CN220505609U - Bearing assembly for wafer box cleaning machine - Google Patents
Bearing assembly for wafer box cleaning machine Download PDFInfo
- Publication number
- CN220505609U CN220505609U CN202322200489.4U CN202322200489U CN220505609U CN 220505609 U CN220505609 U CN 220505609U CN 202322200489 U CN202322200489 U CN 202322200489U CN 220505609 U CN220505609 U CN 220505609U
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- China
- Prior art keywords
- bearing
- fixed cover
- material rack
- bearing assembly
- bearing sleeve
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- 238000004140 cleaning Methods 0.000 title claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 35
- 238000007789 sealing Methods 0.000 claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims abstract description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 238000005299 abrasion Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 230000002035 prolonged effect Effects 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000006872 improvement Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 238000010009 beating Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a bearing assembly for a wafer box cleaning machine, which comprises a fixing mechanism and a rotating and connecting material rack structure, wherein the fixing mechanism is a bearing seat, and the bearing seat comprises a cylinder and a connecting part; the rotating and connecting material rack mechanism comprises a bearing sleeve, a bearing and a fixed cover; shaft seals are also arranged between the upper end and the lower end of the bearing and the bearing sleeve; a sealing ring is also arranged between the fixed cover and the bearing sleeve; be equipped with first screw hole on the bearing housing, be equipped with the second screw hole on the fixed cover, be equipped with the third screw hole on the connecting portion, when dismantling bearing housing, fixed cover and connecting portion, through last the screw corresponding screw hole of screwing in, thereby can be with dismantling the part jack-up and accomplish the dismantlement. The bearing assembly can be conveniently and rapidly disassembled when the bearing assembly is disassembled, so that the maintenance time is saved to a great extent, and the utilization rate is improved. Meanwhile, the sealing effect of the bearing assembly is also improved, the bearing abrasion is reduced, the service life is prolonged, and the cleaning quality of the wafer box is improved.
Description
Technical Field
The utility model belongs to the technical field of silicon wafer production, and particularly relates to a bearing assembly for a wafer box cleaning machine.
Background
In the processing and manufacturing of semiconductor wafers, cassettes are often used to store and transport wafers in order to simplify the transport of the wafers and to reduce the risk of contamination. Because the critical dimension of semiconductor is small, the granularity requirement on the surface of silicon wafer is very strict, therefore, the wafer box also has to be clean and dust-free, the wafer box circulated in production is cleaned by a wafer box cleaning machine on time, the wafer box is placed on a material frame before cleaning, the material frame rotates around a central shaft during cleaning, meanwhile, a surrounding spray nozzle continuously sprays water to the box, and the material frame rotates at high speed to spin-dry the box after cleaning.
The work or material rest rotating electrical machines of wafer box cleaning machine is installed at the board top, and the work or material rest bottom is bearing assembly, and when the motor drove the work or material rest rotatory in actual cleaning process, bearing assembly is driven to follow rotatory, because the work or material rest is very heavy and the rotational speed is high, leads to the bearing assembly atress very big, leads to bearing assembly wearing and tearing easily. Meanwhile, the problem that water for cleaning the wafer box permeates into the bearing due to poor sealing of the existing bearing assembly can be solved, abrasion of the bearing assembly can be accelerated, shaking of the platform can occur when the bearing assembly is abraded to a certain extent, and the bearing assembly needs to be replaced in time. However, because the bearing component is tightly matched with the material rack, the disassembly and the assembly of the bearing component are very troublesome, and the production of the machine is influenced by long time consumption. Meanwhile, particles worn out by the bearing assembly can influence the cleanliness of the wafer box, so that quality anomalies such as particle overscaling, metal overscaling and the like of chips placed in the wafer box are caused.
Therefore, the bearing assembly is further improved, so that the bearing assembly is simpler and more convenient to disassemble and assemble, the abrasion is reduced, the service life is prolonged, and the bearing assembly has important technical values for subsequently improving the utilization rate of the cleaning machine, improving the quality of the wafer box and the like.
Disclosure of Invention
The utility model aims to solve the defects in the prior art and provides a bearing assembly for a wafer box cleaning machine.
The utility model aims at realizing the following technical scheme:
a bearing assembly for a wafer cassette cleaning machine comprises a fixing mechanism, a rotating and connecting material rack structure,
the fixing mechanism is a bearing seat, the bearing seat comprises a cylinder and a connecting part positioned at the bottom of the cylinder, and the connecting part is used for being connected with a wafer box cleaning machine table;
the rotating and connecting material rack mechanism comprises a bearing sleeve, a bearing positioned in the bearing sleeve and a fixed cover positioned at the top of the bearing sleeve and used for sealing and fixing the bearing; shaft seals are further arranged between the upper end and the lower end of the bearing and the bearing sleeve; a sealing ring is further arranged between the fixed cover and the bearing sleeve; the bearing sleeve is used for being connected with the material rack; the inner ring of the bearing is tightly matched with the cylinder, and when the material rack rotates, the bearing sleeve and the outer ring of the bearing are driven to rotate around the inner ring of the bearing;
the utility model discloses a wafer box cleaning machine, including material rack, fixed cover, bearing housing, the junction with the material rack is equipped with first screw hole, fixed cover is last with the junction of material rack is equipped with the second screw hole, on the connecting portion with the junction of wafer box cleaning machine board is equipped with the third screw hole, when dismantling the bearing housing fixed cover with when the connecting portion, through last the screw with the screw corresponding screw hole of screwing in, thereby can jack-up the dismantlement part and accomplish the dismantlement.
