CN220514129U - Cold hydrogenation device - Google Patents
Cold hydrogenation device Download PDFInfo
- Publication number
- CN220514129U CN220514129U CN202322041155.7U CN202322041155U CN220514129U CN 220514129 U CN220514129 U CN 220514129U CN 202322041155 U CN202322041155 U CN 202322041155U CN 220514129 U CN220514129 U CN 220514129U
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- CN
- China
- Prior art keywords
- tank
- communicated
- heat exchanger
- outlet
- fluidized bed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005984 hydrogenation reaction Methods 0.000 title claims abstract description 22
- 239000002699 waste material Substances 0.000 claims abstract description 38
- 238000003860 storage Methods 0.000 claims abstract description 34
- 239000000463 material Substances 0.000 claims abstract description 26
- 238000001816 cooling Methods 0.000 claims description 17
- 238000010791 quenching Methods 0.000 claims description 11
- 230000000171 quenching effect Effects 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000000926 separation method Methods 0.000 claims description 9
- 238000004891 communication Methods 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 47
- 239000011863 silicon-based powder Substances 0.000 abstract description 45
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 239000007789 gas Substances 0.000 description 51
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 15
- 239000000377 silicon dioxide Substances 0.000 description 14
- 239000005046 Chlorosilane Substances 0.000 description 13
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 13
- 239000002994 raw material Substances 0.000 description 12
- 239000001257 hydrogen Substances 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 235000013312 flour Nutrition 0.000 description 8
- 238000007599 discharging Methods 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 6
- 239000005052 trichlorosilane Substances 0.000 description 6
- 150000002431 hydrogen Chemical class 0.000 description 5
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000005049 silicon tetrachloride Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a cold hydrogenation device, comprising: a fluidized bed; the top outlet of the fluidized bed is communicated with the hot material inlet of the heat exchanger; the hot material outlet of the heat exchanger is communicated with the feed inlet of the cyclone separator; a discharge port of the cyclone separator is communicated with the receiving tank; the collecting tank is communicated with the discharge port of the receiving tank; the air outlet of the collecting tank is communicated with the feed inlet of the first filter; the waste storage body tank, the discharge gate of collecting tank with waste storage body tank intercommunication. In the production process, the silicon powder separated by the gas flowing out from the top outlet of the fluidized bed through the cyclone separator can be collected, so that the escape and waste of the silicon powder are reduced, and the silicon powder utilization rate is improved.
Description
Technical Field
The utility model belongs to the technical field of polysilicon, and particularly relates to a cold hydrogenation device.
Background
Along with the development of new energy, semiconductors and other industries, the demand for silicon wafers is increasing, polysilicon is required for the production of the silicon wafers, and in the polysilicon production process, a cold hydrogenation process is often involved, wherein the cold hydrogenation process is to introduce raw materials such as hydrogen, silicon powder and silicon tetrachloride into a fluidized bed reactor for reaction to generate trichlorosilane, and the trichlorosilane with higher purity can be obtained through processes such as rectification. In the production process, the introduced silicon powder can escape along with gas from the gas outlet of the fluidized bed, and a large amount of escaped silicon powder cannot be effectively recovered, so that more silicon powder enters a subsequent system after escaping from the fluidized bed, waste of the silicon powder is brought, and the silicon powder utilization rate is low.
Disclosure of Invention
The embodiment of the utility model aims to provide a cold hydrogenation device which is used for solving the problem that silicon powder escaping from a fluidized bed in a cold hydrogenation process cannot be effectively recovered.
The embodiment of the utility model provides a cold hydrogenation device, which comprises:
a fluidized bed;
the top outlet of the fluidized bed is communicated with the hot material inlet of the heat exchanger;
the hot material outlet of the heat exchanger is communicated with the feed inlet of the cyclone separator;
a discharge port of the cyclone separator is communicated with the receiving tank;
the collecting tank is communicated with the discharge port of the receiving tank;
the air outlet of the collecting tank is communicated with the feed inlet of the first filter;
the waste storage body tank, the discharge gate of collecting tank with waste storage body tank intercommunication.
