CN220214448U - Semiconductor workshop industrial waste gas collecting and treating device capable of efficiently treating - Google Patents
Semiconductor workshop industrial waste gas collecting and treating device capable of efficiently treating Download PDFInfo
- Publication number
- CN220214448U CN220214448U CN202321407377.XU CN202321407377U CN220214448U CN 220214448 U CN220214448 U CN 220214448U CN 202321407377 U CN202321407377 U CN 202321407377U CN 220214448 U CN220214448 U CN 220214448U
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- Prior art keywords
- waste gas
- box
- industrial waste
- dust removing
- communicating pipe
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- 239000007789 gas Substances 0.000 title claims abstract description 52
- 239000004065 semiconductor Substances 0.000 title claims abstract description 27
- 239000002440 industrial waste Substances 0.000 title claims abstract description 19
- 239000000428 dust Substances 0.000 claims abstract description 61
- 230000000149 penetrating effect Effects 0.000 claims abstract description 3
- 238000002485 combustion reaction Methods 0.000 claims description 10
- 239000002994 raw material Substances 0.000 claims description 5
- 238000003860 storage Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 238000005057 refrigeration Methods 0.000 claims description 3
- 239000002912 waste gas Substances 0.000 description 20
- 230000000694 effects Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 2
- 239000010881 fly ash Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010815 organic waste Substances 0.000 description 1
- 230000000246 remedial effect Effects 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model discloses an industrial waste gas collecting and treating device for a semiconductor workshop, which relates to the technical field of semiconductors, wherein a sliding plate is arranged in a movable cover, one end of the sliding plate is connected with a sliding block in a sliding manner, one end of the sliding block is movably connected with a connecting plate, a plurality of dust removing nets are distributed at the lower end of the connecting plate from left to right at equal intervals, a dust removing box is arranged at one end of the dust removing net far away from the movable cover, a second communicating pipe is connected with one end of the dust removing box, a condensing box is arranged at one end of the second communicating pipe, a first communicating pipe is connected with the middle part of one end of the condensing box, a gas supply box is arranged at one end of the first communicating pipe, a gas inlet pipe is connected in a penetrating manner in the gas supply box, and a control panel is arranged outside one end of the gas supply box.
Description
Technical Field
The utility model relates to the technical field of semiconductors, in particular to a semiconductor workshop industrial waste gas collecting and treating device capable of efficiently treating.
Background
Acid-base gas and other organic waste gas are generated in the semiconductor manufacturing process, the gas is discharged into the air to pollute the air and harm the health of human bodies, industrial waste gas can be discharged only by purifying treatment, and usually, dust contained in the gas is filtered before the gas is discharged to the outside atmosphere after high-temperature treatment, water treatment and cooling treatment, so that water molecules and dust contained in the gas are removed.
By searching, an industrial waste gas treatment device (publication number CN 209549104U) is disclosed, which can treat various harmful substances in waste gas by a continuous waste gas treatment structure, and finally burn the harmful substances to minimize the harmful substances in the waste gas. Waste gas enters the absorption box body through the air inlet pipe, harmful substances dissolved in the absorption liquid are removed through the cleaning of the absorption liquid, and then the waste gas enters the condensation box body, so that when the harmful gases in the waste gas reach a condensation point, the waste gas is condensed to become condensed water and collected, in the electrostatic dust removal box body, when electrons run to the positive pole in-process to encounter dust particles, the dust particles are negatively charged and adsorbed to the anode electrode plate to be collected, fine particles in the waste gas are removed, and then the waste gas is sucked into the combustion furnace through a third connecting pipe by a third induced draft fan to be combusted.
However, in the above technical scheme, although the effect of treating various harmful substances in the waste gas can be well achieved, the dust contained in the gas needs to be filtered before the treated waste gas is discharged to the outside atmosphere, so that water molecules and dust contained in the gas can be removed.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model provides the semiconductor workshop industrial waste gas collecting and treating device capable of efficiently treating, and solves the problem that the dust removing effect in waste gas is poor due to the fact that the dust removing structure in the electrostatic dust removing box of the device is inconvenient to detach and clean.
In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a but semiconductor workshop industrial waste gas collection processing apparatus of high-efficient processing, the fly ash can be covered, the inside slide that is provided with of fly ash can be covered, the one end sliding connection of slide has the slider, the one end swing joint of slider has the connecting plate, the lower extreme of connecting plate is from left to right equidistance to distribute there are a plurality of dust removal nets.
Preferably, one end of the dust removing net far away from the movable cover is provided with a dust removing box, and one end of the dust removing box is connected with a second communicating pipe.
Preferably, one end of the second communicating pipe is provided with a condensing box, and the middle part of one end of the condensing box is connected with a first communicating pipe.
Preferably, one end of the first communication pipe is provided with an air supply box, and an air inlet pipe is connected inside the air supply box in a penetrating manner.
Preferably, a control panel is arranged outside one end of the air supply box, and one end, far away from the dust removal box, of the control panel is connected with a third communicating pipe.
Preferably, one end of the third communicating pipe is connected with a combustion furnace, and a raw material temporary storage box is arranged in the middle of the top end of the combustion furnace.
Preferably, a semiconductor refrigerating sheet is arranged in the condensing box, and the lower end of the semiconductor refrigerating sheet, which is far away from the condensing box, is provided with a condensing sheet.
Preferably, an induced draft fan is arranged in the second communicating pipe, and a cathode electrode plate is arranged in the induced draft fan far away from the dust removing box.
Preferably, the cathode electrode plate is connected with the anode electrode plate far away from the interior of the dust removal box.
