CN220258580U - Liquid supply system of coating machine - Google Patents
Liquid supply system of coating machine Download PDFInfo
- Publication number
- CN220258580U CN220258580U CN202322000229.2U CN202322000229U CN220258580U CN 220258580 U CN220258580 U CN 220258580U CN 202322000229 U CN202322000229 U CN 202322000229U CN 220258580 U CN220258580 U CN 220258580U
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- liquid
- buffer tank
- liquid supply
- supply system
- detection mechanism
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- 239000007788 liquid Substances 0.000 title claims abstract description 175
- 238000000576 coating method Methods 0.000 title claims abstract description 50
- 239000011248 coating agent Substances 0.000 title claims abstract description 48
- 238000001514 detection method Methods 0.000 claims abstract description 28
- 239000003814 drug Substances 0.000 claims abstract description 19
- 238000012545 processing Methods 0.000 claims abstract description 6
- 239000011550 stock solution Substances 0.000 claims description 6
- 239000002699 waste material Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 7
- 238000002360 preparation method Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000007599 discharging Methods 0.000 description 10
- 239000000126 substance Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010808 liquid waste Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Abstract
The utility model belongs to the technical field of semiconductor equipment preparation, and particularly relates to a liquid supply system of a coating machine, which comprises the following components: the device comprises a first buffer tank, a second buffer tank, a first detection mechanism, a second detection mechanism and a liquid medicine treatment mechanism respectively connected with the first buffer tank and the second buffer tank; the first detection mechanism is suitable for detecting a liquid inlet of the first buffer tank; the second detection mechanism is suitable for detecting a liquid inlet of the second buffer tank; when the air bubble is detected at the liquid inlet of any buffer tank, the other buffer tank is switched to work so that the coating liquid flowing through the liquid medicine processing mechanism is continuously supplied to the coating knife. According to the liquid supply system of the coating machine, the two buffer tanks are arranged, when the liquid inlet of one buffer tank detects bubbles, the other buffer tank is switched to work, so that the coating liquid flowing through the liquid medicine treatment mechanism is continuously supplied to the coating knife, uninterrupted liquid supply of the liquid supply system of the coating machine is realized, and the stability of the liquid supply and the coating effect are considered.
Description
Technical Field
The utility model belongs to the technical field of semiconductor equipment preparation, and particularly relates to a liquid supply system of a coating machine.
Background
Bubbles are easily entrained when the prior stock solution enters a pipeline of a coating machine, so that the defective rate of a coating process in the coating process is increased.
In the prior art, a technical scheme of eliminating bubbles by arranging buffer tanks is generally adopted for supplying liquid, however, one buffer tank may not completely eliminate bubbles, and if the crude liquid which is not defoamed thoroughly is input into a coating knife, the coating effect is affected; if defoaming is continued, the stability of the liquid supply is affected, so that the coating is interrupted.
Disclosure of Invention
The utility model aims to provide a liquid supply system of a coating machine, which realizes uninterrupted liquid supply of the liquid supply system of the coating machine and combines the stability of liquid supply and the coating effect by arranging two buffer tanks.
In order to solve the above technical problems, the present utility model provides a liquid supply system of a coating machine, including:
the device comprises a first buffer tank, a second buffer tank, a first detection mechanism, a second detection mechanism and a liquid medicine treatment mechanism respectively connected with the first buffer tank and the second buffer tank; the first detection mechanism is suitable for detecting a liquid inlet of the first buffer tank; the second detection mechanism is suitable for detecting a liquid inlet of the second buffer tank; when the air bubble is detected at the liquid inlet of any buffer tank, the other buffer tank is switched to work so that the coating liquid flowing through the liquid medicine processing mechanism is continuously supplied to the coating knife.
Further, the first buffer tank and the second buffer tank are respectively connected with a stock solution supply tank.
Further, the first detection mechanism includes: the first liquid inlet air bubble sensor and the first liquid inlet air control valve are arranged at the liquid inlet of the first buffer tank.
Further, the first detection mechanism further includes: the first liquid draining bubble sensor and the first liquid draining pneumatic control valve are arranged at the liquid draining port of the first buffer tank.
Further, the second detection mechanism includes: the second liquid inlet air bubble sensor and the second liquid inlet air control valve are arranged at the liquid inlet of the second buffer tank.
Further, the second detection mechanism further includes: the second liquid draining bubble sensor and the second liquid draining pneumatic control valve are arranged at the liquid draining port of the second buffer tank.
Further, the liquid medicine treatment mechanism includes: the liquid medicine tank is respectively connected with the first buffer tank and the second buffer tank, and the filter and the water pump are sequentially connected with the liquid medicine tank.
Further, a first liquid supply pneumatic control valve is arranged at the liquid supply port of the first buffer tank.
Further, a second liquid supply pneumatic control valve is arranged at the liquid supply port of the second buffer tank.