Optionally, the apparatus further comprises:
and the air outlet of the cyclone separator is communicated with the feed inlet of the quenching tower.
Optionally, the apparatus further comprises:
and the feed inlet of the air cooling separator is communicated with the top outlet of the quenching tower.
Optionally, the apparatus further comprises:
and a discharge hole of the air cooling separator is communicated with a feed hole of the separation tower.
Optionally, the apparatus further comprises:
and the air outlet of the waste storage tank is communicated with the feed inlet of the second filter.
Optionally, the air outlet of the waste storage tank is communicated with the feed inlet of the first filter.
Optionally, the apparatus further comprises:
the gas storage tank is communicated with at least one of the receiving tank, the collecting tank and the waste storage tank.
Optionally, a heating sleeve is arranged on the outer side wall of the collecting tank, and a heating pipe is arranged in the heating sleeve.
Optionally, the apparatus further comprises:
and the feeding tank is communicated with the cold material inlet of the heat exchanger, and the cold material outlet of the heat exchanger is communicated with the feeding port of the fluidized bed.
Optionally, a jacket is arranged on the outer side of the waste storage tank, and the jacket comprises a cooling pipe;
the apparatus further comprises: the feeding tank is communicated with the inlet of the cooling pipe, the outlet of the cooling pipe is communicated with the cold material inlet of the heat exchanger, and the cold material outlet of the heat exchanger is communicated with the feeding port of the fluidized bed.
In the cold hydrogenation device of the embodiment of the utility model, the top outlet of the fluidized bed is communicated with the hot material inlet of the heat exchanger, the hot material outlet of the heat exchanger is communicated with the feeding port of the cyclone separator, the discharging port of the cyclone separator is communicated with the receiving tank, the collecting tank is communicated with the discharging port of the receiving tank, the air outlet of the collecting tank is communicated with the feeding port of the first filter, and the discharging port of the collecting tank is communicated with the waste storage tank. In the production process, gas flowing out of the top outlet of the fluidized bed can enter a heat exchanger to exchange heat, the temperature of the gas can be reduced, the gas subjected to heat exchange can enter a cyclone separator to separate silicon powder in the gas, and the gas after the cyclone separator separates the silicon powder can be separated to obtain trichlorosilane. The silica flour that cyclone separated can get into the receiving tank, the silica flour that the receiving tank received can get into the collecting tank and collect, the gas in the collecting tank can be replaced through nitrogen gas, the gas that the collecting tank was put out can get into first filter and filter, the silica flour of filtering out can be retrieved, contain chlorosilane in the gas after the filtration, chlorosilane can retrieve, reduce chlorosilane's content in the silica flour, behind the displacing gas in the collecting tank, chlorosilane's content in the gas in the collecting tank is lower, can discharge the silica flour in the collecting tank to useless storage body jar, the silica flour in useless storage body jar can recycle, reduce the silica flour extravagant, improve silica flour utilization ratio.
Drawings
FIG. 1 is a schematic diagram of one connection of a cold hydrogenation apparatus;
FIG. 2 is another schematic connection of a cold hydrogenation apparatus;
fig. 3 is a schematic diagram of still another connection of the cold hydrogenation apparatus.
Reference numerals
A fluidized bed 10; a feed tank 11;
a heat exchanger 20; a primary heat exchanger 21; a secondary heat exchanger 22;
a cyclone separator 30;
a receiving tank 40;
a collection tank 50;
a first filter 60;
a waste reservoir tank 70; a second filter 71;
a quenching tower 81; an air-cooled separator 82; and a separation column 83.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The terms first, second and the like in the description and in the claims, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the utility model may be practiced otherwise than as specifically illustrated or described herein. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.
The cold hydrogenation device provided by the embodiment of the utility model is described in detail below by referring to fig. 1 to 3, and specific embodiments and application scenarios thereof.
