CN108982467A - The Raman fiber miniature probe of low spectral background - Google Patents
The Raman fiber miniature probe of low spectral background Download PDFInfo
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- CN108982467A CN108982467A CN201810621060.3A CN201810621060A CN108982467A CN 108982467 A CN108982467 A CN 108982467A CN 201810621060 A CN201810621060 A CN 201810621060A CN 108982467 A CN108982467 A CN 108982467A
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- 239000000523 sample Substances 0.000 title claims abstract description 134
- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 92
- 230000003595 spectral effect Effects 0.000 title claims abstract description 88
- 239000000835 fiber Substances 0.000 title claims abstract description 64
- 239000013307 optical fiber Substances 0.000 claims abstract description 30
- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 230000005284 excitation Effects 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 6
- 238000002955 isolation Methods 0.000 claims description 6
- 238000002310 reflectometry Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000008054 signal transmission Effects 0.000 claims description 3
- 230000013011 mating Effects 0.000 claims description 2
- 230000003760 hair shine Effects 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 9
- 238000001237 Raman spectrum Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 6
- 230000009286 beneficial effect Effects 0.000 abstract description 5
- 238000012360 testing method Methods 0.000 description 15
- 239000011521 glass Substances 0.000 description 12
- 238000001228 spectrum Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000005304 optical glass Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000012472 biological sample Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
Abstract
The present invention relates to technical field of Raman spectrum, the spectral background for solving the problems, such as that the optical element in existing probe generates there is no effective suppressing method, the Raman fiber miniature probe of low spectral background is provided, it includes probing shell and the excitation fiber being set in probing shell, collection optical fiber, the first coupled lens, focusing mirror and filter set, filter set include bandpass filter, dichroscope and edge filter；The first coupled lens and bandpass filter are sequentially passed through from the laser of excitation fiber；Laser reflection to focusing mirror, focusing mirror are focused on sample after collecting laser by dichroscope；The Raman signal of sample sequentially passes through dichroscope and edge filter after focusing mirror is collected.Focusing mirror is used, the conventional lenses used rather than tradition is popped one's head in, under the premise of guaranteeing that probe size is small and exquisite and sensor sensitivity is higher, the basic spectral background for removing probe itself is very beneficial for the detection to weak signal sample.
Description
Technical field
The present invention relates to technical field of Raman spectrum, in particular to the Raman fiber miniature probe of low spectral background.
Background technique
Raman spectrum has been widely used in scientific research, production and life as a kind of lossless, fingerprint detection method
Field.Traditional Raman spectroscopy instrument based on microscopic system have been relatively mature, and have very high sensitivity and very low
Spectral background, be suitble to scientific research and the indoor application of experiment.But this kind of equipment instrument is big and is difficult to move, it is difficult to scene inspection
It surveys.The Raman probe of optical fiber type then has very small volume, and the optical fiber for connecting probe is flexible, flexibly changing test
Position and angle are highly suitable for being difficult to Raman detection, the scene inspection of mobile example (such as big workpiece surface, the archaeology art work)
Survey and original position and on-line monitoring in industrial production.
Traditional Raman fiber miniature probe is mainly by incident optical, reception optical fiber, the first coupled lens, filter set
The part such as (including bandpass filter, dichroscope and long pass filter) and condenser lens forms, and has had already appeared a variety of quotient
The product of product.But this kind of probe is generally used for analyzing the sample having compared with strong Raman signal, and it is very weak to Raman signal
Sample (such as biological sample, nano thin-film, metallic corrosion products) be difficult to obtain preferable test effect at present.In addition to probe
Remolding sensitivity had outside gap using the large-scale Raman spectrometer of microscopic system, there are one major reason be this kind of probe all
With certain spectral background, so that faint sample Raman optical signal be made to be submerged in spectral background.Due to spectral background with
The Raman signal of sample, which is coupled, to be difficult to differentiate between, and is increased with laser power, the time of integration and increased (the same with sample),
Therefore sample Raman signal as low as to a certain degree when, by change test parameter and testing time etc. be all difficult to effectively detect sample
Raman signal.Raman fiber miniature probe has become problem in the industry to the detection of weak signal, not can effectively solve for many years,
Which has limited application of the fiber Raman probe in some systems and scene.
