CN220503168U - Evaporation boat clamping mechanism - Google Patents
Evaporation boat clamping mechanism Download PDFInfo
- Publication number
- CN220503168U CN220503168U CN202322303298.0U CN202322303298U CN220503168U CN 220503168 U CN220503168 U CN 220503168U CN 202322303298 U CN202322303298 U CN 202322303298U CN 220503168 U CN220503168 U CN 220503168U
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- China
- Prior art keywords
- evaporation boat
- mounting seat
- electrode piece
- electrode
- piece
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- 238000001704 evaporation Methods 0.000 title claims abstract description 91
- 230000008020 evaporation Effects 0.000 title claims abstract description 90
- 230000007246 mechanism Effects 0.000 title claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 10
- 230000008569 process Effects 0.000 claims abstract description 10
- 239000011231 conductive filler Substances 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 3
- 238000005336 cracking Methods 0.000 abstract description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses an evaporation boat clamping mechanism, which comprises an electrode piece, wherein the electrode piece comprises a first electrode piece and a second electrode piece, and the first electrode piece and the second electrode piece are respectively and electrically connected with an anode and a cathode of an electrode; the mounting seat is connected to at least one electrode piece in a sliding way and is used for bearing the evaporation boat, and the evaporation boat and the electrode piece are kept in electrical contact conduction, and the mounting seat and the electrode piece are provided with a fit clearance so as to be convenient for generating micro-slippage in the follow-up process; and the compressing piece is used for applying a certain compressing force to the evaporation boat, so that the evaporation boat is tightly attached to the mounting seat, and the bottom of the mounting seat can be attached to the surface of the electrode piece. The evaporation boat mounting seat based on slidable connection is matched with the pressing piece, so that the traditional rigid limiting fixation is avoided, the evaporation boat is suitable for thermal expansion in the use process, micro displacement is generated, and the cracking problem caused by incapability of releasing due to thermal expansion can be further reduced.
Description
Technical Field
The utility model relates to the technical field of evaporation plating, in particular to an evaporation boat clamping mechanism.
Background
The two ends of the evaporation boat are connected with electrodes in the vacuum coating equipment, and voltage and current are applied to the evaporation boat by the electrodes, so that the evaporation boat generates heat due to the resistance effect. In the prior art, as in CN213357725U, the clamping mechanism for the evaporation boat disclosed in the disclosure uses a rapidly detached pressing member to fix the clamping end of the evaporation boat, and attach the electrode, and cooperates with the pressing rod to maintain the clamping force.
However, the evaporation boat generates a large amount of heat in the use process, thermal expansion occurs, and the evaporation boat and the clamping device are rigidly fixed, so that the evaporation boat is easily broken, and the service life of the evaporation boat is reduced.
Disclosure of Invention
The present utility model aims to solve at least one of the technical problems in the related art to some extent. Therefore, an object of the present utility model is to provide an evaporation boat clamping mechanism, which is capable of adapting to thermal expansion of an evaporation boat while facilitating assembly of the evaporation boat.
The technical scheme of the utility model is as follows:
an evaporation boat clamping mechanism, comprising
The electrode piece comprises a first electrode piece and a second electrode piece and is used for being respectively and electrically connected with the positive electrode and the negative electrode of the electrode;
the mounting seat is connected to at least one electrode piece in a sliding way and is used for bearing the evaporation boat, and the evaporation boat and the electrode piece are kept in electrical contact conduction, and the mounting seat and the electrode piece are provided with a fit clearance so as to be convenient for generating micro-slippage in the follow-up process;
and the compressing piece is used for applying a certain compressing force to the evaporation boat, so that the evaporation boat is tightly attached to the mounting seat, and the bottom of the mounting seat can be attached to the surface of the electrode piece.
Because the evaporation boat is not provided with a rigid limiting structure at the movable side (length direction) of the evaporation boat, the mounting seat can also slide freely, the evaporation boat is clamped and fastened by means of the extrusion force of the compression piece, and the evaporation boat can be well adapted to deformation caused by thermal expansion of the evaporation boat while certain assembly firmness and electrical contact are ensured, so that the cracking of the evaporation boat body caused by incapability of deformation is reduced.
Further, an assembly groove matched with the width of the mounting seat is formed in the electrode part, a sliding groove is formed in the inner end side of the assembly groove, sliding blocks are correspondingly formed in the two sides of the mounting seat, and the thickness of the sliding blocks is smaller than that of the sliding groove.
Further, the mounting seat is provided with a placing groove corresponding to the evaporation boat.
Further, the pressing part is a pressing locking rod, the pressing locking rod and the action end of the evaporation boat are arranged to be rotatable pressing parts, a rotating seat is fixed on the electrode part corresponding to the assembly groove, the pressing parts are pivoted on the rotating seat, and part of the pressing parts are acted on the upper surface of the evaporation boat in the outer rotating process of the pressing parts to apply acting force to the surface of the evaporation boat.
In this example, the pressing portion is an ellipse, and the outer peripheral rotation locus thereof can be in contact with the surface of the evaporation boat near the long diameter end, generating the pressing force. The surface of the pressing portion contacting the evaporation boat should be smooth, such as ceramic material.
