-elastic connecting pieces side by side, so that the effect of saving the power consumption when the body 41 is driven is achieved, and the measuring cost of the angular velocity sensor is saved.

In addition, under the condition that the elastic coefficient of the first elastic connecting piece 43 is adjusted, the first elastic connecting piece 43 is easier to deform, and the rigidity of the first elastic connecting piece 43 is smaller. According to the principle of simple harmonic vibration, in the case where the mass of the first elastic connection member 43 is constant, the eigenfrequency of the first elastic connection member 43 is proportional to the stiffness of the first elastic connection member 43. Based on this, the present application facilitates adjusting the eigenfrequency of the synchronizing lever 4 with the stiffness of the first elastic connection 43 adjusted such that the eigenfrequency of the synchronizing lever 4 coincides with the eigenfrequency of the drive module 1. Therefore, the synchronous lever 4 and the driving module 1 can be in a resonance state, so that power required by the driving module 1 for driving the synchronous lever 4 to rotate is conveniently saved, and the effect of reducing power consumption is also achieved.

In some embodiments, the number of the first elastic connection members 43 may be plural, and the plural first elastic connection members 43 are spaced apart from the edge of the connection structure 42.

The number of first elastic connection members 43 is at least 2. The number of the first elastic connection members 43 may be odd or even, which is not limited in the embodiment of the present application.

Regardless of whether the number of the first elastic connection members 43 is odd or even, all the first elastic connection members 43 may be symmetrically distributed at the edge of the connection structure 42. The symmetrical distribution may be central symmetry about the connection structure 42, or may be axisymmetrical about any cross section of the connection structure 42, which is not limited in the embodiment of the present application. Illustratively, the synchronizing lever 4 shown in fig. 3 comprises six first elastic connection members 43, which six first elastic connection members 43 are distributed in an axisymmetric manner.

In practice, in order to precisely control the rotational movement of the synchronizing lever 4, a plurality of first elastic connection members 43 may be distributed symmetrically about the center of the connection structure 42.

In summary, since the plurality of first elastic connecting pieces 43 are symmetrically distributed at the edge of the connecting structure 42, when the driving module 1 drives the body 41 of the synchronous lever 4 to rotate, the stress on each first elastic connecting piece 43 is relatively balanced, which is beneficial to ensuring that the synchronous lever 4 only rotates around the rotating shaft thereof and does not generate displacement in other directions, thereby being convenient for improving the accuracy of measuring the angular velocity of the angular velocity sensor.

In some embodiments, the distances between the first ends of the plurality of first elastic connectors 43 and the anchor structure 45 may be equal.

The first end of the first elastic connection member 43 is an end connected to the first elastic connection member 43 and the connection structure 42. The distance between the first end of the first elastic connection 43 and the anchoring structure 45 refers to the closest distance between the first end of the first elastic connection 43 and the anchoring structure 45.

When the first elastic connection 43 rotates, part of the energy on the first elastic connection 43 is transferred to the anchoring structure 45 via the connection structure 42. Since the anchor structure 45 is connected to the substrate, the energy transferred to the anchor structure 45 may partially bounce back, and the bounced energy may return to the first elastic connection 43 through the connection structure 42.

Assuming that the distances between the first ends of the plurality of first elastic connection members 43 and the anchoring structure 45 are equal, the energy transferred from the plurality of first elastic connection members 43 to the anchoring structure 45 is the same, and the energy returned from the anchoring structure 45 to the plurality of first elastic connection members 43 is also the same. In this way, the energy eventually remaining on the plurality of first elastic connectors 43 may remain equal, such that the energy on the first elastic connectors 43 is not affected by the energy dissipation and bounce at the anchoring structures 45. In this way, it is convenient to ensure that the plurality of first elastic connecting pieces 43 drive the synchronizing lever 4 to perform a stable rotation motion. In case the synchronizing lever 4 can rotate smoothly, the two driving modules 1 connected to the synchronizing lever 4 can move smoothly in synchronization.

In some embodiments, the first resilient connecting element 43 may be configured as at least one of an S-shape, a W-shape, or a V-shape.