Spectral background generates the fluorescence mainly generated in a fiber by laser and Raman signal, laser in optical filter and mirror
The composition such as spectral background of generation is transmitted in head.Light is then almost difficult to observe by using the large-scale Raman spectrometer of microscopic system
It composes background (except environment light), main cause is that the biggish volume of large-scale Raman spectrometer can accommodate longer light path, can be used
Lower optical density and total focusing principle effectively inhibit stray light.And the general volume of fibre-optical probe is smaller, optical path
It is very compact, it is larger so as to cause laser power density, and the spectral background of generation is difficult to effectively inhibit.Currently, right in the industry
The spectral background that optical fiber generates can be solved substantially by increasing the method for bandpass filter and long pass filter, but to spy
The spectral background that optical element (optical filter and lens etc.) in head generates then there is no effective suppressing method, this is because these
The substrate of optical element is all optical glass, and laser can all generate spectral background by these glass substantially.
Summary of the invention
The present invention is intended to provide a kind of Raman fiber miniature probe of low spectral background, to solve the optics in existing probe
The problem of spectral background that element generates there is no effective suppressing method.
The embodiment of the present invention is achieved in that
The embodiment of the present invention provides the Raman fiber miniature probe of low spectral background,
Including probing shell and the excitation fiber being set in probing shell, collect optical fiber, the first coupled lens, focusing instead
Mirror and filter set are penetrated, filter set includes bandpass filter, dichroscope and edge filter；Focusing mirror can focus
Laser is to sample and can collect the Raman signal of sample；
First coupled lens and bandpass filter are correspondingly arranged in the side of excitation fiber, from the laser of excitation fiber
Sequentially pass through the first coupled lens and bandpass filter；Dichroscope and focusing mirror are obliquely installed respectively, and dichroscope will
To focusing mirror, focusing mirror is focused laser reflection across bandpass filter after collecting the laser reflected through dichroscope
In the sample for being located at focusing mirror side；
Edge filter is set to the side of dichroscope, the Raman signal of sample after focusing mirror is collected successively
Across dichroscope and edge filter, finally through collecting optical fiber output.
Focusing mirror can focus laser to sample and collect the scattered light signal of sample, will replace used in tradition probe
Condenser lens.Under the premise of guaranteeing that probe size is small and exquisite and sensor sensitivity is higher, by using reflective lens and warp
The light channel structure for crossing design can remove spectral background substantially, be very beneficial for the detection to weak signal sample.
In the present embodiment: the laser in excitation fiber becomes directional light by the first coupled lens, using band
Pass filter filters out the stray light other than laser, obtains pure incident laser；Laser is reflected by dichroscope, and laser passes through
Focusing mirror focuses on sample, and the Raman signal (in figure shown in dotted line) of sample is changed into after focusing mirror is collected
On parallel beam incident to dichroscope, the laser of reflection and scattering is largely reflected by dichroscope, and only 1% laser is saturating
It crosses and passes through glass baseplate.The Raman signal of laser and sample is further filtered by edge filter, reflection at this time and
The laser intensity of scattering reduces by 10 again6Times, so that the spectral background generated in optical fiber and optical element below is negligible.Upper
It states in embodiment, excitation fiber can use 100 micron multi-mode optical fiber of core diameter, issue the laser of 532nm.Bandpass filter penetrates
Bandwidth 2nm.The reflectivity of dichroscope about 99%.
Hold above-mentioned, the Raman fiber miniature probe of low spectral background provided by the present application uses focusing mirror, rather than
Tradition probe conventional lenses used, can avoid the spectral background that optical glass generates.Guaranteeing that probe size is small and exquisite and pops one's head in
Under the premise of with higher sensitivity, spectral background can be removed substantially by using reflective lens, is very beneficial for weak signal sample
The detection of product.
In an embodiment of the present embodiment:
Bandpass filter is provided with the first filming face that can effectively end bias light；
The first filming face is along laser transmission direction position in the side of the close sample of bandpass filter.
In an embodiment of the present embodiment:
Bandpass filter uses narrow band filter；
Effective cut-off efficiency of narrow band filter is greater than 104。
In an embodiment of the present embodiment:
Dichroscope is provided with the second coated surface that can effectively end laser light；
Second coated surface is along laser transmission direction position in the side of the close sample of dichroscope.
