CN215545015U

CN215545015U - Rotary sealing structure and pneumatic chuck mechanism

Info

Publication number: CN215545015U
Application number: CN202122255209.0U
Authority: CN
Inventors: 解福杭
Original assignee: Makino China Co Ltd
Current assignee: Makino China Co Ltd
Priority date: 2021-09-17
Filing date: 2021-09-17
Publication date: 2022-01-18
Anticipated expiration: 2031-09-17

Abstract

The utility model relates to the technical field of machining equipment, and discloses a rotary sealing structure which comprises a transmission assembly and a sealing assembly, wherein the transmission assembly comprises a main shaft, a bearing and a bearing seat, the bearing and the bearing seat are sleeved on the main shaft, the main shaft can be connected to a pneumatic chuck, a first passage and a second passage are arranged in the main shaft, one end of the first passage and one end of the second passage can be respectively communicated with the pneumatic chuck, and the other end of the first passage and the second passage can be respectively communicated with a first annular groove and a second annular groove which are arranged on the bearing seat. And seal assembly includes a plurality of check rings, a plurality of check rings one to one set up on the bearing frame in a plurality of first seal grooves, and first seal groove and first annular, second annular interval set up, can realize the main shaft and bearing frame, first route and the sealed of second route, and this rotary seal structure is simple, and the practicality is strong. The utility model also discloses a pneumatic chuck mechanism, which comprises the rotary sealing structure and the pneumatic chuck, and has good sealing property, so that the clamping degree of the pneumatic chuck can be ensured, and the machining precision of a machine tool can be ensured.

Description

Rotary sealing structure and pneumatic chuck mechanism

Technical Field

The utility model relates to the technical field of machining equipment, in particular to a rotary sealing structure and a pneumatic chuck mechanism.

Background

The pneumatic chuck is a very important part on a machine tool, and the compressed air drives a piston in a cylinder to move, so that the clamping and loosening actions of the pneumatic chuck are realized to clamp a workpiece. The air flue needs to be opened on the air chuck for provide air source power, the air chuck is connected in the lathe main shaft, and the shell assembly through bearing assembly and air chuck, and there is relative motion between lathe main shaft and the bearing housing, has the clearance, and the lathe is at the time of the initial preparation work, can carry out the gas detection and loosen with the chuck and press from both sides tight these two actions, and outside air supply admits air toward the main shaft through the air cock at this time. If the sealing is not good, suspended impurities in the air can enter the main shaft, so that the main shaft, a bearing or other parts are abraded, and the service life and the processing performance of the machine tool are influenced. At present, a commonly used main shaft sealing structure is mainly a labyrinth sealing device, the structure is complex, and the installation steps are complex.

Therefore, a rotary sealing structure and a pneumatic chuck mechanism are needed to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a rotary sealing structure which has multiple sealing effects, can solve the sealing problem in the rotary air intake process of a main shaft, and has the advantages of simple structure and strong practicability.

As the conception, the technical scheme adopted by the utility model is as follows:

a rotary seal structure comprising:

the transmission assembly comprises a main shaft, a bearing and a bearing seat, wherein the bearing and the bearing seat are sleeved on the main shaft, the main shaft can be connected to a pneumatic chuck, a first passage and a second passage are arranged in the main shaft, one end of the first passage and one end of the second passage can be respectively communicated with the pneumatic chuck, the first passage is configured to enable the pneumatic chuck to clamp a workpiece, and the second passage is configured to enable the workpiece to detect whether the workpiece is clamped on the pneumatic chuck;

sealing assembly, including a plurality of check rings, be equipped with first annular, second annular and a plurality of first seal groove on the bearing frame, it is a plurality of first seal groove interval sets up, so that first annular with be equipped with between the second annular first seal groove, first annular is kept away from one side of second annular is equipped with first seal groove, the second annular is kept away from one side of first annular is equipped with first seal groove, one the check ring sets up in one in the first seal groove, just the check ring support tightly in the main shaft.

Optionally, the transmission assembly still includes first ceramic wafer and end cover, the main shaft passes through first ceramic wafer with the end cover connect in air chuck, first ceramic wafer with all be equipped with the through-hole on the end cover, the through-hole is configured to the intercommunication first passageway with air chuck, and the intercommunication the second passageway with air chuck.