As shown in fig. 1 to 3, the cold hydrogenation apparatus according to an embodiment of the present utility model includes: the fluidized bed 10, the heat exchanger 20, the cyclone separator 30, the receiving tank 40, the collecting tank 50, the first filter 60 and the waste storage tank 70, wherein the top outlet of the fluidized bed 10 is communicated with the hot material inlet of the heat exchanger 20, the hot material outlet of the heat exchanger 20 is communicated with the feeding port of the cyclone separator 30, the discharging port of the cyclone separator 30 is communicated with the receiving tank 40, the collecting tank 50 is communicated with the discharging port of the receiving tank 40, the air outlet of the collecting tank 50 is communicated with the feeding port of the first filter 60, and the discharging port of the collecting tank 50 is communicated with the waste storage tank 70. The heat exchanger 20 may include a multi-stage heat exchanger, for example, the heat exchanger 20 may include a primary heat exchanger 21 and a secondary heat exchanger 22, a top outlet of the fluidized bed 10 may be in communication with a hot material inlet of the primary heat exchanger 21, a hot material outlet of the primary heat exchanger 21 may be in communication with a hot material inlet of the secondary heat exchanger 22, and a hot material outlet of the secondary heat exchanger 22 may be in communication with a feed inlet of the cyclone 30. A cyclone separator can be arranged at the top of the fluidized bed 10 to reduce the escape of silicon powder. The mixed gas in the fluidized bed 10 can be subjected to gas-solid separation from a built-in cyclone separator at the top of the fluidized bed, and the silicon powder can be returned to the dense phase section of the fluidized bed along a dipleg after being separated by the built-in cyclone separator and then participate in the reaction.
In the production process, raw materials such as hydrogen, silicon powder and silicon tetrachloride can be introduced into a fluidized bed to react to generate trichlorosilane. The reacted gas flows out from the top outlet of the fluidized bed 10 and can enter the heat exchanger 20, the heat exchange and the temperature reduction can be carried out on the gas through the heat exchanger 20, the temperature of the gas entering the cyclone separator 30 can be reduced, the gas subjected to the heat exchange through the heat exchanger 20 can enter the cyclone separator 30, silicon powder in the gas can be separated through the cyclone separator 30, the silicon powder separated by the cyclone separator 30 can enter the receiving tank 40, the silicon powder in the receiving tank 40 can enter the collecting tank 50 for collection, the gas in the collecting tank 50 can enter the first filter 60 for filtration after being replaced, then the silicon powder in the collecting tank 50 can be introduced into the waste storage tank 70, the recycling of the silicon powder can be realized, the silicon powder waste is reduced, and the silicon powder utilization rate is improved.
In the production process, gas flowing out of the top outlet of the fluidized bed can enter a heat exchanger to exchange heat, the temperature of the gas can be reduced, the gas subjected to heat exchange can enter a cyclone separator to separate silicon powder in the gas, the gas after the cyclone separator separates the silicon powder can be separated to obtain trichlorosilane, the silicon powder separated by the cyclone separator can enter a receiving tank, the silicon powder received by the receiving tank can enter a collecting tank to be collected, the gas in the collecting tank can be replaced by nitrogen, the gas replaced by the collecting tank can enter a first filter to be filtered, the filtered silicon powder can be recovered, the filtered gas contains chlorosilane, the chlorosilane can be recovered, the content of the chlorosilane in the silicon powder is reduced, the silicon powder in the collecting tank can be discharged to a waste storage tank after the collecting tank is replaced by the gas, the chlorosilane content in the gas in the collecting tank is lower, and the silicon powder in the waste storage tank can be recycled.
In some embodiments, the cold hydrogenation apparatus may further comprise: the air outlet of the quenching tower 81 and the cyclone separator 30 are communicated with the feed inlet of the quenching tower 81. The gas from which the silicon powder is separated by the cyclone separator can enter a quenching tower 81, and the gas can be leached by the quenching tower 81, so that the silicon powder in the gas is further removed.
In other embodiments, the cold hydrogenation apparatus may further include: and an air-cooled separator 82, wherein a feed inlet of the air-cooled separator 82 communicates with a top outlet of the quenching tower 81. The gas flowing out from the top outlet of the quenching tower 81 may enter the air-cooled separator 82, and may be subjected to cooling, condensation and separation by the air-cooled separator 82.
