CN220252391U

CN220252391U - Pressing plate device

Info

Publication number: CN220252391U
Application number: CN202321906036.7U
Authority: CN
Inventors: 薛业保; 章广飞; 王运钢; 李文静
Original assignee: Anhui Guoxin Intelligent Equipment Co ltd
Current assignee: Anhui Guoxin Intelligent Equipment Co ltd
Priority date: 2023-07-19
Filing date: 2023-07-19
Publication date: 2023-12-26
Anticipated expiration: 2033-07-19

Abstract

The utility model discloses a pressing plate device, which relates to the technical field of photoetching machines and comprises a U-shaped supporting frame, wherein two supporting legs of the supporting frame are provided with main rotating shafts which are in rotary connection with the supporting legs, the outer ring of the main rotating shafts is fixedly sleeved with mounting seats corresponding to two sides and horizontal, the horizontal surface of each mounting seat is provided with two groups of bearing units, each bearing unit is provided with a pressing plate mechanism, and a PCB body is positioned on each bearing unit and is pressed by the pressing plate mechanism; and the main rotating shaft is symmetrically provided with adjusting mechanisms. According to the utility model, through arranging the two groups of bearing units, the PCB body can be circularly compressed and released, the PCB body is not required to be placed and abdicated, the compression and release rhythm and efficiency of the PCB body are improved, the PCB body processing efficiency is further improved, meanwhile, the PCB bodies with different sizes are compressed within a certain range, and the practicability of the whole device is improved.

Description

Pressing plate device

Technical Field

The utility model relates to the technical field of photoetching machines, in particular to a pressing plate device.

Background

The photoetching machine is called a mask alignment exposure machine, and the common photoetching machine adopts mask alignment photoetching, and the common photoetching process needs to carry out a plurality of procedures such as cleaning and drying the surface of a silicon wafer, priming, spin coating photoresist, soft baking, alignment exposure, post baking, developing, hard baking, etching and the like.

For example, a lithographic apparatus proposed by publication number CN214375824U comprises a main body, a table, and a platen device. The main body is provided with an optical path module and a driving module, and the upper surface of the workbench is formed into a placing area for placing a workpiece; the light path module is arranged opposite to the placing area of the workbench, the workbench is connected with the main machine body, and at least one of the workbench and the light path module is connected with the driving module, so that the light path module can move in the horizontal direction relative to the placing area. The pressing plate device is fixed with the main machine body, and is positioned on at least one side of the optical path module, the pressing plate device is arranged opposite to the placement area, and the pressing plate device is configured to apply a force for pressing the placement area against a workpiece positioned on the workbench in a non-contact manner.

The pressing plate device is close to the working area of the light path module, and the workpiece on the workbench is higher in stability. The non-contact type pressing plate device avoids possible scratches or cross contamination on the surface of the workpiece, improves the yield of the workpiece, and simplifies the structure of the photoetching machine; but after the processing of the PCB body is finished, the compressing operation of the processed PCB body needs to be released firstly, the processed PCB is taken down, the placement of the PCB body is put aside, then the PCB body to be processed is compressed again, the problem that the PCB body needs to be put aside during the operation exists, and the processing efficiency is lower.

Disclosure of Invention

In view of the foregoing, the present application provides a platen device.

In order to achieve the above purpose, the present application provides the following technical solutions: the utility model provides a clamp plate device, includes the support frame that is the U type, be provided with main pivot on two stabilizer blades of support frame, and with the stabilizer blade rotation is connected, the outer lane of main pivot has fixedly cup jointed the mount pad that corresponds both sides level, be provided with two sets of bearing units on the mount pad horizontal plane, be provided with clamp plate mechanism on the bearing unit, the PCB board body is located on the bearing unit, compresses tightly it through clamp plate mechanism;

and adjusting mechanisms are symmetrically arranged on the main rotating shaft, and the distance between each group of bearing units can be adjusted through the adjusting mechanisms.

Preferably, a first driving motor is fixedly connected to one of the support frame support legs, and one end of the main rotating shaft is fixedly connected with the output end of the first driving motor;

the support frame is provided with a conveyor belt, and the conveyor belt is positioned below the bearing unit.

Preferably, two groups of strip-shaped holes are formed in the mounting seat, each group of strip-shaped holes is two in number, the bearing unit comprises a plugboard which is sleeved in the mounting seat in a sliding manner, bearing plates which are flush with the horizontal plane of the mounting seat are fixedly connected to the two ends of the plugboard, and the bearing plates can be pushed by the adjusting mechanism to slide in the strip-shaped holes.

Preferably, a connecting plate is fixedly connected between the two groups of bearing plates, a push plate is fixedly connected on the connecting plate, the adjusting mechanism comprises two sleeves fixedly sleeved on the outer ring of the main rotating shaft, the sleeves are positioned on two sides of the mounting seat, two symmetrically distributed support pieces are fixedly connected on the side walls of the sleeves, an electric telescopic rod is arranged on the support pieces, and the output end of the electric telescopic rod is fixedly connected with the push plate.

Preferably, the pressing plate mechanism comprises two second driving motors fixedly connected to one side of the pressing plate mechanism, the output ends of the second driving motors are fixedly connected with second rotating shafts, the outer rings of the second rotating shafts are fixedly sleeved with second gears, each group of pressing plate is fixedly connected with a lug, the two pressing plate mechanisms are rotatably connected with first rotating shafts between the lugs, one ends of the first rotating shafts penetrate through one side of the lugs, the outer rings are fixedly sleeved with first gears meshed with the second gears, and the outer rings of the first rotating shafts are provided with a plurality of pressing pieces.

Preferably, the compressing piece comprises a lantern ring fixedly sleeved on the outer ring of the first rotating shaft, a pressing piece is fixedly connected to the side wall of the lantern ring, and the angle between the two pressing pieces is a right angle.

Preferably, the pressing sheet is provided with a plurality of convex points made of silica gel.

In summary, the utility model has the technical effects and advantages that:

according to the utility model, through arranging the two groups of bearing units, the PCB body can be circularly compressed and released, the PCB body is not required to be placed and abdicated, the compression and release rhythm and efficiency of the PCB body are improved, the PCB body processing efficiency is further improved, meanwhile, the PCB bodies with different sizes are compressed within a certain range, and the practicability of the whole device is improved.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic perspective view of a platen device.

Fig. 2 is a schematic diagram of the platen mechanism and the adjustment mechanism.

Fig. 3 is a schematic structural view of a platen mechanism.

Fig. 4 is a schematic partial structure.

In the figure: 1. a support frame; 2. a first driving motor; 201. a main rotating shaft; 3. a first gear; 4. a second gear; 5. a first rotating shaft; 6. a mounting base; 601. a bar-shaped hole; 7. a carrying plate; 701. a tab; 702. a push plate; 703. inserting plate; 704. a connecting plate; 8. a sleeve; 801. supporting sheets; 9. an electric telescopic rod; 10. a second driving motor; 1001. a second rotating shaft; 11. a collar; 1101. tabletting; 12. and (5) protruding points.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Examples: referring to the pressing plate device shown in fig. 1-4, the pressing plate device comprises a U-shaped supporting frame 1, wherein two supporting legs of the supporting frame 1 are provided with main rotating shafts 201, the main rotating shafts are in rotating connection with the supporting legs, an outer ring of each main rotating shaft 201 is fixedly sleeved with mounting seats 6 corresponding to two sides and horizontal, two groups of bearing units are arranged on the horizontal surface of each mounting seat 6, a pressing plate mechanism is arranged on each bearing unit, and a PCB body is positioned on each bearing unit and is pressed by the pressing plate mechanism;

the main rotating shaft 201 is symmetrically provided with adjusting mechanisms, and the distance between each group of bearing units can be adjusted through the adjusting mechanisms, so that PCB bodies with different sizes can be compressed in a certain range.

As shown in fig. 1 and 2, a first driving motor 2 is fixedly connected to one of the supporting legs of the supporting frame 1, and one end of a main rotating shaft 201 is fixedly connected with the output end of the first driving motor 2;

during operation, the first driving motor 2 is used for turning over the processed PCB body by 180 degrees, then the PCB body to be processed is placed on a group of bearing units above the PCB body, the PCB body is compressed through the pressing plate mechanism, and when the PCB body is compressed, the processed PCB body is released and separated from the bearing units, so that the PCB body can be circularly compressed and released, the placing of the PCB body is not required to be abducted, the compression and release rhythm and efficiency of the PCB body are improved, and the processing efficiency of the PCB body is further improved.

In this embodiment, the supporting frame 1 is provided with a conveyor belt (not shown in the drawings), and the conveyor belt is located below the carrying unit. The conveyor belt is a prior art and will not be described in detail herein.

The processed PCB body is released and separated from the bearing unit, and is transmitted by the conveyor belt in a homeotropic manner, so that the PCB body enters the next operation.

As shown in fig. 2-4, two groups of strip-shaped holes 601 are formed in the mounting seat 6, each group of strip-shaped holes is two in number, the bearing unit comprises a plugboard 703 which is sleeved in the mounting seat 6 in a sliding manner, two ends of the plugboard 703 are fixedly connected with bearing plates 7 which are flush with the horizontal plane of the mounting seat 6, the bearing plates 7 can be pushed by the adjusting mechanism to slide in the strip-shaped holes 601, the distance between each group of bearing plates 7 is changed, and therefore the PCB bodies with different sizes can be compressed in a certain range, and the practicability of the whole device is improved.

As shown in fig. 2-4, a connecting plate 704 is fixedly connected between the two groups of bearing plates 7, a push plate 702 is fixedly connected to the connecting plate 704, the adjusting mechanism comprises two sleeves 8 fixedly sleeved on the outer ring of the main rotating shaft 201, the sleeves 8 are positioned on two sides of the mounting seat 6, two symmetrically distributed supporting pieces 801 are fixedly connected to the side walls of the sleeves 8, an electric telescopic rod 9 is arranged on the supporting pieces 801, and the output end of the electric telescopic rod 9 is fixedly connected with the push plate 702.

When the distance between each group of bearing plates 7 needs to be changed, the electric telescopic rod 9 drives the push plate 702 to move, and then the bearing plates 7 of each group are mutually close to or far away from each other through the cooperation of the connecting plate 704 and the plugboard 703;

for visual adjustment of the distance between each set of carrier plates 7, graduations may be engraved on the corresponding face of the mounting 6.

As shown in fig. 2 and 3, the pressing plate mechanism includes two second driving motors 10 fixedly connected to one side of the pressing plate mechanism, the output end of each second driving motor 10 is fixedly connected with a second rotating shaft 1001, the outer ring of each second rotating shaft 1001 is fixedly sleeved with a second gear 4, each group of bearing plates 7 is fixedly connected with a lug 701, a first rotating shaft 5 is rotatably connected between the two lugs 701, one end of each first rotating shaft 5 penetrates through one lug 701, the outer ring is fixedly sleeved with a first gear 3 meshed with the second gear 4, and the outer ring of each first rotating shaft 5 is provided with a plurality of pressing pieces.

During operation, the processed PCB body is turned over by 180 degrees through the first driving motor 2, then the PCB body to be processed is placed on a group of bearing plates 7 above, the second driving motor 10 is used for enabling the second rotating shaft 1001 to rotate, the second gear 4 is used for enabling the first gear 3 to rotate, the first rotating shaft 5 is enabled to rotate ninety degrees, the compressing piece is driven to compress the PCB body, and when the PCB body is compressed, the processed PCB body is released and separated from the bearing plates 7 due to the fact that the compressing piece rotates ninety degrees along with the first rotating shaft 5, so that the PCB body can be circularly compressed and released, the placing of the PCB body is not required to be replaced, the rhythm and the efficiency of compressing and releasing the PCB body are improved, and the processing efficiency of the PCB body is further improved.

