CN101751056A - Vacuum system constant voltage constant current regulator and control method thereof - Google Patents
Vacuum system constant voltage constant current regulator and control method thereof Download PDFInfo
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- CN101751056A CN101751056A CN200810229520A CN200810229520A CN101751056A CN 101751056 A CN101751056 A CN 101751056A CN 200810229520 A CN200810229520 A CN 200810229520A CN 200810229520 A CN200810229520 A CN 200810229520A CN 101751056 A CN101751056 A CN 101751056A
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Abstract
The invention relates to a vacuum system constant voltage constant current regulator and control method thereof, which includes a vacuum detection unit collecting the vacuum degree of a vacuum system, an intelligent control unit receiving the signal of a vacuum detection unit, executing a control program and sending a control signal to an adjusting unit; and the adjusting unit receiving the control signal of the intelligent control unit and adjusting the vacuum degree of the vacuum system; the method includes the steps as follows: electrifying the regulator and displaying the actual measurement value of the current vacuum degree and the setting value in last time if the communication of the vacuum detection unit is normal; inputting the vacuum degree setting value if the vacuum degree of the current vacuum system is less than the minimum vacuum control value; adjusting an electric check valve to the optimal starting position if regulating according to the setting value, and grading according to the actual measurement value of the vacuum degree and the setting value so as to respectively determine corresponding PID values to control the opening angle of the electric check valve. The invention can automatically adjust the vacuum degree of the system under unmanned condition, has high control precision, improves the efficiency, and stops the occurrence of error operation radically.
Description
Technical field
The present invention relates to the automatic adjustment technology in a kind of vacuum system, specifically vacuum system constant voltage constant current regulator and control method thereof.
Background technology
Present vacuum system, it is to finish by regulating manually mostly that vacuum tightness is regulated, and in large-scale industrial production or in the experiment that higher risk is arranged, by manual shift is unpractical, for example in the semiconductor coated film industry, the chemical physics reaction time often reaches several days, in this process, vacuum tightness need keep definite value, exist degree of accuracy low by regulating manually, problems such as efficient is low, and occur maloperation easily, take manpower, in some chemical physics reactions, need to add inflammable gass such as alkanes, if it is too much as the inflammable gas ratio in the reaction to occur maloperation when manual operation, will cause very serious consequence, therefore adopt automatic adjustment technology imperative, and regulation scheme does not automatically appear effectively in order as yet.
Summary of the invention
At the deficiencies in the prior art part, the technical problem to be solved in the present invention provides a kind of vacuum system constant voltage constant current regulator and control method thereof that can obtain vacuum automatically.
For solving the problems of the technologies described above, the technical solution used in the present invention is:
A kind of vacuum system constant voltage constant current regulator of the present invention comprises: vacuum detecting unit, the vacuum tightness of collection vacuum system; Intelligent control unit, the signal of reception vacuum detecting unit, executive control program transmits control signal to regulon; Regulon, the control signal of reception intelligent control unit, the vacuum tightness of adjusting vacuum system.
Vacuum system constant voltage constant current regulator of the present invention also has the computer software unit, receives the data that intelligent control unit is uploaded by communication interface, and Long-distance Control is carried out in the order of transmission control system under intelligent control unit; Described regulon comprises stepper motor and the motorised cut-off valves that links to each other with this stepper motor output shaft.
The control method of a kind of vacuum system constant voltage constant current regulator of the present invention may further comprise the steps:
Regulator powers on;
Judge whether the vacuum detecting unit communications is normal,, then show current vacuum tightness measured value and the last value of setting as normally;
Whether the vacuum tightness of judging current vacuum system less than minimum vacuum control value, as less than, then import the vacuum tightness value of setting;
Regulate by the above-mentioned value of setting?
In this way, then begin to regulate, motorised cut-off valves is adjusted to best start bit;
Carry out stepping according to vacuum tightness measured value and the difference of the value of setting;
Judge regulative mode according to the stepping situation, determine corresponding pid value respectively at each regulative mode;
Opening angle by current regulative mode and corresponding pid value control motorised cut-off valves;
Judge whether to reach the vacuum tightness value of setting?
As reach, then stop automatic adjusting?
Be then to finish.
Described difference according to the vacuum tightness measured value and the value of setting is carried out stepping and is specially:
Be divided into coarse adjustment shelves, fine tuning shelves and finely tune shelves by the difference size of vacuum tightness measured value with the value of setting.
