CN220224303U - Electron beam high accuracy coating equipment - Google Patents
Electron beam high accuracy coating equipment Download PDFInfo
- Publication number
- CN220224303U CN220224303U CN202321724019.1U CN202321724019U CN220224303U CN 220224303 U CN220224303 U CN 220224303U CN 202321724019 U CN202321724019 U CN 202321724019U CN 220224303 U CN220224303 U CN 220224303U
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- threaded rod
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- 239000011248 coating agent Substances 0.000 title claims abstract description 51
- 238000000576 coating method Methods 0.000 title claims abstract description 51
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 35
- 238000009434 installation Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 abstract description 15
- 230000008878 coupling Effects 0.000 abstract description 3
- 238000010168 coupling process Methods 0.000 abstract description 3
- 238000005859 coupling reaction Methods 0.000 abstract description 3
- 238000007747 plating Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model relates to the technical field of electron beam coating and discloses electron beam high-precision coating equipment which comprises a coating chamber, wherein a clamp assembly is arranged in the coating chamber, the inner wall of the coating chamber is connected with an adjusting assembly, the clamp assembly comprises a mounting box, the top of the mounting box is provided with a sliding groove, one side of the mounting box is provided with a first motor, and an output shaft of the first motor is fixedly connected with a positive and negative threaded rod through a coupling. This electron beam high accuracy coating equipment is provided with mounting box, spout, first motor, positive and negative threaded rod, first bearing, movable block, thread groove, circular slot, slide bar and splint, drives positive and negative threaded rod through starting first motor and rotates to make two movable blocks drive the splint and remove and carry out the centre gripping fixedly to the crucible, can the crucible of the equidimension of centre gripping, be convenient for people use different coating materials to carry out the coating film, satisfied people's needs.
Description
Technical Field
The utility model relates to the technical field of electron beam coating, in particular to electron beam high-precision coating equipment.
Background
The electron beam high-precision film plating machine is a universal film plating machine, is used for plating various single-layer films and multi-layer films, can be used for plating various hard films and metal films, and is mainly used for preparing metal electrodes of nano devices and organic photoelectric devices and preparing catalyst film layers for growing nano materials.
The electron beam high-precision film plating equipment adopts an electron gun evaporation mode, can evaporate any film plating material, and when in work, the film plating material is firstly placed in a crucible, the electron gun emits electron beams, and as the electron beam temperature is very high, any film plating medicinal material can be melted, and after the film plating medicinal material is melted by the electron beams, molecules of the material are in linear motion in vacuum and meet a substrate, and then are condensed to form a film.
The prior art publication No. CN217997301U provides an electron beam coating protection device, when an electron beam is out of control near the anode outlet of an electron gun, the electron beam is directly hit on a guard plate, damage caused by the electron beam hitting on other objects is prevented, a hole for giving way is arranged in the middle of the guard plate, the guard plate is positioned around the electron beam path area, the electron beam path is deviated towards any direction and can be hit on the guard plate, as the melting point of the guard plate is above 1000 ℃, even if a high-power electron beam cannot instantly melt the guard plate, the guard plate can be prevented from being ablated by the electron beam, the temperature of the guard plate is detected in real time by a temperature detector, the temperature detected by the temperature detector is received by a controller, the electron gun is controlled to be turned off in time, an alarm is controlled to give an alarm, a worker is reminded of timely taking corresponding measures, the situation that the electron beam path is deviated to automatically turn off the electron gun is realized, and larger damage to the guard plate is avoided.
The above-mentioned prior art, though can prevent that electron beam from beating and causing the damage on other objects through being provided with the backplate, when adopting different coating materials, these coating materials size variation, the crucible that needs looks adaptation uses, and the step that the crucible of the device was dismantled and is changed is loaded down with trivial details, can not satisfy people's needs, consequently, we need a electron beam high accuracy coating equipment.
Disclosure of Invention
The utility model aims to provide an electron beam high-precision coating device for solving the problems in the background technology.
