CN220438647U

CN220438647U - Microscope rotary carrier

Info

Publication number: CN220438647U
Application number: CN202321869475.5U
Authority: CN
Inventors: 聂伟; 林育全; 陈志远; 高敬国
Original assignee: Xiamen Tongfu Microelectronics Co ltd
Current assignee: Xiamen Tongfu Microelectronics Co ltd
Priority date: 2023-07-17
Filing date: 2023-07-17
Publication date: 2024-02-02
Anticipated expiration: 2033-07-17

Abstract

The application discloses microscope rotation carrier, include: a body; a bottom plate placed on the body; the jig is used for bearing the tray, the jig is movably connected with the bottom plate, and the jig can rotate around the center of the bottom plate on the bottom plate. According to the utility model, through the rotatable design of the jig, the jig can be conveniently adjusted, and the jig does not need to be taken up, so that collision to a lens of a microscope is avoided, and the lens is protected.

Description

Microscope rotary carrier

Technical Field

The utility model relates to the technical field of semiconductor equipment, in particular to a microscope rotary carrier.

Background

The Tray is also called a Tray and is used for containing vessels for processing parts, and in the processing detection process, the Tray is used for bearing processed and to-be-processed, qualified and unqualified workpiece products, so that the Tray is very important. In actual production and processing, it is necessary to adjust the position of the Tray on the stage and the stage angle of the microscope according to run card information. However, in the related art, the stage of the microscope is fixed and cannot rotate, and when the Tray is adjusted, the angle of the whole jig for placing the Tray is usually required to be replaced after the whole jig is taken up, and the adjustment mode is easy to collide with the lens of the microscope, so that the lens is damaged.

Disclosure of Invention

In view of the foregoing drawbacks or shortcomings in the prior art, it is desirable to provide a microscope rotating stage, facilitating the adjustment of a disk, which is advantageous for protecting a microscope lens.

In a first aspect, the present utility model provides a microscope rotating stage comprising:

a body;

a bottom plate placed on the body;

the jig is used for bearing the tray, the jig is movably connected with the bottom plate, and the jig can rotate around the center of the bottom plate on the bottom plate.

As an alternative scheme, a mounting hole is formed in the center of the bottom plate, a roller bearing is mounted in the mounting hole, and an inner ring of the roller bearing is connected with the jig.

As an alternative scheme, the bottom surface of the jig is provided with a boss, and the boss is in interference fit with the inner ring of the roller bearing.

As an alternative scheme, a positioning structure is arranged on the bottom plate, after the jig rotates by a preset angle, the positioning structure and the jig are mutually limited, and the position of the jig is locked.

As an alternative scheme, the location structure includes the support that sets up on the bottom plate and installs the setting element on the support, and the setting element can be towards or deviate from the tool motion on the support, when the setting element towards tool motion and with the side in close contact with of tool, the position of tool is locked, when the setting element deviates from the tool motion, the tool is in rotatable state.

Alternatively, the positioning member comprises an indexing pin.

As an alternative scheme, at least two grooves are uniformly formed in the side face of the jig at intervals, the side face of the groove autonomous tool is concavely arranged towards the inside of the jig, and the grooves and the positioning pieces are mutually limited.

As an alternative scheme, the clamping groove is formed in the center of the body, the clamping groove is matched with the bottom plate, the bottom plate is clamped with the inner wall of the clamping groove, and the bottom plate is fixed.

As an alternative scheme, at least three bearing grooves are formed in the surface of the jig, and the at least three bearing grooves are sequentially marked as follows from small to large: the first bearing groove, the second bearing groove, the third bearing groove and the Nth bearing groove, wherein N is more than 3;

the three bearing grooves are distributed in a step mode, the first bearing groove is located in the center of the jig, the second bearing groove is formed in the periphery of the first bearing groove, the bottom of the second bearing groove is higher than that of the first bearing groove, the third bearing groove is located in the periphery of the second bearing groove, and the bottom of the third bearing groove is higher than that of the second bearing groove.

As an alternative scheme, the opening edge of each bearing groove is provided with a foolproof structure for determining the installation direction of the material tray, and the foolproof structure is matched with the unfilled corner on the material tray.

As an alternative scheme, at least three notches are formed in the side wall of the opening of each bearing groove, the notches extend from the side wall of the opening of the bearing groove towards the direction away from the inside of the bearing groove, and the material tray is placed on the bearing groove, and three corners of the material tray are correspondingly placed at the three notches.

