CN215822721U - Tail gas recovery system in polycrystalline silicon production - Google Patents
Tail gas recovery system in polycrystalline silicon production Download PDFInfo
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- CN215822721U CN215822721U CN202121904573.9U CN202121904573U CN215822721U CN 215822721 U CN215822721 U CN 215822721U CN 202121904573 U CN202121904573 U CN 202121904573U CN 215822721 U CN215822721 U CN 215822721U
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Abstract
The utility model discloses a tail gas recovery system in polycrystalline silicon production, which belongs to the technical field of polycrystalline silicon production and comprises an activated carbon adsorption column, a heat exchanger, a silicon powder filter and a collection tank, wherein the activated carbon adsorption column comprises an inner coil pipe, an outer coil pipe, a feeding port and a discharging port, the inner coil pipe, the outer coil pipe, the feeding port and the discharging port are used for introducing hot water, the heat exchanger comprises an inlet and an outlet, the upper part of the silicon powder filter is provided with a hydrogen feeding port, a tail gas inlet and a gas phase outlet, the bottom of the silicon powder filter is provided with a silicon powder discharging port, and the upper part of the collection tank is provided with a feeding port I; the top is provided with an emptying pipeline; the bottom of the reactor is provided with a solid outlet, the discharge port is communicated with the inlet, the outlet is communicated with the hydrogen feed inlet, and the silicon powder discharge port is communicated with the feed inlet I, so that the problems that the silicon powder filter is easy to block, the service life of a filter element is short, and the silicon powder recovery efficiency of the system is low when the silicon powder filter filters and intercepts silicon powder in reducing gas in the existing polysilicon production can be solved.
Description
Technical Field
The utility model belongs to the technical field of polycrystalline silicon production, and particularly relates to a tail gas recovery system in polycrystalline silicon production.
Background
At present, the production method of the polysilicon adopted in China is developed from the traditional improved Siemens method to an improved Siemens method, namely, the byproducts of fine silicon powder, dichlorosilane, hydrogen chloride and silicon tetrachloride in the processes of tail gas recovery procedure treatment and reduction reaction are added to realize closed cycle of the whole materials.
The tail gas recovery process is that silicon powder in a hot state is intercepted through a silicon powder filter, the residual gas is subjected to multistage condensation to separate dichlorosilane, trichlorosilane and silicon tetrachloride from hydrogen and hydrogen chloride in the tail gas, and a certain proportion of silicon powder monomers are generated by trichlorosilane reduction reaction, so that a large amount of micron-sized silicon powder inevitably enters a subsequent system.
At present, most of domestic manufacturers condense the reduction tail gas by using a heat exchanger, and then separate the fine silicon powder by filtering liquid-phase chlorosilane containing the fine silicon powder, but the silicon powder is condensed into blocks when meeting the liquid-phase chlorosilane, so that dangerous medium chlorosilane cannot be completely replaced, safety accidents are easy to happen when the silicon powder is cleaned, and a large amount of loss of materials is caused.
In addition, some polysilicon production enterprises in China also use gas-phase silicon powder filters to recover silicon powder, but due to the fact that the used hydrogen temperature is not appropriate and other factors, chlorosilane in reduction tail gas is instantly condensed and forms blocks with nanoscale silicon powder, and filter element blockage of the silicon powder filters or silicon powder discharging pipelines is caused.
In summary, how to more effectively recover the silicon powder in the tail gas of the reduction reaction becomes a technical problem to be solved in the field.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problems that in the prior art, when a silicon powder filter filters and intercepts silicon powder in reducing gas in the production of polycrystalline silicon, the silicon powder filter is easy to block, the service life of a filter element is short, and the efficiency of recovering the silicon powder by a system is low.
In order to achieve the above object, the technical solution of the present invention is as follows:
a tail gas recovery system in polycrystalline silicon production comprises an activated carbon adsorption column, a heat exchanger, a silicon powder filter and a collection tank, wherein the activated carbon adsorption column comprises an inner coil pipe, an outer coil pipe, a feed inlet and a discharge outlet, the inner coil pipe and the outer coil pipe are used for introducing hot water, the heat exchanger comprises an inlet and an outlet, the upper part of the silicon powder filter is provided with a hydrogen feed inlet, a tail gas inlet and a gas phase outlet, the bottom of the silicon powder filter is provided with a silicon powder discharge outlet, and the upper part of the collection tank is provided with a feed inlet I; the top is provided with an emptying pipeline; the bottom of the reactor is provided with a solid outlet, the discharge port is communicated with the inlet, the outlet is communicated with the hydrogen feed port, and the silicon powder discharge port is communicated with the feed port I.
