CN220509996U

CN220509996U - Wafer bearing device

Info

Publication number: CN220509996U
Application number: CN202420080236.XU
Authority: CN
Inventors: 孙丰; 蒋立
Original assignee: Suzhou Secote Precision Electronic Co Ltd
Current assignee: Suzhou Secote Precision Electronic Co Ltd
Priority date: 2024-01-12
Filing date: 2024-01-12
Publication date: 2024-02-20
Anticipated expiration: 2034-01-12

Abstract

The utility model discloses a wafer bearing device, which belongs to the field of semiconductor detection and comprises: the rotary table comprises a rotary table and a rotary shaft assembly, an air passage structure is formed in the rotary table, and a release opening communicated with the air passage structure is formed in the top surface of the rotary table; the clamping assembly is arranged on the turntable and comprises at least one movable clamping piece which can move to a clamping state or a loosening state; the transmission assembly comprises a transmission disc connected to the turntable, and the movable clamping piece is in transmission connection with the transmission disc; the plugging assembly is fixed on the transmission disc; the pressure detection structure is used for monitoring the vacuum value of the gas circuit structure; the transmission disc rotates clockwise in response to the switching of the movable clamping piece from the loosening state to the clamping state, and the plugging assembly plugs the release opening; the drive disk rotates counterclockwise in response to the movable clamp switching from the clamped state to the undamped state and moves the closure assembly away from the release port. The utility model can reliably detect the position state of the clamping moving part.

Description

Wafer bearing device

Technical Field

The present utility model relates to the field of semiconductor inspection technology, and in particular, to a wafer carrier.

Background

In the production process of the wafer, appearance detection is required to be carried out on the outer edge of the wafer so as to ensure that the wafer is qualified and leaves a factory. In the prior art, a wafer carrier is generally provided for clamping and rotating a wafer, the wafer carrier includes a turntable and a clamping assembly disposed on the turntable of the turntable, the clamping assembly including at least one movable clamping member adapted to move to a clamping state or a releasing state relative to the turntable for clamping or releasing the wafer. In general, the wafer carrier may be provided with a position sensor at the movable clamping member to obtain the position of the movable clamping member, so as to ensure the reliability of the wafer carrier during the automated operation. However, since the movement amplitude of the movable clamping member is generally small, the position sensor is prone to misjudgment, and the reliability is poor.

Accordingly, there is a need for an improvement over the prior art to overcome the deficiencies described in the prior art.

Disclosure of Invention

The utility model aims to provide a wafer carrying device which can reliably detect the position state of a movable clamping piece.

The utility model aims at realizing the following technical scheme: a wafer carrier apparatus, comprising:

the rotary table comprises a rotary table and a rotary shaft assembly in transmission connection with the rotary table, an air passage structure is formed in the rotary table, and a release opening communicated with the air passage structure is formed in the top surface of the rotary table;

the clamping assembly is arranged on the turntable and comprises at least one movable clamping piece which can move to a clamping state or a loosening state along the radial direction of the turntable;

the transmission assembly comprises a transmission disc which is coaxially connected to the turntable and can rotate relative to the turntable, and the movable clamping piece is in transmission connection with the transmission disc;

the blocking component is fixed on the transmission disc;

the pressure detection structure is used for monitoring the vacuum value of the gas circuit structure;

wherein the drive disk rotates clockwise in response to the movable clamp switching from the unclamped state to the clamped state and causes the closure assembly to close the release port; the drive disk rotates counterclockwise in response to the movable clamp member switching from the clamped state to the undamped state and moves the closure assembly away from the release port.