In order to solve the technical problems, the utility model provides the following technical scheme: the electron beam high-precision coating equipment comprises a coating chamber, wherein a clamp assembly is arranged in the coating chamber, and an adjusting assembly is connected to the inner wall of the coating chamber;
the fixture assembly comprises a mounting box, wherein a sliding groove is formed in the top of the mounting box, a first motor is mounted on one side of the mounting box, an output shaft of the first motor is fixedly connected with a positive and negative threaded rod through a coupler, one end of the positive and negative threaded rod is provided with a first bearing, the outer wall of the positive and negative threaded rod is in threaded connection with a moving block, a thread groove is formed in the outer wall of the moving block, a round groove is formed in the outer wall of the moving block, a sliding rod is connected to the inner wall of the round groove in a sliding mode, and a clamping plate is fixedly connected to the top of the moving block;
the adjusting component comprises a fixing frame, a second motor is mounted on the inner wall of the fixing frame, an output shaft of the second motor is fixedly connected with a rotating shaft through a coupler, a pinion is fixedly connected with one end of the rotating shaft, a large gear is connected with the outer wall of the pinion in a meshed mode, a rotating rod is fixedly connected with the outer wall of the large gear, a second bearing is arranged at one end of the rotating rod, a supporting block is fixedly connected with the outer wall of the rotating rod, and an electron gun is arranged at one end of the supporting block.
Preferably, the outer wall of the coating chamber is hinged with an equipment door, the top of the mounting box is provided with a crucible, the inner wall of the coating chamber is provided with a substrate, one side of the coating chamber is fixedly connected with an exhaust pipe, and one end of the exhaust pipe is provided with a vacuumizing device.
Preferably, the installation box forms a rotating structure with the positive and negative threaded rod through the first motor, and one end of the first motor stretches into the installation box to be connected with the positive and negative threaded rod.
Preferably, the number of the moving blocks is two, and the moving blocks are symmetrically arranged on the positive and negative threaded rods.
Preferably, the moving block and the sliding rod form a sliding structure through a round groove, and one end of the sliding rod penetrates through the round groove to be connected with the inner wall of the installation box.
Preferably, the fixing frame and the rotating shaft form a rotating structure through the second motor, and one end of the second motor penetrates through the fixing frame to be connected with the rotating shaft.
Preferably, the shape and the size of the rotating rod are matched with those of the second bearing, and one end of the rotating rod extends into the second bearing to be connected.
Compared with the prior art, the utility model has the following beneficial effects:
the first motor is started to drive the positive and negative threaded rod to rotate, so that the two moving blocks drive the clamping plates to move to clamp and fix the crucible, the crucibles with different sizes can be clamped, and people can conveniently use different coating materials to coat films, thereby meeting the needs of people.
The second motor is started to drive the rotation shaft to rotate, so that the pinion drives the large gear to rotate, the electron gun is driven to slowly rotate, the angle of the electron gun is convenient to adjust, the accuracy of the angle adjustment of the electron gun is higher, and the crucible with different sizes is adapted to use.
Drawings
FIG. 1 is a schematic diagram of a front view structure of the present utility model;
FIG. 2 is a schematic view of the mounting box and crucible structure of the present utility model;
FIG. 3 is a schematic view of the structure of the mounting box and the moving block of the present utility model;
fig. 4 is a schematic structural diagram of a fixing frame and a second motor according to the present utility model.
Wherein: 1. a film plating chamber; 2. a clamp assembly; 201. a mounting box; 202. a chute; 203. a first motor; 204. a positive and negative threaded rod; 205. a first bearing; 206. a moving block; 207. a thread groove; 208. a circular groove; 209. a slide bar; 210. a clamping plate; 3. an adjustment assembly; 301. a fixing frame; 302. a second motor; 303. a rotating shaft; 304. a pinion gear; 305. a large gear; 306. a rotating lever; 307. a second bearing; 308. a support block; 309. an electron gun; 4. an equipment door; 5. a crucible; 6. a substrate; 7. an exhaust pipe; 8. and (5) vacuumizing the device.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1, fig. 2, fig. 3 and fig. 4, an electron beam high-precision coating apparatus includes a coating chamber 1, a clamp assembly 2 is disposed in the coating chamber 1, and an inner wall of the coating chamber 1 is connected with an adjusting assembly 3, the clamp assembly 2 includes a mounting box 201, a chute 202 is disposed at a top of the mounting box 201, a first motor 203 is disposed at one side of the mounting box 201, an output shaft of the first motor 203 is fixedly connected with a forward and reverse threaded rod 204 through a coupling, one end of the forward and reverse threaded rod 204 is provided with a first bearing 205, an outer wall of the forward and reverse threaded rod 204 is in threaded connection with a moving block 206, an outer wall of the moving block 206 is provided with a threaded groove 207, an outer wall of the moving block 206 is provided with a circular groove 208, an inner wall of the circular groove 208 is in sliding connection with a slide bar 209, a top of the moving block 206 is fixedly connected with a clamping plate 210, the adjusting assembly 3 includes a fixing frame 301, and an inner wall of the fixing frame 301 is provided with a second motor 302, an output shaft of the second motor 302 is fixedly connected with 303 through a coupling, one end of the rotating shaft is fixedly connected with a pinion 304, an outer wall of the pinion 304 is in meshed connection with a large gear 305, one end of the large gear 305 is fixedly connected with a rotating shaft 306, one end of the large gear 306 is rotatably connected with a second bearing 306, and one end of a support rod 308 is fixedly connected with a threaded rod 308 is provided with a threaded rod 308.