The first elastic connection member 43 may include an S-shaped structure, a W-shaped structure, or a V-shaped structure, and the first elastic connection member 43 may be formed after a plurality of S-shaped structures are connected, or formed after a plurality of W-shaped structures are connected, or formed after at least one S-shaped structure is connected with at least one W-shaped structure. The possible structural forms of the first elastic connecting member 43 are not exhaustive, so long as the bending structure 431 can be formed between the first end and the second end of the first elastic connecting member 43, and the shape of the first elastic connecting member 43 is not limited in the embodiments of the present application.

In this embodiment, the first elastic connecting member 43 is configured as an S-shape, a W-shape or a V-shape, and the first elastic connecting member 43 has a bend between the first end and the second end, so that a bending structure 431 can be formed between the first end and the second end of the first elastic connecting member 43 to adjust the elastic coefficient of the first elastic connecting member 43.

Fig. 4 is a schematic structural diagram of a first elastic connecting member 43 according to an embodiment of the present application, in some embodiments, as shown in fig. 4, the bending structure 431 includes at least one connecting portion 4311 and a plurality of bending portions 4312, and two ends of each connecting portion 4311 are respectively connected to one bending portion 4312. The plurality of bending portions 4312 have the same structure.

The connection part 4311 refers to a portion between two adjacent bending parts 4312, one end of the connection part 4311 is connected to one bending part 4312, and the other end of the connection part 4311 is connected to the other bending part 4312. An end of the bending part 4312 at one side edge position, which is not connected to the connection part 4311, is connected to a first end of the first elastic connection member 43, and an end of the bending part 4312 at the other side edge position, which is not connected to the connection part 4311, is connected to a second end of the first elastic connection member 43.

Since the area of the bending portion 4312 is larger than that of the connecting portion 4311, the influence of the bending portion 4312 on the elastic coefficient of the first elastic connecting member 43 is also relatively large. Assuming that the structures of the plurality of bending parts 4312 are arranged identically, the overall elastic coefficient of the first elastic connecting piece 43 can be conveniently and rapidly determined according to the elastic coefficients of the plurality of bending parts 4312, so that the elastic coefficient of the first elastic connecting piece 43 can be conveniently adjusted to a required value, and the elastic coefficient of the first elastic connecting piece 43 can be effectively adjusted.

In some embodiments, a first end of the first resilient connecting element 43 may be surface-connected to the connecting structure 42.

In this way, the contact area of the connection between the first end of the first elastic connection member 43 and the connection structure 42 is larger, and the connection reliability of the connection is higher, so that the possibility of connection failure between the first end of the first elastic connection member 43 and the connection structure 42 is reduced when the synchronous lever 4 rotates around the anchoring structure 45.

Similarly, in other embodiments, the second end of the first resilient connecting element 43 may be surface-connected to the body 41. In this way, the contact area of the connection between the second end of the first elastic connection member 43 and the body 41 is larger, and the connection reliability of the connection is also higher, so that the possibility of connection failure between the second end of the first elastic connection member 43 and the body 41 is reduced when the synchronous lever 4 rotates around the anchoring structure 45.

It should be noted that, in the present application, only the first end of the first elastic connecting member 43 may be connected to the surface of the connecting structure 42, only the second end of the first elastic connecting member 43 may be connected to the surface of the body 41, and the second end of the first elastic connecting member 43 may be connected to the surface of the body 41 while the first end of the first elastic connecting member 43 is connected to the surface of the connecting structure 42.

With continued reference to fig. 3, in some embodiments, as shown in fig. 3, the synchronizing lever 4 may include a limiting structure 44, the limiting structure 44 being configured to limit the angle of rotation of the body 41 about the anchoring structure 45.

Assuming that the synchronizing lever 4 is rotated around the anchor structure 45 without limitation, the end of the synchronizing lever 4 is likely to collide with the driving module 1, and thus, the synchronizing lever 4 or the driving module 1 may be damaged, so that the angular velocity sensor may not work normally.

In view of this, the present embodiment limits the angle of the body 41 when rotating around the anchoring structure 45 by providing the limiting structure 44, thereby reducing the interference with the driving module 1 when the synchronizing lever 4 rotates, and protecting the synchronizing lever 4 or the driving module 1 from a large external mechanical impact.

