CN220366799U - Zero position verification device for flat-plate epitaxial equipment - Google Patents
Zero position verification device for flat-plate epitaxial equipment Download PDFInfo
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- CN220366799U CN220366799U CN202322004513.7U CN202322004513U CN220366799U CN 220366799 U CN220366799 U CN 220366799U CN 202322004513 U CN202322004513 U CN 202322004513U CN 220366799 U CN220366799 U CN 220366799U
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Abstract
The utility model discloses a zero position verification device for flat-plate epitaxial equipment, and belongs to the field of equipment zero verification. The zero point position checking device of the flat-plate epitaxial equipment comprises: the zero point laser assembly controls the rotating shaft to rotate to the zero point position during operation, and the laser emits laser to form a light spot on the zero point position card to accurately record the zero point position. By repeatedly recording and comparing zero points, the repeated positioning precision of the zero points can be checked, the running condition of the zero point system of the epitaxial equipment is monitored, the efficiency and the reliability of zero point checking operation are greatly improved, and the qualification rate of epitaxial products is remarkably improved.
Description
Technical Field
The utility model relates to the field of equipment zero position verification, in particular to a zero position verification device for flat-plate epitaxial equipment.
Background
The flat-plate epitaxial device needs to find the zero position of the base by using a zero system in the process of loading and taking the wafers, and then controls the rotation shaft to rotate to the position corresponding to the pit on the base according to the fixed position step number. The flat-plate epitaxial product has extremely high requirement on thickness uniformity, and small position deviation can cause abnormal thickness uniformity of the product, so that the zero position is required to have high repetition precision.
How to verify the repeated reliability of the zero point position is always a considerable problem in actual production, and in the prior production practice, the repeated judgment is often carried out by naked eyes of production staff, and the verification mode is time-consuming, laborious and unreliable.
Therefore, a new technology is required to solve the above-mentioned problems.
Disclosure of Invention
In order to overcome the defects in the prior art, the utility model provides a zero position verification device for flat-plate epitaxial equipment, which realizes repeated and accurate verification of the zero position of a base by using laser equipment.
In order to achieve the above purpose, the scheme provided by the utility model is as follows: a zero position verification device of flat epitaxial equipment comprises a base, a rotating shaft, a rotating platform, a zero laser component, a laser, a zero position card positioned at one side of the rotating platform and separated from the rotating platform by a certain distance,
the base is fixedly connected to the top of the rotating shaft through a center hole, a zero position hole is formed in the edge of the base, the upper surface of the base is perpendicular to the axis of the rotating shaft, the rotating platform is fixedly connected to the rotating shaft and located below the base, the zero laser assembly is fixed above the base, a laser path emitted by the zero laser assembly is perpendicular to the plane of the base and can be reflected through the zero position hole when the base rotates to a fixed position, the laser is fixed on the rotating platform, and a zero position card is used for receiving laser emitted by the laser to form a light spot on the zero position card.
Specifically, the side surface of the zero point position card for receiving laser is a plane, and the side surface is perpendicular to the laser emergent direction of the laser.
Specifically, the zero laser component is electrically connected with the rotating shaft. When the zero-point laser component emits laser to pass through the zero-point position hole, the zero-point laser component sends an electric signal to enable the rotating shaft to stop rotating, and after the rotating shaft stops rotating, the base reaches the zero-point position by rotating by a fixed step number, and at the moment, the position of a laser spot is recorded on the zero-point position card.
In particular, the laser emits laser light continuously in operation.
Compared with the prior art, the utility model has the beneficial effects that: the utility model provides a zero position verification device, which utilizes a laser to replace the traditional human eye verification, the zero position of each operation can be accurately recorded on a zero position card, the repeated positioning precision of the zero point can be verified through the comparison of multiple zero positions, the running condition of a zero point system of epitaxial equipment is monitored, the efficiency and the reliability of the zero point verification operation are greatly improved, and the qualification rate of epitaxial products is remarkably improved.
Drawings
Fig. 1 is a schematic top plan view of the base of the present utility model.
Fig. 2 is an overall schematic diagram of a zero position checking device of a flat-plate epitaxial device of the present utility model.
In the figure: 1. the device comprises a base, a rotating shaft, a rotating platform, a zero point laser assembly, a laser, a zero point position clamp, a center hole and a zero point position hole.
Detailed Description
The present utility model is further illustrated in the accompanying drawings and detailed description which are to be understood as being merely illustrative of the utility model and not limiting of its scope, and various modifications of the utility model, which are equivalent to those skilled in the art upon reading the utility model, will fall within the scope of the utility model as defined in the appended claims.
In order to keep the following description of the embodiments of the present utility model clear and concise, the detailed description of known functions and known components thereof have been omitted.
Referring to fig. 1-2, the embodiment provides a zero position calibration device for a flat-plate epitaxial device, which comprises a base 1, a rotating shaft 2, a rotating platform 3, a zero laser component 4, a laser 5, and a zero position card 6 positioned at one side of the rotating platform 3 and spaced from the rotating platform 3 by a certain distance,
the base 1 is fixedly connected to the top of the rotating shaft 2 through a central hole 11, a zero position hole 12 is formed in the edge of the base, the upper surface of the base 1 is perpendicular to the axis of the rotating shaft 2, the rotating platform 3 is fixedly connected to the rotating shaft 2 and located below the base 1, the zero laser component 4 is fixed above the base 1, the laser path emitted by the zero laser component 4 is perpendicular to the plane of the base 1 and can be reflected through the zero position hole 12 when the base 1 rotates to a fixed position, the laser 5 is fixed on the rotating platform 3, the laser 5 continuously emits laser during operation, and the position of the emitted laser is displayed on the zero position card 6.