As an alternative scheme, the surface interval penetration card of tool is equipped with two at least through-holes, and two at least through-holes symmetric distribution is at the surface of tool.

The beneficial effects of the utility model are as follows:

according to the microscope rotating carrying platform, the jig is movably connected with the bottom plate, and the jig can rotate around the center of the bottom plate on the bottom plate, so that the problem that in the prior art, when a charging tray is adjusted in the visual inspection process of an IC, the charging tray needs to be lifted up and then replaced in angle, and the lens of the microscope is easy to collide is solved. According to the utility model, through the rotatable design of the jig, the jig can be conveniently adjusted, and the jig does not need to be taken up, so that collision to a lens of a microscope is avoided, and the lens is protected.

Drawings

Other features, objects and advantages of the present application will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the following drawings, in which:

FIG. 1 is a schematic view of a rotating stage of a microscope of the present utility model;

FIG. 2 is a schematic view of the fixture and base plate of the rotating stage of the microscope of the present utility model;

FIG. 3 is an exploded view of the structure of the jig and base plate in the rotating stage of the microscope of the present utility model;

fig. 4 is a section A-A of fig. 2.

In the figure:

10. a body;

20. the bottom plate, 21, the roller bearing, 22, the positioning structure, 221, the bracket, 222, the positioning piece, 23 and the mounting hole;

30. jig, 31, boss, 32, groove, 33, bearing groove, 331, first bearing groove, 332, second bearing groove, 333, third bearing groove, 334, foolproof structure, 335, notch, 34, through hole.

40. And a material tray.

Detailed Description

The present application is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be noted that, for convenience of description, only the portions related to the utility model are shown in the drawings.

It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

It should be noted that, in the description of the present application, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature.

It should be noted that, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

In actual production processing, it is necessary to adjust the position of the Tray on the stage and adjust the stage angle of the microscope according to run card information. However, in the related art, the stage of the microscope is fixed and cannot rotate, and when the Tray is adjusted, the angle of the whole jig for placing the Tray is usually required to be replaced after the whole jig is taken up, and the adjustment mode is easy to collide with the lens of the microscope, so that the lens is damaged.

Based on the above-described problems, embodiments of the present application provide a microscope rotating stage, as shown in fig. 1 to 4, including:

a body 10;

a bottom plate 20, the bottom plate 20 being placed on the body 10;

the jig 30, the jig 30 is used for bearing the tray 40, the jig 30 is movably connected with the bottom plate 20, and the jig 30 can rotate around the center of the bottom plate 20 on the bottom plate 20.

It should be noted that, the microscope rotary stage according to the embodiments of the present application is generally applicable to a visual inspection link of an IC, where an operator places an IC product on a Tray (material Tray), places the material Tray on a jig, places the jig on the microscope stage, and further visually inspects the IC through the operator, for example, a polarity direction, a placement manner, and the like of the IC.

It will be appreciated that the body 10 serves as a main part of a microscope stage and is primarily intended to carry items to be inspected, such as the base plate 20, the jig 30, the tray 40, etc.

The bottom plate 20 is placed on the body 10, and bottom plate 20 mainly used bears tool 30, avoids tool direct contact body 10 and rotatory on body 10, leads to causing wearing and tearing to body 10, and then influences the life of microscope, can be dismantled between bottom plate 20 and the body 10 and be connected, as long as can guarantee when tool 30 is placed on bottom plate 20, perhaps rotatory tool 30's in-process, bottom plate 20 is stable, can not appear rocking or dropping the problem can.

In a specific embodiment, the bottom plate 20 can be directly placed on the body 10, so as to facilitate taking and placing; of course, the bottom plate 20 can be fixed on the body 10 by a buckle, which is beneficial to ensuring the stability of the bottom plate 20, and further ensuring the stable and reliable rotation of the jig 20.

It is further understood that the jig 30 is mainly used for carrying the tray 40, and is used for placing the tray 40 containing the IC products on the jig 30, so as to check the condition of the IC products. The jig 30 and the bottom plate 20 are detachably connected, the jig 30 can be clamped on the bottom plate 20 through a clamping groove, and the jig 30 can be fixed on the bottom plate 20 through a buckle or a bolt.

The jig 30 is rotatably connected to the bottom plate 20, and the jig 30 may be connected to the bottom plate 20 through a rotation shaft, and of course, the jig 30 may also be connected to the bottom plate 20 through a bearing.