Further, the coater liquid supply system further includes: a waste liquid tank.
The liquid supply system of the coating machine has the beneficial effects that when the liquid inlet of one buffer tank detects bubbles, the other buffer tank is switched to work, so that the coating liquid flowing through the liquid medicine treatment mechanism is continuously supplied to the coating knife, the uninterrupted liquid supply of the liquid supply system of the coating machine is realized, and the stability of the liquid supply and the coating effect are considered.
Additional features and advantages of the utility model will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
In order to make the above objects, features and advantages of the present utility model more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic view of a coater liquid supply system of the present utility model.
In the figure:
the liquid-feeding device comprises a first buffer tank 1, a second buffer tank 2, a first detection mechanism 3, a first liquid-feeding bubble sensor 31, a first liquid-feeding gas control valve 32, a first liquid-discharging bubble sensor 33, a first liquid-discharging gas control valve 34, a second detection mechanism 4, a second liquid-feeding bubble sensor 41, a second liquid-feeding gas control valve 42, a second liquid-discharging bubble sensor 43, a second liquid-discharging gas control valve 44, a liquid medicine processing mechanism 5, a liquid medicine tank 51, a filter 52, a water pump 53, a coating knife 6, a raw liquid supply tank 7, a first liquid-supplying gas control valve 8, a second liquid-supplying gas control valve 9 and a liquid waste tank 10.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
As shown in fig. 1, the present embodiment provides a liquid supply system of a coating machine, including: a first buffer tank 1, a second buffer tank 2, a first detection mechanism 3, a second detection mechanism 4, and a liquid medicine treatment mechanism 5 connected to the first buffer tank 1 and the second buffer tank 2, respectively; the first detection mechanism 3 is suitable for detecting the liquid inlet of the first buffer tank 1; the second detection mechanism 4 is suitable for detecting the liquid inlet of the second buffer tank 2; when the air bubbles are detected at the liquid inlet of any one of the buffer tanks, the other buffer tank is switched to operate so that the coating liquid flowing through the chemical liquid processing mechanism 5 is continuously supplied to the coating knife.
Specifically, the first buffer tank 1 and the second buffer tank 2 are both opened, and when the liquid inlet of any buffer tank detects bubbles, the current buffer tank stops supplying liquid and the other buffer tank is switched to work; or the first buffer tank 1 or the second buffer tank 2 is opened, if bubbles appear in the currently used buffer tank, the other buffer tank can be opened immediately, so that uninterrupted liquid supply of a liquid supply system of the coating machine is realized, and the stability of liquid supply and the coating effect are considered. (the arrows in the line represent the direction of flow of the liquid)
In this embodiment, the first buffer tank 1 and the second buffer tank 2 are respectively connected to a stock solution supply tank 7, so as to defoaming the stock solution flowing out of the stock solution supply tank 7.
In this embodiment, the first detecting mechanism 3 includes: a first liquid inlet bubble sensor 31 and a first liquid inlet pneumatic control valve 32 which are arranged at the liquid inlet of the first buffer tank 1; the first detection mechanism 3 further includes: a first liquid-discharging bubble sensor 33 and a first liquid-discharging pneumatic control valve 34 which are arranged at the liquid-discharging port of the first buffer tank 1; a first liquid supply pneumatic control valve 8 is arranged at the liquid supply port of the first buffer tank 1.
Specifically, the first buffer tank 1 is provided with a liquid inlet, a liquid outlet and a liquid supply port; when the first buffer tank 1 works normally, the first liquid inlet air bubble sensor 31, the first liquid inlet air control valve 32 and the first liquid supply air control valve 8 are all in an open state, the first liquid outlet air bubble sensor 33 and the first liquid outlet air control valve 34 are in a closed state, when the first liquid inlet air bubble sensor 31 detects air bubbles, the first liquid supply air control valve 8 is closed, and when the first liquid outlet air bubble sensor 33 senses air bubbles, the first liquid outlet air bubble sensor 33 and the first liquid outlet air control valve 34 are all open, and if the first liquid outlet air bubble sensor 33 senses air bubbles, the first liquid outlet air control valve 34 is always opened to enable raw liquid to flow out until the first liquid outlet air bubble sensor 33 does not sense air bubbles any more, and the first liquid outlet air control valve 34 is closed, and at the moment, the first liquid supply air control valve 8 can be opened to continue to supply liquid for the coating knife 6.
In this embodiment, the second detecting mechanism 4 includes: a second liquid inlet bubble sensor 41 and a second liquid inlet pneumatic control valve 42 which are arranged at the liquid inlet of the second buffer tank 2; the second detection mechanism 4 further includes: a second liquid-discharging bubble sensor 43 and a second liquid-discharging pneumatic control valve 44 which are arranged at the liquid-discharging port of the second buffer tank 2; a second liquid supply pneumatic control valve 9 is arranged at the liquid supply port of the second buffer tank 2.