Further, the hold-down member is an adjusting bolt that is adjusted toward the mount.
Further, a smooth pressing plate is arranged between the pressing piece and the evaporation boat.
Further, conductive filling is arranged on the contact surface of the evaporation boat and the mounting seat.
The conductive filling is arranged, and the conductive filling has certain elasticity and can adapt to tiny expansion deformation in the thickness direction.
Further, a conductive flexible connection is arranged between the first electrode piece and the mounting seat and used for electrically communicating the mounting seat with the first electrode piece.
The utility model has the beneficial effects that: but evaporation boat mount pad based on sliding connection to cooperation compresses tightly the piece, has avoided traditional rigidity spacing fixed, can make evaporation boat in the use, adaptation thermal expansion produces the micro displacement, and then reducible thermal expansion can't release the fracture problem that leads to.
Drawings
The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:
FIG. 1 is a schematic top view of a clamping mechanism for an evaporation boat according to the present utility model;
FIG. 2 is a schematic cross-sectional view of the first pole element corresponding to the direction of the arrow in FIG. 1;
FIG. 3 is a schematic top view of the mounting base;
FIG. 4 is a schematic view of a first pole element with a conductive flexible connection and a pressure plate disposed therein;
fig. 5 is a schematic structural view of a modification of the second electrode member.
In the figure: 0-evaporation boat; 1-a first electrode member; 11-an assembly groove; 12-a fixing part; 13-a rotating seat; 14-sliding grooves; 1' -a second electrode member; 2-a mounting base; 21-a placement groove; 22-slide block; 23-a stop; 3-pressing the locking lever; 31-a pressing part; 4-conducting filling; 5-pressing plates; 6-conductive flexible connection.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.
Examples of the embodiments are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements throughout or elements having like or similar functionality. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.
Referring to FIGS. 1-3, an evaporation boat clamping mechanism includes
The electrode piece comprises a first electrode piece 1 and a second electrode piece 1', which are used for being respectively and electrically connected with the positive electrode and the negative electrode of the electrode, and the first electrode piece 1 and the second electrode piece 1' have the same structure;
the mounting seat 2 is connected to the first electrode piece 1 and the second electrode piece 1' in a sliding manner, is used for bearing the evaporation boat, keeps electrical contact conduction with the evaporation boat and the electrode pieces, has a certain fit clearance, is convenient for generating micro-slippage in the follow-up process, and is suitable for thermal expansion;
and the compressing piece is used for applying a certain compressing force to the evaporation boat, so that the evaporation boat is tightly attached to the mounting seat 2, and further, the bottom of the mounting seat 2 can be attached to the surface of the electrode piece (the assembly groove 11), so that sufficient electrical contact is maintained.
Because evaporation boat 0 does not set up rigid limit structure at its activity side (length direction), and mount pad 2 also can freely slide, relies on the extrusion force of compressing tightly the piece to press from both sides tight fastening to evaporation boat, when guaranteeing certain assembly firm nature, electrical contact, the deformation that evaporation boat thermal expansion brought that adaptation that can be better reduces the evaporation boat body because of the fracture that can't deformation caused.
In this embodiment, an assembly groove 11 matching the width of the mounting seat 2 is formed on the electrode member, a sliding groove 14 is formed at the inner end side of the assembly groove 11, and sliding blocks 22 are correspondingly formed at two sides of the mounting seat 2, wherein the thickness of the sliding blocks 22 is slightly smaller than that of the sliding grooves 14, so that the mounting seat 2 can be directly contacted with the assembly groove 11 after assembly, and the acting force is mainly concentrated on the joint surface of the mounting seat and the assembly groove 11; the mounting seat 2 is also provided with a placing groove 21 corresponding to the evaporation boat 0.
As shown in fig. 2, the pressing member is a pressing locking rod 3, the acting end of the pressing locking rod 3 and the evaporation boat 0 is provided with a rotatable pressing part 31, a rotating seat 13 is fixed on the electrode member corresponding to the assembly groove 11, the pressing part 31 is pivoted on the rotating seat 13, and part of the pressing part 31 acts on the upper surface of the evaporation boat 0 in the process of rotating outside the pressing part, so as to apply acting force on the surface of the evaporation boat 0; in this example, the pressing portion 31 has an elliptical shape, and its outer peripheral rotation locus can be brought into contact with the surface of the evaporation boat near the long diameter end, generating a pressing force. The surface of the pressing portion 31 contacting the evaporation boat should be provided smooth, such as ceramic material.
Of course, the compressing part can also be an adjusting bolt adjusted towards the mounting seat 2, a smooth insulating ceramic pressing plate can be arranged between the adjusting bolt and the evaporation boat, a mounting frame (such as an inverted U-shaped frame crossing the top of the mounting seat, a screw hole is arranged in the middle) for adjusting the connection of the adjusting bolt is arranged on the first electrode assembly, the distance and acting force between the compressing part and the evaporation boat are adjusted by rotating the adjusting bolt, and the displacement sliding generated by the thermal expansion of the evaporation boat is not influenced due to the arrangement of the ceramic pressing plate, so that the evaporation boat can be locked, the acting force of the mounting seat and the assembly groove 11 is adjusted, and the electrical conduction is ensured.