In some embodiments, and with reference to fig. 3, the stop structure 44 may include an extension 441 and a stop 442. The extension member 441 is connected to the connecting structure 42, the limiting member 442 is connected to the body 41, and an end portion of the extension member 441 remote from the connecting structure 42 is located in a rotation path of the limiting member 442.

The extension 441 is substantially rod-shaped. The extension member 441 may be a flexible cantilever beam, where the extension member 441 has two opposite ends, and one end of the extension member 441 near the connecting structure 42 is connected to the connecting structure 42, and one end of the extension member 441 far from the connecting structure 42 is located on the rotation path of the limiting member 442, but is not fixedly connected to the limiting member 442.

The end of the extension member 441 away from the connection structure 42 located in the rotation path of the limiting member 442 means that the limiting member 442 touches the extension member 441 during rotation of the body 41 along with the step lever 4.

In summary, since the end of the extension member 441 away from the connecting structure 42 is located on the rotation path of the limiting member 442, the limiting member 442 touches the extension member 441 during the rotation of the limiting member 442 along with the body 41 of the lever 4. Because the extension piece 441 is fixedly connected to the connection structure 42, and the connection structure 42 is always fixed during the rotation of the synchronous lever 4, when the limit piece 442 touches the extension piece 441, the extension piece 441 can prevent the limit piece 442 from continuing to rotate in the original direction, thereby playing a role in limiting the angle of the body 41 when rotating around the anchoring structure 45.

Further, in some embodiments, the number of the stoppers 442 may be two, and the end of the extension member 441 away from the connection structure 42 is located between the two stoppers 442.

The stopper 442 may have a rod-like or plate-like structure. The two stoppers 442 may be identical or different in structure, and the embodiment of the present application is not limited thereto.

In this embodiment, when the body 41 of the synchronous lever 4 rotates to a certain angle along one direction, one of the limiting members 442 touches the extending member 441, so that the extending member 441 stops rotating along the one direction, thereby limiting the body 41 from rotating along the one direction. When the body 41 of the synchronizing lever 4 rotates to a certain angle in the other direction, the other stopper 442 touches the extension member 441, so that the extension member 441 stops continuing to rotate in the other direction, thereby restricting the body 41 from continuing to rotate in the other direction. In this way, the limiting structure 44 is enabled to limit the angle of the body 41 when it rotates around the anchoring structure 45 in different directions.

Wherein the one direction is opposite to the other direction. Illustratively, the one direction may be clockwise and the other direction may be counter-clockwise. Alternatively, the one direction may be counterclockwise and the other direction may be clockwise.

Further, the end of the extension member 441 remote from the connecting structure 42 may be located on a perpendicular bisector of the line connecting the two stoppers 442. In this way, the distance between the end of the extension 441 facing away from the connecting structure 42 and the two limiting members 442 is equal, allowing the rotation angle of the body 41 of the synchronizing lever 4 in different directions to be the same. In the case that the angles of rotation of the body 41 of the synchronizing lever 4 in different directions are the same, the movement amplitudes of the two driving modules 1 connected to both ends of the body 41 of the synchronizing lever 4 in the second direction X are the same, so that the accuracy of measuring the angular velocity by the angular velocity sensor is facilitated to be ensured.

In some embodiments, the drive mode motion of the two drive modules 1 and the sense mode motion of the two sense modules 2 are mechanically decoupled. That is, the driving mode movement of the driving module 1 and the sensing mode movement of the sensing module 2 do not affect each other.

To achieve a mechanical decoupling of the drive mode motion and the sense mode motion, as shown in fig. 5, the side of the sense mode mechanical amplifying structure 3 close to the first mass 11 is connected to the first mass 11 by a first movable pivot 31 and the side of the sense mode mechanical amplifying structure 3 close to the second mass 12 is connected to the second mass 12 by a second movable pivot 32. The first movable pivot 31 is also connected to the corresponding anchor by a second elastic connection 5 on each side in the second direction X, and the second movable pivot 32 is also connected to the corresponding anchor by a second elastic connection 5 on each side in the second direction X.