Furthermore, a hydrogen back-flushing pipeline is arranged between the silicon powder outlet at the bottom of the silicon powder filter and the heat exchanger, and a valve I is arranged on the hydrogen back-flushing pipeline.
Furthermore, a buffering air bag group is further arranged on a pipeline connecting the hydrogen feeding hole and the outlet.
Further, interior coil pipe and outer coil pipe include interior coil pipe and outer coil pipe, place the active carbon adsorption post in the interior coil pipe, outer coil pipe inlays to be located on the active carbon adsorption post outer wall.
Furthermore, a filtering device is arranged at the top of the collecting tank, and the filtering precision of the filtering device is 1-2 mu m.
Furthermore, the upper part, the middle part and the lower part of the activated carbon adsorption column are all provided with remote thermometers.
Furthermore, the feed inlet and the discharge outlet of the activated carbon adsorption column are both provided with pressure gauges.
Further, the heat exchanger is a U-shaped heat exchanger, and a telemetering thermometer is arranged at an outlet of the U-shaped heat exchanger.
Further, the filtration precision of the silicon powder filter is 5 μm.
Further, a pressure gauge and a remote thermometer are arranged on the silicon powder filter; and the collecting tank is provided with a pressure gauge and a remote thermometer.
The utility model has the beneficial effects that:
first, by adopting the tail gas recovery system, the silicon powder in the reduction reaction tail gas can be recovered more effectively. Utilize the hydrogen that contains a small amount of chlorosilane, hydrogen chloride that the active carbon adsorption column purified recovery workshop section obtained, reach pure hydrogen, heat hydrogen through the heat exchanger, the hot hydrogen that will obtain at last sweeps the silica flour filter, smoothly intercepts silica flour, in prior art, obviously reduces the caking phenomenon of silica flour on the filter core surface, obviously improves the gas-liquid of system's pipeline and erodees the shorter problem of filter core life who causes, improves silica flour filtration efficiency, final gaseous phase also can reuse.
In the utility model, a hydrogen back-blowing pipeline is also arranged between the silicon powder outlet at the bottom of the silicon powder filter and the heat exchanger, and a valve I is arranged on the hydrogen back-blowing pipeline, so that the blockage caused by a large amount of silicon powder accumulated on the lower part of the silicon powder filter can be prevented.
In the utility model, the pipeline connecting the hydrogen feed inlet and the outlet is also provided with the buffer gas bag group, so that the situation that the normal operation of the system is influenced because hydrogen containing chlorosilane in the silicon powder filter enters the heat exchanger in a reverse channeling manner due to insufficient gas pressure on the pipeline can be prevented.
Fourthly, the inner coil pipe and the outer coil pipe comprise the inner coil pipe and the outer coil pipe, the inner coil pipe is arranged in the activated carbon adsorption column, and the outer coil pipe is embedded on the outer wall of the activated carbon adsorption column, so that hydrogen containing partial chlorosilane and hydrogen chloride can pass through the activated carbon adsorption column to obtain pure hydrogen which can be used by a subsequent system.
In the utility model, the top of the collecting tank is provided with a filtering device, the filtering precision of the filtering device is 1-2 mu m, and the silicon powder is prevented from being discharged into the air from a vent pipeline at the top of the collecting tank.
And sixthly, the upper part, the middle part and the lower part of the activated carbon adsorption column are respectively provided with a remote thermometer, so that the temperature in the inner coil and the outer coil in the activated carbon adsorption column can be monitored within a required range, and the aim of purifying hydrogen is fulfilled.
And pressure gauges are arranged at a feed inlet and a discharge outlet of the activated carbon adsorption column, so that the pressure in the activated carbon adsorption column is ensured to be within a required range, on one hand, the safe and stable operation of the activated carbon adsorption column equipment is ensured, and on the other hand, the pressure requirement of the process gas can be ensured.