Optionally, the sealing assembly further comprises a plurality of O-rings, the transmission assembly is further provided with a plurality of second sealing grooves, and one O-ring is disposed in one second sealing groove;

the second sealing groove comprises two main shaft second sealing grooves arranged on the main shaft, one main shaft second sealing groove is annularly arranged outside the first passage, the other main shaft second sealing groove is annularly arranged outside the second passage, and the end cover is provided with two corresponding end cover second sealing grooves arranged on the main shaft second sealing grooves.

Optionally, two first seal grooves are arranged between the first ring groove and the second ring groove.

Optionally, one side of the first ring groove, which is far away from the second ring groove, is provided with the first seal groove;

one side of the second annular groove, which is far away from the first annular groove, is provided with the first sealing groove.

The utility model further aims to provide the pneumatic chuck mechanism which has good spindle sealing performance, can ensure the machining precision of a machine tool, and has simple structure and wide application range.

a pneumatic chuck mechanism comprising a pneumatic chuck connected to the spindle, a pneumatic assembly configured to be able to pass gas to the first passage to enable the pneumatic chuck to clamp a workpiece, and a rotary seal structure as claimed in any one of the preceding claims, the pneumatic assembly configured to be able to pass gas to the second passage to detect whether the workpiece is clamped on the pneumatic chuck.

Optionally, the pneumatic assembly includes a first air inlet joint and a second air inlet joint, the first air inlet joint is communicated with the first passage, the second air inlet joint is communicated with the second passage, the pneumatic chuck is provided with a clamping portion and a vent hole, the clamping portion can be driven to clamp the workpiece, and the vent hole can be communicated with the second air inlet joint.

Optionally, the air chuck mechanism pressure sensor is configured to detect a pressure value within the second passageway.

Optionally, the air chuck mechanism further comprises a base plate and a second ceramic plate, wherein the base plate is sleeved on the air chuck and connected with the bearing seat through the second ceramic plate.

Optionally, the air chuck mechanism further comprises a dial sleeved on the air chuck, the dial being configured to display a rotation angle of the air chuck.

The utility model has the beneficial effects that:

the rotary sealing structure comprises a transmission assembly and a sealing assembly, wherein the transmission assembly comprises a main shaft, a bearing and a bearing seat, the bearing and the bearing seat are sleeved on the main shaft, the main shaft is used for driving a workpiece to rotate on a machine tool, and the sealing assembly is used for sealing a gap between the main shaft and the bearing seat. Specifically, a first passage and a second passage are arranged in the main shaft, and a first annular groove communicated with one end of the first passage and a second annular groove communicated with one end of the second passage are arranged in the bearing seat to ensure that the first passage and the second passage are communicated. Under the arrangement, the sealing assembly not only ensures the sealing between the main shaft and the bearing seat, but also ensures the sealing of the first passage and the second passage, so that the sealing assembly comprises a plurality of grating rings which are sleeved on the main shaft and tightly abut against the main shaft, and in order to prevent the grating rings from falling and loosening, the bearing seat is provided with a plurality of first sealing grooves, and each grating ring is arranged in each first sealing groove. Wherein, a plurality of first seal groove intervals set up to be equipped with first seal groove between messenger's first annular and the second annular, one side that the second annular was kept away from to first annular is equipped with the second seal groove, and one side that first annular was kept away from to the second annular is equipped with first seal groove, thereby solves the sealed problem of the rotatory in-process of admitting air of main shaft, simple structure, and the practicality is strong.

The pneumatic chuck mechanism comprises the rotary sealing structure, the pneumatic chuck and the pneumatic assembly, wherein the pneumatic chuck is connected with the spindle, the pneumatic assembly is used for introducing gas into the first passage so as to enable a workpiece to be clamped by the pneumatic chuck, and the pneumatic assembly is used for introducing gas into the second passage so as to detect whether the workpiece is clamped on the pneumatic chuck. The pneumatic chuck mechanism with the rotary sealing structure has the advantages that when the pneumatic assembly enters air into the first passage in the main shaft, the pneumatic chuck mechanism has a better sealing effect, the air in the first passage can be prevented from leaking to the second passage, and meanwhile, suspended impurities in the air are prevented from entering the main shaft.