The microscope rotating carrying platform solves the problems that in the visual inspection process, a charging tray cannot be rotated, the charging tray needs to be taken down to be adjusted when the charging tray is adjusted, the lens of a microscope is easy to collide, and the lens of the microscope is easy to wear. The microscope rotary carrying platform provided by the embodiment of the application can conveniently adjust the disc through the rotatable design of the jig, and the jig is not required to be taken up, so that collision caused to a lens of a microscope is avoided, and the lens is protected.

As an achievable mode, a mounting hole 23 is formed in the center of the bottom plate 20, a roller bearing 21 is mounted in the mounting hole 23, and an inner ring of the roller bearing 21 is connected with a jig 30.

The mounting hole 23 is mainly used for mounting the roller bearing 21, so that the jig 30 is conveniently assembled on the bottom plate 20, and meanwhile, the jig 30 can be guaranteed to rotate. The shape of the mounting hole 23 may be any shape such as, but not limited to, circular or square, etc.

In this embodiment, the jig 30 is mounted on the bottom plate 20 through the roller bearing 21, and the structure is simple, easy to implement, and the rotation of the jig 30 can be reliably ensured.

As a realizable manner, the bottom surface of the jig 30 is provided with a boss 31, and the boss 31 is in interference fit with the inner ring of the roller bearing 21. The boss 31 in this embodiment is favorable to tool 30 and roller bearing 21 cooperation, guarantees that the tool can be connected with roller bearing 21 reliably to boss 31 and roller bearing 21's inner circle interference fit has guaranteed boss 31 and roller bearing 21 fixed fit, and then guarantees that tool 30 can reliably rotate.

The boss 31 and the jig 30 may be integrally formed, and the boss 31 may be formed by secondary processing on the jig 20; the boss 31 and the jig 30 can be fixedly connected in any fixed connection mode, and the shape of the boss 31 is matched with the inner ring of the roller bearing 21 so as to ensure that the jig 30 can be reliably matched with the roller bearing 21 through the boss 31.

As an achievable manner, the positioning structure 22 is disposed on the bottom plate 20, and after the jig 30 rotates by a predetermined angle, the positioning structure and the jig 30 are limited, and the position of the jig 30 is locked.

Wherein, the positioning structure 22 fixes the combination of the pin and the fixing hole, one of the pin and the fixing hole is arranged on the bottom plate 20, the other is arranged on the jig 30, and after the jig 30 rotates to a preset angle, the position of the jig 30 is fixed by the cooperation of the pin and the fixing hole; of course, the positioning structure may also be a buckle and a buckling position, one of the buckle and the buckling position is arranged on the jig 30, the other is arranged on the bottom plate 20, and after the jig 30 rotates to a predetermined angle, the buckle and the buckling position are buckled, and the position cup of the jig 30 is fixed.

It should be noted that, the predetermined angle is set according to the actual processing requirement, for example, may be 90 degrees, when the jig rotates for 90 degrees, the positioning structure may fix the position of the jig 30, so as to avoid the movement of the jig 30, thereby ensuring that an operator can better observe the IC product on the tray 40.

As a realizable manner, as shown in fig. 2, the positioning structure 22 includes a bracket 221 provided on the base plate 20 and a positioning member 222 mounted on the bracket 221, the positioning member 222 being movable toward or away from the jig 30 on the bracket 221, the position of the jig 30 being locked when the positioning member 222 moves toward the jig 30 and comes into close contact with the side of the jig 30, the jig 30 being in a rotatable state when the positioning member 222 moves away from the jig 30.

Wherein the retainer 222 may be, but is not limited to, various pins, screws or bolts; the positioning piece 222 is mounted on the support 221 and is perpendicular to the side surface of the jig 30, when the position of the jig 30 needs to be fixed, the end part of the positioning piece 222 moves towards the direction of the jig 30 to be in tight contact with the side surface of the jig 30, the position of the jig 30 is fixed, when the jig 30 needs to be rotated, the end part of the positioning piece 222 moves away from the direction of the jig 30 and is far away from the jig 30, and the jig 30 is in a rotatable state.

The positioning structure in the embodiment has the advantages of simple structure and convenient operation, and can reliably fix the position of the jig.

In a preferred embodiment, the positioning member 222 comprises an indexing pin. The indexing pin degree pin in the embodiment comprises a pin body, a pin head, a handle and an embedded spring, wherein the pin body is inserted into or pulled out of the handle through operation, and the pin body is positioned through telescopic movement of the pin head after relative displacement under the action of the embedded spring.