Through the above technical scheme, the first motor 203 is started to drive the positive and negative threaded rod 204 to rotate, thereby the two moving blocks 206 drive the clamping plates 210 to move to clamp and fix the crucible 5, the crucible 5 with different sizes can be clamped, people can conveniently use different coating materials to coat films, the requirements of people are met, the second motor 302 is started to drive the rotating shaft 303 to rotate, thereby the pinion 304 drives the large gear 305 to rotate, thereby the electron gun 309 is driven to slowly rotate, the angle of the electron gun 309 is convenient to adjust, the precision of the angle adjustment of the electron gun 309 is higher, the crucible 5 with different sizes is adapted to use, the laser pen device is arranged on the electron gun 309 to assist the position of the electron gun 309 to emit electron beams, the crucible 5 with different sizes is convenient to use when the angle is adjusted, the substrate 6 can be made of materials such as metal, ceramic, plastic film and the like, the substrate 6 can be placed above the crucible 5, and the substrate 6 can be fixed by means of a clamp and the like.
Specifically, the outer wall of the coating chamber 1 is hinged with an equipment door 4, the top of the installation box 201 is provided with a crucible 5, the inner wall of the coating chamber 1 is provided with a substrate 6, one side of the coating chamber 1 is fixedly connected with an exhaust pipe 7, and one end of the exhaust pipe 7 is provided with a vacuumizing device 8.
Through above-mentioned technical scheme, through being provided with equipment door 4 the operating personnel of being convenient for change crucible 5 and add coating film material, evacuating device 8 is prior art, can be through the evacuation pipe 7 with the evacuation state of drawing vacuum in the coating film room 1.
Specifically, the mounting box 201 forms a rotating structure with the forward and reverse threaded rod 204 through the first motor 203, and one end of the first motor 203 extends into the mounting box 201 to be connected with the forward and reverse threaded rod 204.
Through the above technical scheme, the connection effect between the installation box 201 and the first motor 203 and the forward and reverse threaded rod 204 is enhanced, so that the first motor 203 can well drive the forward and reverse threaded rod 204 to rotate after being started, and the forward and reverse threaded rod 204 is provided with forward and reverse threads which are matched with the thread grooves 207 on the symmetrically arranged moving blocks 206.
Specifically, the number of the moving blocks 206 is two, and the moving blocks 206 are symmetrically disposed on the forward and reverse threaded rod 204.
Through the above technical scheme, by arranging two moving blocks 206, when the positive and negative threaded rod 204 rotates, the two moving blocks 206 move to drive the clamping plate 210 to move so as to clamp the crucible 5.
Specifically, the moving block 206 and the sliding rod 209 form a sliding structure through the circular groove 208, and one end of the sliding rod 209 penetrates through the circular groove 208 to be connected with the inner wall of the installation box 201.
Through the above technical scheme, the both ends of slide bar 209 and the inner wall fixed connection of mounting box 201, the quantity of slide bar 209 is two to the symmetry axis symmetry of mounting box 201 sets up, and when movable block 206 moved, movable block 206 relied on circular slot 208 to slide on slide bar 209 more stably.
Specifically, the fixing frame 301 and the rotating shaft 303 form a rotating structure through the second motor 302, and one end of the second motor 302 passes through the fixing frame 301 to be connected with the rotating shaft 303.
Through the above technical scheme, the connecting effect between the fixing frame 301 and the second motor 302 and the rotating shaft 303 is enhanced, so that the second motor 302 can well drive the rotating shaft 303 to rotate, and the rotating stability is enhanced.
Specifically, the shape and size of the rotation lever 306 are matched with those of the second bearing 307, and one end of the rotation lever 306 extends into the second bearing 307 to be connected.
Through the above technical scheme, the connecting effect between the rotating rod 306 and the second bearing 307 is enhanced, so that the rotating rod 306 is more stable to rotate by means of the second bearing 307 during rotation.
