CN220289891U - Composite optical film - Google Patents
Composite optical film Download PDFInfo
- Publication number
- CN220289891U CN220289891U CN202321724313.2U CN202321724313U CN220289891U CN 220289891 U CN220289891 U CN 220289891U CN 202321724313 U CN202321724313 U CN 202321724313U CN 220289891 U CN220289891 U CN 220289891U
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- China
- Prior art keywords
- film
- optical
- silicon oxide
- silicon
- composite optical
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- 239000012788 optical film Substances 0.000 title claims abstract description 24
- 239000002131 composite material Substances 0.000 title claims abstract description 17
- 239000010408 film Substances 0.000 claims abstract description 75
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 52
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 20
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 19
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 19
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 16
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 16
- 239000006121 base glass Substances 0.000 claims abstract description 13
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000005240 physical vapour deposition Methods 0.000 claims abstract description 7
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 description 24
- 239000000463 material Substances 0.000 description 8
- 230000005540 biological transmission Effects 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
Abstract
The utility model relates to the technical field of optical films and discloses a composite optical film, which comprises a base glass layer, wherein a silicon oxide film is arranged at the top of the base glass layer, a silicon dioxide film is arranged at the top of the silicon oxide film, a silicon nitride film is arranged at the top of the silicon dioxide film, an aluminum film is arranged at the top of the silicon nitride film, and the silicon oxide film is deposited at the top of the base glass layer by adopting physical vapor deposition.
Description
Technical Field
The utility model relates to the technical field of optical films, in particular to a composite optical film.
Background
The optical film is a film material with specific optical performance and is widely applied to the fields of optical devices, display devices, solar cells and the like. Conventional optical films are generally prepared from a single material, and the optical performance of the optical films is limited and cannot meet the complex application requirements. Thus, there is a need for a new type of composite optical film to provide a wider selection of optical properties.
Disclosure of Invention
The present utility model is directed to a composite optical film to solve the above-mentioned problems of the prior art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the composite optical film comprises a base glass layer, wherein a silicon oxide film is arranged at the top of the base glass layer, a silicon dioxide film is arranged at the top of the silicon oxide film, a silicon nitride film is arranged at the top of the silicon dioxide film, and an aluminum film is arranged at the top of the silicon nitride film.
The technical scheme is adopted: the superposition of the multilayer thin films of the composite optical film realizes the regulation and control of the characteristics of light reflection, transmission, absorption and the like, provides wider optical performance selection, has simple and efficient preparation method, can be used for designing and optimizing the number of thin film layers, thickness and material composition according to the needs, has excellent optical performance, is suitable for the fields of optical devices, display devices and solar cells, and can meet the requirements of complex application.
The utility model further provides that the silicon oxide film is deposited on top of the base glass layer using physical vapor deposition.
The technical scheme is adopted: by arranging the silicon oxide film as an interface layer between the substrate and the upper film, good adhesiveness and stability are provided, and the deposition quality of other film layers is ensured.
The utility model is further arranged that the silicon dioxide film is deposited on top of the silicon oxide film by sputtering.
The technical scheme is adopted: by arranging the silicon dioxide film, the film has good optical characteristics, can be used for adjusting the reflection and transmission of light, can enhance the wear resistance and corrosion resistance of the film, and improves the stability and service life of the film.
The utility model further provides that the silicon nitride film is deposited on top of the silicon dioxide film by sputtering.
The technical scheme is adopted: by providing a silicon nitride film, silicon nitride has a high refractive index and transparency, and can be used for controlling light propagation and interference phenomena, and selectively reflects and transmits light of a specific wavelength, and is used for preparing optical filters, mirrors and optical diffraction elements.
The utility model further provides that the aluminum film is deposited on top of the silicon nitride film by physical vapor deposition.
The technical scheme is adopted: by arranging the aluminum film, the aluminum film is an excellent metal reflecting material, has high reflectivity and good conductivity, can be used for enhancing the reflecting performance of the optical film, and can be applied to high-reflecting mirrors and optical reflecting devices.
Compared with the prior art, the utility model has the following beneficial effects:
the superposition of the multilayer thin films of the composite optical film realizes the regulation and control of the characteristics of light reflection, transmission, absorption and the like, provides wider optical performance selection, has simple and efficient preparation method, can be used for designing and optimizing the number of thin film layers, thickness and material composition according to the needs, has excellent optical performance, is suitable for the fields of optical devices, display devices and solar cells, and can meet the requirements of complex application.
