CN220398991U

CN220398991U - Liquid sampling device

Info

Publication number: CN220398991U
Application number: CN202322036110.0U
Authority: CN
Inventors: 田亚茹
Original assignee: Xian Eswin Silicon Wafer Technology Co Ltd; Xian Eswin Material Technology Co Ltd
Current assignee: Xian Eswin Silicon Wafer Technology Co Ltd; Xian Eswin Material Technology Co Ltd
Priority date: 2023-07-31
Filing date: 2023-07-31
Publication date: 2024-01-26
Anticipated expiration: 2033-07-31

Abstract

The present disclosure provides a liquid sampling device, comprising: the collecting cavity comprises a sampling area, a sample bottle screwing area and a sample bottle taking and placing area; the liquid inlet end of the supply pipeline assembly is positioned outside the collection cavity, and the liquid outlet end of the supply pipeline assembly is positioned in the sampling area; the bottle body positioning assembly is arranged in the collection cavity and is positioned below the liquid discharge end; the rotary table assembly is arranged in the sample bottle screwing area and comprises a rotary table and a gravity sensor, and the rotary table is configured to execute a rotating action to drive the bottle body to rotate when the gravity sensor senses that the bottle body is placed on the rotary table; the first control assembly is used for controlling the bottle body to move among the sampling area, the sample bottle screwing area and the sample bottle taking and placing area and is arranged in the collecting cavity; and the second control assembly is used for controlling the bottle cap so as to limit the bottle cap to rotate along with the bottle body and is arranged in the collecting cavity. The liquid sampling device provided by the embodiment of the disclosure can avoid sample pollution and improve the accuracy of a test result.

Description

Liquid sampling device

Technical Field

The utility model relates to the technical field of semiconductor production and processing, in particular to a liquid sampling device.

Background

In the technical field of silicon wafer production and processing, four process flows of crystal pulling, forming, polishing and cleaning are mainly included, the surface of the produced silicon wafer is easily polluted by various impurities in the process processing, and the existence of the impurities can seriously influence the performance of a rear-end silicon device and the yield of a product, so that the preparation of an ultra-clean silicon wafer becomes one of main tasks in the field of silicon wafers.

In order to obtain the silicon wafer without metal impurities and clean surface, various methods are needed to ensure that the silicon wafer is free of metal and particle pollution, so that the surface of the silicon wafer is clean, and the back-end application and development are convenient. The most common method for removing impurities is to soak and wash by using a cleaning liquid, and a cleaning procedure is added after each process is finished in production line production, so that the pollution of the procedure is striven for, and the procedure is cleaned. The cleaning liquid used in the cleaning process is prepared from corrosive chemicals such as sulfuric acid, nitric acid, hydrochloric acid, hydrofluoric acid, ammonia water, hydrogen peroxide and ultrapure water, and in order to ensure that impurities can be effectively removed in the cleaning process without introducing new pollution, the liquid of the chemicals used in the cleaning process has strict requirements, and the chemicals used in the cleaning process need to be periodically sampled and monitored so as to prevent the silicon wafer quality from being influenced by higher metal content of the chemicals.

The back end of the silicon wafer production process is usually completed in a class 10 clean room, the metal content of the liquid chemicals used is kept at ppt level (Parts Per Trillion ), and the main steps of laboratory analysis of the liquid chemicals are as follows: liquid sampling, sample processing, test analysis using inductively coupled plasma mass spectrometry (ICP-MS).

The existing operation is that an operator manually opens a valve of a chemical supply pipeline assembly by using a glove, closes a liquid pipeline valve by using the glove after a PFA (polyvinyl fluoride) sample bottle is filled with chemicals, then takes a clean bottle cap to screw up, and finally processes the chemicals filled with the chemicals and tests the chemicals on an ICP-MS. The whole flow is excessively manually operated, the risk of environmental and personnel pollution to the sample is increased, and the reliability and the authenticity of the test result can be influenced by different operation habits of each personnel. On the other hand, prolonged exposure to aggressive chemicals can harm the health of the operator.

Disclosure of Invention

The embodiment of the disclosure provides a liquid sampling device, which can avoid sample pollution and improve the accuracy of a test result.