Eighthly, the heat exchanger is a U-shaped heat exchanger, and the outlet of the U-shaped heat exchanger is provided with a remote thermometer for monitoring the temperature of gas at the outlet of the U-shaped heat exchanger, so that the heat exchanger can be adjusted conveniently, and the temperature requirement of the gas in the process can be met.
In the utility model, in the actual production, the particle size of the silicon powder in the reducing gas entering the silicon powder filter is mainly 4-10 μm, the filtering precision of the silicon powder filter is 5 μm, and most particles can be intercepted.
Tenth, in the utility model, a pressure gauge and a remote thermometer are arranged on the silicon powder filter; the collecting tank is provided with a pressure gauge and a remote thermometer and is used for detecting the pressure and the temperature of the silicon powder filter and the gas in the collecting tank, so that the temperature and the pressure of the gas in the equipment are ensured to be within the required range, the expected purpose is achieved, and the equipment can run safely and stably.
Drawings
FIG. 1 is a system architecture connection diagram of the present invention.
FIG. 2 is a system architecture diagram of a preferred embodiment.
Fig. 3 is a system configuration connection diagram of another embodiment.
Fig. 4 is a schematic structural view of an activated carbon adsorption column.
Fig. 5 is a system configuration connection diagram of still another embodiment.
Wherein, 1, an active carbon adsorption column; 2. a heat exchanger; 3. a silicon powder filter; 4. a collection tank; 5. a hydrogen back-flushing pipeline; 6. a valve I; 7. a buffer air bag group; 8. a filtration device; 9. a remote thermometer; 10. a pressure gauge; 1.1, inner and outer coil pipes; 1.2, a feed inlet; 1.3, a discharge hole; 1.4, a manhole; 2.1, an inlet; 2.2, an outlet; 3.1, a hydrogen feeding hole; 3.2, a tail gas inlet; 3.3, a gas phase outlet; 3.4, a silicon powder outlet; 4.1, a feed inlet I; 4.2, emptying a pipeline; 4.3, a solid outlet; 1.1.1, an inner coil pipe; 1.1.2, an outer coil.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
Example 1
A tail gas recovery system in polycrystalline silicon production belongs to the technical field of polycrystalline silicon production and comprises an activated carbon adsorption column 1, a heat exchanger 2, a silicon powder filter 3 and a collection tank 4, and referring to figure 1, the activated carbon adsorption column 1 comprises an inner coil pipe 1.1, an outer coil pipe 1.1, a feed inlet 1.2 and a discharge outlet 1.3 which are used for leading hot water, the heat exchanger 2 comprises an inlet 2.1 and an outlet 2.2, the upper part of the silicon powder filter 3 is provided with a hydrogen feed inlet 3.1, a tail gas inlet 3.2 and a gas phase outlet 3.3, the bottom of the silicon powder filter 3 is provided with a silicon powder discharge outlet 3.4, and the upper part of the collection tank 4 is provided with a feed inlet I4.1; the top is provided with an emptying pipeline 4.2; the bottom of the reactor is provided with a solid outlet 4.3, the discharge port 1.3 is communicated with the inlet 2.1, the outlet 2.2 is communicated with the hydrogen feed port 3.1, and the silicon powder discharge port 3.4 is communicated with the feed port I4.1.
The embodiment is the most basic embodiment, and the tail gas recovery system mainly aims to recover silicon powder in the reduction reaction tail gas, and the specific operation method comprises the following steps:
a. introducing hydrogen (containing a small amount of chlorosilane and hydrogen chloride) obtained in a recovery working section into an inner coil pipe 1.1 and an outer coil pipe 1 of an activated carbon adsorption column 1, keeping the temperature in the activated carbon adsorption column 1 at 25 ℃, and purifying the original mixed gas to obtain hydrogen without the chlorosilane and the hydrogen chloride under the pressure condition of 800-;
b. then the hydrogen purified in the step a enters a heat exchanger 2 from an inlet 2.1, the hydrogen is heated to 190 ℃ and the pressure condition is controlled to 1000kPa and 900;
c. in the step b, heated hot hydrogen is introduced into the silicon powder filter 3, the hot hydrogen enters from a hydrogen inlet 3.1 and is blown into the silicon powder filter 3, meanwhile, the reduced tail gas containing silicon powder obtained in the recovery working section enters into the silicon powder filter 3 from a tail gas inlet 3.2, dust such as silicon powder and the like intercepted by the silicon powder filter 3 shakes the filter element through gas impact, the silicon powder reaches the lower part of the silicon powder filter 3, the rest gas reaches the rear end through the filter element of the silicon powder filter 3, finally, the silicon powder in the reduced tail gas is smoothly intercepted by the silicon powder filter 3 and is discharged from a silicon powder outlet 3.4, and the gas phase is discharged from a gas phase outlet 3.3 of the silicon powder filter 3;
d. the collection tank 4 collects the silicon powder retained by the silicon powder filter 3, temporarily stores the silicon powder to a certain amount, discharges the silicon powder from the solid outlet 4.3, and discharges the gas which is put into the collection tank 4 from the vent pipeline 4.2.