Drawings

FIG. 1 is a schematic structural diagram of an air chuck mechanism provided in an embodiment of the present invention;

FIG. 2 is an enlarged view at A in FIG. 1;

FIG. 3 is an enlarged view at B in FIG. 1;

fig. 4 is an enlarged view at C in fig. 1.

In the figure:

1. a main shaft; 101. a first path; 102. a second path; 103. a second seal groove of the main shaft; 2. a bearing; 3. a bearing seat; 301. a first ring groove; 302. a second ring groove; 303. a first seal groove; 4. a first ceramic sheet; 5. an end cap; 501. an end cover second seal groove; 6. a Gray circle; 7. an O-shaped ring; 8. a pneumatic chuck; 9. a first air intake joint; 10. a second air inlet joint; 11. a chassis; 12. a second ceramic sheet; 13. a dial.

Detailed Description

In order to make the technical problems solved, the technical solutions adopted and the technical effects achieved by the present invention clearer, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be further noted that, for the convenience of description, only some but not all of the elements associated with the present invention are shown in the drawings.

In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used based on the orientations and positional relationships shown in the drawings only for convenience of description and simplification of operation, and do not indicate or imply that the referred device or element must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.

The technical scheme of the utility model is further explained by the specific implementation mode in combination with the attached drawings.

Rotary seals are used in a wide variety of applications in the machining field to prevent gas leakage when a pneumatic assembly supplies gas to a rotating rotary assembly. For example, there is a relative movement between the spindle 1 and the bearing seat 3 of the machine tool, i.e. there is a gap, so when an external air source enters the spindle 1, if the sealing is not good, the suspended impurities in the air enter the spindle 1, which will cause the spindle 1, the bearing 2 or other parts to be worn and affect the service life and the machining performance of the machine tool, and therefore a rotary sealing structure is needed to avoid this problem.

As shown in fig. 1, the present implementation provides a rotary seal structure that includes a drive assembly and a seal assembly. In particular, the transmission assembly comprises a main shaft 1, a bearing 2 and a bearing seat 3, and it is understood that one end of the main shaft 1 can be connected with other parts of the machine tool in a rotating way through the bearing 2 and the bearing seat 3, such as a motor, so as to provide a rotating driving force for the main shaft 1. While the other end of the spindle 1 can be connected to a pneumatic chuck 8. as known, the pneumatic chuck 8 is used to clamp a workpiece in order to carry out further processing of the workpiece.

Of course, in order to clamp the workpiece by the air chuck 8, a passage for supplying air to the air chuck 8 needs to be further provided in the spindle 1, and optionally, in this embodiment, a first passage 101 and a second passage 102 are provided in the spindle 1, and the first passage 101 and the second passage 102 are respectively communicated with the air chuck 8. When an external air source is connected to the air chuck 8 through the first passage 101, the clamping portion of the air chuck 8 can be caused to perform a clamping or unclamping action to clamp or unclamp the workpiece. When the workpiece is clamped and an external gas source supplies gas to the second passage 102, if the workpiece is clamped in the air chuck 8, the gas can be blocked in the second passage 102 by the workpiece, and if the workpiece is not clamped in the air chuck 8, the gas can pass through a gap between the air chuck 8 and the workpiece and then leaks to the external environment. Alternatively, the air chuck 8 may be provided with a vent hole communicating with the external environment, which vent hole will be blocked from communicating with the second through hole when the workpiece is clamped in the air chuck 8, and will remain in communication with the second through hole when the workpiece is not clamped in the air chuck 8. In addition, the specific operation principle of the air chuck 8 is well known in the art, and will not be described in detail herein.