The technical scheme provided by the embodiment of the disclosure is as follows:

a liquid sampling device for collecting a liquid sample through a sample bottle, the sample bottle comprising a bottle body and a bottle cap which can be screwed together; the liquid sampling device includes:

the collecting cavity comprises a sampling area, a sample bottle screwing area and a sample bottle taking and placing area;

the liquid inlet end is positioned outside the collecting cavity, and the liquid outlet end is positioned in the sampling area;

the bottle body positioning assembly is used for positioning the bottle body in the sampling area, is arranged in the collecting cavity and is positioned below the liquid draining end;

the rotary table assembly is used for driving the bottle body to rotate and is arranged in the sample bottle screwing area, and comprises a rotary table and a gravity sensor, and the rotary table is configured to execute a rotating action to drive the bottle body to rotate when the gravity sensor senses that the bottle body is placed on the rotary table;

the first control assembly is used for controlling the bottle body to move among the sampling area, the sample bottle screwing area and the sample bottle taking and placing area and is arranged in the collecting cavity; and

The second control assembly is used for controlling the bottle cap so as to limit the bottle cap to rotate along with the bottle body and is arranged in the collecting cavity.

The liquid sampling device further comprises an operable control component, wherein the operable control component is electrically connected with the electromagnetic valve and is used for controlling the opening and closing states of the electromagnetic valve based on control parameters, and the control parameters comprise control parameters input by user operation and/or control parameters stored in advance.

Illustratively, the supply line assembly includes at least two supply lines for delivering different liquids, respectively, each of the supply lines having a separate solenoid valve disposed thereon.

Illustratively, the operable control assembly includes a plurality of solenoid valve control buttons corresponding to solenoid valves on different supply lines.

Illustratively, the first handling assembly includes a first manipulator; the liquid sampling device further comprises an operable control component, wherein the operable control component is connected with the first mechanical hand and used for controlling the working state of the first mechanical hand based on control parameters, and the control parameters comprise control parameters input by user operation and/or control parameters stored in advance.

Illustratively, the second handling assembly includes a second manipulator; the liquid sampling device further comprises an operable control component, wherein the operable control component is connected with the second mechanical hand and is used for controlling the working state of the second mechanical hand based on control parameters, and the control parameters comprise control parameters input by user operation and/or control parameters stored in advance.

Illustratively, the collection chamber is provided with an acidic exhaust structure and/or an alkaline exhaust structure.

Illustratively, the bearing surface of the rotary table is provided with a first positioning groove.

Illustratively, the body positioning assembly includes a second positioning groove.

Illustratively, a leak-proof layer is disposed below the bottom of the collection chamber.

The beneficial effects brought by the embodiment of the disclosure are as follows:

the liquid sampling device provided by the embodiment of the disclosure comprises a collection chamber, a supply pipeline assembly, a bottle body positioning assembly, a rotary table assembly, a first operating assembly and a second operating assembly, wherein liquid is conveyed into the collection chamber through the supply pipeline assembly, the first operating assembly can move the bottle body to a sampling area and position the bottle body through the bottle body positioning assembly to access the liquid, after the bottle body is connected with a sample, the first operating assembly can move the bottle body to a rotary table of a sample bottle screwing area, when a gravity sensor senses that the bottle body is placed on the current rotary table, an induction signal is generated, so that the rotary table performs a rotary action to drive the bottle body to rotate, the second operating assembly operates a bottle cap, the bottle cap is moved to the upper side of the rotary table and is limited to rotate along with the bottle body, thereby, the bottle cap is screwed on the bottle body through relative rotation of the bottle cap and the bottle body, and the first operating assembly operates the bottle body to the sample bottle taking area after screwing is finished, and the liquid sampling process is completed. Compared with the manual liquid receiving scheme, the whole process can effectively avoid the pollution of personnel and environment to liquid samples, reduce the interference of operation differences of different operators to test results, and in addition, can also avoid the direct contact of the operators with highly corrosive liquid, thereby improving the operation safety.

Drawings

FIG. 1 shows a schematic configuration of a liquid sampling device provided in an embodiment of the present disclosure;

fig. 2 is a schematic view of a structure of a liquid sampling device according to an embodiment of the present disclosure when a rotary table assembly cooperates with a second operating assembly to screw a bottle body and a bottle cap.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present disclosure more apparent, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present disclosure. It will be apparent that the described embodiments are some, but not all, of the embodiments of the present disclosure. All other embodiments, which can be made by one of ordinary skill in the art without the need for inventive faculty, are within the scope of the present disclosure, based on the described embodiments of the present disclosure.