In an embodiment of the present embodiment:
Dichroscope leads to dichroscope using long wave；
The laser reflectivity that long wave leads to dichroscope is greater than 95%.
In an embodiment of the present embodiment:
Edge filter is provided with the third coated surface that can effectively end Rayleigh scattering light；
Third coated surface is located at the side of the close sample of edge filter along the Raman signal transmission direction of sample.
In an embodiment of the present embodiment:
Edge filter uses long pass filter；
Edge filter is greater than 10 to laser cutoff efficiency6。
In an embodiment of the present embodiment:
Focusing mirror can be using any one in parabolic mirror, off-axis concave mirror and catoptric lens
Kind.
In an embodiment of the present embodiment:
The Raman fiber miniature probe of low spectral background further includes plane mirror and the second coupled lens；
Plane mirror is set to the side of edge filter, and the second coupled lens are set to edge filter and collect light
Between fibre；
Raman signal across the sample of edge filter is reflected across the second coupled lens, finally by plane mirror
It is collected by collection optical fiber.
In an embodiment of the present embodiment:
Excitation fiber and collection optical fiber are respectively positioned on the side of probing shell；
The Raman fiber miniature probe of low spectral background further include be set to the first coupled lens and the second coupled lens it
Between optical isolation device.
The beneficial effects of the present invention are: the Raman fiber miniature probe of low spectral background proposed by the present invention, relative to mesh
Preceding fiber Raman miniature probe design can be shown under the premise of guaranteeing that probe size is small and exquisite and sensor sensitivity is higher
It writes and reduces the optical signal that laser transmits generation in optical element substrate glass, can get low-down spectral background, have very much
Conducive to faint Raman signal is measured, there is very high application and popularization value.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the overall structure diagram of the Raman fiber miniature probe of low spectral background provided in an embodiment of the present invention；
Fig. 2 is the spectral background that the Raman fiber optic probe of the first structure provided in an embodiment of the present invention is tested；
Fig. 3 is to test after the Raman fiber optic probe of the first structure provided in an embodiment of the present invention removes condenser lens
Spectral background；
Fig. 4 is the spectral background that the Raman fiber optic probe of second of structure provided in an embodiment of the present invention is tested；
Fig. 5 is that the Raman fiber optic probe of second of structure provided in an embodiment of the present invention tests the Raman spectrum of monocrystalline silicon；
Fig. 6 is the spectral background of the Raman fiber miniature probe of low spectral background provided in an embodiment of the present invention；
Fig. 7 is the Raman for the monocrystalline silicon that the Raman fiber miniature probe of low spectral background provided in an embodiment of the present invention is tested
Spectrum.
Icon: 101- excitation fiber；The first coupled lens of 102-；103- optical isolation device；104- probing shell；105- band
Pass filter；106- long wave leads to dichroscope；107- ligh trap；108- focusing mirror；109- sample；110- long pass filter；
111- plane mirror；The second coupled lens of 112-；113- collects optical fiber.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without making creative work belongs to the model that the present invention protects
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In the description of the present invention, it should be noted that if occur term " center ", "upper", "lower", "left", "right",
The orientation or positional relationship of the instructions such as "vertical", "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings,
Either the invention product using when the orientation or positional relationship usually put, be merely for convenience of the description present invention and simplification retouched
It states, rather than the device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation,
Therefore it is not considered as limiting the invention.If only being used in addition, occurring term " first ", " second " etc. in description of the invention
It is described in distinguishing, is not understood to indicate or imply relative importance.
If being not offered as requiring component absolute in addition, occurring the terms such as term "horizontal", "vertical" in description of the invention
Horizontal or pendency, but can be slightly tilted.If "horizontal" only refers to that its direction is more horizontal with respect to for "vertical", not
It is to indicate that the structure is had to fully horizontally, but can be slightly tilted.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, if there is term
" setting ", " installation ", " connected ", " connection " shall be understood in a broad sense, for example, " connection " may be a fixed connection, being also possible to can
Dismantling connection, or be integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, can also pass through
Intermediary is indirectly connected, and can be the connection inside two elements.For the ordinary skill in the art, can have
Body situation understands the concrete meaning of above-mentioned term in the present invention.
Embodiment, referring to Figure 1 to Figure 7.