Drawings
Fig. 1 is a schematic perspective view of the structure of the present utility model.
In the figure: 1. a base glass layer; 2. a silicon oxide film; 3. a silicon dioxide film; 4. a silicon nitride film; 5. an aluminum film.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1:
referring to fig. 1, a composite optical film includes a base glass layer 1, a silicon oxide film 2 is disposed on top of the base glass layer 1, a silicon dioxide film 3 is disposed on top of the silicon oxide film 2, a silicon nitride film 4 is disposed on top of the silicon dioxide film 3, an aluminum film 5 is disposed on top of the silicon nitride film 4, and the superposition of the multilayer films of the composite optical film realizes the regulation and control of the characteristics of light reflection, transmission, absorption and the like, provides a wider optical performance selection, has a simple and efficient preparation method, can perform design and optimization of the number of film layers, thickness and material composition as required, has excellent optical performance, is suitable for the fields of optical devices, display devices and solar cells, and can meet the requirements of complex applications.
Referring to fig. 1, a silicon oxide film 2 is deposited on top of a base glass layer 1 by physical vapor deposition, and by providing the silicon oxide film 2 as an interface layer between the base and the upper layer of film, good adhesion and stability are provided, and deposition quality of other film layers is ensured.
Referring to fig. 1, a silicon dioxide film 3 is deposited on top of a silicon oxide film 2 by sputtering, and by providing the silicon dioxide film 3, the silicon dioxide film has good optical characteristics, can be used for adjusting the reflection and transmission of light, and can enhance the wear resistance and corrosion resistance of the diaphragm, and improve the stability and service life of the diaphragm.
Referring to fig. 1, a silicon nitride film 4 is deposited on top of a silicon dioxide film 3 by sputtering, and by providing the silicon nitride film 4, silicon nitride has a high refractive index and transparency, and can be used to control light propagation and interference phenomena, and selectively reflect and transmit light of a specific wavelength, for the preparation of optical filters, mirrors and optical diffraction elements.
Referring to fig. 1, an aluminum film 5 is deposited on top of a silicon nitride film 4 by physical vapor deposition, and by providing the aluminum film 5, the aluminum film is an excellent metal reflective material with high reflectivity and good electrical conductivity, and can be used to enhance the reflective performance of an optical film, thereby realizing high-reflectivity mirror and optical reflective device applications.
The use process is briefly described: the superposition of the multilayer thin films of the composite optical film realizes the regulation and control of the characteristics of light reflection, transmission, absorption and the like, provides wider optical performance selection, has simple and efficient preparation method, can be used for designing and optimizing the number of thin film layers, thickness and material composition according to the needs, has excellent optical performance, is suitable for the fields of optical devices, display devices and solar cells, and can meet the requirements of complex application.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. A composite optical film comprising a base glass layer (1), characterized in that: the silicon oxide film (2) is arranged at the top of the base glass layer (1), the silicon oxide film (3) is arranged at the top of the silicon oxide film (2), the silicon nitride film (4) is arranged at the top of the silicon oxide film (3), and the aluminum film (5) is arranged at the top of the silicon nitride film (4).
2. The composite optical film according to claim 1, wherein: the silicon oxide film (2) is deposited on top of the base glass layer (1) by physical vapor deposition.
3. The composite optical film according to claim 1, wherein: the silicon dioxide film (3) is deposited on top of the silicon oxide film (2) by sputtering.
4. The composite optical film according to claim 1, wherein: the silicon nitride film (4) is deposited on top of the silicon dioxide film (3) by sputtering.
5. The composite optical film according to claim 1, wherein: the aluminum film (5) is deposited on the top of the silicon nitride film (4) by physical vapor deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321724313.2U CN220289891U (en) | 2023-07-03 | 2023-07-03 | Composite optical film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321724313.2U CN220289891U (en) | 2023-07-03 | 2023-07-03 | Composite optical film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220289891U true CN220289891U (en) | 2024-01-02 |
Family
ID=89331672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321724313.2U Active CN220289891U (en) | 2023-07-03 | 2023-07-03 | Composite optical film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220289891U (en) |
-
2023
- 2023-07-03 CN CN202321724313.2U patent/CN220289891U/en active Active
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