Unless defined otherwise, technical or scientific terms used in this disclosure should be given the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The terms "first," "second," and the like, as used in this disclosure, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Likewise, the terms "a," "an," or "the" and similar terms do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.

Referring to fig. 1 and 2, embodiments of the present disclosure provide a liquid sampling device for collecting a liquid sample from a sample bottle. The sample bottle 1 comprises a body 11 and a cap 12 which can be screwed together. The liquid sampling device includes: the collection chamber 100, the supply line assembly 200, the body positioning assembly 300, the rotation table assembly 400, the first manipulation assembly 500, and the second manipulation assembly 600.

The collection chamber 100 includes a sampling area, a sample bottle screwing area and a sample bottle taking and placing area, the collection chamber 100 is provided with a taking and placing port 110 in the sample bottle taking and placing area, and the sample bottle 1 can be placed into the collection chamber 100 and taken out from the collection chamber 100 through the taking and placing port 110.

The supply pipe assembly 200 is used for delivering liquid into the collection chamber 100, the supply pipe assembly 200 includes at least one supply pipe 210, the liquid inlet end of the supply pipe assembly 200 is located outside the collection chamber 100, and the liquid outlet end is located in the sampling area. Specifically, the fluid inlet end of the supply line assembly 200 may be connected to a corresponding port on the chemical supply system, and the fluid inlet end of the supply line assembly 200 extends into the collection chamber 100.

The body positioning assembly 300 is used for positioning the body 11 in the sampling area, so that the body 11 can receive the liquid discharged from the liquid discharge end, and the body positioning assembly 300 is disposed in the collection chamber 100 and below the liquid discharge end.

The rotary table assembly 400 is configured to drive the bottle body 11 to rotate, the rotary table assembly 400 is disposed in the sample bottle screwing area, and the rotary table assembly 400 includes a rotary table 410 and a gravity sensor (not shown in the drawing), and the rotary table 410 is configured to perform a rotation action to drive the bottle body 11 to rotate when the gravity sensor senses that the bottle body 11 is placed on the rotary table 410.

The first manipulating component 500 is used for manipulating the bottle body 11 to move among the sampling area, the sample bottle screwing area and the sample bottle picking and placing area, and the first manipulating component 500 is arranged in the collecting chamber 100.

The second handling assembly is disposed in the collection chamber 100, and is used for handling the bottle cap 12 to cap the bottle cap 12 on the bottle body 11, and limiting the bottle cap 12 to rotate with the bottle body 11, so that the bottle body 11 and the bottle cap 12 rotate relatively to be screwed together.

In the above scheme, the sampling process performed by the liquid sampling device may be as follows:

delivering liquid into the collection chamber 100 through the supply line assembly 200;

the first manipulating assembly 500 is used for moving the bottle body 11 of the sample bottle 1 from the picking and placing area to the sampling area, and the bottle body positioning assembly 300 is used for positioning the bottle body 11 so that the bottle body 11 can receive liquid from the liquid draining end;

after the sample is received by the body 11, the first manipulating component 500 may move the body 11 onto the rotary table 410 of the sample bottle screwing area, and when the gravity sensor senses that the body 11 is currently placed on the rotary table 410, an induction signal is generated, so that the rotary table 410 performs a rotation action to drive the body 11 to rotate;

the second control assembly controls the bottle cap 12 to move the bottle cap 12 to above the rotary table 410, covers the bottle cap 12 on the bottle body 11, and limits the bottle cap 12 to rotate along with the bottle body 11, so that the bottle body 11 and the bottle cap 12 are combined by means of the rotation of the bottle body 11, and the bottle cap 12 is screwed on the bottle body 11;

after the screwing is finished, the first manipulating component 500 manipulates the bottle body 11 to move to the sample bottle taking and placing area, and the liquid sampling process is completed.

The whole liquid sampling process is performed in the collecting chamber 100, and the first operating component 500 is used for operating the bottle body 11 of the sample bottle 1 to move among the sampling area, the screwing area and the picking and placing area, and the second operating component is matched with the rotary table 410 component 400 to screw the bottle body 11 and the bottle cap 12.

