CN220367204U - Microscopic light path coupling system for measuring deep ultraviolet photoluminescence spectrum - Google Patents
Microscopic light path coupling system for measuring deep ultraviolet photoluminescence spectrum Download PDFInfo
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- CN220367204U CN220367204U CN202322002037.5U CN202322002037U CN220367204U CN 220367204 U CN220367204 U CN 220367204U CN 202322002037 U CN202322002037 U CN 202322002037U CN 220367204 U CN220367204 U CN 220367204U
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- 238000000103 photoluminescence spectrum Methods 0.000 title claims abstract description 20
- 230000008878 coupling Effects 0.000 title claims abstract description 18
- 238000010168 coupling process Methods 0.000 title claims abstract description 18
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 18
- 230000003287 optical effect Effects 0.000 claims abstract description 26
- 238000001514 detection method Methods 0.000 claims abstract description 8
- 238000005259 measurement Methods 0.000 abstract description 9
- 230000005284 excitation Effects 0.000 abstract description 6
- 238000005424 photoluminescence Methods 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The utility model discloses a microscopic light path coupling system for measuring deep ultraviolet photoluminescence spectrum, which comprises: the beam shrinking module consists of two or more ultraviolet lenses and is arranged on the laser path and used for shrinking the deep ultraviolet laser beam; a deep ultraviolet narrow strip 45-degree reflecting mirror positioned beside the micro-light-emitting path, and the edge of the reflecting mirror is used for reflecting laser into the micro-light path; and the reflecting objective lens converges the laser reflected by the narrow 45-degree reflecting mirror on the sample, collects the fluorescent signal of the sample and sends the fluorescent signal to the collecting light path for detection. The utility model can be used for microscopic optical path coupling of deep ultraviolet photoluminescence spectrum, realizes microscopic measurement of deep ultraviolet photoluminescence spectrum as short as 200nm, reduces the loss of fluorescent signal of sample to the maximum extent, and has the advantages of higher excitation power density, higher fluorescence signal collection efficiency and higher space resolution capability compared with a non-microscopic deep ultraviolet photoluminescence measurement system.
Description
Technical Field
The utility model relates to the technical field of photoluminescence spectrum (PL spectrum) testing, in particular to a microscopic light path coupling system for measuring deep ultraviolet photoluminescence spectrum, which can be used for microscopic measurement of the deep ultraviolet photoluminescence spectrum.
Background
As is well known, with the development of spectroscopic measurement techniques and the need for scientific research, microscopic optical paths have become an integral part of PL spectroscopic measurements. The introduction of microscopic light paths mainly has the following three roles: (1) The laser spots are converged smaller, and the excitation power density is higher; (2) The collection efficiency of the fluorescent signals of the sample is higher, which is more beneficial to the detection of weak signals; (3) The method can realize higher spatial resolution capability and can realize measurement of the semiconductor micro-nano structure.
In recent years, with the development of wide band gap and ultra wide band gap semiconductor materials and low-dimensional quantum structures thereof, the requirement for deep ultraviolet microscopic PL spectrum has arisen. However, conventional microscopic optical paths typically employ dichroic mirrors or edge filters to couple with the laser optical path, whereas commercial dichroic beam splitters or edge filters typically have only a model with a band above 250nm and are not suitable for PL spectrum measurements below 250 nm.
Therefore, how to couple the microscopic light path and the laser light path of the deep ultraviolet band is a problem that needs to be solved urgently by the current deep ultraviolet PL spectrum measurement technology.
Disclosure of Invention
The utility model mainly aims to provide a microscopic light path coupling system for deep ultraviolet PL spectrum measurement, which achieves the effects of introducing laser into a microscopic light path and allowing most fluorescent signals to enter a collecting light path on the premise of lacking a dichroic beam splitter and an edge filter of a deep ultraviolet band.
To achieve the above object, the present utility model provides a microscopic optical path coupling system for measuring deep ultraviolet photoluminescence spectra, comprising two or more ultraviolet lenses, a narrow stripe mirror, a reflective objective lens, wherein: the two or more ultraviolet lenses form a beam shrinking module and are arranged on a laser path; the microscopic light path is perpendicular to the laser light path, the narrow strip-shaped reflecting mirror is arranged behind the beam shrinking module, and at the side of the microscopic light path, the narrow strip-shaped reflecting mirror forms an included angle of 45 degrees with the laser light path, and the edge of the narrow strip-shaped reflecting mirror reflects laser into the microscopic light path; the reflecting type objective lens is positioned on the micro-display optical path, laser reflected by the narrow strip-shaped reflecting mirror is converged on the sample, and fluorescent signals emitted by the sample are collected by the reflecting type objective lens and sent into the collecting optical path for detection.