Further, the spindle assembly includes:

the sleeve seat is provided with a mounting hole which is coaxial with the turntable in a penetrating way, and the top surface and the bottom surface of the sleeve seat are inwards sunken to form annular mounting grooves;

the number of the first bearings is two, and the first bearings are respectively arranged in different mounting grooves;

the rotating shaft penetrates through the first bearing and is coaxial with the mounting hole;

the rotary table is characterized in that a first suction cavity is formed between the rotary table and the mounting hole, a suction channel is formed inside the rotary table, a second suction cavity communicated with the suction channel is formed between the rotary table and the rotary table, a suction port communicated with the first suction cavity and the outside is formed in the sleeve seat, and the release port is communicated with the second suction cavity.

Further, the rotating shaft assembly comprises sealing rings sleeved outside the rotating shaft, the number of the sealing rings is two, and the two sides of the first suction cavity in the axis direction of the rotating disc are respectively sealed.

Further, the clamping assembly comprises at least one fixed clamping piece, and each movable clamping piece is arranged opposite to one fixed clamping piece.

Further, the transmission assembly includes:

the transmission piece is hinged between the movable clamping piece and the transmission disc;

the mounting shaft is coaxially fixed on the rotary table, and the transmission disc is sleeved outside the mounting shaft;

wherein a second bearing is received between the mounting shaft and the drive disk.

Further, the transmission member is arranged along a tangential direction of the transmission disc.

Further, the occlusion assembly comprises:

the mounting block is fixedly connected with the transmission disc;

the blocking rod is fixedly connected with the mounting block, and the lower end of the blocking rod is in fit contact with the top surface of the turntable;

wherein the mounting block is adapted to adjust position along a circumference of the drive disk.

Further, the installation block is fixed on the upper end face of the transmission disc, and the plugging rod penetrates through the transmission disc along the axis direction of the rotary disc and is in threaded connection with the installation block.

Further, the transmission disc is in the axis direction of carousel link up and has seted up first connecting hole and first regulation waist hole, the installation piece is in the axis direction of carousel link up and has seted up second connecting hole and second regulation waist hole, first connecting hole with the waist hole is corresponding to the second regulation, first connecting hole with be connected with threaded fastener between the waist hole is adjusted to the second, first regulation waist hole with the second connecting hole is corresponding, the shutoff pole wears to locate in the first regulation waist hole, and with second connecting hole threaded connection.

Further, the plugging rod comprises:

the rod body is in threaded connection with the mounting block;

the plugging part is detachably connected with the lower end of the rod body;

the bottom surface of the plugging part is a smooth surface and is suitable for plugging or moving away from the release opening.

Compared with the prior art, the utility model has the following beneficial effects: according to the utility model, the rotary table, the transmission assembly, the plugging assembly and the pressure detection structure are arranged, the air channel structure is formed in the rotary table, the top surface of the rotary table is provided with the release port communicated with the air channel structure, when the clamping assembly is switched from the unclamping state to the clamping state, the transmission disc can be driven to rotate clockwise, the plugging assembly can plug the release port, when the clamping assembly is switched from the clamping state to the unclamping state, the transmission disc can be driven to rotate anticlockwise, the plugging assembly can be moved away from the release port, the opening and closing of the release port can influence the vacuum value of the air channel structure, and the pressure detection structure can monitor the change of the vacuum value to accurately judge the moving state of the movable clamping piece.

Drawings

FIG. 1 is a schematic view of a wafer carrier of the present utility model.

Fig. 2 is a schematic cross-sectional view of fig. 1.

Fig. 3 is a schematic cross-sectional view of the turntable assembly and turntable of the present utility model.

Fig. 4 is a schematic cross-sectional view of the shaft, turntable, drive assembly and closure assembly of the present utility model.

Fig. 5 is a schematic view of an exploded construction of the drive disk and closure assembly of the present utility model.