With this arrangement, in order to ensure the sealing of the main shaft 1 and the bearing housing 3, as well as the communication of the first passage 101 and the second passage 102 with the external air source, and to ensure the separation of the first passage 101 and the second passage 102, a plurality of grommets 6 are selected for sealing in the present embodiment. Specifically, as shown in fig. 1 and fig. 2, since the first passage 101 needs to be communicated with an external air source, both ends of the first passage 101 must be arranged to penetrate through the main shaft 1, and in order to ensure the air intake efficiency of the first passage 101, the bearing housing 3 is provided with the first annular groove 301 to increase the gap between the main shaft 1 and the bearing housing 3 at the first passage 101, and the first annular groove 301 is annularly arranged in the bearing housing 3, so that the first passage 101 can be ensured to be always communicated with the first annular groove 301 in the rotation process of the main shaft 1. As shown in fig. 1 and 3, the second passage 102 is similar to the first passage 101, and is also provided with two ends penetrating through the main shaft 1, and in order to ensure air intake of the second passage 102, the bearing seat 3 is provided with a second annular groove 302 to increase a gap between the main shaft 1 and the bearing seat 3 at the second passage 102, and the second passage 102 and the second annular groove 302 are always communicated during rotation of the main shaft 1. Of course, still be provided with a plurality of first seal grooves 303 on the bearing frame 3, the quantity of first seal groove 303 is unanimous with the quantity of the ring 6 that makes a lot of, sets up a ring 6 in the first seal groove 303, and knowingly, first seal groove 303 also is the loop configuration, and for guaranteeing the sealed effect of ring 6 that makes a lot of, a plurality of first seal grooves 303 interval sets up.

Optionally, in this embodiment, the interval of the first sealing groove 303 is set such that the first sealing groove 303 is disposed at both sides of the first ring groove 301 and the second ring groove 302 at intervals. As shown in fig. 1 to 3, a first sealing groove 303 is disposed between the first ring groove 301 and the second ring groove 302, the first sealing groove 303 is disposed on a side of the first ring groove 301 away from the second ring groove 302, and the first sealing groove 303 is disposed on a side of the second ring groove 302 away from the first ring groove 301. Known, the gurley ring 6 is formed by the combination of a square sliding ring of reinforcing PTFE and O type rubber circle, uses

gurley ring

6 and 1 butt of main shaft, not only takes place to blow the obscission hardly, can realize fine sealed effect, still can reduce the start-up simultaneously and resist. As shown in fig. 1, the provision of the grating rings 6 in the two first seal grooves 303 on both sides of the first passage 101 may serve to seal the first passage 101 and prevent gas from flowing through the upper bearing 2, while the provision of the grating rings 6 in the two first seal grooves 303 on both sides of the second passage 102 may serve to seal the second passage 102, and the two grating rings 6 between the first passage 101 and the second passage 102 may separate the first passage 101 from the second passage 102 to serve as a double seal.

As shown in fig. 1, in the present embodiment, two first seal grooves 303 are disposed between the first ring groove 301 and the second ring groove 302. However, in other embodiments, one or more first seal grooves 303 may be selectively provided according to the sealing requirements and the start load of the main shaft 1.

Similarly, in the present embodiment, a first sealing groove 303 is disposed on a side of the first ring groove 301 away from the second ring groove 302. However, in other embodiments, one or more first seal grooves 303 may be selectively provided according to the sealing requirements and the start load of the main shaft 1. The side of the second ring groove 302 away from the first ring groove 301 is also provided with one first sealing groove 303 in this embodiment, and in other embodiments, more than one first sealing groove 303 may be still provided according to the sealing requirement and the start-up resistance of the spindle 1.

In addition, as can be seen from fig. 1, the transmission assembly further includes a first ceramic plate 4 and an end cover 5, and in the embodiment, the spindle 1 is connected to the air chuck 8 through the first ceramic plate 4 and the end cover 5. The end cover 5 and the air chuck 8 are fixedly connected through a screw penetrating through the middle of the end cover and the air chuck, the first ceramic piece 4 is an insulator, the current from the end cover 5 to the spindle 1 can be effectively isolated, and the situation that when the air chuck 8 clamps an electrode, part of the current passes through the spindle 1 to guide the spindle 1 to drive the spindle 1 to rotate is avoided, so that the safety of equipment is guaranteed. Of course, in order to ensure that the first passage 101 and the second passage 102 can be communicated with the air chuck 8, the first ceramic plate 4 and the end cover 5 should also be provided with through holes, and optionally, the first ceramic plate 4 and the end cover 5 are respectively provided with two through holes, namely, one through hole is communicated with the first passage 101, and the other through hole is communicated with the second passage 102.