The principle of the second buffer tank 2 is the same as that of the first buffer tank 1, and will not be described in detail. When the first buffer tank 1 has bubbles, the pipeline is defoamed, and the liquid is supplied to the coating step knife 6 through the second buffer tank 2, so that uninterrupted liquid supply of a liquid supply system of the coating machine is realized, and the stability of the liquid supply and the coating effect are considered.
In this embodiment, the chemical treatment mechanism 5 includes: a chemical tank 51 connected to the first buffer tank 1 and the second buffer tank 2, respectively, and a filter 52 and a water pump 53 connected to the chemical tank 51 in this order. By providing the liquid medicine tank 51, the filter 52, and the water pump 53, the raw liquid is proportioned into a coating liquid in a certain proportion, and the coating treatment is performed on the coating knife 6.
In this embodiment, the liquid supply system of the coating machine further includes: a waste liquid tank 10. By arranging the waste liquid tank 10, waste liquid flowing through the coating step knife 6 is collected, and environmental pollution is avoided.
In summary, in the liquid supply system of the coating machine, when the liquid inlet of one buffer tank detects bubbles, the other buffer tank is switched to work, so that the coating liquid flowing through the liquid medicine processing mechanism 5 is continuously supplied to the coating knife, uninterrupted liquid supply of the liquid supply system of the coating machine is realized, and the stability of liquid supply and the coating effect are both considered.
The components (components not illustrating specific structures) selected in the application are all common standard components or components known to those skilled in the art, and the structures and principles of the components are all known to those skilled in the art through technical manuals or through routine experimental methods.
In the description of embodiments of the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
With the above-described preferred embodiments according to the present utility model as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present utility model. The technical scope of the present utility model is not limited to the description, but must be determined according to the scope of claims.
Claims (10)
1. A coater liquid supply system, comprising:
the device comprises a first buffer tank, a second buffer tank, a first detection mechanism, a second detection mechanism and a liquid medicine treatment mechanism respectively connected with the first buffer tank and the second buffer tank;
the first detection mechanism is suitable for detecting a liquid inlet of the first buffer tank;
the second detection mechanism is suitable for detecting a liquid inlet of the second buffer tank;
when the air bubble is detected at the liquid inlet of any buffer tank, the other buffer tank is switched to work so that the coating liquid flowing through the liquid medicine processing mechanism is continuously supplied to the coating knife.
2. The liquid supply system of claim 1, wherein the liquid supply system comprises a liquid supply system,
the first buffer tank and the second buffer tank are respectively connected with a stock solution supply tank.
3. The liquid supply system of claim 1, wherein the liquid supply system comprises a liquid supply system,
the first detection mechanism includes: the first liquid inlet air bubble sensor and the first liquid inlet air control valve are arranged at the liquid inlet of the first buffer tank.
4. The coater liquid supply system as set forth in claim 3, wherein,
the first detection mechanism further includes: the first liquid draining bubble sensor and the first liquid draining pneumatic control valve are arranged at the liquid draining port of the first buffer tank.
5. The liquid supply system of claim 1, wherein the liquid supply system comprises a liquid supply system,
the second detection mechanism includes: the second liquid inlet air bubble sensor and the second liquid inlet air control valve are arranged at the liquid inlet of the second buffer tank.
6. The coater liquid supply system as set forth in claim 5, wherein,
the second detection mechanism further includes: the second liquid draining bubble sensor and the second liquid draining pneumatic control valve are arranged at the liquid draining port of the second buffer tank.
7. The liquid supply system of claim 1, wherein the liquid supply system comprises a liquid supply system,
the liquid medicine treatment mechanism includes: the liquid medicine tank is respectively connected with the first buffer tank and the second buffer tank, and the filter and the water pump are sequentially connected with the liquid medicine tank.
8. The liquid supply system of claim 1, wherein the liquid supply system comprises a liquid supply system,
the liquid supply port of the first buffer tank is provided with a first liquid supply pneumatic control valve.
9. The liquid supply system of claim 1, wherein the liquid supply system comprises a liquid supply system,
and a second liquid supply pneumatic control valve is arranged at the liquid supply port of the second buffer tank.
10. The liquid supply system of claim 1, wherein the liquid supply system comprises a liquid supply system,
the coater liquid supply system further comprises: a waste liquid tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322000229.2U CN220258580U (en) | 2023-07-27 | 2023-07-27 | Liquid supply system of coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322000229.2U CN220258580U (en) | 2023-07-27 | 2023-07-27 | Liquid supply system of coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220258580U true CN220258580U (en) | 2023-12-29 |
Family
ID=89320185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322000229.2U Active CN220258580U (en) | 2023-07-27 | 2023-07-27 | Liquid supply system of coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220258580U (en) |
-
2023
- 2023-07-27 CN CN202322000229.2U patent/CN220258580U/en active Active
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