By adopting the tail gas recovery system of the embodiment, the problem that the filter element of the silicon powder filter 3 is easy to block due to dry dedusting of the reduction tail gas can be effectively solved.
Example 2
In this embodiment, a further improvement is provided in embodiment 1, a hydrogen blowback pipeline 5 is further provided between the silicon powder outlet 3.4 at the bottom of the silicon powder filter 3 and the heat exchanger 2, as shown in fig. 2, a valve I6 is provided on the hydrogen blowback pipeline 5, and in order to prevent blockage caused by accumulation of a large amount of silicon powder on the lower portion of the silicon powder filter 3, the hydrogen blowback pipeline 5 is additionally provided for blowback of the silicon powder filter 3.
Example 3
Compared with the embodiment 1-2, the difference of this embodiment is that a buffer gas bag group 7 is further disposed on the pipeline connecting the hydrogen gas inlet 3.1 and the outlet 2.2, and in design, two buffer gas bags are generally connected in parallel and then connected to the pipeline in the buffer gas bag group 7, and referring to fig. 3, it is possible to prevent insufficient gas pressure on the pipeline, so that hydrogen gas containing chlorosilane in the silicon powder filter 3 is prevented from flowing back into the heat exchanger 2.
Example 4
Compared with the embodiments 1-3, the difference of this embodiment is that the inner coil 1.1 and the outer coil 1.1.2 include the inner coil 1.1.1 and the outer coil 1.1.1, the inner coil 1.1.1 is embedded in the activated carbon adsorption column 1, and the outer coil 1.1.2 is embedded on the outer wall of the activated carbon adsorption column 1. In the actual design, a manhole 1.4 can be designed for checking the running state of the activated carbon adsorption column 1. Referring to fig. 4, a feed inlet 1.2 is formed at the bottom of the activated carbon adsorption column 1, and is used for introducing hydrogen containing silane and hydrogen chloride from the recovery section, and after purification in the activated carbon adsorption column 1, relatively pure hydrogen is obtained and sent to the heat exchanger 2 from a discharge outlet 1.3.
Example 5
Compared with the embodiments 1-4, the difference of this embodiment is that the top of the collecting tank 4 is provided with a filtering device 8, and the filtering device 8 selects different filter elements according to actual production requirements, and the filtering precision is generally controlled to be 1-2 μm.
Example 6
This example is different from examples 1 to 5 in that, referring to fig. 5, the upper, middle and lower portions of the activated carbon adsorption column 1 are each provided with a remote thermometer 9 for monitoring the temperature of the upper, middle and lower portions of the activated carbon adsorption column 1.
Example 7
Compared with the embodiments 1-6, the difference of this embodiment is that, referring to fig. 5, the inlet port 1.2 and the outlet port 1.3 of the activated carbon adsorption column 1 are both provided with a pressure gauge 10.
Example 8
Compared with the embodiments 1-7, the difference of this embodiment is that, referring to fig. 5, the heat exchanger 2 is a U-shaped heat exchanger 2, and a telemetering thermometer 9 is arranged at the outlet 2.2 of the U-shaped heat exchanger 2.
Example 9
This example is different from examples 1 to 8 in that the filtration accuracy of the silicon powder filter 3 is 5 μm.
Example 10
This example is compared with examples 1-9, with the difference that, with reference to fig. 5, the silicon powder filter 3 is provided with a pressure gauge 10 and a remote thermometer 9; the collecting tank 4 is provided with a pressure gauge 10 and a remote thermometer 9.