As shown in Figure 1, the embodiment of the present invention provides the Raman fiber miniature probe of low spectral background,
Including probing shell 104 and the excitation fiber 101 being set in probing shell 104, collect optical fiber 113, the first coupling
Lens 102, focusing mirror 108 and filter set are closed, filter set includes bandpass filter 105, dichroscope and cut-off filter
Mating plate；Focusing mirror 108 can focus laser to sample 109 and can collect the Raman signal of sample 109；
First coupled lens 102 and bandpass filter 105 are correspondingly arranged in the side of excitation fiber 101, from excitation
The laser of optical fiber 101 sequentially passes through the first coupled lens 102 and bandpass filter 105；Dichroscope and focusing mirror 108 divide
It is not obliquely installed, dichroscope passes through the laser reflection of bandpass filter 105 to focusing mirror 108, focusing mirror 108
The sample 109 positioned at 108 side of focusing mirror is focused on after collecting the laser reflected through dichroscope；
Edge filter is set to the side of dichroscope, and the Raman signal of sample 109 is collected by focusing mirror 108
After sequentially pass through dichroscope and edge filter, finally through collect optical fiber 113 export.
It should be noted that the spectral background that laser penetrates generation in optical element not necessarily can all be detected device collection
Arrive, (including collecting optical fiber 113) has a collection angle problem because of detector, if optical element from detector distance compared with
It is remote or use confocal system, it also can be significantly reduced the spectral background of optical element generation, but fibre-optical probe is due to small in size,
The very compact particularity of optical path, so that laser penetration optical element is generated spectral background, some is collected into, thus
Generate the interference of spectral background.The spectral background influences the test of sample 109 little under normal circumstances, it might even be possible to use background
Deduction method deducts, but weak raman spectral signal may be then submerged in spectral background, or even in long-time integration feelings
Under condition, spectral background is possible to cause 109 normal Raman signal of sample that can not be detected beyond detector dynamic range, because
This, under the premise of guaranteeing Raman probe sensitivity, the spectral background for reducing fiber Raman probe is non-to the detection of weak Raman signal
Chang Youli.
As shown in Figure 1, solid line with the arrow indicates that exciting light, dotted line with the arrow indicate Raman light.Bandpass filter
105, dotted line side indicates to be coated with coated surface in dichroscope and edge filter.
In the present embodiment: the laser in excitation fiber 101 is (shown in solid in Fig. 1) by the first coupled lens
102 become directional light, filter out the stray light other than laser using bandpass filter 105, obtain pure incident laser；Laser
It is reflected by dichroscope, laser focuses on sample 109 by focusing mirror 108, and the Raman signal of sample 109 is (in figure
Shown in dotted line) it is changed on parallel beam incident to dichroscope after the collection of focusing mirror 108, it reflects and what is scattered swashs
Wide part is reflected by dichroscope, and only 1% laser light simultaneously passes through glass baseplate.The Raman of laser and sample 109 letter
It number is further filtered by edge filter, the laser intensity for reflecting and scattering at this time reduces by 10 again6Times, thus later
The spectral background generated in optical fiber and optical element is negligible.In the above-described embodiments, excitation fiber 101 can use core diameter
100 micron multi-mode optical fibers issue the laser of 532nm.Bandpass filter 105 penetrates bandwidth 2nm.The reflectivity of dichroscope is about
99%.
Hold above-mentioned, the Raman fiber miniature probe of low spectral background provided by the present application uses focusing mirror 108, without
It is conventional lenses, can avoid the spectral background that optical glass generates.Guaranteeing that probe size is small and exquisite and sensor sensitivity is higher
Under the premise of, spectral background can be removed substantially by using reflective lens, be very beneficial for the detection to weak signal sample 109.
As shown in Figure 1, in an embodiment of the present embodiment:
The Raman fiber miniature probe of low spectral background further includes plane mirror 111 and the second coupled lens 112；
Plane mirror 111 is set to the side of edge filter, the second coupled lens 112 be set to edge filter and
It collects between optical fiber 113；
Raman signal across the sample 109 of edge filter is reflected across the second coupling thoroughly by plane mirror 111
Mirror 112 is finally collected by collection optical fiber 113.
Finally pass through plane mirror 111 across the Raman signal of edge filter to reflect, is then passed through the second coupled lens
It is collected the collection of optical fiber 113 after 112, eventually enters into spectrometer detection.100 micron multi-mode of core diameter can be used by collecting optical fiber 113
Optical fiber is also possible to the fiber optic bundle of single or more composition.