The second elastic links 5 connected to both sides of the first movable pivot 31 may restrict the movement direction of the first movable pivot 31 such that the first movable pivot 31 moves only in a direction parallel to the first direction Y and does not move in other directions. Similarly, the second elastic links 5 connected to both sides of the second movable pivot 32 may restrict the movement direction of the second movable pivot 32 such that the second movable pivot 32 moves only in a direction parallel to the first direction Y and does not move in other directions.

As shown in fig. 1, the first drive bobbin holder 13 and the third drive bobbin holder 15 are each connected to the first synchronizing lever by a third movable pivot 6. The third movable pivot 6 is arranged such that the first synchronizing lever only rotates about its fixed pivot and does not interfere with the linear movement of the first drive bobbin carriage 13 and the third drive bobbin carriage 15 in the second direction X. Wherein the third movable pivot 6 is structured as shown in fig. 6.

Similarly, the second drive bobbin holder 14 and the fourth drive bobbin holder 16 are each connected to the second synchronizing lever by a fourth movable pivot 7. The fourth movable pivot 7 is arranged such that the second synchronizing lever only rotates about its fixed pivot and does not interfere with the linear movement of the second drive bobbin holder 14 and the fourth drive bobbin holder 16 in the second direction X. Wherein the fourth movable pivot 7 is of similar construction to the third movable pivot 6.

The first synchronizing lever may comprise a first mechanical decoupler for decoupling the linear movement of the first drive carriage 13 and the linear movement of the third drive carriage 15 from the rotational movement of the first synchronizing lever. Wherein the first mechanical decoupler may be fork-shaped, maintaining a low stress even when the first drive bobbin holder 13 and the third drive bobbin holder 15 are displaced a large amount.

Similarly, the second synchronizing lever may include a second mechanical decoupler for decoupling the linear motion of the second drive carriage 14 and the linear motion of the fourth drive carriage 16 from the rotational motion of the second synchronizing lever. The structure of the second mechanical decoupler is similar to that of the first mechanical decoupler, and the structure of the second mechanical decoupler will not be described here.

With continued reference to fig. 1, the first driving bobbin holder 13, the second driving bobbin holder 14, the third driving bobbin holder 15, the fourth driving bobbin holder 16, the first sensing bobbin holder 21, and the second sensing bobbin holder 22 may be provided with the flexure 8 such that the first driving bobbin holder 13, the second driving bobbin holder 14, the third driving bobbin holder 15, the fourth driving bobbin holder 16, the first sensing bobbin holder 21, and the second sensing bobbin holder 22 may perform a linear motion in a predetermined direction.

Wherein the flexure 8 may be constituted by a multi-pronged spring connected to a corresponding anchor.

Through the scheme, the possibility of quadrature errors generated by the driving mode motion and the sensing mode motion can be reduced, so that mechanical decoupling of the driving mode motion and the sensing mode motion is convenient to realize, and the reliability and the working performance of the angular velocity sensor can be remarkably improved.

Fig. 7 is a schematic diagram of a structure of the driving module 1 in the angular velocity sensor shown in fig. 1 when moving, and fig. 8 is a schematic diagram of FEM simulation corresponding to fig. 7, as shown in fig. 7 and 8, when the driving mode moves, the two driving modules 1 synchronously and reversely move along the second direction X, and the two sensing modules 2 are kept stationary. It can be seen that the motion of the drive module 1 does not affect the mechanical decoupling of the sense module 2 when the drive mode is in motion.

Fig. 9 is a schematic view of a structure of the sensor module 2 in the sensor of angular velocity shown in fig. 1 when moving, fig. 10 is a schematic view of FEM simulation corresponding to fig. 9, and as shown in fig. 9 and 10, when the first mass 11 and the second mass 12 are moved in the opposite direction in synchronization by the coriolis force, the first sensor bobbin 21 and the second sensor bobbin 22 are moved in the opposite direction in synchronization by switching and amplifying the sensor mode mechanical amplifying structure 3, and the driving bobbin in both driving modules 1 are kept motionless. It can be seen that the motion of the sensing module 2 does not affect the driving module 11 during the sensing mode motion, and the mechanical decoupling therebetween.