As a realizable mode, as shown in fig. 2, at least two grooves 32 are uniformly formed on the side surface of the jig 30 at intervals, the grooves 32 are concavely formed from the side surface of the jig 30 toward the inside of the jig 30, and the grooves 32 and the positioning pieces 222 are mutually limited. In this embodiment, locating piece and recess are spacing each other, and the setting of recess is favorable to reliable location tool, compares in the locating piece direct with the side of tool support tight contact, the setting of recess avoids locating piece and the problem that the slippage appears in the tool side.

As a realizable manner, a clamping groove is formed in the center of the body 10, the clamping groove is matched with the bottom plate 20, the bottom plate 20 is clamped with the inner wall of the clamping groove, and the bottom plate 20 is fixed. In this embodiment, the arrangement of the clamping groove is favorable for facilitating the installation and the disassembly of the bottom plate, and the bottom plate 20 is installed in the clamping groove, so that the bottom plate 20 is favorable for avoiding movement, and the stability of the jig 30 can be ensured.

In a preferred embodiment, as shown in fig. 2, at least three carrying grooves 33 are formed on the surface of the jig 30, and the at least three carrying grooves 33 are sequentially recorded as follows from small to large: the first bearing groove 331, the second bearing groove 332, the third bearing groove 333 and the nth bearing groove, N >3, N being a positive integer;

the at least three carrying grooves 33 are distributed in a step-like manner, the first carrying groove 331 is located at the center of the jig 30, the second carrying groove 332 is formed at the circumferential side of the first carrying groove 331, the bottom of the second carrying groove 332 is higher than the bottom of the first carrying groove 331, the third carrying groove 333 is located at the circumferential side of the second carrying groove 332, and the bottom of the third carrying groove 333 is higher than the bottom of the second carrying groove 332.

The bearing grooves with different groove widths in the embodiment are mainly suitable for bearing the trays 40 with different sizes, and the groove widths of the first bearing groove, the second bearing groove and the third bearing groove on the jig of the embodiment can be set to be respectively used for being compatible with 2-inch, 3-inch or 4-inch trays; of course, in actual manufacturing, the number and size of the carrying grooves can be set according to actual needs.

In this embodiment, the design of the first bearing groove, the second bearing groove and the third bearing groove is beneficial to preventing trays with different sizes, and applicability of the jig is increased.

As a practical way, the opening edge of each carrying groove 33 is provided with a fool-proof structure 334 for determining the mounting direction of the tray 40, and the fool-proof structure 334 is matched with the unfilled corner on the tray 40.

It will be appreciated that, according to the content of the Runcard record, the output direction of the IC should be towards the unfilled corner of the tray, so as to ensure the polarity direction of the IC, and therefore, in order to ensure the placement direction of the tray 40, the opening edge of the carrying slot 33 is provided with a foolproof structure 334, which is matched with the unfilled corner of the tray 40.

The fool-proof structure in the embodiment is beneficial to ensuring the placement direction of the material tray 40, and the whole jig is not required to be taken down from the carrier when the position of the material tray 40 needs to be adjusted, so that the lens of a microscope can be effectively protected.

As a realizable manner, at least three notches 335 are formed on the opening side wall of each carrying groove 33, the notches 335 extend from the opening side wall of the carrying groove 33 towards a direction away from the inside of the carrying groove 33, and when the tray 40 is placed on the carrying groove 33, three corners of the tray 40 are respectively placed at the three notches 335 correspondingly.

The notch in this embodiment can effectively protect the corner of the tray, avoids collision or friction between the corner of the tray and the jig, and causes damage to the tray.

As an achievable manner, at least two through holes 34 are formed in the surface of the jig 30 at intervals, and the at least two through holes 34 are symmetrically distributed on the surface of the jig 30.

In the embodiment, the through holes define a space between the surface of the jig and the material tray, so that the material tray is convenient to take, and the jig can be reduced.

In some embodiments, the through hole may be a groove, so long as a space can be defined between the surface of the jig and the tray, which is not specifically limited in the embodiments of the present application.

In summary, according to the microscope rotary carrying platform disclosed by the embodiment of the application, the rotatable design of the jig can be used for conveniently adjusting the disc, and the jig is not required to be taken up, so that collision to a lens of a microscope is avoided, and the lens is protected;

and the positioning structure is simple in structure and convenient to operate, the position of the jig can be reliably fixed, and the position of the jig can be fixed after the jig rotates by a preset angle. The jig is light, so that larger pressure on a microscope working carrier is avoided; the jig is convenient to take, and the falling risk in the installation process is avoided; the jig can be compatible with 2 inch, 3 inch and 4 inch tray jigs; the positioning angle can be consistent with the crystal picking machine, and the personnel can be prevented from changing randomly by matching with the rotation direction indexing pin.