The zero point laser component 4 is electrically connected with the rotating shaft 2, and when the zero point laser component 4 emits laser to pass through the zero point position hole 12, the zero point laser component 4 triggers and enables the rotating shaft 2 to stop rotating, after the rotating shaft 2 stops rotating, the base 1 reaches the zero point position by rotating the fixed step number, and the zero point position is a fixed point position on the base 1 and is determined and set in advance by a manufacturer.
One conventional working procedure of this embodiment is: the rotating shaft 2 drives the base 1 to rotate clockwise, the zero point laser component 4 continuously emits laser, the laser 5 keeps on in an on state due to the working state of continuous high temperature in the epitaxial equipment, when the laser emitted by the zero point laser component 4 passes through the zero point position hole 12, the reflected laser wavelength is different from the laser wavelength when the laser passes through the non-zero point position hole, at the moment, the zero point laser component 4 generates an electric signal to control the rotating shaft 2 to stop rotating, and the rotating fixed step number drives the base 1 to reach the zero point position, at the moment, the laser 5 emits laser to be displayed on the zero point position card 6, at the moment, marks are made on the zero point position card 6 or the light spot position is recorded by photographing. After the light spot positions are recorded for a plurality of times, if the light spots on the zero position card 6 are at the same position, the zero repeated positioning precision is normal, and the zero system of the epitaxial equipment is normal; if the position difference exists in the light spot on the zero position card 6, the abnormal zero system of the epitaxial equipment is indicated, and the epitaxial product has quality risk.
Compared with the traditional method that the zero position is distinguished by human eyes, the method for verifying the accuracy of the zero position by regulating and controlling the mechanical arm for many times, loading and taking the wafer for many times has the characteristics of intuitiveness, accuracy, high efficiency and convenience, saves a great deal of labor cost and time cost, verifies the effect of the method in production practice, and solves the problem that the epitaxial equipment is wasted due to the fact that the zero position is repeatedly positioned due to the fact that the epitaxial equipment is not crossed.
There are many ways in which the utility model may be embodied, and the above description is only of a preferred embodiment of the utility model. It should be noted that modifications and adaptations to the present utility model may occur to one skilled in the art without departing from the principles of the present utility model and are intended to be comprehended within the scope of the present utility model. The components not explicitly described in this embodiment can be implemented by using the prior art.
Claims (7)
1. The utility model provides a flat epitaxial device zero point position verifying attachment which characterized in that includes: the device comprises a base (1), a rotating shaft (2), a rotating platform (3), a zero point laser component (4), a laser (5) and a zero point position card (6) which is positioned at one side of the rotating platform (3) and is separated from the rotating platform (3) by a certain distance,
the base (1) is fixedly connected to the top of the rotating shaft (2) through a central hole (11), a zero position hole (12) is formed in the edge of the base (1), the upper surface of the base (1) is perpendicular to the axis of the rotating shaft (2), the rotating platform (3) is fixedly connected to the rotating shaft (2) and located below the base (1), the zero point laser assembly (4) is fixed above the base (1), a laser path emitted by the zero point laser assembly (4) is perpendicular to the plane of the base (1) and can be reflected through the zero position hole (12) when the base (1) rotates to a fixed position, the laser (5) is fixed on the rotating platform, and a zero position clamp (6) is used for receiving laser emitted by the laser (5) to form a light spot on the zero position clamp (6).
2. The flat-plate type epitaxial device zero position verification device according to claim 1, wherein: the side surface of the zero position card (6) for receiving laser is a plane.
3. The flat-plate type epitaxial device zero position verification device according to claim 2, wherein: the side surface of the zero position card (6) for receiving laser is perpendicular to the laser emitting direction of the laser (5).
4. The flat-plate type epitaxial device zero position verification device according to claim 1, wherein: the zero point laser component (4) is electrically connected with the rotating shaft (2).
5. The flat-plate type epitaxial device zero position verification device according to claim 4, wherein: when the zero point laser component (4) emits laser to pass through the zero point position hole (12), the zero point laser component (4) sends an electric signal to stop the rotation of the rotating shaft (2).
6. The flat-plate type epitaxial device zero position verification device according to claim 5, wherein: after the rotation shaft (2) stops rotating, the base (1) reaches the zero position by rotating a fixed step number.
7. The flat-plate type epitaxial device zero position verification device according to claim 1, wherein: the laser (5) emits laser light continuously during operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322004513.7U CN220366799U (en) | 2023-07-28 | 2023-07-28 | Zero position verification device for flat-plate epitaxial equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322004513.7U CN220366799U (en) | 2023-07-28 | 2023-07-28 | Zero position verification device for flat-plate epitaxial equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220366799U true CN220366799U (en) | 2024-01-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322004513.7U Active CN220366799U (en) | 2023-07-28 | 2023-07-28 | Zero position verification device for flat-plate epitaxial equipment |
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| Country | Link |
|---|---|
| CN (1) | CN220366799U (en) |
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2023
- 2023-07-28 CN CN202322004513.7U patent/CN220366799U/en active Active
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