In order to increase the contact between the evaporation boat and the electrode piece, a conductive filling 4 is arranged on the contact surface of the evaporation boat and the mounting seat 2, if the size of the placement groove 21 in the mounting seat 2 is matched with that of the end part of the evaporation boat, graphite paper is arranged at the bottom and two sides of the evaporation boat, and further, the graphite paper is arranged on the joint surface of the bottom of the mounting seat 2 and the assembly groove 11 of the first electrode piece 1. The conductive filling is arranged, and the conductive filling has certain elasticity and can adapt to tiny expansion deformation in the thickness direction.
Referring to fig. 4, considering that poor contact may occur in the process of slight sliding of the mounting base 2 due to expansion, a conductive flexible connection 6 is further provided between the first electrode member 1 and the mounting base 2, so as to electrically connect the mounting base 2 with the first electrode member 1, and ensure normal operation thereof; a pressing plate 5 may be disposed on the top of the evaporation boat corresponding to the pressing portion 31, and the pressing plate 5 is also made of a smooth ceramic material.
Specifically, the conductive flexible connection 6 can be a commercially available conductive copper strip; the end part of the mounting seat 2 is further provided with a stop block 23, and conductive filling is also arranged on the inner side of the stop block 23, so that the evaporation boat is tightly attached to the stop block 23 through the conductive filling, and the conductive contact area is further increased.
As shown in fig. 5, the second electrode member 1' may be directly configured as an electrode connector, and the whole of the second electrode member is in a columnar structure, and a step is arranged at an end portion of the second electrode member, which is close to the evaporation boat, for placing the evaporation boat, and of course, a conductive filling such as graphite paper is also arranged at the step portion.
When the clamping mechanism is used, the electrode piece can be assembled to the electrode through the fixing part 12, so that electrical conduction is realized.
In this application, structures and connection relationships not described in detail are all prior art, and their structures and principles are already known and are not described herein.
In the description of the present utility model, it should also be noted that the orientation or positional relationship indicated by "upper, lower, inner and outer", etc. in terms are based on the orientation or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or element to be referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first, second, or third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (8)
1. An evaporation boat clamping mechanism which is characterized in that: comprising
The electrode piece comprises a first electrode piece and a second electrode piece and is used for being respectively and electrically connected with the positive electrode and the negative electrode of the electrode;
the mounting seat is connected to at least one electrode piece in a sliding way and is used for bearing the evaporation boat, and the evaporation boat and the electrode piece are kept in electrical contact conduction, and the mounting seat and the electrode piece are provided with a fit clearance so as to be convenient for generating micro-slippage in the follow-up process;
and the compressing piece is used for applying compressing force to the evaporation boat, so that the evaporation boat is tightly attached to the mounting seat, and the bottom of the mounting seat can be attached to the surface of the electrode piece.
2. The evaporation boat clamping mechanism as claimed in claim 1, wherein: an assembly groove matched with the width of the mounting seat is formed in the electrode piece, a sliding groove is formed in the inner end side of the assembly groove, sliding blocks are correspondingly formed on two sides of the mounting seat, and the thickness of the sliding blocks is smaller than that of the sliding groove.
3. The evaporation boat clamping mechanism as claimed in claim 2, wherein: the mounting seat is provided with a placing groove corresponding to the evaporation boat.
4. The evaporation boat clamping mechanism as claimed in claim 3, wherein: the compressing part is a pressing locking rod, the pressing locking rod and the acting end of the evaporation boat are arranged to be rotatable compressing parts, rotating seats are fixed on the electrode parts corresponding to the assembling grooves, the compressing parts are pivoted on the rotating seats, and partial parts of the compressing parts act on the upper surface of the evaporation boat in the outer rotating process of the compressing parts to apply acting force to the surface of the evaporation boat.
5. The evaporation boat clamping mechanism as claimed in claim 3, wherein: the compressing piece is an adjusting bolt which is adjusted towards the mounting seat.
6. The evaporation boat clamping mechanism as claimed in claim 4 or 5, wherein: a smooth pressing plate is arranged between the pressing piece and the evaporation boat.
7. The evaporation boat clamping mechanism as defined in claim 6, wherein: and a conductive filler is arranged on the contact surface of the evaporation boat and the mounting seat.
8. The evaporation boat clamping mechanism as claimed in claim 7, wherein: and a conductive flexible connection is arranged between the first electrode piece and the mounting seat and used for electrically communicating the mounting seat with the first electrode piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322303298.0U CN220503168U (en) | 2023-08-25 | 2023-08-25 | Evaporation boat clamping mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322303298.0U CN220503168U (en) | 2023-08-25 | 2023-08-25 | Evaporation boat clamping mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220503168U true CN220503168U (en) | 2024-02-20 |
Family
ID=89865184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322303298.0U Active CN220503168U (en) | 2023-08-25 | 2023-08-25 | Evaporation boat clamping mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220503168U (en) |
-
2023
- 2023-08-25 CN CN202322303298.0U patent/CN220503168U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |