CN220271768U - Automatic exhaust control system for tail gas treatment - Google Patents
Automatic exhaust control system for tail gas treatment Download PDFInfo
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- CN220271768U CN220271768U CN202321737801.7U CN202321737801U CN220271768U CN 220271768 U CN220271768 U CN 220271768U CN 202321737801 U CN202321737801 U CN 202321737801U CN 220271768 U CN220271768 U CN 220271768U
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- 238000000034 method Methods 0.000 abstract description 13
- 239000002699 waste material Substances 0.000 abstract description 5
- 230000032683 aging Effects 0.000 abstract description 4
- 230000007774 longterm Effects 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 33
- 239000004065 semiconductor Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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- Treating Waste Gases (AREA)
Abstract
The embodiment of the application discloses an automatic exhaust control system for tail gas treatment; the device comprises a PLC controller, a frequency converter, tail gas treatment equipment, production equipment, a parameter acquisition module and a valve group; according to the embodiment of the application, the working parameters of the production equipment are acquired through the setting parameter acquisition module, the PLC controller correspondingly adjusts the valve group and the frequency converter according to the working parameters, so that the valve group controls the air exhaust quantity of the production equipment, the frequency converter controls the running speed of the tail gas treatment equipment, the automatic adjustment control of the production equipment and the tail gas treatment equipment is realized, meanwhile, the production is timely adjusted according to the air exhaust quantity, the whole process is convenient and fast to adjust, the equipment is prevented from being aged due to energy waste and equipment aging caused by long-term high-load running, and the maintenance cost is saved.
Description
Technical Field
The embodiment of the application relates to the technical field of exhaust gas, in particular to an automatic exhaust gas control system for exhaust gas treatment.
Background
The semiconductor factory uses more toxic and harmful flammable and explosive gases, and the gases are discharged after being treated by an exhaust gas treatment system to reach national standards; the semiconductor factories use a large number of chemicals such as hydrochloric acid, phosphoric acid, sulfuric acid, ammonia water, acetone, etc., which are volatilized during use, and the workplace where the chemicals are used needs to be exhausted effectively in order to ensure that the working environment is not polluted. Exhaust air in semiconductor factories is divided into 4 types: acid gas exhaust, alkaline gas exhaust, general gas exhaust, and organic gas exhaust. The four types of exhaust air are connected with equipment in the respective exhaust systems, the equipment is various, and the exhaust systems are generally controlled by manual adjustment. The method has the following defects: 1. when the air quantity is balanced, equipment is required to be added or a certain equipment parameter is required to be changed, the air exhaust of each equipment is required to be readjusted or the air exhaust main machine runs at high power and high load, so that the air exhaust quantity of each equipment is maintained at a higher level, and the process requirement is met; 2. when the air exhaust quantity of the equipment is abnormal, the air exhaust system has no feedback information, cannot be adjusted in time, and can influence production, so that defective products are produced; 3. the long-term high-load operation of the host causes energy waste, higher equipment selection configuration, quicker equipment aging and increased maintenance cost.
Disclosure of Invention
The embodiment of the application provides an exhaust automatic control system is handled to tail gas to solve the equipment of current exhaust apparatus is handled to tail gas and is adjusted inconveniently, can't in time adjust when the volume of airing exhaust and cause the influence to production, and problem with high costs.
In a first aspect, an embodiment of the present application provides an automatic exhaust gas control system for exhaust gas treatment, including a PLC controller, a frequency converter, an exhaust gas treatment device, a production device, a parameter acquisition module and a valve group, where the frequency converter is connected to the PLC controller and the exhaust gas treatment device, the PLC controller is connected to the parameter acquisition module and the valve group, the exhaust gas treatment device is connected to the production device through a pipeline, the valve group is disposed on the pipeline, and the parameter acquisition module is connected to the production device; the parameter acquisition module is used for acquiring working parameters of the production equipment and feeding the working parameters back to the PLC, the PLC adjusts the frequency of the frequency converter and the opening degree of the valve group according to the working parameters, and the tail gas treatment equipment adjusts the running speed according to the frequency of the frequency converter so as to control the exhaust of the production equipment.
In some embodiments, the valve train includes a first automatic valve disposed on the conduit and connected to the PLC controller.
In some embodiments, the valve train includes a first manual valve disposed on the conduit.
In some embodiments, the parameter acquisition module includes a pressure gauge, the pressure gauge is installed at an exhaust outlet end of the production equipment, and the pressure gauge is used for acquiring an exhaust value of the production equipment and feeding back the exhaust value to the PLC controller.
In some embodiments, the parameter acquisition module includes a flow meter mounted on the conduit for acquiring and feeding back to the PLC controller the exhaust air volume of the production facility.
In some embodiments, the first automatic valve employs a solenoid valve.
In some embodiments, the first manual valve employs a manual ball valve.