Example 11
The embodiment is a better implementation mode, and a tail gas recovery system in polycrystalline silicon production belongs to the technical field of polycrystalline silicon production, and comprises an activated carbon adsorption column 1, a heat exchanger 2, a silicon powder filter 3 and a collection tank 4, wherein the activated carbon adsorption column 1 comprises an inner coil pipe 1.1, an outer coil pipe 1.1, a feed inlet 1.2 and a discharge outlet 1.3, the heat exchanger 2 comprises an inlet 2.1 and an outlet 2.2, the upper part of the silicon powder filter 3 is provided with a hydrogen feed inlet 3.1, a tail gas inlet 3.2 and a gas phase outlet 3.3, the bottom of the silicon powder filter 3 is provided with a silicon powder discharge outlet 3.4, and the upper part of the collection tank 4 is provided with a feed inlet I4.1; the top is provided with an emptying pipeline 4.2; the bottom of the reactor is provided with a solid outlet 4.3, the discharge port 1.3 is communicated with the inlet 2.1, the outlet 2.2 is communicated with the hydrogen feed port 3.1, and the silicon powder discharge port 3.4 is communicated with the feed port I4.1.
Further, referring to fig. 5, a hydrogen blowback pipeline 5 is further disposed between the silicon powder outlet 3.4 at the bottom of the silicon powder filter 3 and the heat exchanger 2, and a valve I6 is disposed on the hydrogen blowback pipeline 5. When the condensation of chlorosilane takes place because of having the blind area in silicon powder filter 3 bottom to cause the jam, open valve I6, heat exchanger 2 export 2.2 exhaust hot hydrogen can heat the blowback through silicon powder filter 3 bottom, prevent that the unloading of silicon powder filter 3 to holding vessel 4 is not smooth.
Further, a buffering air bag group 7 is further arranged on a pipeline connecting the hydrogen feeding hole 3.1 and the outlet 2.2, and the buffering air bag group 7 is formed by connecting two buffering air bags in parallel and then connecting the two buffering air bags to the pipeline.
Further, interior outer coil pipe 1.1 includes interior coil pipe 1.1.1 and outer coil pipe 1.1.2, place in active carbon adsorption column 1 in interior coil pipe 1.1.1, outer coil pipe 1.1.2 inlays and locates on the active carbon adsorption column 1 outer wall.
Furthermore, the top of the collecting tank 4 is provided with a filtering device 8, the filtering precision of the filtering device 8 is 1 μm, so that the silicon powder is prevented from entering a blanking pipeline between the silicon powder filter 3 and the collector, and meanwhile, the silicon powder is also reduced from entering an emptying pipeline 4.2.
Further, the upper part, the middle part and the lower part of the activated carbon adsorption column 1 are all provided with a telemetering thermometer 9.
Further, a pressure gauge 10 is arranged at the feed inlet 1.2 and the discharge outlet 1.3 of the activated carbon adsorption column 1.
Further, the heat exchanger 2 is a U-shaped heat exchanger 2, and a telemetering thermometer 9 is arranged at an outlet 2.2 of the U-shaped heat exchanger 2.
Further, the filtration accuracy of the silicon powder filter 3 is 5 μm.
Further, a pressure gauge 10 and a remote thermometer 9 are arranged on the silicon powder filter 3; the collecting tank 4 is provided with a pressure gauge 10 and a remote thermometer 9.
Among this technical scheme, a device for detecting the temperature has chooseed for use teletransmission thermometer 9, compares in other ordinary thermometers, and teletransmission thermometer 9 can be arranged in automatic control system, the manometer also can choose for use teletransmission manometer, is convenient for realize remote control, automated production.
Claims (10)
1. A tail gas recovery system in polycrystalline silicon production is characterized in that: the device comprises an activated carbon adsorption column (1), a heat exchanger (2), a silicon powder filter (3) and a collection tank (4), wherein the activated carbon adsorption column (1) comprises an inner coil pipe (1.1), an outer coil pipe (1.2) and a discharge hole (1.3), the inner coil pipe and the outer coil pipe are used for introducing hot water, the heat exchanger (2) comprises an inlet (2.1) and an outlet (2.2), the upper part of the silicon powder filter (3) is provided with a hydrogen feed port (3.1), a tail gas inlet (3.2) and a gas phase outlet (3.3), the bottom of the silicon powder filter (3) is provided with a silicon powder discharge port (3.4), and the upper part of the collection tank (4) is provided with a feed port I (4.1); the top is provided with a vent pipeline (4.2); the bottom of the silicon powder discharging device is provided with a solid outlet (4.3), the discharging port (1.3) is communicated with the inlet (2.1), the outlet (2.2) is communicated with the hydrogen feeding port (3.1), and the silicon powder discharging port (3.4) is communicated with the feeding port I (4.1).