If do not stop automatic adjusting, then go to opening angle step by current regulative mode and corresponding pid value control motorised cut-off valves, circulation is carried out;
If vacuum system does not reach the vacuum tightness value of setting, it is spacing to judge then whether motorised cut-off valves reaches the pairing limit of adjusting, as arriving, then exceed range of adjustment, report to the police, otherwise go to the opening angle step of controlling motorised cut-off valves by current regulative mode and corresponding pid value, circulation is carried out;
If the vacuum tightness of current vacuum system is not less than minimum vacuum control value, then motorised cut-off valves is adjusted to fully open position, the input vacuum tightness that the continues value of setting step;
If the vacuum detecting unit communications is undesired, then report an error.
The present invention has following beneficial effect and advantage:
1. the present invention proposes the automatic regulative mode of a kind of brand-new vacuum, with control assemblies such as Programmable Logic Controllers is the control core, can be under unmanned condition the vacuum tightness of varitrol, the control accuracy height, also improved efficient, fundamentally stop the generation of maloperation, in actual scientific and industrialized production, brought into play vital role.
2. the present invention prolongs with the cheap main execution unit of stepper motor conduct, still can realize high precision, high efficiency automatic control, and the control assembly of other vacuum tightnesss of the prior art has relatively reduced production cost.
3. the instrument class Programmable Logic Controller that uses in apparatus of the present invention has 485 serial communication functions, can communicate by letter with host computer (computer software unit), a host computer can be hung many instrument class Programmable Logic Controllers down, can be simultaneously by of the vacuum tightness realization unified control of a plurality of motorised cut-off valves to the multicell vacuum system, simplify control procedure, improved work efficiency.
Description of drawings
Fig. 1 is the electrical structure block diagram of apparatus of the present invention;
Fig. 2 is apparatus of the present invention electrical schematic diagram;
Fig. 3 is the inventive method control flow chart;
Embodiment
As shown in Figure 1, vacuum system constant voltage constant current regulator of the present invention comprises vacuum detecting unit, intelligent control unit and regulon, and wherein the vacuum tightness of vacuum system is gathered in the vacuum detecting unit; Intelligent control unit is the control core of device, is used to receive the signal of vacuum detecting unit, and executive control program transmits control signal to regulon; Regulon is used to receive the control signal of intelligent control unit, regulates the vacuum tightness of vacuum system.
Apparatus of the present invention also can have the computer software unit, receive the data that intelligent control unit is uploaded by communication interface, and Long-distance Control is carried out in the order of transmission control system under intelligent control unit.Regulon in the present embodiment comprises stepper motor and the motorised cut-off valves that links to each other with this stepper motor output shaft.
The vacuum detecting unit can adopt vacuum meter (ZDF-5227) as vacuum detection component, also can adopt the comparatively expensive Pi Lanishi vacuum gauge of price, select the former for use in the present embodiment, the detection probe of vacuum meter is installed in the vacuum cavity, its signal output part and intelligent control unit carry out serial communication by RS232 or RS485, and the vacuum tightness of the vacuum system that collects is sent to intelligent control unit.
Intelligent control unit is as core control part, and present embodiment adopts instrument class Programmable Logic Controller (PANASONIC FP-E), also can adopt conventional Programmable Logic Controller (EMERSONEC10-1006).Have operation push-button and the display screen that is used to show current vacuum tightness measured value and the vacuum tightness value of setting on the instrument class Programmable Logic Controller, it is the function that vacuum tightness just can be realized regulating automatically in the computer software unit that this type of Programmable Logic Controller does not need host computer; And conventional Programmable Logic Controller is not imported button, must be with the control of computer software unit as input control signal.
Regulon is the execution unit of apparatus of the present invention, by stepper motor and driver thereof and the motorised cut-off valves that links to each other with this stepper motor output shaft, also comprise be used to detect motorised cut-off valves opening and closing position near switch, it is connected to the digital quantity input end of Programmable Logic Controller, and it is spacing to judge near the feedback signal of opening whether motorised cut-off valves reaches the pairing limit of adjusting by two in the methods of the invention.
Adopting the instrument class Programmable Logic Controller with intelligent control unit is example, and apparatus of the present invention are moved the control method that control program is realized regulator by intelligent control unit, and are specific as follows:
After regulator powers on, judge at first whether the vacuum detecting unit communications is normal,, then show current vacuum tightness measured value and the last value of setting as normally;
Whether the vacuum tightness of judging current vacuum system as less than minimum vacuum degree control value, then by operation push-button Programmable Logic Controller on imports vacuum tightness be provided with value less than minimum vacuum control value;
Regulate by the above-mentioned value of setting?
In this way, then begin to regulate, motorised cut-off valves is adjusted to best start bit, in the present embodiment, spend as best start bit from the standard-sized sheet position to off-position direction rotation 20;
Carry out stepping according to vacuum tightness measured value and the difference of the value of setting, promptly working as difference is the coarse adjustment shelves greater than 10Pa, and difference is the fine tuning shelves in 1～10Pa, and difference is the fine setting shelves less than 1Pa;
Judge regulative mode according to the stepping situation, determine corresponding pid value respectively at each regulative mode;
Opening angle by current regulative mode and corresponding pid value control motorised cut-off valves, be intelligent control unit changes the output pulse according to the size of pid value frequency and direction, the speed of control step motor and sense of rotation are further controlled the opening angle of motorised cut-off valves;
Do you judge that vacuum system reaches the vacuum tightness value of setting?
As reach, then judge whether to stop automatic adjusting?
Be then to finish;
As not stopping automatic adjusting, then go to according to the stepping situation and judge regulative mode, determine corresponding pid value step respectively at each regulative mode, circulation is carried out;
If vacuum system does not reach the vacuum tightness value of setting, it is spacing to judge then whether motorised cut-off valves reaches the pairing limit of adjusting, as arriving, then exceed range of adjustment, report to the police, judge regulative mode otherwise go to according to the stepping situation, determine corresponding pid value step respectively at each regulative mode, circulation is carried out;
If the vacuum tightness of current vacuum system is not less than minimum vacuum control value, then motorised cut-off valves is adjusted to fully open position, the input vacuum tightness value of setting that continues step, this step are to open the vacuum pumping system and can produce damage to motorised cut-off valves when the big vacuum tightness for preventing;
If the vacuum detecting unit communications is undesired, then report an error, this device can not normally use.
The instrument class Programmable Logic Controller that uses in apparatus of the present invention has 485 serial communication functions, can communicate by letter with host computer (computer software unit), a host computer can be hung many instrument class Programmable Logic Controllers down, can be simultaneously by the vacuum tightness realization unified control of a plurality of motorised cut-off valves to the multicell vacuum system.
Claims (9)
1. vacuum system constant voltage constant current regulator is characterized in that comprising:
The vacuum detecting unit, the vacuum tightness of collection vacuum system;
Intelligent control unit, the signal of reception vacuum detecting unit, executive control program transmits control signal to regulon;
Regulon, the control signal of reception intelligent control unit, the vacuum tightness of adjusting vacuum system.
2. by the described vacuum system constant voltage constant current regulator of claim 1, it is characterized in that: also have the computer software unit, receive the data that intelligent control unit is uploaded by communication interface, Long-distance Control is carried out in the order of transmission control system under intelligent control unit.
3. by the described vacuum system constant voltage constant current regulator of claim 1, it is characterized in that: described regulon comprises stepper motor and the motorised cut-off valves that links to each other with this stepper motor output shaft.
4. the control method of a vacuum system constant voltage constant current regulator, it is held to levy and is may further comprise the steps:
Regulator powers on;
Judge whether the vacuum detecting unit communications is normal,, then show current vacuum tightness measured value and the last value of setting as normally;
Whether the vacuum tightness of judging current vacuum system less than minimum vacuum control value, as less than, then import the vacuum tightness value of setting;
Regulate by the above-mentioned value of setting?
In this way, then begin to regulate, motorised cut-off valves is adjusted to best start bit;
Carry out stepping according to vacuum tightness measured value and the difference of the value of setting;
Judge regulative mode according to the stepping situation, determine corresponding pid value respectively at each regulative mode;
Opening angle by current regulative mode and corresponding pid value control motorised cut-off valves;
Judge whether to reach the vacuum tightness value of setting?
As reach, then stop automatic adjusting?
Be then to finish.
5. by the control method of the described vacuum system constant voltage constant current regulator of claim 4, it is held to levy and is: described difference according to the vacuum tightness measured value and the value of setting is carried out stepping and is specially:
Be divided into coarse adjustment shelves, fine tuning shelves and finely tune shelves by the difference size of vacuum tightness measured value with the value of setting.