In some embodiments of the present disclosure, a first positioning groove is provided on the bearing surface of the rotary table 410, and the bottle body 11 may be accommodated in the first positioning groove.

In the above-mentioned scheme, through setting up first location recess, can fix a position body 11 to prevent body 11 and take place askew etc. phenomenon along with revolving stage 410 rotatory in-process, avoid influencing and revolve and twist the effect.

Wherein the first positioning groove may be configured to have an inner diameter size substantially the same as the size of the body 11 to effectively position the body 11.

In addition, the body 11 is rotated with the rotary table 410, so that the body 11 is preferably not rotated relative to the rotary table 410, that is, the body 11 is locked against movement relative to the rotary table 410. Thus, in some embodiments of the present disclosure, a protrusion may be provided on one of the circumferential side wall of the body 11 and the inner side wall of the first positioning groove, and a locking groove may be provided on the other, and the protrusion may be inserted into the locking groove to prevent the body 11 from rotating relative to the rotary table 410.

Specifically, the protrusion may be a rib extending in the axial direction of the body 11, and the catching groove may be a groove extending in the axial direction of the body 11. In this way, on one hand, the rotation of the bottle body 11 relative to the rotary table 410 in the positioning groove can be avoided, and on the other hand, the rib and the groove are easy to align when the bottle body 11 is taken from and put into the positioning groove.

In some exemplary embodiments of the present disclosure, the supply line assembly 200 is provided with a solenoid valve 220 for controlling the on-off state of the supply line assembly 200. By controlling the opening and closing state of the electromagnetic valve 220, the amount of liquid received by the sample bottle 1 can be controlled.

The liquid sampling device further comprises an operable control assembly 700, wherein the operable control assembly 700 is electrically connected with the electromagnetic valve 220 and is used for controlling the opening and closing states of the electromagnetic valve 220 based on control parameters, and the control parameters comprise control parameters input by a user operation and/or control parameters stored in advance.

In the above-mentioned scheme, the on-off state of the electromagnetic valve 220 can be controlled accurately, the liquid outlet and the liquid stop in the sampling process can be controlled accurately, and the electromagnetic valve 220 can be controlled to be on-off state by the operable control assembly 700, wherein in some embodiments, the operable control assembly 700 can comprise the electromagnetic valve control button 710 arranged outside the collection chamber 100, thus, the on-off of the electromagnetic valve 220 can be controlled directly by the operation of a user (operator), the electromagnetic valve 220 is utilized to replace the traditional valve for control, the situation that the liquid is stopped along with the full state can be achieved, the waste of chemicals is reduced, and the production cost is reduced.

In addition, the control mode of the opening and closing state of the electromagnetic valve 220 may be controlled based on the control parameter stored in advance, besides the button control of the electromagnetic valve 220 is operated by the user, so that the opening and closing of the electromagnetic valve 220 may be automatically controlled to control the liquid amount in the sample bottle 1. For example, the opening time parameter of the solenoid valve 220 is stored in advance in the operational control assembly 700, and the opening and closing state of the solenoid valve 220 is directly controlled according to the opening time parameter of the solenoid valve 220 stored in advance.

Furthermore, in some exemplary embodiments, the supply line assembly 200 includes at least two supply lines 210 for delivering different liquids, respectively, each of the supply lines 210 having a separate solenoid valve 220 disposed thereon. The operational control assembly 700 includes a plurality of solenoid valve control buttons 710 corresponding to the solenoid valves 220 on different supply lines 210.

With the above-described arrangement, the different supply lines 210 can be individually controlled by different solenoid control buttons 710, respectively, so that selective access to the liquid can be achieved.

Specifically, the bottle 11 may be placed under a designated supply line 210 under the manipulation of the first manipulation assembly 500 to access the liquid in the supply line 210. The number of supply lines 210 is determined by the chemicals to be sampled, and one supply line 210 is used for each chemical. The chemicals to be sampled may include HF, HCl, NH ₄ OH、H ₂ O ₂ 、HNO ₃ 、KOH、H ₂ SO ₄ And the semiconductor industry needs to use acid-base chemicals.

It should be noted that, when the supply line assembly 200 includes at least two supply lines 210 for respectively delivering different liquids, the body positioning assembly 300 may include a plurality of positioning points, each positioning point corresponds to one supply line 210.