Reference numerals illustrate:

100. a rotary table; 110. a turntable; 111. a release port; 120. a spindle assembly; 121. a sleeve seat; 1211. a mounting hole; 1212. a mounting groove; 1213. a suction port; 122. a first bearing; 123. a rotating shaft; 1231. a suction channel; 124. a first pumping chamber; 125. a second pumping chamber; 126. a seal ring; 127. a rotating electric machine; 128. a coupling; 200. a clamping assembly; 210. a movable clamping member; 220. fixing the clamping piece; 300. a transmission assembly; 310. a drive plate; 311. a first connection hole; 312. a first adjustment waist hole; 320. a mounting shaft; 330. a second bearing; 340. a transmission member; 400. a plugging assembly; 410. a mounting block; 411. a second connection hole; 412. a second adjustment waist hole; 420. a plugging rod; 421. a rod body; 422. a blocking part; 430. a threaded fastener; 440. and (5) locking the nut.

Detailed Description

In order to make the above objects, features and advantages of the present application more comprehensible, embodiments accompanied with figures are described in detail below. It is to be understood that the specific embodiments described herein are for purposes of illustration only and are not limiting. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present application are shown in the drawings. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.

The terms "comprising" and "having" and any variations thereof herein are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those listed steps or elements but may include other steps or elements not listed or inherent to such process, method, article, or apparatus.

Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the present application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.

Referring to fig. 1 and 2, a wafer carrying apparatus according to a preferred embodiment of the present utility model includes a turntable 100, including a turntable 110 and a spindle assembly 120 in driving connection with the turntable 110, wherein an air path structure is formed in the turntable 100, and a release opening 111 is formed on a top surface of the turntable 110 and is communicated with the air path structure; a clamping assembly 200 disposed on the turntable 110 and including at least one movable clamping member 210 movable to a clamped state or an undamped state along a radial direction of the turntable 110; the transmission assembly 300 comprises a transmission disc 310 which is coaxially connected to the turntable 110 and can rotate relative to the turntable 110, and the movable clamping piece 210 is in transmission connection with the transmission disc 310; a blocking assembly 400 secured to the drive plate 310; the pressure detection structure is used for monitoring the vacuum value of the gas circuit structure; wherein the driving disk 310 rotates clockwise in response to the movable clamp 210 switching from the unclamped state to the clamped state, and causes the blocking assembly 400 to block the release port 111; the drive plate 310 rotates counterclockwise in response to the movable clamp 210 switching from the clamped to the undamped condition and moves the closure assembly 400 away from the release port 111.

According to the utility model, by arranging the rotary table 100, the transmission assembly 300, the blocking assembly 400 and the pressure detection structure, an air channel structure is formed in the rotary table 100, the top surface of the rotary table 110 is provided with the release opening 111 communicated with the air channel structure, when the clamping assembly 200 is switched from the unclamping state to the clamping state, the transmission disc 310 can be driven to rotate clockwise, the blocking assembly 400 can block the release opening 111, when the clamping assembly 200 is switched from the clamping state to the unclamping state, the transmission disc 310 can be driven to rotate anticlockwise, the blocking assembly 400 is moved away from the release opening 111, the opening and closing of the release opening 111 can influence the vacuum value of the air channel structure, and the pressure detection structure can monitor the change of the vacuum value to accurately judge the moving state of the movable clamping member 210.

Further, the wafer carrying device includes a vacuum generating structure (not shown) in butt joint with the air path structure, the vacuum generating structure is suitable for applying a preset suction force to the air path structure so that the negative pressure in the air path structure of the plugging release port 111 is at a preset value, when the release port 111 is opened, the negative pressure in the air path structure will change, so that the pressure detecting structure detects the fluctuation thereof, and the pressure detecting structure can be specifically an air pressure sensor.