As shown in Figure 1, in an embodiment of the present embodiment:
Excitation fiber 101 and collection optical fiber 113 are respectively positioned on the side of probing shell 104；
The Raman fiber miniature probe of low spectral background further includes being set to the first coupled lens 102 and the second coupled lens
Optical isolation device 103 between 112.
The effect of optical isolation device 103 is isolation input path and receiving light path, so that it is dry to reduce incident and output optical signal
It disturbs.
As shown in Figure 1, in an embodiment of the present embodiment:
The Raman fiber miniature probe of low spectral background further includes the ligh trap 107 being set in probing shell 104, ligh trap
107 design to absorb remaining incident light, can play a part of to eliminate stray light.
As shown in Figure 1, in an embodiment of the present embodiment:
Bandpass filter 105 is provided with the first filming face that can effectively end bias light；
The first filming face is along laser transmission direction position in the side of the close sample 109 of bandpass filter 105.
Bandpass filter 105 can filter out the stray light other than laser, obtain pure incident laser.The first filming face is set
It is disposed adjacent to the side of sample 109, the spectrum back that the glass baseplate of 109 side of separate sample in the first filming face generates will be located at
Scape stops, and prevents it to be incident on by the reflection of sample 109 and collects side, meanwhile, reduce laser to greatest extent in non-glass
The spectral background of generation is transmitted in material.
In an embodiment of the present embodiment:
Bandpass filter 105 uses narrow band filter；
Effective cut-off efficiency of narrow band filter is greater than 104。
Narrow band filter penetrates incident laser selectively, transmits the spectrum back of generation in a fiber for removing laser
Scape can be double-sided coating, be also possible to coating single side, but the first filming face of effectively cut-off bias light should be towards sample 109
Side (is transmitted as sequence by laser), effectively ends efficiency and is greater than 104。
As shown in Figure 1, in an embodiment of the present embodiment:
Dichroscope is provided with the second coated surface that can effectively end laser light；
Second coated surface is along laser transmission direction position in the side of the close sample 109 of dichroscope.
Second coated surface reduces laser to greatest extent and transmits generation in non-glass material towards 109 side of sample
Spectral background.
In an embodiment of the present embodiment:
Dichroscope leads to dichroscope 106 using long wave；
The laser reflectivity that long wave leads to dichroscope 106 is greater than 95%.
Long wave leads to 106 reflection laser of dichroscope and can penetrate Raman signal, and laser reflection face is located at 109 side of sample,
The reflectivity of laser is greater than 95%, avoids laser from transmitting in glass material and generates additional spectral background signal.Long wave logical two
The laser reflection of bandpass filter 105 is passed through to focusing mirror 108 to Look mirror 106, and can penetrate line focus reflecting mirror
Raman signal after 108 reflections.
As shown in Figure 1, in an embodiment of the present embodiment:
Edge filter is provided with the third coated surface that can effectively end Rayleigh scattering light；
Third coated surface is located at the close sample 109 of edge filter along the Raman signal transmission direction of sample 109
Side.
Third coated surface reduces laser to greatest extent and transmits generation in non-glass material towards 109 side of sample
Spectral background.The laser that Rayleigh scattering light namely scatters.
In an embodiment of the present embodiment:
Edge filter uses long pass filter 110；
Edge filter is greater than 10 to laser cutoff efficiency6。
Long pass filter 110 is greater than 10 to laser cutoff efficiency6, equally can be double-sided coating, be also possible to single side plating
Film.
The Raman signal of laser and sample 109 is further filtered through too long pass filter 110, is reflected and is scattered at this time
Laser intensity reduce by 10 again6Times, so that the spectral background generated in optical fiber and optical element below is negligible.
In an embodiment of the present embodiment:
Focusing mirror 108 can be using any in parabolic mirror, off-axis concave mirror and catoptric lens
It is a kind of.
Focusing mirror 108 can be the reflective focusing such as parabolic mirror, off-axis concave mirror, catoptric lens
Mirror, it acts as focusing laser and collecting the Raman signal of sample 109, numerical aperture can be between 0.05-0.8.