In some embodiments, the production facility is provided with a plurality of valve groups, the number of valve groups is consistent with the number of production facilities, and the number of parameter acquisition modules is consistent with the number of production facilities.
In some embodiments, the first automatic valve is ZCF-P.
In some embodiments, the first manual valve is model Q11F.
According to the embodiment of the application, the working parameters of the production equipment are acquired through the setting parameter acquisition module, the PLC controller correspondingly adjusts the valve group and the frequency converter according to the working parameters, so that the valve group controls the air exhaust quantity of the production equipment, the frequency converter controls the running speed of the tail gas treatment equipment, the automatic adjustment control of the production equipment and the tail gas treatment equipment is realized, meanwhile, the production is timely adjusted according to the air exhaust quantity, the whole process is convenient and fast to adjust, the equipment is prevented from being aged due to energy waste and equipment aging caused by long-term high-load running, and the maintenance cost is saved.
Drawings
Fig. 1 is an electrical schematic diagram of an exhaust automatic control system for exhaust treatment according to an embodiment of the present application;
110, a PLC controller; 120. a frequency converter; 130. tail gas treatment equipment; 140. a pipe; 150. production equipment; 160. a pressure gauge; 170. a first manual valve; 180. a first automatic valve.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present application more apparent, the following detailed description of specific embodiments thereof is given with reference to the accompanying drawings. It is to be understood that the specific embodiments described herein are merely illustrative of the application and not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the matters related to the present application are shown in the accompanying drawings. Before discussing exemplary embodiments in more detail, it should be mentioned that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although a flowchart depicts operations (or steps) as a sequential process, many of the operations can be performed in parallel, concurrently, or at the same time. Furthermore, the order of the operations may be rearranged. The process may be terminated when its operations are completed, but may have additional steps not included in the figures. The processes may correspond to methods, functions, procedures, subroutines, and the like.
The utility model provides an exhaust gas treatment exhaust automatic control system of this application embodiment, the equipment that avoids current exhaust gas treatment exhaust apparatus adjusts inconveniently, can't in time adjust when the volume of airing exhaust and cause the influence to production to and the problem with high costs.
Fig. 1 is an electrical schematic diagram of an exhaust automatic control system for exhaust treatment according to an embodiment of the present application. Referring to fig. 1, the automatic exhaust gas control system for exhaust gas treatment includes a PLC controller 110, a frequency converter 120, an exhaust gas treatment device 130, a production device 150, a parameter acquisition module and a valve group, wherein the frequency converter 120 is connected with the PLC controller 110 and the exhaust gas treatment device 130, the PLC controller 110 is connected with the parameter acquisition module and the valve group, the exhaust gas treatment device 130 is connected with the production device 150 through a pipeline 140, the valve group is arranged on the pipeline 140, and the parameter acquisition module is connected with the production device 150; the parameter obtaining module is configured to obtain an operating parameter of the production equipment 150 and feed back the operating parameter to the PLC controller 110, the PLC controller 110 adjusts the frequency of the frequency converter 120 and the opening degree of the valve group according to the operating parameter, and the tail gas treatment equipment 130 adjusts the operation speed according to the frequency of the frequency converter 120, so as to control the exhaust of the production equipment 150.
Above-mentioned, obtain the operating parameter of production facility 150 through setting up the parameter and obtain the module, PLC controller 110 corresponds adjusting valve group and converter 120 according to operating parameter, thereby the exhaust volume of valve group control production facility 150, the operation speed of converter 120 control tail gas treatment facility 130 realizes the automation and carries out the regulation control of production facility 150 and tail gas treatment facility 130, adjust production in time according to the exhaust volume simultaneously, whole process adjustment convenient and fast is automatic, avoid equipment long-term high-load operation to cause the energy waste and equipment ageing, practice thrift maintenance cost.
As a preferred embodiment, the valve group includes a first automatic valve 180 and a first manual valve 170, the first automatic valve 180 is disposed on the pipe 140 and the first automatic valve 180 is connected to the PLC controller 110, and the first manual valve 170 is disposed on the pipe 140; the parameter obtaining module comprises a pressure gauge 160 and a flowmeter, the pressure gauge 160 is installed at the exhaust outlet end of the production equipment 150, the pressure gauge 160 is used for obtaining exhaust numerical values of the production equipment 150 and feeding back the exhaust numerical values to the PLC 110, the flowmeter is installed on the pipeline 140, and the flowmeter is used for obtaining exhaust air quantity of the production equipment 150 and feeding back the exhaust air quantity to the PLC 110.