Further, referring to fig. 2 to 4, the rotating shaft assembly 120 includes a socket 121, a first bearing 122 and a rotating shaft 123, the socket 121 is perforated with a mounting hole 1211 coaxial with the turntable 110, the top and bottom surfaces of the socket 121 are each inwardly recessed with an annular mounting groove 1212, the number of the first bearings 122 is two and are respectively disposed in different mounting grooves 1212, the rotating shaft 123 is perforated in the first bearing 122 and is coaxial with the mounting hole 1211, the outer diameter of the rotating shaft 123 is smaller than the inner diameter of the mounting hole 1211, a first suction cavity 124 is formed between the rotating shaft 123 and the mounting hole 1211, a suction channel 1231 is formed inside the rotating shaft 123, a second suction cavity 125 communicating with the suction channel 1231 is formed between the turntable 110 and the rotating shaft 123, the socket 121 is perforated with a suction port 1213 communicating with the first suction cavity 124 and the outside, the vacuum generating structure is connected with the suction port 1213, and the release port 111 is communicating with the second suction cavity 125.

Preferably, the rotating shaft assembly 120 includes two sealing rings 126 sleeved outside the rotating shaft 123, and the two sealing rings 126 respectively seal two sides of the first suction cavity 124 in the axial direction of the turntable 110. The seal ring 126 is tightly fitted with the rotation shaft 123, and one end of the seal ring 126 in the axial direction abuts against the first bearing 122, and the other end abuts against the bottom of the installation groove 1212.

In addition, the rotating shaft assembly 120 further includes a rotating motor 127, and the rotating motor 127 is connected to the lower end of the rotating shaft 123 through a coupling 128.

Further, returning to fig. 1, a sliding rail structure is disposed between the movable clamping member 210 and the turntable 110, and the sliding rail structure is disposed along the radial direction of the turntable 110. The clamping assembly 200 includes a driving structure (not shown) in driving connection with the movable clamping member 210, where the driving structure is suitable for driving the movable clamping member 210 to switch between a clamping state and a releasing state, the driving structure may be a linear cylinder, an electric cylinder, etc., the number of the driving structures may be multiple, and the driving structures are in one-to-one correspondence with the movable clamping members 210, or the number of the driving structures is one, and a synchronous transmission structure is disposed between the driving structure and the movable clamping members 210, and the synchronous transmission structure drives the movable clamping members 210 to move synchronously. The clamping assembly 200 includes at least one fixed clamp 220, each movable clamp 210 being disposed opposite a fixed clamp 220, the movable clamp 210 and the fixed clamp 220 cooperatively carrying and clamping a wafer. In the present embodiment, the number of the movable clips 210 and the fixed clips 220 is plural, and are alternately arranged along the circumferential direction of the turntable 110.

Further, referring to fig. 1, 4 and 5, the transmission assembly 300 includes a mounting shaft 320, a second bearing 330 and a transmission member 340, the mounting shaft 320 is coaxially fixed on the turntable 110, the transmission disc 310 is sleeved outside the mounting shaft 320 and is located above the turntable 110, the second bearing 330 is received between the mounting shaft 320 and the transmission disc 310, the transmission member 340 is hinged between the movable clamping members 210 and the transmission disc 310, and the transmission member 340 has a plurality of transmission members and corresponds to the movable clamping members 210 one by one. Preferably, the driving member 340 is arranged along a tangential direction of the driving disk 310 so that the movable clamp 210 better pushes the driving disk 310 to rotate.

Further, the plugging assembly 400 comprises a mounting block 410 and a plugging rod 420, wherein the mounting block 410 is fixedly connected with the transmission disc 310, the plugging rod 420 is fixedly connected with the mounting block 410, and the lower end of the plugging rod 420 is in fit contact with the top surface of the turntable 110. The lower end of the blocking rod 420 is blocked at the release port 111 when the movable clamp 210 is in the clamped state, and the lower end of the blocking rod 420 is moved away from the release port 111 when the movable clamp 210 is in the unclamped state.

In this embodiment, for easy installation, the mounting block 410 is fixed at the upper end of the driving disc 310, the blocking rod 420 is inserted into the driving disc 310 along the axial direction of the turntable 110, and two ends of the blocking rod 420 extend out of the upper end and the lower end of the driving disc 310, respectively. The blocking rod 420 is in threaded connection with the mounting block 410, so that the position of the blocking rod 420 in the axial direction of the turntable 110 can be conveniently adjusted, and the lower end of the blocking rod 420 is ensured to be reliably attached to the top surface of the turntable 110. Preferably, the blocking rod 420 is externally screw-coupled with a locking nut 440, and the locking nut 440 is abutted against the mounting block 410 to lock the blocking rod 420.