Preferably, the connecting part is a connecting flange, and a plurality of bearing seat mounting holes are formed in the connecting flange and are used for connecting the bearing seat with the wafer box cleaning machine.
Preferably, a plurality of cleaning and nitrogen nozzle mechanism mounting holes are formed in the top of the cylinder.
Preferably, the fixed cover is connected with the bearing sleeve through a fixed screw.
Preferably, the bearing sleeve is provided with a plurality of bearing sleeve mounting holes for connecting the bearing sleeve to the material rack.
Preferably, the sealing ring is made of rubber.
Preferably, the shaft seal is made of rubber.
This application is through the further improvement to bearing assembly for wafer box cleaning machine, avoided the low and unsafe mode of beating of availability factor when dismantling bearing assembly, can realize convenient and fast's dismantlement, to a great extent has saved maintenance time and has improved the utilization ratio. Meanwhile, the sealing effect of the bearing assembly is also improved, water is prevented from entering the bearing assembly, bearing abrasion is reduced, the service life is prolonged, and the cleaning quality of the wafer box is improved. Therefore, the bearing assembly provided by the application has good practical value and technical improvement significance in semiconductor processing and manufacturing.
Drawings
FIG. 1 is a schematic view of the overall structure of a bearing assembly provided herein;
FIG. 2 is a schematic cross-sectional structure of FIG. 1;
FIG. 3 is an exploded view of FIG. 1;
FIG. 4 is a schematic upper side structure of FIG. 1;
FIG. 5 is a schematic view of the bearing portion of FIG. 1;
fig. 6 is a schematic view of a portion of the bearing housing of fig. 1.
Wherein, 1-the bearing sleeve; 2-a first screw hole; 3-bearing sleeve mounting holes; 4-a fixed cover; 5-a second screw hole; 6-fixing screws; 7-bearing seats; 8-a third screw hole; 9-bearing seat mounting holes; 10-cleaning and nitrogen nozzle mechanism mounting holes; 11-shaft seal; 12-a bearing; 13-sealing rings.
Detailed Description
The utility model provides a bearing assembly for a wafer box cleaning machine, which is shown in fig. 1-6, and the whole bearing assembly is cylindrical and comprises a lower fixing mechanism and an upper rotating and connecting material frame structure, wherein the fixing mechanism is mainly used for fixing the whole bearing assembly on a wafer box cleaning machine table. Specific:
the fixing mechanism is a bearing seat 7, the bearing seat comprises a cylinder and a connecting part positioned at the bottom of the cylinder, and the connecting part is used for being connected with a machine table of the wafer box cleaning machine; preferably, the connecting portion is a connecting flange, and a plurality of bearing seat mounting holes 9, 8 as shown, are formed in the connecting flange and are used for connecting the bearing seats with a wafer box cleaning machine. The top of the cylinder is provided with a plurality of cleaning and nitrogen nozzle mechanism mounting holes 10 which are mainly used for fixing a mechanism provided with a cleaning and nitrogen nozzle on the top of the bearing seat 7.
The rotating and connecting material rack mechanism comprises a bearing sleeve 1, a bearing 12 positioned in the bearing sleeve, and a fixed cover 4 positioned at the top of the bearing sleeve and used for sealing and fixing the bearing. Preferably, the fixing cover is connected with the bearing housing by 4 fixing screws 6. The bearing sleeve 1 is used for being connected with a machine table material frame and protecting the bearing 12 in the machine table material frame, and a plurality of bearing sleeve mounting holes 3, 8 as shown in the figure, are formed in the preferable bearing sleeve and are used for connecting the bearing sleeve on the material frame.
Shaft seals 11 are arranged between the upper end and the lower end of the bearing and the bearing sleeve, the shaft seals 11 are preferably made of rubber, and mainly serve to fix and protect the bearing 12, prevent water and fragments from entering the bearing 12, and also prevent lubricating oil in the bearing 12 from overflowing to the outside; a sealing ring 13 is also arranged between the fixed cover and the bearing sleeve, and the sealing ring is also preferably made of rubber material and is mainly used for sealing the bearing 12 and preventing water from entering the bearing sleeve 1 and affecting the bearing 12.
The bearing adopts the prior art, such as conical roller bearing, deep groove ball bearing, and the like, and comprises an inner ring, an outer ring, rolling bodies positioned between the inner ring and the outer ring, and a retainer.