In some embodiments, the cold hydrogenation apparatus may further comprise: the discharge port of the separation tower 83 and the air-cooled separator 82 are communicated with the feed port of the separation tower 83. The chlorosilane flowing out of the air-cooled separator 82 can enter a separation tower 83 for separation, and relatively pure trichlorosilane is obtained.
Optionally, the cold hydrogenation apparatus may further include: the air outlet of the second filter 71 and the air outlet of the waste reservoir tank 70 may communicate with the feed inlet of the second filter 71. The gas in the waste storage tank 70 can be filtered by displacing the gas into the second filter 71, the silica powder in the gas can be filtered, the filtered silica powder can be recovered, and the silica powder in the waste storage tank 70 can be discharged after the gas is filtered for recycling.
Alternatively, the air outlet of the waste reservoir tank 70 may be in communication with the feed inlet of the first filter 60. The gas in the waste storage tank 70 can be filtered by displacing the gas into the first filter 60, the silica powder in the gas can be filtered, the filtered silica powder can be recovered, and the silica powder in the waste storage tank 70 can be discharged after the gas is filtered for recycling.
Optionally, the cold hydrogenation apparatus may further include: the air tank communicates with at least one of the receiving tank 40, the collecting tank 50, and the waste reservoir tank 70. The nitrogen gas may be stored in the gas tank, and the nitrogen gas may be used to replace the gas in the receiving tank 40, the collecting tank 50, and the waste storage tank 70, so that the inside of the receiving tank 40, the collecting tank 50, and the waste storage tank 70 may be purged.
In some embodiments, the outer sidewall of the collection tank 50 may be provided with a heating jacket, which may have heating tubes therein. The collecting tank 50 can be heated through the heating pipe, so that the collecting tank 50 can maintain a certain temperature, chlorosilane in the collecting tank can be replaced by gas as completely as possible, and the content of chlorosilane in silicon powder can be reduced. The outer side wall of the receiving tank 40 may be provided with a heating jacket, in which a heating pipe may be provided, through which the receiving tank 40 may be heated. The bottom of the receiving tank 40 can be communicated with a hydrogen tank, hydrogen can be introduced into the bottom of the receiving tank 40 through the hydrogen tank, and the proper amount of hydrogen can be introduced into the bottom of the receiving tank 40 to prevent the silicon powder at the bottom of the receiving tank from piling up and blocking.
Optionally, as shown in fig. 2, the cold hydrogenation apparatus may further include: feed tank 11, feed tank 11 may be in communication with a cold feed inlet of heat exchanger 20, and a cold feed outlet of heat exchanger 20 is in communication with a feed inlet of fluidized bed 10. The quantity of the feed tank 11 can be one or more, raw materials such as hydrogen, silicon tetrachloride and the like can be stored through the feed tank 11, the raw materials in the feed tank 11 can exchange heat through the heat exchanger 20, and the raw materials are heated by utilizing gas flowing out from the top outlet of the fluidized bed, so that the temperature of the gas can be reduced, the raw materials can be heated, and the heat is effectively utilized.
In an embodiment of the present utility model, as shown in fig. 3, the outside of the waste reservoir tank 70 may be provided with a jacket, which may include a cooling pipe. The apparatus may further include: the feed tank 11, the feed tank 11 and the inlet of the cooling pipe can be communicated, the outlet of the cooling pipe can be communicated with the cold material inlet of the heat exchanger 20, and the cold material outlet of the heat exchanger 20 can be communicated with the feed inlet of the fluidized bed 10. The quantity of the feed tank 11 can be one or more, raw materials such as hydrogen, silicon tetrachloride and the like can be stored through the feed tank 11, the raw materials in the feed tank 11 can be firstly introduced into the cooling pipe, the materials in the waste storage tank 70 can be cooled through the raw materials, the raw materials flow into the heat exchanger 20 from the outlet of the cooling pipe, the raw materials are reheated through the heat exchanger 20, the temperature of the materials in the waste storage tank 70 can be reduced, the temperature of gas entering the cyclone separator is reduced, the raw materials can be heated, and heat is effectively utilized.