Preferably, the mounting block 410 is adapted to adjust the position along the circumference of the driving disk 310, thereby adjusting the position of the plugging rod 420, so as to ensure that the plugging rod is accurately plugged or moved away from the release opening 111 under the driving of the movable clamping member 210. Specifically, the driving disc 310 is provided with a first connecting hole 311 and a first adjusting waist hole 312 along the axial direction of the turntable 110, the mounting block 410 is provided with a second connecting hole 411 and a second adjusting waist hole 412 along the axial direction of the turntable 110, the first connecting hole 311 and the second adjusting waist hole 412 correspond to each other, a threaded fastener 430 is connected between the first connecting hole 311 and the second adjusting waist hole 412 to realize the relative fixation of the mounting block 410 and the driving disc 310, the first adjusting waist hole 312 and the second connecting hole 411 correspond to each other, and the blocking rod 420 is provided in the first adjusting waist hole 312 in a penetrating manner and is in threaded connection with the second connecting hole 411. The mounting block 410 may be position-adjusted along the length of the second adjustment waist hole 412, and the first adjustment waist hole 312 may avoid the blocking rod 420 when the mounting block 410 is position-adjusted.

Further, the blocking rod 420 includes a rod 421 and a blocking portion 422, the rod 421 is in threaded connection with the mounting block 410, the blocking portion 422 is detachably connected with the lower end of the rod 421, the bottom surface of the blocking portion 422 is a smooth surface, and is suitable for blocking or moving away from the release opening 111. The plugging portion 422 is preferably made of a non-metallic material with a low hardness so as to prevent the plugging portion 422 from scratching the turntable 110 during movement.

The working process of the utility model is as follows: the driving structure drives the movable clamping piece 210 to move to a loosening state, in the process, the movable clamping piece 210 moves towards the edge of the turntable 110, the transmission piece 340 pulls the transmission disc 310 to rotate anticlockwise under the action of the movable clamping piece 210, the blocking assembly 400 rotates synchronously with the transmission disc 310 and moves away from the release opening 111, so that the vacuum value in the air path structure changes, the movable clamping piece 210 is judged to be in the loosening state, and the wafer is reliably placed on the movable clamping piece 210; then, the driving structure drives the movable clamping member 210 to move to the clamping state, in the process, the movable clamping member 210 moves towards the center of the turntable 110, the driving member 340 pushes the driving disc 310 to rotate clockwise under the action of the movable clamping member 210, the blocking assembly 400 rotates synchronously with the driving disc 310 and moves to the release opening 111 again, at this time, the vacuum value in the air flow structure is gradually restored to a preset value, and then the movable clamping member 210 can be judged to be in the clamping state.

The foregoing description is only of embodiments of the present application, and is not intended to limit the scope of the patent application, and all equivalent structures or equivalent processes using the descriptions and the drawings of the present application or direct or indirect application in other related technical fields are included in the scope of the patent protection of the present application.

Claims

1. A wafer carrier, comprising:

the rotary table (100) comprises a rotary table (110) and a rotating shaft assembly (120) in transmission connection with the rotary table (110), an air passage structure is formed in the rotary table (100), and a release opening (111) communicated with the air passage structure is formed in the top surface of the rotary table (110);

a clamping assembly (200) arranged on the turntable (110) and comprising at least one movable clamping member (210) which can move to a clamping state or a loosening state along the radial direction of the turntable (110);

the transmission assembly (300) comprises a transmission disc (310) which is coaxially connected to the rotary disc (110) and can rotate relative to the rotary disc (110), and the movable clamping piece (210) is in transmission connection with the transmission disc (310);

the plugging assembly (400) is fixed on the transmission disc (310);

wherein the drive disk (310) rotates clockwise in response to the movable clamp (210) switching from the undamped state to the clamped state and causes the closure assembly (400) to close the relief port (111); the drive disk (310) rotates counterclockwise in response to the movable clamp (210) switching from the clamped state to the undamped state and moves the closure assembly (400) away from the release port (111).