Specifically, a pressure gauge 160 with a signal transmission function is installed at the exhaust outlet end of the production equipment 150, and the exhaust numerical value of the production equipment 150 is transmitted to the PLC 110 in real time; the air pipe first manual valve 170 is arranged at the rear end of the pressure gauge 160 of the production equipment 150, so that the operation of the production equipment 150 is prevented from being influenced when automatic control is abnormal; an automatic valve is additionally arranged at the rear end of the first manual valve 170, and the first automatic valve 180 can receive the command of the PLC 110 to adjust the valve size, wherein when the first automatic valve 180 is normal, the first manual valve 170 is in a full-open state; the pipeline 140 is also provided with a flow meter for real-time transmission of the exhaust flow of the production facility 150 to the PLC controller 110. The PLC controller 110 adjusts the frequency of the frequency converter 120 according to the field measurement actual value and the equipment set value; the exhaust gas treatment device 130 adjusts the operating speed according to the frequency converter 120 command; when any equipment set value is changed or added, the PLC controller 110 can automatically adjust the opening of the first automatic valve 180 or adjust the frequency of the frequency converter 120 according to the measured value and the equipment set value, so as to meet the operation requirement of the equipment, reduce the exhaust failure of the production equipment 150, reduce the manpower waste and reduce the high-power operation of the exhaust equipment.
It should be noted that, the PLC controller 110 acquires parameters to perform adjustment control on other devices, and there are various implementation manners of this process in the prior art, which is not limited in this embodiment of the present application.
As a preferred embodiment, the first automatic valve 180 employs a solenoid valve; the first manual valve 170 employs a manual ball valve.
As a preferred embodiment, the production facility 150 is provided with a plurality of valve groups, the number of which corresponds to the number of production facilities 150, and the number of parameter acquisition modules corresponds to the number of production facilities 150.
In some embodiments, the first automatic valve 180 is ZCF-P; the first manual valve 170 is model Q11F.
The foregoing description is only of the preferred embodiments of the present application and the technical principles employed. The present application is not limited to the specific embodiments described herein, but is capable of numerous obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the present application. Therefore, while the present application has been described in connection with the above embodiments, the present application is not limited to the above embodiments, but may include many other equivalent embodiments without departing from the spirit of the present application, and the scope of the present application is determined by the scope of the claims.
Claims (10)
1. An exhaust gas treatment exhaust gas automatic control system, characterized by comprising: the device comprises a PLC (programmable logic controller), a frequency converter, tail gas treatment equipment, production equipment, a parameter acquisition module and a valve group, wherein the frequency converter is connected with the PLC and the tail gas treatment equipment, the PLC is connected with the parameter acquisition module and the valve group, the tail gas treatment equipment is connected with the production equipment through a pipeline, the valve group is arranged on the pipeline, and the parameter acquisition module is connected with the production equipment; the parameter acquisition module is used for acquiring working parameters of the production equipment and feeding the working parameters back to the PLC, the PLC adjusts the frequency of the frequency converter and the opening degree of the valve group according to the working parameters, and the tail gas treatment equipment adjusts the running speed according to the frequency of the frequency converter so as to control the exhaust of the production equipment.
2. The exhaust gas treatment exhaust automatic control system of claim 1, wherein the valve train includes a first automatic valve disposed on the conduit and connected to the PLC controller.
3. The exhaust treatment exhaust automatic control system of claim 1, wherein the valve train includes a first manual valve disposed on the conduit.
4. The exhaust gas treatment exhaust automatic control system according to claim 1, wherein the parameter acquisition module comprises a pressure gauge, the pressure gauge is installed at an exhaust outlet end of the production equipment, and the pressure gauge is used for acquiring an exhaust gas value of the production equipment and feeding back the exhaust gas value to the PLC controller.
5. The exhaust gas treatment automatic control system according to claim 1, wherein the parameter acquisition module includes a flow meter mounted on the pipe for acquiring an exhaust air volume of the production equipment and feeding back to the PLC controller.
6. The exhaust gas treatment automatic control system according to claim 2, wherein the first automatic valve is a solenoid valve.
7. The exhaust gas treatment automatic control system according to claim 3, wherein the first manual valve is a manual ball valve.
8. The exhaust gas automatic control system according to claim 1, wherein the production equipment is provided in plural, the number of the valve groups is identical to the number of the production equipment, and the number of the parameter acquisition modules is identical to the number of the production equipment.
9. The exhaust gas treatment automatic control system according to claim 2, wherein the first automatic valve is ZCF-P.
10. The exhaust gas treatment automatic control system according to claim 3, wherein the first manual valve is of a type Q11F.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321737801.7U CN220271768U (en) | 2023-07-04 | 2023-07-04 | Automatic exhaust control system for tail gas treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321737801.7U CN220271768U (en) | 2023-07-04 | 2023-07-04 | Automatic exhaust control system for tail gas treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220271768U true CN220271768U (en) | 2023-12-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321737801.7U Active CN220271768U (en) | 2023-07-04 | 2023-07-04 | Automatic exhaust control system for tail gas treatment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220271768U (en) |
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2023
- 2023-07-04 CN CN202321737801.7U patent/CN220271768U/en active Active
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