When the vacuum coating device is used, the external power supply is connected to the device, the external power supply supplies power to the device, an operator places the crucible 5 on the installation box 201, the first motor 203 is started to drive the positive and negative threaded rod 204 to rotate, the positive and negative threaded rod 204 is more stable by virtue of the rotation of the first bearing 205, so that the moving block 206 moves, the moving block 206 slides on the slide rod 209 through the circular groove 208, the moving block 206 moves to drive the clamping plate 210 to move so as to clamp the crucible 5, then the operator adjusts the angle of the electron gun 309, the second motor 302 can be started to drive the rotation shaft 303 to rotate, the rotation shaft 303 drives the pinion 304 to rotate, the pinion 304 drives the large gear 305 to rotate, the large gear 305 drives the rotation rod 306 to rotate, the rotation rod 306 is more stable by virtue of the rotation of the second bearing 307, the rotation rod 306 drives the support block 308 to slowly rotate by the adjustment angle, after the adjustment of the angle, the operator puts coating material into the crucible 5, the equipment door 4 is closed, the vacuum coating chamber 1 is started to be pumped into vacuum, the electron gun 309 is started to emit electron beams to the coating material in the crucible 5, and the solid state coating material is completely described in the prior art.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit thereof, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The electron beam high-precision coating equipment comprises a coating chamber (1), and is characterized in that: a clamp assembly (2) is arranged in the coating chamber (1), and an adjusting assembly (3) is connected to the inner wall of the coating chamber (1);
the fixture assembly (2) comprises a mounting box (201), a sliding groove (202) is formed in the top of the mounting box (201), a first motor (203) is mounted on one side of the mounting box (201), an output shaft of the first motor (203) is fixedly connected with a positive and negative threaded rod (204) through a coupler, one end of the positive and negative threaded rod (204) is provided with a first bearing (205), the outer wall of the positive and negative threaded rod (204) is in threaded connection with a moving block (206), a thread groove (207) is formed in the outer wall of the moving block (206), a circular groove (208) is formed in the outer wall of the moving block (206), a sliding rod (209) is connected to the inner wall of the circular groove (208) in a sliding mode, and a clamping plate (210) is fixedly connected to the top of the moving block (206);
the adjusting component (3) comprises a fixing frame (301), a second motor (302) is installed on the inner wall of the fixing frame (301), an output shaft of the second motor (302) is fixedly connected with a rotating shaft (303) through a coupler, one end of the rotating shaft (303) is fixedly connected with a pinion (304), the outer wall of the pinion (304) is in meshed connection with a large gear (305), the outer wall of the large gear (305) is fixedly connected with a rotating rod (306), one end of the rotating rod (306) is provided with a second bearing (307), the outer wall of the rotating rod (306) is fixedly connected with a supporting block (308), and one end of the supporting block (308) is provided with an electron gun (309).
2. An electron beam high precision coating apparatus as set forth in claim 1, wherein: the outer wall of the coating chamber (1) is hinged with an equipment door (4), the top of the installation box (201) is provided with a crucible (5), the inner wall of the coating chamber (1) is provided with a substrate (6), one side of the coating chamber (1) is fixedly connected with an exhaust pipe (7), and one end of the exhaust pipe (7) is provided with a vacuumizing device (8).
3. An electron beam high precision coating apparatus as set forth in claim 1, wherein: the mounting box (201) and the positive and negative threaded rod (204) form a rotating structure through the first motor (203), and one end of the first motor (203) extends into the mounting box (201) to be connected with the positive and negative threaded rod (204).
4. An electron beam high precision coating apparatus as set forth in claim 1, wherein: the number of the moving blocks (206) is two, and the moving blocks (206) are symmetrically arranged on the positive and negative threaded rod (204).
5. An electron beam high precision coating apparatus as set forth in claim 1, wherein: the moving block (206) and the sliding rod (209) form a sliding structure through the circular groove (208), and one end of the sliding rod (209) penetrates through the circular groove (208) to be connected with the inner wall of the installation box (201).
6. An electron beam high precision coating apparatus as set forth in claim 1, wherein: the fixing frame (301) and the rotating shaft (303) form a rotating structure through the second motor (302), and one end of the second motor (302) penetrates through the fixing frame (301) to be connected with the rotating shaft (303).
7. An electron beam high precision coating apparatus as set forth in claim 1, wherein: the shape and the size of the rotating rod (306) are matched with those of the second bearing (307), and one end of the rotating rod (306) extends into the second bearing (307) to be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321724019.1U CN220224303U (en) | 2023-07-03 | 2023-07-03 | Electron beam high accuracy coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321724019.1U CN220224303U (en) | 2023-07-03 | 2023-07-03 | Electron beam high accuracy coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220224303U true CN220224303U (en) | 2023-12-22 |
Family
ID=89188457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321724019.1U Active CN220224303U (en) | 2023-07-03 | 2023-07-03 | Electron beam high accuracy coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220224303U (en) |
-
2023
- 2023-07-03 CN CN202321724019.1U patent/CN220224303U/en active Active
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