In the case of insulating the end cover 5 from the main shaft 1 by the first ceramic sheet 4, although the end cover and the main shaft are fixed by a fastening member, the mechanical fixation is inevitably accompanied by a gap, which may cause leakage of gas when flowing from the first and

second passages

101 and 102 into the through-hole. In this embodiment, the sealing assembly further includes a plurality of O-rings 7 disposed at the first ceramic plate 4, and similar to the arrangement of the gurley ring 6, a plurality of second sealing grooves need to be disposed on the transmission assembly, and then one O-ring 7 is disposed in each second sealing groove.

Specifically, as shown in fig. 4, the second seal groove includes two spindle second seal grooves 103 disposed on the spindle 1, one spindle second seal groove 103 is disposed around the first passage 101, and the other spindle second seal groove 103 is disposed around the second passage 102. Alternatively, when the O-ring 7 is placed in the second spindle sealing groove 103, the gas may pass through the middle of the O-ring 7, and when the O-ring 7 is already placed in the second spindle sealing groove 103, the first ceramic plate 4 is connected with the spindle 1, and the O-ring 7 is sandwiched between the two and abuts against the two to achieve sealing. Two end cover second sealing grooves 51 are formed in the end cover 5 corresponding to the two main shaft second sealing grooves 103, an O-shaped ring 7 is arranged in one end cover second sealing groove 51, and when the end cover 5 is connected with the pneumatic chuck 8, the O-shaped ring 7 can be abutted to the two main shaft second sealing grooves to realize sealing.

To further illustrate the wide application of the rotary sealing structure in the machine tool, the present embodiment further provides an air chuck mechanism, which includes the rotary sealing structure and the air chuck 8, and in addition, based on the working principle of the air chuck 8, an air assembly is further provided to provide an external air source for the air chuck 8, when the air chuck 8 is connected to the spindle 1, the air assembly can introduce air into the first passage 101, and when the air enters the check valve of the air chuck 8, the workpiece can be clamped on the air chuck 8. However, after the workpiece is clamped to the air chuck 8, the first passage 101 is not vented, but the second passage 102 is vented by the air assemblies, and if the air entering the second passage 102 leaks to the external environment through the air chuck 8, it means that the workpiece is not completely clamped to the air chuck 8.

In the present embodiment, as shown in fig. 1, the pneumatic assembly includes a first air inlet joint 9 and a second air inlet joint 10, wherein the first air inlet joint 9 is communicated with a first passage 101, and the second air inlet joint 10 is communicated with a second passage 102. Alternatively, the first and

second intake joints

9 and 10 may be disposed on the same side, and the first and

second passages

101 and 102 may be disposed on both sides, respectively. After an external air source is injected into the pneumatic chuck 8 through the first air inlet joint 9, the clamping part on the pneumatic chuck 8 can be pushed to move so as to clamp a workpiece, the first air inlet joint 9 stops ventilating after clamping, and the air cylinder of the clamping part is in a pressure maintaining state at the moment so as to clamp the workpiece. Thereafter, the second passage 102 is vented through the second air inlet joint 10, and if the workpiece is in the clamped state, the gas in the second passage 102 cannot leak through the vent hole provided in the air chuck 8, that is, the workpiece will become an obstacle to the communication of the second passage 102 with the vent hole, but if the workpiece is loosened, the gas will overflow from the vent hole.

Further, the air chuck mechanism provided by the present embodiment further includes a pressure sensor for detecting the air pressure value in the second passage 102 in real time. Optionally, pressure sensor can signal connection in alarm, when the atmospheric pressure value that pressure sensor detected is less than the default, then can transmit signal to alarm to remind the staff to inspect the work piece and press from both sides tight the condition.

Optionally, the air chuck mechanism further includes a base plate 11 and a second ceramic plate 12, in this embodiment, the air chuck 8 is connected to the end cover 5 through a screw, and the base plate 11 is sleeved on the end cover 5 and the air chuck 8 to protect the two, when the air chuck mechanism 8 is applied to an electric discharge machine, an electric brush or the like is disposed in the base plate 11, and therefore, the base plate 11 is further connected to the bearing seat 3 through the second ceramic plate 12, and it is known that the second ceramic plate 12 is an insulating member.

Optionally, the air chuck mechanism further comprises a dial 13, the dial 13 is sleeved on the air chuck 8, and the dial 13 is used for recording the rotation angle of the air chuck 8.