2. The system for recovering the tail gas in the production of the polycrystalline silicon, according to claim 1, is characterized in that: a hydrogen back-blowing pipeline (5) is further arranged between the silicon powder outlet (3.4) at the bottom of the silicon powder filter (3) and the heat exchanger (2), and a valve I (6) is arranged on the hydrogen back-blowing pipeline (5).
3. The system for recovering the tail gas in the production of the polycrystalline silicon, according to claim 2, is characterized in that: and a buffering air bag group (7) is also arranged on a pipeline connecting the hydrogen feeding hole (3.1) and the outlet (2.2).
4. The system for recovering the tail gas in the production of the polycrystalline silicon, according to claim 3, is characterized in that: interior outer coil pipe (1.1) is including interior coil pipe (1.1.1) and outer coil pipe (1.1.2), place in active carbon adsorption post (1) in interior coil pipe (1.1.1), outer coil pipe (1.1.2) inlays to be located on active carbon adsorption post (1) outer wall.
5. The system for recovering the tail gas in the production of the polycrystalline silicon, according to claim 4, is characterized in that: the top of the collecting tank (4) is provided with a filtering device (8), and the filtering precision of the filtering device (8) is 1-2 mu m.
6. The system for recovering the tail gas in the production of the polycrystalline silicon according to any one of claims 1 to 5, wherein: the upper part, the middle part and the lower part of the active carbon adsorption column (1) are all provided with remote thermometers (9).
7. The system for recovering the tail gas in the production of the polycrystalline silicon, according to claim 6, is characterized in that: the feed inlet (1.2) and the discharge outlet (1.3) of the active carbon adsorption column (1) are both provided with a pressure gauge (10).
8. The system for recovering the tail gas in the production of the polycrystalline silicon, according to claim 7, is characterized in that: the heat exchanger (2) is a U-shaped heat exchanger, and a telemetering thermometer (9) is arranged at an outlet (2.2) of the U-shaped heat exchanger.
9. The system for recovering the tail gas in the production of the polycrystalline silicon, according to claim 8, is characterized in that: the filtering precision of the silicon powder filter (3) is 5 mu m.
10. The system for recovering the tail gas in the production of the polycrystalline silicon, according to claim 9, is characterized in that: a pressure gauge (10) and a remote thermometer (9) are arranged on the silicon powder filter (3); and a pressure gauge (10) and a remote thermometer (9) are arranged on the collecting tank (4).
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| CN202121904573.9U CN215822721U (en) | 2021-08-16 | 2021-08-16 | Tail gas recovery system in polycrystalline silicon production |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114699851A (en) * | 2022-03-21 | 2022-07-05 | 武汉宏澳绿色能源工程有限责任公司 | Waste gas treatment device for preparing polycrystalline silicon and using method thereof |
| CN115055026A (en) * | 2022-05-25 | 2022-09-16 | 云南通威高纯晶硅有限公司 | Method for purifying mixed gas by using tube array adsorption column |
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2021
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114699851A (en) * | 2022-03-21 | 2022-07-05 | 武汉宏澳绿色能源工程有限责任公司 | Waste gas treatment device for preparing polycrystalline silicon and using method thereof |
| CN115055026A (en) * | 2022-05-25 | 2022-09-16 | 云南通威高纯晶硅有限公司 | Method for purifying mixed gas by using tube array adsorption column |
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Assignee: Sichuan Yongxiang Energy Technology Co.,Ltd. Assignor: SICHUAN YONGXIANG NEW ENERGY Co.,Ltd. Contract record no.: X2023510000014 Denomination of utility model: A tail gas recovery system for polycrystalline silicon production Granted publication date: 20220215 License type: Common License Record date: 20230816 |