As shown in fig. 2 and 3, the compressing member comprises a collar 11 fixedly sleeved on the outer ring of the first rotating shaft 5, and compression sheets 1101 are fixedly connected to the side wall of the collar 11, wherein the angle between the two compression sheets 1101 is a right angle.

When the first rotating shaft 5 rotates by ninety degrees, the collar 11 drives the pressing piece 1101 to rotate by ninety degrees, so that the pressing piece 1101 pressed on the processed PCB body is converted from a horizontal state to a vertical state; while the pressed sheet 1101 pressed against the unprocessed PCB body is changed from the vertical state to the horizontal state.

As shown in fig. 3, in order to avoid damage to the PCB body, a plurality of bumps 12 made of silicone material are provided on the pressing sheet 1101.

Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present utility model, and although the present utility model has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present utility model.

Claims

1. The utility model provides a clamp plate device, is support frame (1) of U type including being, its characterized in that: the PCB supporting device is characterized in that main rotating shafts (201) are arranged on two supporting legs of the supporting frame (1) and are in rotary connection with the supporting legs, mounting seats (6) corresponding to two sides of the main rotating shafts (201) are fixedly sleeved on outer rings of the main rotating shafts, two groups of bearing units are arranged on the horizontal surfaces of the mounting seats (6), a pressing plate mechanism is arranged on each bearing unit, and a PCB body is positioned on each bearing unit and is pressed by the pressing plate mechanism;

and the main rotating shaft (201) is symmetrically provided with adjusting mechanisms, and the distance between each group of bearing units can be adjusted through the adjusting mechanisms.

2. The platen apparatus of claim 1, wherein: a first driving motor (2) is fixedly connected to one supporting leg of the supporting frame (1), and one end of the main rotating shaft (201) is fixedly connected with the output end of the first driving motor (2);

the support frame (1) is provided with a conveyor belt, and the conveyor belt is positioned below the bearing unit.

3. The platen apparatus of claim 1, wherein: two groups of strip-shaped holes (601) are formed in the mounting seat (6), each group of strip-shaped holes is two in number, the bearing unit comprises a plugboard (703) which is sleeved in the mounting seat (6) in a sliding mode, two ends of the plugboard (703) are fixedly connected with bearing plates (7) which are flush with the horizontal plane of the mounting seat (6), and the adjusting mechanism can push the bearing plates (7) to slide in the strip-shaped holes (601).

4. A platen apparatus according to claim 3, wherein: two sets of fixedly connected with connecting plate (704) between loading board (7), fixedly connected with push pedal (702) on connecting plate (704), adjustment mechanism is including fixed cup jointing two sleeve pipes (8) of main pivot (201) outer lane, sleeve pipe (8) are located the both sides of mount pad (6), fixedly connected with two symmetric distribution's branch piece (801) on the lateral wall of sleeve pipe (8), be provided with electric telescopic handle (9) on branch piece (801), electric telescopic handle (9) output with push pedal (702) fixed connection.

5. A platen apparatus according to claim 3, wherein: the pressing plate mechanism comprises two second driving motors (10) fixedly connected to one side of the pressing plate mechanism, the output ends of the second driving motors (10) are fixedly connected with second rotating shafts (1001), outer rings of the second rotating shafts (1001) are fixedly sleeved with second gears (4), each group of pressing plate mechanism is fixedly connected with a lug (701) on each bearing plate (7), first rotating shafts (5) are rotatably connected between the lugs (701), one ends of the first rotating shafts (5) penetrate through one side of the lugs (701), the outer rings are fixedly sleeved with first gears (3) meshed with the second gears (4), and a plurality of pressing pieces are arranged on the outer rings of the first rotating shafts (5).

6. The platen apparatus of claim 5, wherein: the compressing piece comprises a lantern ring (11) fixedly sleeved on the outer ring of the first rotating shaft (5), a pressing piece (1101) is fixedly connected to the side wall of the lantern ring (11), and the angle between the two pressing pieces (1101) is a right angle.

7. The platen apparatus of claim 6, wherein: the tabletting (1101) is provided with a plurality of convex points (12) made of silica gel.