Fig. 11 is a schematic structural view of a combined angular velocity sensor according to an embodiment of the present application, and as shown in fig. 11, the embodiment of the present application further provides a combined angular velocity sensor, which includes the angular velocity sensor 100 in the two previous embodiments.

The angular velocity sensor 100 in the previous embodiment includes two masses, and the angular velocity sensor 100 is also referred to as a dual-mass angular velocity sensor. The combined angular velocity sensor provided in this embodiment includes four masses, which are also called four-mass angular velocity sensors.

Since the structure and the beneficial effects of the dual-mass sensor 100 have been described in detail in the previous embodiments, the disclosure is omitted herein.

The two dual mass angular velocity sensors may be symmetrically distributed along the first direction Y-axis. Under the condition that a pair of driving modules 1 are symmetrically distributed along a first direction Y axis and a pair of sensing modules 2 are symmetrically distributed along a second direction X axis in the dual-mass angular velocity sensor, the two dual-mass angular velocity sensors are symmetrically distributed along the first direction Y axis, so that the structural symmetry of the four-mass angular velocity sensor is conveniently realized, and the driving mode motion and the sensing mode motion in the four-mass angular velocity sensor are conveniently completely decoupled.

The four-mass angular velocity sensor comprises two double-mass angular velocity sensors, so that functions and effects which can be realized by the double-mass angular velocity sensors can be realized by the four-mass angular velocity sensors.

The above embodiments are only for illustrating the technical solution of the present application, and are not limiting thereof; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the corresponding technical solutions.

Claims (10)

1. An angular velocity sensor, characterized by comprising: the device comprises two driving modules arranged along a first direction, two sensing modules arranged along a second direction, a sensing mode mechanical amplifying structure and two synchronous levers, wherein the second direction is perpendicular to the first direction;

the two sensing modules are positioned between the two driving modules along the first direction; the two sides of the sensing mode mechanical amplifying structure in the first direction are respectively connected with the two driving modules, and the two sides of the sensing mode mechanical amplifying structure in the second direction are respectively connected with the two sensing modules;

one side of the two driving modules in the second direction is respectively connected with the end part of one synchronous lever, and the other side of the two driving modules in the second direction is respectively connected with the end part of the other synchronous lever;

the synchronous lever comprises a body, a connecting structure and a first elastic connecting piece, wherein a first end of the first elastic connecting piece is connected with the connecting structure, a second end of the first elastic connecting piece is connected with the body, and the connecting structure is connected to the anchoring structure; the first elastic connecting piece is provided with a bending structure between the first end and the second end, and the bending structure is used for adjusting the elastic coefficient of the first elastic connecting piece.

2. The sensor of angular velocity according to claim 1, wherein the number of the first elastic connection members is plural, and the plural first elastic connection members are spaced apart from the edge of the connection structure.

3. The sensor of angular velocity according to claim 1, characterized in that the first elastic connection is configured as S-, W-, or V-shaped.

4. The sensor of angular velocity according to claim 1, wherein the bending structure comprises at least one connecting portion and a plurality of bending portions, and both ends of each connecting portion are respectively connected to one of the bending portions;

the structures of the plurality of bending parts are the same.

5. The sensor of angular velocity according to claim 1, wherein a first end of the first elastic connection member is connected to the connection structure face, and a second end of the first elastic connection member is connected to the body face.

6. The sensor of angular velocity according to any one of claims 1 to 5, characterized in that the synchronizing lever comprises a limiting structure for limiting the angle of rotation of the body around the anchoring structure.

7. The sensor of angular velocity according to claim 6, wherein the limiting structure comprises an extension member connected to the connection structure and a limiting member connected to the body, an end of the extension member remote from the connection structure being located in a rotational path of the limiting member.

8. The sensor of angular velocity according to claim 7, wherein the number of the stoppers is two, and the end of the extension member away from the connection structure is located between the two stoppers.

9. The sensor of angular velocity according to claim 8, wherein the end of the extension piece remote from the connection structure is located on a perpendicular bisector of the line connecting the two stoppers.

10. Sensor of angular velocity according to claim 1, characterized in that the drive mode movement of both said drive modules and the sense mode movement of both said sense modules are mechanically decoupled.