Specifically, the body positioning assembly 300 may include a second positioning groove, into which the body 11 may be received, so as to prevent the body 11 from being tilted when receiving the liquid.

Further, in some exemplary embodiments of the present disclosure, the first manipulation assembly 500 includes a first manipulator; the liquid sampling device further comprises an operable control assembly 700, wherein the operable control assembly 700 is connected with the first mechanical hand and is used for controlling the working state of the first mechanical hand based on control parameters, and the control parameters comprise control parameters input by user operation and/or control parameters stored in advance.

In the above scheme, the first manipulator may be used to clamp the bottle 11, so as to complete the movement of the bottle 11 between the sampling area, the sample bottle screwing area and the sample bottle picking and placing area, and the whole movement process may be controlled by the real-time operation of the user.

Specifically, the operable control assembly 700 may include a display 720 that may interact with an operator, and control of the first manipulator may be achieved by the operator inputting an operation instruction on the display 720.

Of course, the motion of the first manipulator may also be controlled by preset control strategies in the operational control assembly 700.

Further, in some exemplary embodiments of the present disclosure, the second manipulation assembly includes a second manipulator; the liquid sampling device further comprises an operable control assembly 700, wherein the operable control assembly 700 is connected with the second mechanical hand and is used for controlling the working state of the second mechanical hand based on control parameters, and the control parameters comprise control parameters input by user operation and/or control parameters stored in advance.

In the above-mentioned scheme, the second manipulator may be used to clamp the bottle cap 12, when the bottle body 11 is placed on the rotary table 410, the second manipulator may be used to accurately cover the bottle cap 12 on the bottle body 11, and the second manipulator may be used to clamp the bottle cap 12 to limit the bottle cap 12 to rotate along with the bottle body 11, so as to complete the screwing process of the bottle body 11 and the bottle cap 12. And the whole moving process can be completed by controlling the second manipulator in real time by a user.

Specifically, the operable control assembly 700 may include a display 720 that may interact with an operator, and control of the second manipulator may be achieved by the operator entering an operation instruction on the display 720.

Of course, the motion of the second manipulator may also be controlled by preset control strategies in the operational control assembly 700.

It should be noted that, the first manipulating component 500 and the second manipulating component are implemented by using a manipulator, which is easy to control and has high operation precision compared with other modes. It will be understood, of course, that the first steering assembly 500 and the second steering assembly may be implemented without limitation as a robot. For example, the first handling unit 500 may be a conveyor for moving and transporting the bottle body 11, and the second handling unit 600 may be other clamping devices for clamping the bottle cap 12.

The supply line assembly 200, the body 11 and the cap 12 of the sample bottle 1, and the rotary table 410 are made of a material that is resistant to acid and alkali corrosion, for example, PFA (polyvinylfluoride copolymer) material. And moreover, the first manipulator and the second manipulator can be made of ceramic materials, so that the use requirements of a clean room are met, and new metal and acid-base pollution can not be introduced.

In addition, in some embodiments of the present disclosure, the collection chamber 100 is provided with an acid exhaust structure 120 and/or an alkaline exhaust structure 130, so that acid waste gas and/or alkaline waste gas generated during the liquid sampling process can be discharged, so as to ensure a clean environment in the collection chamber 100, and avoid cross contamination when different samples are taken.

Specifically, the acid vent structure 120 includes an acid vent, and the acid vent structure 130 includes an alkaline vent, the acid vent and the alkaline vent being disposed at the top of the collection chamber 100. Valves can be respectively arranged on the acid exhaust pipe and the alkaline exhaust pipe. Opening an acid exhaust pipe when sampling the acid chemicals; when alkaline chemicals are sampled, the alkaline exhaust pipe is opened.

In addition, the collection chamber 100 may be made of transparent acid and alkali corrosion resistant material to facilitate sampling.

Furthermore, in some embodiments of the present disclosure, a leakage preventing layer 800 is provided below the bottom of the collection chamber 100. By arranging the leakage-proof layer 800, liquid can be prevented from flowing from the collection chamber 100 to other devices below the collection chamber 100 when the leakage fault occurs in the liquid collection device, and the leakage can be cleaned in time at the leakage-proof layer 800. The leakage preventing layer 800 may be configured as a tank for collecting leakage or a cavity for collecting leakage.