For 108 mirror of focusing mirror used in the present embodiment for off-axis parabolic mirror, diameter is 12.7mm focal length
15mm, numerical aperture is suitable with traditional glass lens collection efficiency close to 0.4, but the not interference of spectral background.
Finally, enumerating part Experiment figure by reference.
Fig. 2 is the spectral background of certain commercialization Raman probe.Test condition is 50mw, 532nm laser, the time of integration
30s, the sample 109 when test is air, and external environment is darkroom.It can be seen that in Fig. 2, in addition to 1550 wave numbers and 2450 wave numbers are left
The right side is outside the Raman spectrum of oxygen and nitrogen, and there are also obvious spectrum back ends, this partial spectrum background is mainly due to internal optics member
Part causes.
Fig. 3 is the spectral background tested after certain commercialization Raman probe removes condenser lens.The same Fig. 2 of test condition.
After the glass lens of focusing is removed, spectral background obviously weakens, but there are still compared with strong spectral background.Show to produce in addition to lens
Outside raw spectral background, probe internal element can also generate spectral background.It is proved by actual measurement by increasing optical filter quantity (as increased
Add the bandpass filter 105 and Rayleigh optical filter at incident optical) it will not all weaken the background, it can be inferred that spectral background produces
It is raw the reason is that the probe uses the dichroscope (short pass filter) of transmission-type, laser be directed through dichroscope can generate it is bright
Aobvious spectral background.
Fig. 4 is the spectral background of another commercialization Raman probe.The same Fig. 2 of test condition.The probe is using reflective
Dichroscope (long pass filter 110), but focus lamp uses glass lens, therefore still it can be found that apparent spectrum back
Scape.
Fig. 5 is the Raman spectrum of another commercialization Raman probe.Test condition is 50mw 532nm laser, the time of integration
30s, the sample 109 when test is monocrystalline silicon, and external environment is darkroom.Although it can be found that peak single order peak (520cm-1) of silicon
It is very strong, it can obviously be differentiated from spectral background, but second order peak (940cm-1 broad peak) mixes with spectral background signal,
It is more difficult to differentiate, therefore the probe is still difficult to meet the requirement for measuring weaker Raman signal.
Fig. 6 is using the Raman fiber miniature probe of low spectral background proposed by the present invention (using what is used in the present embodiment
Data) spectral background, the same Fig. 2 of test condition.Can be with from figure, other than oxygen in air and nitrogen peak, spectral background
Very clean, this provides good basis for measurement weak signal.
The Raman light for the monocrystalline silicon that Fig. 7 is tested using the Raman fiber miniature probe of low spectral background proposed by the present invention
Spectrum.The same Fig. 5 of test condition.It can be found that the single order peak and second order peak of silicon are all clearly, and without spectrum background interference, light letter
Number intensity and Fig. 5 are substantially suitable, it was demonstrated that the Raman fiber miniature probe of low spectral background of the present invention has and commercialization is visited
Comparable sensitivity, and can further improve sensitivity by increasing by 108 numerical aperture of focusing mirror.Should statistics indicate that,
The fiber Raman miniature probe of low spectral background provided by the invention can guarantee that probe size is small and exquisite and sensor sensitivity is higher
Under the premise of, the spectral background of probe itself is significantly reduced, weak signal sample 109 is detected for Portable Raman spectrometer and provides
A kind of good solution has very high application and popularization value.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of Raman fiber miniature probe of low spectral background, it is characterised in that:
Including probing shell and the excitation fiber being set in the probing shell, collect optical fiber, the first coupled lens, focusing instead
Mirror and filter set are penetrated, the filter set includes bandpass filter, dichroscope and edge filter；The focusing mirror
Laser can be focused to sample and the Raman signal of the sample can be collected；
First coupled lens and the bandpass filter are correspondingly arranged in the side of the excitation fiber, swash from described
The fine laser that shines sequentially passes through first coupled lens and the bandpass filter；The dichroscope and the focusing are anti-
Mirror to be penetrated to be obliquely installed respectively, the dichroscope passes through the laser reflection of the bandpass filter to the focusing mirror,
The focusing mirror focuses on the institute positioned at the focusing mirror side after collecting the laser reflected through the dichroscope
State sample；
The edge filter is set to the side of the dichroscope, and the Raman signal of the sample is reflected by the focusing
Mirror sequentially passes through the dichroscope and the edge filter after collecting, finally through the collection optical fiber output.
