CN220224333U - Support roller and processing apparatus - Google Patents

Abstract

The application relates to a support roller, which comprises a first support part and a second support part which are connected with each other, wherein the first support part and the second support part are sequentially arranged along the axial direction of the support roller; the first support portion and the second support portion form a convex structure or a concave structure. The middle of the bulge structure is bulge, so that the middle of the flexible substrate is bulge, and the middle of the flexible substrate is higher than two sides of the substrate in the width direction, so that sagging of the substrate in the width direction can be reduced, shaking of the substrate is reduced, and coating quality is improved. The diameters of the two ends of the concave structure are larger, so that the tension of the two sides of the substrate in the width direction can be increased, the two sides of the substrate in the width direction achieve a tightening effect equivalent to that of the middle of the substrate, the sagging trend of the substrate in the width direction is effectively reduced, the shaking of the substrate is reduced, and the quality of a coating film is improved. The application also relates to a processing device.

Description

Support roller and processing apparatus

Technical Field

The utility model relates to the technical field of flexible substrate winding and film plating, in particular to a supporting roller and processing equipment.

Background

In the current vacuum coating equipment, flexible substrates, such as films, are mostly conducted through cylindrical roll shafts in the process of unreeling to reeling. In the process of conveying the base material, the base material is flexible, light in weight and large in surface area, so that the flexible base material sags in the wide direction, the base material shakes in the conveying process, and the quality of a coating film is seriously affected.

Disclosure of Invention

Based on the above, it is necessary to provide a support roller and a processing device for reducing substrate shake and improving coating quality, aiming at the problems that the substrate is easy to shake and the coating quality is affected in the existing flexible substrate conveying process.

The support roller comprises a first support part and a second support part which are connected with each other, wherein the first support part and the second support part are sequentially arranged along the axial direction of the support roller;

the diameter of the first supporting part gradually decreases from one end connected with the second supporting part to the other end, and the diameter of the second supporting part gradually decreases from one end connected with the first supporting part to the other end so as to form a convex structure; or (b)

The diameter of the first supporting part gradually increases from one end connected with the second supporting part to the other end, and the diameter of the second supporting part gradually increases from one end connected with the first supporting part to the other end so as to form a concave structure.

The supporting roller with the convex structure is used for supporting the flexible substrate, the middle of the flexible substrate is convex due to the convex structure, and the middle of the flexible substrate is higher than two sides of the wide direction of the substrate, so that sagging of the wide direction of the substrate can be prevented, the substrate has better stability in the conveying process, shaking is effectively reduced, and coating quality is improved.

The supporting roller with the concave structure is used for supporting the flexible substrate, and because the diameters of the two ends of the concave structure are larger, the tension of the two sides of the substrate in the width direction can be increased, so that the two sides of the substrate achieve a tightening effect equivalent to the middle of the substrate, the sagging trend of the substrate in the width direction is effectively reduced, the shaking of the substrate is reduced, and the quality of a coating film is improved.

In one embodiment, the protruding structures or the recessed structures are curved along the outer contour of the axial direction of the support roller.

In one embodiment, the first support portion and the second support portion are symmetrically arranged along an axial direction of the support roller.

In one embodiment, the support roller further includes a first connection portion and a second connection portion, the first connection portion is connected to an end of the first support portion facing away from the second support portion, and the second connection portion is connected to an end of the second support portion facing away from the first support portion.

The treatment equipment comprises the spraying plate and the supporting roller, wherein the spraying plate is used for spraying towards the base material supported by the supporting roller.

In one embodiment, a side of the spray plate facing the support roller is provided with a concave part, and the concave part corresponds to and is matched with the convex structure on the support roller; or (b)

The spraying plate is provided with a protruding portion on one side facing the supporting roller, and the protruding portion corresponds to and is matched with the concave structure on the supporting roller.

In one embodiment, the processing apparatus includes two support rollers, both of which have the concave structure or the convex structure, and the two support rollers are arranged at intervals along the substrate conveying direction.

In one embodiment, the distance between the two supporting rollers is less than or equal to 500mm.

In one embodiment, the side of the spray plate facing the substrate is provided with a plurality of spray holes.

In one embodiment, the processing apparatus further comprises a reaction chamber, and the support roller and the shower plate are both disposed in the reaction chamber.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural view of a backup roll according to a first embodiment of the present application;

FIG. 2 is a schematic view (with partial cutaway) of a construction of a processing apparatus including the backup roll shown in FIG. 1;

FIG. 3 is a schematic side view of a portion of the components of the processing apparatus shown in FIG. 2;

fig. 4 is a schematic structural view of a backup roll according to a second embodiment of the present application;

FIG. 5 is a schematic view (with partial cutaway) of a construction of a processing apparatus including the backup roll shown in FIG. 4;

fig. 6 is a schematic side view of a part of the components of the processing apparatus shown in fig. 5.

Detailed Description

In order to make the above objects, features and advantages of the present application more comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is, however, susceptible of embodiment in many other forms than those described herein and similar modifications can be made by those skilled in the art without departing from the spirit of the application, and therefore the application is not to be limited to the specific embodiments disclosed below.

In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be configured and operated in a particular orientation, and therefore should not be construed as limiting the present application.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" is at least two, such as two, three, etc., unless explicitly defined otherwise.

In this application, unless specifically stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

In this application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

As shown in fig. 1, a first embodiment of the present application provides a support roller 10, where the support roller 10 includes a first support portion 11 and a second support portion 12 that are connected to each other, and the first support portion 11 and the second support portion 12 are sequentially arranged along an axial direction of the support roller 10.

The diameter of the first support portion 11 gradually decreases from one end connected to the second support portion 12 to the other end, and the diameter of the second support portion 12 gradually decreases from one end connected to the first support portion 11 to the other end, so as to form the convex structure 13.

By adopting the support roller 10 to support the flexible substrate 300 (refer to fig. 2), the middle of the flexible substrate 300 is raised due to the middle protrusion of the protrusion structure 13, and the middle of the flexible substrate 300 is higher than two sides of the substrate 300 in the width direction, so that sagging of the substrate 300 in the width direction can be prevented, thereby the substrate 300 has better stability in the conveying process, jitter is effectively reduced, and coating quality is improved.

It should be noted that, when the flexible substrate 300 is supported by the conventional cylindrical roller, the substrate 300 has a light weight and a large surface area, so that the middle position of the substrate 300 may sag compared to the two sides of the substrate 300 in the width direction, and the middle position of the substrate 300 may be supported by the above-mentioned supporting roller 10 in the middle of the protrusion structure 13, so that the sag of the substrate 300 in the width direction may be reduced.

In some embodiments, the raised structures 13 are curved along the outer contour of the support roller 10 in the axial direction.

Taking the first supporting portion 11 as an example, the gradual change in the diameter of the first supporting portion 11 means that the diameter of the first supporting portion 11 is not abrupt, and a stepped structure does not occur. Meanwhile, the surface of the first supporting portion 11 may be an inclined plane, i.e., a straight line shape along the outer contour of the supporting roller 10 in the axial direction, or may be a curved surface, i.e., a curved shape along the outer contour of the supporting roller 10 in the axial direction.

It will be appreciated that when the surfaces of the first support 11 and the second support 12 are inclined planes, the junction of the surfaces of the first support 11 and the second support 12 forms a tip. And when a curved surface is used, formation of a tip can be avoided, thereby further protecting the flexible substrate 300 from damaging the substrate 300.

Of course, other positions may be set as inclined planes, and rounded corners may be formed at the connection positions to form a curved surface. The specific form of the projection structure 13 is not limited herein.

In addition, it should be further noted that the gradient of the protruding structure 13 is slower, and the protruding structure 13 can support the middle of the substrate 300, so that the middle is slightly higher than two sides in the width direction, and sagging in the width direction is reduced, so that the substrate 300 has better stability in the conveying process, and jitter is reduced.

In some embodiments, the first support 11 and the second support 12 are arranged along the axial direction of the support roller 10 and are radially symmetrical.

It can be understood that the highest protruding height position of the protruding structure 13 is the connecting position of the first supporting portion 11 and the second supporting portion 12, and the first supporting portion 11 and the second supporting portion 12 are symmetrically arranged, so that the highest protruding height position is the middle position of the protruding structure 13.

In this way, the processing of the backup roller 10 can be facilitated. In addition, the substrate 300 is inclined at the same width on the first supporting portion 11 and the second supporting portion 12, so that the two sides of the substrate 300 in the width direction are also symmetrically arranged, and the flatness of the substrate 300 can be improved.

In some embodiments, the support roller 10 further includes a first connecting portion 14 and a second connecting portion 15, the first connecting portion 14 is connected to an end of the first support portion 11 facing away from the second support portion 12, and the second connecting portion 15 is connected to an end of the second support portion 12 facing away from the first support portion 11.

It will be appreciated that the first and second connection portions 14 and 15 are for connection with bearings, and that the diameters of the first and second connection portions 14 and 15 are smaller than the minimum diameters of the first and second support portions 11 and 12.

The first supporting portion 11, the second supporting portion 12, the first connecting portion 14, and the second connecting portion 15 may be integrally formed, or may be formed by combining the above-described components, and are not particularly limited herein.

As shown in fig. 2, the present application also provides a processing apparatus 100, where the processing apparatus 100 includes a support roller 10 and a shower plate 20 in the first embodiment, and the shower plate 20 is used to shower toward a substrate 300 supported and conveyed by the support roller 10.

In the present embodiment, the processing apparatus 100 is used for coating the substrate 300.

In addition, in the prior art, the influence of the vibration on the coating film can be reduced by increasing the heights of the shower plate 20 and the substrate 300, but dust problems can be generated after the heights are increased. In this application, through adopting foretell backing roll 10 to support substrate 300, reduce the sagging on the broad width direction of substrate 300 for substrate 300 is more level and smooth, has optimized the tension of substrate 300 transportation in-process, thereby makes to carry more stable, reduces the shake of substrate 300 transportation in-process, has reduced the height of spray plate 20 and substrate 300 moreover, has reduced the dust volume, thereby has improved coating film quality.

Referring also to fig. 3, in some embodiments, the processing apparatus 100 includes two support rollers 10, the two support rollers 10 being spaced apart along the transport direction of the substrate 300.

In practical application, the distance between the two support rollers 10 is less than or equal to 500mm. Thus, when the substrate 300 is supported on the two support rollers 10 at the same time, sagging of the substrate 300 in the length direction can be reduced, thereby further reducing shaking in the conveying process of the substrate 300 and improving the coating quality.

It should be noted that more support rollers 10 may be disposed during the film plating process, and the distance between the two support rollers 10 refers to the distance between the two support rollers 10 corresponding to one shower plate 20. In addition, in order to save material cost, that is, reduce the number of the support rollers 10, the spacing between the two support rollers 10 can ensure the coating quality.

In some embodiments, the side of the spray plate 20 facing the support roller 10 is provided with a concave portion 21, and the concave portion 21 corresponds to and matches with the convex structure 13 on the support roller 10, so that the distance between the spray plate 20 and the convex structure 13 is kept consistent, and the spray plate 20 and the substrate 300 can be kept relatively parallel, meanwhile, the distance between the spray plate 20 and the substrate 300 is kept consistent, the uniformity of coating is ensured, and the coating quality and the coating efficiency are improved.

It should be noted that, the support roller 10 can make the substrate 300 smoother, that is, make the suspended portion of the substrate 300 smoother, and avoid excessive sagging.

In some embodiments, the shower plate 20 is provided with a plurality of shower holes 22 on a side facing the substrate 300, and the shower holes 22 are used to shower the reaction gas toward the substrate 300, thereby coating the substrate 300.

Further, the shower plate 20 is further provided with a plurality of exhaust ports 23, and the excessive reaction gas and by-products generated between the shower plate 20 and the substrate 300 can be exhausted from the exhaust ports 23 by exhausting.

In practical application, the plurality of spray holes 22 are divided into a plurality of groups, the plurality of groups of spray holes 22 and the plurality of exhaust ports 23 are alternately arranged along the width direction of the substrate 300, and the plurality of spray holes 22 and the plurality of exhaust ports of each group are respectively arranged at intervals along the conveying direction of the substrate 300.

It will be appreciated that the shower holes 22, the space between the shower plate 20 and the substrate 300, and the exhaust ports 23 form an air flow path. As shown in the flow direction 24 in fig. 3 or 5, the reaction gas enters the space between the shower plate 20 and the substrate 300 through the shower holes 22 on the shower plate 20 and is sprayed toward the substrate 300, so that the surface of the substrate is processed, for example, film coating, and then the excessive reaction gas and by-products generated by the reaction are discharged from the exhaust port 23 by means of air suction.

In some embodiments, the processing apparatus 100 further includes a reaction chamber 200, and the support roller 10 and the shower plate 20 are both disposed within the reaction chamber 200. In the process of coating, the reaction chamber 200 is first evacuated, and then the substrate 300 is vacuum coated in the vacuum environment of the reaction chamber 200.

As shown in fig. 4, the second embodiment of the present application provides a support roller 30, where the support roller 30 includes a first support portion 31 and a second support portion 32 that are connected to each other, and the first support portion 31 and the second support portion 32 are sequentially arranged along the axial direction of the support roller 30.

The diameter of the first supporting portion 31 gradually increases from one end connected to the second supporting portion 32 to the other end, and the diameter of the second supporting portion 32 gradually increases from one end connected to the first supporting portion 31 to the other end, so as to form a concave structure 33.

By adopting the supporting roller 30 to support the flexible substrate 300, the diameters of the two ends of the concave structure are larger, so that the tension of the two sides of the substrate 300 in the width direction can be increased, the two sides of the substrate 300 in the width direction achieve the tightening effect equivalent to the middle of the substrate 300, the sagging trend of the substrate 300 in the width direction is effectively reduced, the shaking of the substrate 300 is reduced, and the quality of the coating film is improved.

It should be noted that, during the film plating process, since the substrate 300 is affected by the deposition environment, especially the deposition temperature (not exceeding the shrinkage temperature of the substrate 300), the substrate 300 transported by the cylindrical roller is pulled under tension, and the two side edges of the substrate 300 in the width direction are elongated and deformed, thereby generating the scallop. The recess structure 33 can reduce the influence of the deposition temperature on the stretching of the substrate 300, thereby avoiding the occurrence of scalloping of the substrate 300.

In some embodiments, the outer profile of the recessed features 33 along the axial direction of the support roller 30 is curved to avoid tip damage to the substrate 300.

In some embodiments, the first support 31 and the second support 32 are arranged along the axial direction of the support roller 30 and are radially symmetrical.

It will be appreciated that the support rolls in the two embodiments described above differ in that the support roll 10 in the first embodiment is a convex structure, while the support roll 30 in the second embodiment is a concave structure 33. Other structures are similar, for example, the support roller 30 in the second embodiment also includes a first connecting portion 34 and a second connecting portion 35.

Referring to fig. 5, the present application further provides a processing apparatus 100, where the processing apparatus 100 includes a shower plate 40 and a support roller 30 in the second embodiment, and the shower plate 40 is also used to shower toward the substrate 300.

In this embodiment, the processing apparatus 100 is used to coat a substrate 300.