The foregoing embodiments are merely illustrative of the principles and features of this invention, which is not limited to the above-described embodiments, but rather is susceptible to various changes and modifications without departing from the spirit and scope of the utility model, which changes and modifications are within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. A rotary seal structure, comprising:

the transmission assembly comprises a main shaft (1), a bearing (2) sleeved on the main shaft (1) and a bearing seat (3), wherein the main shaft (1) can be connected to a pneumatic chuck (8), a first passage (101) and a second passage (102) are arranged in the main shaft (1), one ends of the first passage (101) and the second passage (102) can be respectively communicated with the pneumatic chuck (8), the first passage (101) is configured to enable the pneumatic chuck (8) to clamp a workpiece, and the second passage (102) is configured to detect whether the workpiece is clamped on the pneumatic chuck (8);

seal assembly, including a plurality of checked rings (6), be equipped with first annular (301), second annular (302) and a plurality of first seal groove (303) on bearing frame (3), it is a plurality of first seal groove (303) interval sets up, so that first annular (301) with be equipped with between second annular (302) first seal groove (303), keep away from first annular (301) one side of second annular (302) is equipped with first seal groove (303), keep away from second annular (302) one side of first annular (301) is equipped with first seal groove (303), one checked ring (6) set up in one in first seal groove (303), just checked ring (6) support tightly in main shaft (1).

2. The rotary seal structure according to claim 1, wherein the transmission assembly further comprises a first ceramic plate (4) and an end cover (5), the main shaft (1) is connected to the air chuck (8) through the first ceramic plate (4) and the end cover (5), and each of the first ceramic plate (4) and the end cover (5) is provided with a through hole configured to communicate the first passage (101) and the air chuck (8) and communicate the second passage (102) and the air chuck (8).

3. The rotary seal structure of claim 2, wherein the seal assembly further comprises a plurality of O-rings (7), the drive assembly further comprises a plurality of second seal grooves, one O-ring (7) disposed in each second seal groove;

the second sealing groove comprises two second main shaft sealing grooves (103) arranged on the main shaft (1), one second main shaft sealing groove (103) is annularly arranged outside the first passage (101), the other second main shaft sealing groove (103) is annularly arranged outside the second passage (102), and the end cover (5) is provided with two second end cover sealing grooves (51) corresponding to the two second main shaft sealing grooves (103).

4. The rotary seal structure according to claim 1, characterized in that two first seal grooves (303) are provided between the first ring groove (301) and the second ring groove (302).

5. The rotary seal structure according to claim 1, characterized in that the side of the first ring groove (301) remote from the second ring groove (302) is provided with one of the first seal grooves (303);

one side of the second ring groove (302) far away from the first ring groove (301) is provided with the first sealing groove (303).

6. A pneumatic chuck mechanism, comprising a pneumatic chuck (8), a pneumatic assembly and a rotary seal structure according to any one of claims 1 to 5, wherein the pneumatic chuck (8) is connected to the spindle (1), the pneumatic assembly is configured to be able to feed gas to the first passage (101) to enable the pneumatic chuck (8) to clamp a workpiece, and the pneumatic assembly is configured to be able to feed gas to the second passage (102) to detect whether the workpiece is clamped on the pneumatic chuck (8).

7. The air chuck mechanism according to claim 6, characterized in that the pneumatic assembly comprises a first air inlet connector (9) and a second air inlet connector (10), the first air inlet connector (9) is communicated with the first passage (101), the second air inlet connector (10) is communicated with the second passage (102), the air chuck (8) is provided with a clamping part and a vent hole, the clamping part can be driven to clamp the workpiece, and the vent hole can be communicated with the second air inlet connector (10).

8. The air chuck mechanism according to claim 7, further comprising a pressure sensor configured to detect a pressure value within the second passageway (102).

9. The air chuck mechanism according to claim 6, further comprising a base plate (11) and a second ceramic plate (12), wherein the base plate (11) is sleeved on the air chuck (8) and is connected to the bearing seat (3) through the second ceramic plate (12).

10. The air chuck mechanism according to claim 6, further comprising a dial (13), wherein the dial (13) is sleeved on the air chuck (8), and wherein the dial (13) is configured to display a rotation angle of the air chuck (8).