In the above scheme, preferably, the beam shrinking module comprises a focal length f 1 And a first ultraviolet lens with focal length f 2 The second ultraviolet lens composition of (2) should satisfy f 1 ＞f 2 The beam diameter of the excitation light is reduced to below 1mm, so that the excitation light is conveniently incident from the reflective objective lens optical path ring.
In the above scheme, the narrow strip-shaped reflector is a deep ultraviolet narrow strip-shaped 45-degree reflector, and the reduced laser beam and the optical path ring of the reflective objective lens are formed to be incident coaxially, enter the reflective objective lens and are focused on the sample. The width of the deep ultraviolet narrow strip 45-degree reflecting mirror is less than 2mm, and the deep ultraviolet narrow strip 45-degree reflecting mirror can reflect laser with the wavelength below 250 nm. Meanwhile, the deep ultraviolet narrow strip 45-degree reflecting mirror has small blocking loss on fluorescent signals returned by the reflecting objective lens.
In the above scheme, the measuring wavelength range of the reflective objective lens used should contain deep ultraviolet band, and the shortest wavelength should be below 250 nm.
In one embodiment of the present utility model, the focal length f of the first ultraviolet lens 1 A focal length f of 300mm of the second ultraviolet lens 2 For 75mm, reducing the deep ultraviolet laser beam with the diameter of 3mm to be 0.75mm so as to be incident from the optical path ring of the reflective objective lens; the outer diameter of the optical path ring of the reflective objective lens is 9.72mm, and the inner diameter of the optical path ring of the reflective objective lens is 4.94mm; the narrow strip-shaped reflector is a deep ultraviolet narrow strip-shaped 45-degree reflector with the width of 1mm, and the length of the edge of the narrow strip-shaped reflector extending into the optical path ring of the reflective objective lens is 1mm. The area of the narrow strip-shaped reflecting mirror for shielding the fluorescent signal of the sample is 1mm 2 The fluorescent signal loss caused by shielding is only 1.8%, which is very beneficial to the detection of ultraviolet band weak signals.
Compared with a non-microscopic deep ultraviolet photoluminescence measurement system, the utility model has the advantages of higher excitation power density, higher fluorescence signal collection efficiency and higher spatial resolution capability, and has the following beneficial effects:
1. the microscopic light path coupling system for measuring the deep ultraviolet photoluminescence spectrum can be used for realizing excitation and detection of deep ultraviolet fluorescence signals with the wavelength as short as 200nm, and expanding the wavelength range of microscopic PL spectrum test to a deep ultraviolet band.
2. The microscopic light path coupling system for measuring the deep ultraviolet photoluminescence spectrum can enable the attenuation of the microscopic light path coupling part to the fluorescent signal to be reduced to a lower level, and the loss of the fluorescent signal of the sample is reduced to the maximum extent.
Drawings
FIG. 1 is a schematic light path diagram of a microscopic light path coupling system that may be used to measure deep ultraviolet photoluminescence spectra, provided by an embodiment of the utility model.
Detailed Description
The present utility model will be further described in detail below with reference to the accompanying drawings by way of specific embodiments, for the purpose of making the objects, technical solutions and advantages of the present utility model more apparent.
Referring to fig. 1, the microscopic optical path coupling system for measuring deep ultraviolet photoluminescence spectrum provided by the present utility model includes: the beam shrinking module consists of a first ultraviolet lens 1 (Len 1) with the focal length of 300mm and a second ultraviolet lens 2 (Len 2) with the focal length of 75mm, and is positioned on a laser path and used for shrinking a deep ultraviolet laser beam with the diameter of 3mm to 0.75mm so as to be incident from a light path ring of the reflective objective lens 4; a narrow strip-shaped reflector 3, which is a deep ultraviolet narrow strip-shaped 45-degree reflector with the width of 1mm, is positioned beside the micro-display optical path, reflects the reduced laser beam into the micro-optical path by utilizing the edge of the narrow strip-shaped reflector, and forms coaxial incidence with the optical path ring of the reflective objective lens 4; the reflecting objective 4, which is a reflecting objective with 15 times, a Numerical Aperture (NA) of 0.4, a working distance of 24mm and a measurable shortest wavelength of 200nm, gathers the laser reflected by the narrow strip reflector 3 onto the sample 5, collects the fluorescent signal of the sample 5, and sends the fluorescent signal into a collecting light path for detection.