The bearing inner ring is tightly matched with the cylinder, and when the material rack rotates, the bearing sleeve and the bearing outer ring are driven to rotate around the bearing inner ring, and the bearing inner ring and the bearing seat are kept motionless. From the content of the upper section, the bearing assembly has the advantages that the sealing effect of the bearing assembly is greatly enhanced by arranging the shaft seal, the sealing ring and the fixing cover in the three-layer sealing structure, and the influence on the normal operation of the bearing due to the fact that water enters the bearing in the cleaning process is effectively prevented.
Because this application bearing assembly is close fit with cleaning machine board, work or material rest, the cooperation is also comparatively inseparable between each part in the bearing assembly, and it is very hard when dismantling, consequently, this application is equipped with first screw hole 2 with the junction of work or material rest on the bearing housing, and the junction with the bearing housing is equipped with second screw hole 5 on the fixed cover, is equipped with third screw hole 8 with the junction of board on the connecting portion, as shown in the figure, first screw hole 2, second screw hole 5 and third screw hole 8 are 4. When the bearing sleeve, the fixed cover and the connecting part are disassembled, the screw is continuously screwed into the corresponding screw hole, and the disassembling part can be easily jacked up to complete the disassembly.
This application is through the further improvement to bearing assembly for wafer box cleaning machine, avoided the low and unsafe mode of beating of availability factor when dismantling bearing assembly, can realize convenient and fast's dismantlement, to a great extent has saved maintenance time and has improved the utilization ratio. Meanwhile, the sealing effect of the bearing assembly is also improved, water is prevented from entering the bearing assembly, bearing abrasion is reduced, the service life is prolonged, and the cleaning quality of the wafer box is improved. Therefore, the bearing assembly provided by the application has good practical value and technical improvement significance in semiconductor processing and manufacturing.
While preferred embodiments of the present utility model have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the utility model. It will be apparent to those skilled in the art that various modifications and variations can be made to the present utility model without departing from the spirit or scope of the utility model. Thus, it is intended that the present utility model also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (7)
1. The bearing component for the wafer box cleaning machine comprises a fixing mechanism and a rotating and connecting material rack structure, and is characterized in that,
the fixing mechanism is a bearing seat, the bearing seat comprises a cylinder and a connecting part positioned at the bottom of the cylinder, and the connecting part is used for being connected with a wafer box cleaning machine table;
the rotating and connecting material rack mechanism comprises a bearing sleeve, a bearing positioned in the bearing sleeve and a fixed cover positioned at the top of the bearing sleeve and used for sealing and fixing the bearing; shaft seals are further arranged between the upper end and the lower end of the bearing and the bearing sleeve; a sealing ring is further arranged between the fixed cover and the bearing sleeve; the bearing sleeve is used for being connected with the material rack; the inner ring of the bearing is tightly matched with the cylinder, and when the material rack rotates, the bearing sleeve and the outer ring of the bearing are driven to rotate around the inner ring of the bearing;
the utility model discloses a wafer box cleaning machine, including material rack, fixed cover, bearing housing, the junction with the material rack is equipped with first screw hole, fixed cover is last with the junction of material rack is equipped with the second screw hole, on the connecting portion with the junction of wafer box cleaning machine board is equipped with the third screw hole, when dismantling the bearing housing fixed cover with when the connecting portion, through last the screw with the screw corresponding screw hole of screwing in, thereby can jack-up the dismantlement part and accomplish the dismantlement.
2. The bearing assembly for a wafer cassette cleaner of claim 1,
the connecting part is a connecting flange, and a plurality of bearing seat mounting holes are formed in the connecting flange and are used for connecting the bearing seats with the wafer box cleaning machine.
3. The bearing assembly for a wafer cassette cleaner of claim 1,
the top of the cylinder is provided with a plurality of cleaning and nitrogen nozzle mechanism mounting holes.
4. The bearing assembly for a wafer cassette cleaner of claim 1,
the fixed cover is connected with the bearing sleeve through a fixed screw.
5. The bearing assembly for a wafer cassette cleaner of claim 1,
the bearing sleeve is provided with a plurality of bearing sleeve mounting holes for connecting the bearing sleeve to the material rack.
6. The bearing assembly for a wafer cassette cleaner of claim 1,
the sealing ring is made of rubber.
7. The bearing assembly for a wafer cassette cleaner of claim 1,
the shaft seal is made of rubber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322200489.4U CN220505609U (en) | 2023-08-16 | 2023-08-16 | Bearing assembly for wafer box cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322200489.4U CN220505609U (en) | 2023-08-16 | 2023-08-16 | Bearing assembly for wafer box cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220505609U true CN220505609U (en) | 2024-02-20 |
Family
ID=89867581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322200489.4U Active CN220505609U (en) | 2023-08-16 | 2023-08-16 | Bearing assembly for wafer box cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220505609U (en) |
-
2023
- 2023-08-16 CN CN202322200489.4U patent/CN220505609U/en active Active
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