Referring to fig. 6, in some embodiments, the processing apparatus 100 includes two support rollers 30, and the two support rollers 30 are spaced apart along the conveying direction of the substrate 300.

In practical application, the distance between the two support rollers 30 is less than or equal to 500mm. Thus, when the substrate 300 is supported on the two supporting rollers 30 at the same time, the sagging of the substrate 300 in the length direction can be reduced, thereby further reducing the shake in the conveying process of the substrate 300 and improving the coating quality.

It should be noted that, in the present embodiment, both support rollers 30 have concave structures 33, while in the embodiment shown in fig. 2 described above, both support rollers 10 have convex structures.

In some embodiments, the side of the spray plate 40 facing the substrate 300 has a protrusion 41, and the protrusion 41 corresponds to and matches with the recess structure 33 on the support roller 30, so that the distance between the spray plate 40 and the recess structure 33 is kept consistent, and the spray plate 40 and the substrate 300 are kept relatively parallel, and meanwhile, the distance between the spray plate 40 and the substrate 300 is kept consistent, so that the uniformity of the coating is ensured, and the coating quality and the coating efficiency are improved.

Note that, the shower plate 40 in the present embodiment is different from the shower plate 20 in the first embodiment in that: while the shower plate 40 in the present embodiment is provided with the convex portion 41, the shower plate 20 in the first embodiment is provided with the concave portion 21, and other structures of the shower plate 40 in the present embodiment, such as the shower holes 22, the exhaust ports 23, are the same as those of the shower plate 20 in the first embodiment. In addition, it should be noted that, in connection with the above embodiment, except for the above differences, the processing apparatus 100 in this embodiment is identical to other structures of the processing apparatus 100 in the embodiment shown in fig. 2, and will not be described herein.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples only represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the claims. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.

Claims (10)

1. The support roller is characterized by comprising a first support part and a second support part which are connected with each other, wherein the first support part and the second support part are sequentially arranged along the axial direction of the support roller;

the diameter of the first supporting part gradually decreases from one end connected with the second supporting part to the other end, and the diameter of the second supporting part gradually decreases from one end connected with the first supporting part to the other end so as to form a convex structure; or (b)

The diameter of the first supporting part gradually increases from one end connected with the second supporting part to the other end, and the diameter of the second supporting part gradually increases from one end connected with the first supporting part to the other end so as to form a concave structure.

2. The backup roll of claim 1 wherein the raised structures or the recessed structures are curved along an outer contour of the backup roll in an axial direction.

3. The backup roll of claim 1 wherein the first and second support portions are symmetrically arranged along an axial direction of the backup roll.

4. The backup roll of claim 1 further comprising a first connection portion and a second connection portion, the first connection portion being connected to an end of the first backup portion facing away from the second backup portion, the second connection portion being connected to an end of the second backup portion facing away from the first backup portion.

5. A processing apparatus comprising a shower plate and the backup roll of any one of claims 1-4, the shower plate being adapted to shower toward a substrate supported by the backup roll.

6. The processing apparatus of claim 5, wherein a side of the shower plate facing the support roller has a recess corresponding to and matching the raised structure on the support roller; or (b)

The spraying plate is provided with a protruding portion on one side facing the supporting roller, and the protruding portion corresponds to and is matched with the concave structure on the supporting roller.

7. The processing apparatus according to claim 5, wherein the processing apparatus comprises two of the support rollers, both of the support rollers have the concave structure or the convex structure, and both of the support rollers are arranged at intervals in the substrate conveying direction.

8. The apparatus according to claim 7, wherein a distance between two of the support rollers is 500mm or less.

9. The processing apparatus of claim 5, wherein a side of the shower plate facing the substrate is provided with a plurality of shower holes.

10. The processing apparatus of claim 5 further comprising a reaction chamber, wherein the support roller and the shower plate are both disposed within the reaction chamber.