6. by the control method of the described vacuum system constant voltage constant current regulator of claim 4, it is held to levy and is: if do not stop automatic adjusting, then go to the opening angle step by current regulative mode and corresponding pid value control motorised cut-off valves, circulation is carried out.
7. press the control method of the described vacuum system constant voltage constant current regulator of claim 4, it is held to levy and is: if vacuum system does not reach the vacuum tightness value of setting, it is spacing to judge then whether motorised cut-off valves reaches the pairing limit of adjusting, as arriving, then exceed range of adjustment, report to the police, otherwise go to the opening angle step of controlling motorised cut-off valves by current regulative mode and corresponding pid value, circulation is carried out.
8. by the control method of the described vacuum system constant voltage constant current regulator of claim 4, it is held to levy and is:
If the vacuum tightness of current vacuum system is not less than minimum vacuum control value, then motorised cut-off valves is adjusted to fully open position, the input vacuum tightness that the continues value of setting step.
9. by the control method of the described vacuum system constant voltage constant current regulator of claim 4, it is held to levy and is: if the vacuum detecting unit communications is undesired, then report an error.
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| CN200810229520A CN101751056A (en) | 2008-12-10 | 2008-12-10 | Vacuum system constant voltage constant current regulator and control method thereof |
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| CN200810229520A CN101751056A (en) | 2008-12-10 | 2008-12-10 | Vacuum system constant voltage constant current regulator and control method thereof |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102297756A (en) * | 2011-07-28 | 2011-12-28 | 水利部交通运输部国家能源局南京水利科学研究院 | Method for automatically regulating vacuum of hydraulic depression tank and device thereof |
| CN102677024A (en) * | 2012-05-28 | 2012-09-19 | 上海华力微电子有限公司 | Cavity pressure adjustment method and cavity pressure adjustment device |
| CN103423140A (en) * | 2012-07-25 | 2013-12-04 | 烟台万润精细化工股份有限公司 | Method and device for preventing suck-back of vacuum system |
| CN105186952A (en) * | 2015-07-31 | 2015-12-23 | 芜湖真空科技有限公司 | Control system for stabilizing vacuum degree of vacuum chamber |
| CN108121370A (en) * | 2017-12-23 | 2018-06-05 | 东北大学 | A kind of investigating method and TT＆C system of vacuum environment gas flow |
| CN112343789A (en) * | 2020-10-14 | 2021-02-09 | 中广核工程有限公司 | Spent fuel storage tank vacuumizing method and system |
| CN116092768A (en) * | 2023-04-12 | 2023-05-09 | 江西联创光电超导应用有限公司 | Low-temperature magnet Dewar device and vacuum degree control method |
-
2008
- 2008-12-10 CN CN200810229520A patent/CN101751056A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102297756A (en) * | 2011-07-28 | 2011-12-28 | 水利部交通运输部国家能源局南京水利科学研究院 | Method for automatically regulating vacuum of hydraulic depression tank and device thereof |
| CN102297756B (en) * | 2011-07-28 | 2013-02-27 | 水利部交通运输部国家能源局南京水利科学研究院 | Method for automatically regulating vacuum of hydraulic depression tank and device thereof |
| CN102677024A (en) * | 2012-05-28 | 2012-09-19 | 上海华力微电子有限公司 | Cavity pressure adjustment method and cavity pressure adjustment device |
| CN103423140A (en) * | 2012-07-25 | 2013-12-04 | 烟台万润精细化工股份有限公司 | Method and device for preventing suck-back of vacuum system |
| CN105186952A (en) * | 2015-07-31 | 2015-12-23 | 芜湖真空科技有限公司 | Control system for stabilizing vacuum degree of vacuum chamber |
| CN108121370A (en) * | 2017-12-23 | 2018-06-05 | 东北大学 | A kind of investigating method and TT＆C system of vacuum environment gas flow |
| CN112343789A (en) * | 2020-10-14 | 2021-02-09 | 中广核工程有限公司 | Spent fuel storage tank vacuumizing method and system |
| CN116092768A (en) * | 2023-04-12 | 2023-05-09 | 江西联创光电超导应用有限公司 | Low-temperature magnet Dewar device and vacuum degree control method |
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Open date: 20100623 |