In the description of the present application, it should be understood that, where azimuth terms such as "front, rear, upper, lower, left, right", "transverse, vertical, horizontal", and "top, bottom", etc., indicate azimuth or positional relationships generally based on those shown in the drawings, only for convenience of description and simplification of the description, these azimuth terms do not indicate and imply that the apparatus or elements referred to must have a specific azimuth or be constructed and operated in a specific azimuth, and thus should not be construed as limiting the scope of protection of the present application; the orientation word "inner and outer" refers to inner and outer relative to the contour of the respective component itself.

Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be oriented 90 degrees or at other orientations and the spatially relative descriptors used herein interpreted accordingly.

In addition, the terms "first", "second", etc. are used to define the components, and are merely for convenience of distinguishing the corresponding components, and unless otherwise stated, the terms have no special meaning, and thus should not be construed as limiting the scope of the present application.

The foregoing description is only of the preferred embodiments of the present application and is presented as a description of the principles of the technology being utilized. It will be appreciated by persons skilled in the art that the scope of the utility model referred to in this application is not limited to the specific combinations of features described above, but it is intended to cover other embodiments in which any combination of features described above or equivalents thereof is possible without departing from the spirit of the utility model. Such as the above-described features and technical features having similar functions (but not limited to) disclosed in the present application are replaced with each other.

Claims

1. Microscope rotation carrier, its characterized in that includes:

a body;

a base plate placed on the body;

the jig is used for bearing the material tray, the jig is movably connected with the bottom plate, and the jig can rotate around the center of the bottom plate on the bottom plate.

2. The microscope rotating stage according to claim 1, wherein a mounting hole is formed in the center of the bottom plate, a roller bearing is installed in the mounting hole, and an inner ring of the roller bearing is connected with the jig.

3. The microscope rotating stage according to claim 2, wherein the bottom surface of the jig is provided with a boss, the boss being interference fit with the inner race of the roller bearing.

4. The rotating microscope carrier according to claim 1, wherein a positioning structure is provided on the base plate, the positioning structure and the jig are mutually limited after the jig rotates by a predetermined angle, and the position of the jig is locked.

5. The rotational stage of claim 4, wherein the positioning structure comprises a bracket disposed on the base plate and a positioning member mounted on the bracket, the positioning member being movable on the bracket toward or away from the jig, the position of the jig being locked when the positioning member moves toward the jig and is in close contact with a side of the jig, the jig being in a rotatable state when the positioning member moves away from the jig.

6. The microscope rotating stage according to claim 5, wherein the positioning member comprises an indexing pin.

7. The rotating microscope carrier of claim 5, wherein at least two grooves are uniformly formed in the side surface of the jig at intervals, the grooves are formed in the direction from the side surface of the jig to the inner portion of the jig in a recessed manner, and the grooves and the positioning pieces are mutually limited.

8. The rotating microscope carrier according to claim 1, wherein a clamping groove is formed in the center of the body, the clamping groove is matched with the bottom plate, the bottom plate and the inner wall of the clamping groove are clamped with each other, and the bottom plate is fixed.

9. The rotating microscope carrier according to any one of claims 1 to 8, wherein at least three carrying grooves are formed in the surface of the jig, and the carrying grooves are sequentially marked as follows from small to large: the first bearing groove, the second bearing groove, the third bearing groove and the Nth bearing groove, wherein N is more than 3;

10. The rotating microscope carrier according to claim 9, characterized in that an opening edge of each carrying groove is provided with a foolproof structure for determining the mounting direction of the tray, and the foolproof structure is matched with a unfilled corner on the tray.

11. The rotating stage according to claim 9, wherein at least three notches are formed in the opening side wall of each carrying groove, the notches extend from the opening side wall of the carrying groove toward a direction away from the inside of the carrying groove, the tray is placed on the carrying groove, and three corners of the tray are correspondingly placed at the three notches.

12. The microscope rotary stage according to any one of claims 1 to 8, wherein at least two through holes are provided in the jig at intervals penetrating the surface of the jig, and the at least two through holes are symmetrically distributed on the surface of the jig.