2. The wafer carrier of claim 1, wherein the spindle assembly (120) comprises:

the sleeve seat (121) is provided with a mounting hole (1211) coaxial with the turntable (110) in a penetrating way, and the top surface and the bottom surface of the sleeve seat (121) are inwards sunken to form an annular mounting groove (1212);

-first bearings (122) in two in number and arranged in different ones of said mounting slots (1212), respectively;

a rotating shaft (123) penetrating through the first bearing (122) and coaxial with the mounting hole (1211);

wherein, be formed with first suction chamber (124) between pivot (123) and mounting hole (1211), pivot (123) are inside to be formed with suction channel (1231), carousel (110) with be formed with between pivot (123) with second suction chamber (125) of suction channel (1231) intercommunication, cover seat (121) seted up with suction mouth (1213) of first suction chamber (124) and external intercommunication, release mouth (111) with second suction chamber (125) are linked together.

3. The wafer carrier of claim 2, wherein the spindle assembly (120) includes two sealing rings (126) sleeved outside the spindle (123), and the two sealing rings (126) respectively seal two sides of the first suction chamber (124) in the axial direction of the turntable (110).

4. The wafer carrier of claim 1, wherein said clamping assembly (200) comprises at least one fixed clamp (220), each of said movable clamps (210) being disposed opposite one of said fixed clamps (220).

5. The wafer carrier of claim 1, wherein the transmission assembly (300) comprises:

a transmission member (340) hinged between the movable clamp member (210) and the transmission disc (310);

the mounting shaft (320) is coaxially fixed on the rotary table (110), and the transmission disc (310) is sleeved outside the mounting shaft (320);

wherein a second bearing (330) is received between the mounting shaft (320) and the drive disk (310).

6. The wafer carrier of claim 5, wherein the drive (340) is arranged tangentially to the drive disk (310).

7. The wafer carrier of claim 1, wherein the block-out assembly (400) comprises:

the mounting block (410) is fixedly connected with the transmission disc (310);

the plugging rod (420) is fixedly connected with the mounting block (410), and the lower end of the plugging rod (420) is in fit contact with the top surface of the turntable (110);

wherein the mounting block (410) is adapted to adjust position along a circumference of the drive disk (310).

8. The wafer carrier of claim 7, wherein the mounting block (410) is fixed on an upper end surface of the driving disk (310), and the blocking rod (420) is inserted into the driving disk (310) along an axial direction of the turntable (110) and is in threaded connection with the mounting block (410).

9. The wafer carrier according to claim 8, wherein the transmission disc (310) is provided with a first connecting hole (311) and a first adjusting waist hole (312) in a penetrating manner along an axial direction of the turntable (110), the mounting block (410) is provided with a second connecting hole (411) and a second adjusting waist hole (412) in a penetrating manner along an axial direction of the turntable (110), the first connecting hole (311) and the second adjusting waist hole (412) are corresponding, a threaded fastener (430) is connected between the first connecting hole (311) and the second adjusting waist hole (412), the first adjusting waist hole (312) and the second connecting hole (411) are corresponding, and the blocking rod (420) is arranged in the first adjusting waist hole (312) in a penetrating manner and is in threaded connection with the second connecting hole (411).

10. The wafer carrier of claim 8, wherein the blocking rod (420) comprises:

the rod body (421) is in threaded connection with the mounting block (410);

the plugging part (422) is detachably connected with the lower end of the rod body (421);

wherein the bottom surface of the plugging part (422) is a smooth surface and is suitable for plugging or moving away from the release opening (111).