The receiving tank can regularly discharge silicon powder to the collecting tank, the collecting tank can be kept through nitrogen pressurization and is subjected to silicon powder discharging operation after certain pressure is set for the receiving tank, and after the receiving tank discharges silicon powder, a valve between the receiving tank and the collecting tank can be cut off. The collecting tank can be replaced by nitrogen, continuous replacement is carried out after intermittent pressurizing replacement is continuously carried out, the collecting tank can be heated to maintain a certain temperature, the chlorosilane in the collecting tank is replaced completely as much as possible, and the silicon powder of the filter can be reversely blown into the collecting tank by nitrogen reverse blowing through pressure difference at regular intervals. After the gas replacement of the collecting tank is completed, the silicon powder can be discharged into the waste storage tank, the waste storage tank can be further replaced by introducing nitrogen through cooling, the replacement gas carries the silicon powder to be filtered through a filter, and the nitrogen back blowing can be periodically performed through the pressure difference of the filter to enable the silicon powder of the filter to fall into the waste storage tank. The combustible and toxic substances such as hydrogen, hydrogen chloride, chlorosilane and the like can be effectively removed by gas replacement in the collection tank and the waste storage tank, and the escaping silicon powder can be effectively filtered through the filter to recover the silicon powder escaping from the fluidized bed. Through the repeated collection, the escaping silicon powder in the fluidized bed production process can be ensured to be continuously collected, and the silicon powder conversion rate is continuously improved.
The embodiments of the present utility model have been described above with reference to the accompanying drawings, but the present utility model is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present utility model and the scope of the claims, which are to be protected by the present utility model.
Claims (10)
1. A cold hydrogenation apparatus, comprising:
a fluidized bed;
the top outlet of the fluidized bed is communicated with the hot material inlet of the heat exchanger;
the hot material outlet of the heat exchanger is communicated with the feed inlet of the cyclone separator;
a discharge port of the cyclone separator is communicated with the receiving tank;
the collecting tank is communicated with the discharge port of the receiving tank;
the air outlet of the collecting tank is communicated with the feed inlet of the first filter;
the waste storage body tank, the discharge gate of collecting tank with waste storage body tank intercommunication.
2. The apparatus as recited in claim 1, further comprising:
and the air outlet of the cyclone separator is communicated with the feed inlet of the quenching tower.
3. The apparatus as recited in claim 2, further comprising:
and the feed inlet of the air cooling separator is communicated with the top outlet of the quenching tower.
4. A device according to claim 3, further comprising:
and a discharge hole of the air cooling separator is communicated with a feed hole of the separation tower.
5. The apparatus as recited in claim 1, further comprising:
and the air outlet of the waste storage tank is communicated with the feed inlet of the second filter.
6. The apparatus of claim 1, wherein the outlet of the spent reservoir tank is in communication with the inlet of the first filter.
7. The apparatus as recited in claim 1, further comprising:
the gas storage tank is communicated with at least one of the receiving tank, the collecting tank and the waste storage tank.
8. The device according to claim 1, wherein the outer side wall of the collection tank is provided with a heating jacket having a heating tube therein.
9. The apparatus as recited in claim 1, further comprising:
and the feeding tank is communicated with the cold material inlet of the heat exchanger, and the cold material outlet of the heat exchanger is communicated with the feeding port of the fluidized bed.
10. The apparatus of claim 1, wherein a jacket is provided outside the spent reservoir tank, the jacket comprising a cooling pipe;
the apparatus further comprises: the feeding tank is communicated with the inlet of the cooling pipe, the outlet of the cooling pipe is communicated with the cold material inlet of the heat exchanger, and the cold material outlet of the heat exchanger is communicated with the feeding port of the fluidized bed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322041155.7U CN220514129U (en) | 2023-08-01 | 2023-08-01 | Cold hydrogenation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322041155.7U CN220514129U (en) | 2023-08-01 | 2023-08-01 | Cold hydrogenation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220514129U true CN220514129U (en) | 2024-02-23 |
Family
ID=89928515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322041155.7U Active CN220514129U (en) | 2023-08-01 | 2023-08-01 | Cold hydrogenation device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220514129U (en) |
-
2023
- 2023-08-01 CN CN202322041155.7U patent/CN220514129U/en active Active
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