2. the Raman fiber miniature probe of low spectral background according to claim 1, it is characterised in that:
The bandpass filter is provided with the first filming face that can effectively end bias light；
The first filming face is along laser transmission direction position in the side close to the sample of the bandpass filter.
3. the Raman fiber miniature probe of low spectral background according to claim 1, it is characterised in that:
The bandpass filter uses narrow band filter；
Effective cut-off efficiency of the narrow band filter is greater than 104。
4. the Raman fiber miniature probe of low spectral background according to claim 1, it is characterised in that:
The dichroscope is provided with the second coated surface that can effectively end laser light；
Second coated surface is along laser transmission direction position in the side close to the sample of the dichroscope.
5. the Raman fiber miniature probe of low spectral background according to claim 1, it is characterised in that:
The dichroscope leads to dichroscope using long wave；
The laser reflectivity that the long wave leads to dichroscope is greater than 95%.
6. the Raman fiber miniature probe of low spectral background according to claim 1, it is characterised in that:
The edge filter is provided with the third coated surface that can effectively end Rayleigh scattering light；
The third coated surface is located at the close described of the edge filter along the Raman signal transmission direction of the sample
The side of sample.
7. the Raman fiber miniature probe of low spectral background according to claim 1, it is characterised in that:
The edge filter uses long pass filter；
The edge filter is greater than 10 to laser cutoff efficiency6。
8. the Raman fiber miniature probe of low spectral background according to claim 1, it is characterised in that:
The focusing mirror can be using any one in parabolic mirror, off-axis concave mirror and catoptric lens
Kind.
9. the Raman fiber miniature probe of low spectral background according to claim 1, it is characterised in that:
The Raman fiber miniature probe of the low spectral background further includes plane mirror and the second coupled lens；
The plane mirror is set to the side of the edge filter, and second coupled lens are set to the cut-off filter
Between mating plate and the collection optical fiber；
Raman signal across the sample of the edge filter is reflected by the plane mirror across described second
Coupled lens are finally collected by the collection optical fiber.
10. the Raman fiber miniature probe of low spectral background according to claim 9, it is characterised in that:
The excitation fiber and the side collected optical fiber and be respectively positioned on the probing shell；
The Raman fiber miniature probe of the low spectral background further includes being set to first coupled lens and second coupling
Close the optical isolation device between lens.
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| CN201810621060.3A CN108982467A (en) | 2018-06-15 | 2018-06-15 | The Raman fiber miniature probe of low spectral background |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109975210A (en) * | 2019-04-28 | 2019-07-05 | 重庆冠雁科技有限公司 | A kind of bare engine module of handheld Raman spectrometer |
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| US20080180663A1 (en) * | 2006-10-19 | 2008-07-31 | Kaiser Optical Systems | Raman probe configured for low-concentration measurements |
| CN103822910A (en) * | 2012-11-16 | 2014-05-28 | 福州高意通讯有限公司 | Raman probes for miniature Raman spectrometer |
| CN106546533A (en) * | 2015-09-20 | 2017-03-29 | 简佩蓉 | A kind of use full aperture angle parabolic lens collects the equipment of Surface Enhanced Raman Scattering Spectrum |
| CN208588673U (en) * | 2018-06-15 | 2019-03-08 | 中国工程物理研究院材料研究所 | The Raman fiber miniature probe of low spectral background |
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2018
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080180663A1 (en) * | 2006-10-19 | 2008-07-31 | Kaiser Optical Systems | Raman probe configured for low-concentration measurements |
| CN103822910A (en) * | 2012-11-16 | 2014-05-28 | 福州高意通讯有限公司 | Raman probes for miniature Raman spectrometer |
| CN106546533A (en) * | 2015-09-20 | 2017-03-29 | 简佩蓉 | A kind of use full aperture angle parabolic lens collects the equipment of Surface Enhanced Raman Scattering Spectrum |
| CN208588673U (en) * | 2018-06-15 | 2019-03-08 | 中国工程物理研究院材料研究所 | The Raman fiber miniature probe of low spectral background |
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| CN109975210A (en) * | 2019-04-28 | 2019-07-05 | 重庆冠雁科技有限公司 | A kind of bare engine module of handheld Raman spectrometer |
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