The following describes a specific operation of the liquid sampling device according to an embodiment of the present disclosure:

placing a clean sample bottle 1 at the pick-and-place port 110 of the collection chamber 100;

clamping the bottle body 11 by a first manipulator, and placing the bottle body 11 in a second positioning groove of the sample bottle 1 positioning assembly right below the supply pipeline assembly 200;

the electromagnetic valve control button 710 is utilized to carry out liquid discharging and stopping control until the liquid received by the body 11 of the sample bottle 1 meets the required liquid amount;

the first manipulator clamps the bottle body 11 and places the bottle body 11 in the first positioning groove of the rotary table 410, at this time, the gravity sensor senses that the bottle body 11 is placed on the rotary table 410, and the rotary table 410 starts to rotate and drives the bottle body 11 to rotate;

the second manipulator clamps the bottle cap 12, covers the bottle cap 11 right above the bottle mouth, and limits the bottle cap 12 to rotate along with the bottle body 11, so as to realize screwing combination of the bottle body 11 and the bottle cap 12;

the second manipulator releases the bottle cap 12 and resets, the first manipulator clamps the bottle body 11 and sends the sample bottle 1 to the taking and placing port 110 so as to finish automatic sampling of liquid;

the operator removes the sample bottle 1 from the pick-and-place port 110 for further test analysis of the sample on the ICP-MS machine.

The following points need to be described:

(1) The drawings of the embodiments of the present disclosure relate only to the structures related to the embodiments of the present disclosure, and other structures may refer to the general design.

(2) In the drawings for describing embodiments of the present disclosure, the thickness of layers or regions is exaggerated or reduced for clarity, i.e., the drawings are not drawn to actual scale. It will be understood that when an element such as a layer, film, region or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present.

(3) The embodiments of the present disclosure and features in the embodiments may be combined with each other to arrive at a new embodiment without conflict.

The above is merely a specific embodiment of the disclosure, but the protection scope of the disclosure should not be limited thereto, and the protection scope of the disclosure should be subject to the claims.

Claims

1. A liquid sampling device for collecting a liquid sample through a sample bottle, the sample bottle comprising a bottle body and a bottle cap which can be screwed together; the liquid sampling device is characterized by comprising:

the supply pipeline assembly is used for conveying liquid into the collection cavity and comprises a liquid inlet end and a liquid outlet end, the liquid inlet end is positioned outside the collection cavity, and the liquid outlet end is positioned in the sampling area;

2. The liquid sampling device according to claim 1, wherein the supply pipeline assembly is provided with a solenoid valve for controlling the on-off state of the supply pipeline assembly, and the liquid sampling device further comprises an operable control assembly electrically connected with the solenoid valve for controlling the on-off state of the solenoid valve based on control parameters, wherein the control parameters comprise control parameters input by user operation and/or control parameters stored in advance.

3. The liquid sampling device of claim 2, wherein the supply line assembly comprises at least two supply lines for delivering different liquids, respectively, each of the supply lines being provided with a separate solenoid valve.

4. A liquid sampling device according to claim 3, wherein the operable control assembly comprises a plurality of solenoid valve control buttons corresponding to solenoid valves on different supply lines.

5. The liquid sampling device of claim 1, wherein the first manipulation assembly comprises a first manipulator; the liquid sampling device further comprises an operable control component, wherein the operable control component is connected with the first mechanical hand and used for controlling the working state of the first mechanical hand based on control parameters, and the control parameters comprise control parameters input by user operation and/or control parameters stored in advance.

6. The liquid sampling device of claim 1, wherein the second manipulation assembly comprises a second manipulator; the liquid sampling device further comprises an operable control component, wherein the operable control component is connected with the second mechanical hand and is used for controlling the working state of the second mechanical hand based on control parameters, and the control parameters comprise control parameters input by user operation and/or control parameters stored in advance.

7. The liquid sampling device of claim 1, wherein the collection chamber is provided with an acidic exhaust structure and/or an alkaline exhaust structure.

8. The liquid sampling device of claim 1, wherein the bearing surface of the rotary table is provided with a first positioning groove.

9. The liquid sampling device of claim 1, wherein the body positioning assembly comprises a second positioning groove.

10. The liquid sampling device of claim 1, wherein a leak-proof layer is provided below the bottom of the collection chamber.