Referring to the right side fluorescent cross section schematic diagram of FIG. 1, the optical path ring of the reflective objective 4 has an outer diameter of 9.72mm, an inner diameter of 4.94mm and an area of 55.04mm 2 The method comprises the steps of carrying out a first treatment on the surface of the The width of the narrow strip-shaped reflecting mirror 3 is 1mm, an included angle of 45 degrees is formed between the narrow strip-shaped reflecting mirror and a microscopic light path, the length of the narrow strip-shaped reflecting mirror extending into a light path ring is 1mm, and the area for shielding fluorescent signals of a sample is 1mm 2 The fluorescent signal loss caused by shielding is 1.8%, which is very beneficial to the detection of ultraviolet band weak signals.
The above-mentioned specific embodiments further describe the objects, technical solutions and advantageous effects of the present utility model, and it should be noted that the present utility model belongs to a combination innovation in technical application, where the lens, mirror, objective lens, etc. involved belong to the prior art and have various application forms, and details thereof are not described further herein. The foregoing is provided for the purpose of illustration only and is not intended to limit the utility model, but any modification, equivalent replacement, improvement or the like which comes within the spirit and principles of the utility model should be included in the scope of the utility model.
Claims (6)
1. A microscopic optical path coupling system for measuring deep ultraviolet photoluminescence spectra, comprising two or more ultraviolet lenses, a narrow strip mirror, a reflective objective lens, wherein: the two or more ultraviolet lenses form a beam shrinking module and are arranged on a laser path; the microscopic light path is perpendicular to the laser light path, the narrow strip-shaped reflecting mirror is arranged behind the beam shrinking module, and at the side of the microscopic light path, the narrow strip-shaped reflecting mirror forms an included angle of 45 degrees with the laser light path, and the edge of the narrow strip-shaped reflecting mirror reflects laser into the microscopic light path; the reflecting type objective lens is positioned on the micro-display optical path, laser reflected by the narrow strip-shaped reflecting mirror is converged on the sample, and fluorescent signals emitted by the sample are collected by the reflecting type objective lens and sent into the collecting optical path for detection.
2. The microscopic optical path coupling system according to claim 1, wherein the beam condensing module has a focal length f 1 And a first ultraviolet lens with focal length f 2 A second ultraviolet lens assembly, wherein f 1 ＞f 2 。
3. The microscopic optical path coupling system according to claim 2, wherein the focal length f of the first ultraviolet lens 1 A focal length f of 300mm of the second ultraviolet lens 2 75mm.
4. The microscopic optical path coupling system according to claim 1, wherein the narrow strip mirror is a deep ultraviolet narrow strip 45 ° mirror having a width < 2mm.
5. The microscopic optical path coupling system according to claim 1, wherein the reflective objective lens is a reflective objective lens having a measuring wavelength range including deep ultraviolet.
6. The microscopic optical path coupling system according to claim 1, wherein an optical path ring of the reflective objective lens has an outer diameter of 9.72mm and an inner diameter of 4.94mm; the width of the narrow strip-shaped reflecting mirror is 1mm, and the edge of the narrow strip-shaped reflecting mirror stretches into the light path ring of the reflecting objective lens, and the stretching length of the narrow strip-shaped reflecting mirror is 1mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322002037.5U CN220367204U (en) | 2023-07-27 | 2023-07-27 | Microscopic light path coupling system for measuring deep ultraviolet photoluminescence spectrum |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322002037.5U CN220367204U (en) | 2023-07-27 | 2023-07-27 | Microscopic light path coupling system for measuring deep ultraviolet photoluminescence spectrum |
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| CN220367204U true CN220367204U (en) | 2024-01-19 |
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| CN202322002037.5U Active CN220367204U (en) | 2023-07-27 | 2023-07-27 | Microscopic light path coupling system for measuring deep ultraviolet photoluminescence spectrum |
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2023
- 2023-07-27 CN CN202322002037.5U patent/CN220367204U/en active Active
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