The working principle and the beneficial effects of the utility model are as follows:
according to the utility model, when the device needs to be replaced and the dust removing net is cleaned in the normal use process, the movable cover is opened, then the connecting plate is pulled upwards, the connecting plate is connected with the sliding plate through the sliding block and then slides upwards, the connecting plate drives the dust removing net to slide upwards in the upward sliding process until the connecting plate and the dust removing net are completely separated from the sliding plate through the sliding of the sliding block and the sliding plate, the detached dust removing net is cleaned, and the cleaned dust removing net and the connecting plate are clamped into the groove of the sliding plate through the sliding block, so that the dust removing net has the effects of conveniently disassembling and cleaning and improving the dust removing effect of the dust removing net.
Drawings
The utility model will be described in further detail with reference to the drawings and the detailed description.
FIG. 1 is a schematic diagram of a raw material temporary storage box in the utility model;
FIG. 2 is a schematic view of the structure of the movable cover in the present utility model;
FIG. 3 is a schematic cross-sectional view of a condensing sheet according to the present utility model;
FIG. 4 is a schematic top view of the burner of the present utility model;
fig. 5 is an enlarged schematic view of the structure at a in the present utility model.
In the figure: 1. a raw material temporary storage box; 2. a control panel; 3. an air inlet pipe; 4. a first communication pipe; 5. a third communicating pipe; 6. a second communicating pipe; 7. a movable cover; 8. condensing sheets; 9. a semiconductor refrigeration sheet; 10. a dust removal box; 11. a condensing box; 12. a combustion furnace; 13. a gas supply tank; 14. a slide block; 15. a cathode electrode plate; 16. a connecting plate; 17. an induced draft fan; 18. an anode electrode plate; 19. a slide plate; 20. a dust removing net.
Detailed Description
The technical solutions of the embodiments of the present utility model will be clearly and completely described below in conjunction with the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 2 and 5, the present utility model provides a technical solution: the utility model provides a but semiconductor workshop industrial waste gas collection processing apparatus of high-efficient processing, including movable cover 7, the inside slide 19 that is provided with of movable cover 7, the one end sliding connection of slide 19 has slider 14, the one end swing joint of slider 14 has connecting plate 16, the lower extreme of connecting plate 16 is by left to right equidistance distribution have a plurality of dust removal nets 20, through the dust removal net 20 after handling the clearance with connecting plate 16 through slider 14 then block into slide 19's recess can, and then play still play when convenient to detach cleaning performance and improve dust removal net 20 dust removal effect.
Referring to fig. 1, fig. 2, fig. 3, fig. 4 and fig. 5, the end of the dust removal net 20, which is far away from the movable cover 7, is provided with the dust removal box 10, one end of the dust removal box 10 is connected with the second communicating pipe 6, one end of the second communicating pipe 6 is provided with the condensing box 11, one end middle part of the condensing box 11 is connected with the first communicating pipe 4, one end of the first communicating pipe 4 is provided with the gas supply box 13, the inside through connection of the gas supply box 13 has the gas inlet pipe 3, one end outside of the gas supply box 13 is provided with the control panel 2, one end of the control panel 2, which is far away from the dust removal box 10, is connected with the third communicating pipe 5, one end of the third communicating pipe 5 is connected with the combustion furnace 12, the top middle part of the combustion furnace 12 is provided with the raw materials temporary storage box 1, the inside of the condensing box 11 is provided with the semiconductor refrigerating piece 9, the lower end of the condensing box 11 is far away from the semiconductor refrigerating piece 9 is provided with the condensing box 8, the inside of the second communicating pipe 6 is provided with the electrode plate 17, the inside of the dust removal box 10 is far away from the inside of the condensing box 10 is provided with the cathode 15, the inside of the cathode 15 is far away from the dust removal box 10 has the anode 18, the inside of the dust removal box 10 is connected with the harmful gas through the dust removal box 10, the harmful gas is the inside of the gas and the gas is blown down by the gas and the gas from the gas supply box 12, the gas and the gas is mutually matched with the dust and the gas and the waste gas and the harmful gas and the gas and is used.
When in use, firstly, the measuring instrument is checked whether each part can be used normally, and when the measuring instrument cannot be used normally, remedial measures for maintaining or replacing part of parts are immediately taken, when all the works are ready, the waste gas enters the air supply box 13 through the air inlet pipe 3, the absorption liquid is arranged in the air supply box 13, the harmful gas of the waste gas dissolved in the absorption liquid is removed, the waste gas in the gas supply tank 13 is led into the condensing tank 11 through the first communication pipe 4, when the harmful gas in the waste gas reaches the condensation point, condensing to become condensed water, collecting the condensed water, leading the waste gas in the condensing tank 11 to enter the dust removing tank 10 through the second communicating pipe 6, when the electrons run to the positive electrode, dust particles are absorbed to the anode electrode plate 18 to be collected, fine particles in the waste gas are removed, the waste gas is sucked into the combustion furnace 12 through the third communicating pipe 5 by the induced draft fan 17 for combustion, by opening the removable cover 7 when the device needs to be replaced and the dust collection net 20 cleaned during normal use, then the connecting plate 16 is pulled upwards, the connecting plate 16 is connected with the sliding plate 19 through the sliding block 14 to slide upwards, the connecting plate 16 drives the dust removing net 20 to slide upwards in the process of sliding upwards until the connecting plate 16 and the dust removing net 20 are completely separated from the sliding plate 19 through the sliding of the sliding block 14 and the sliding plate 19, the detached dust removing net 20 is cleaned, the cleaned dust removing net 20 and the connecting plate 16 are clamped into the grooves of the sliding plate 19 through the sliding block 14, and further plays a role in improving the dust removal effect of the dust removal net 20 while playing a role in convenient disassembly and cleaning, and further completes the work of collecting and treating the industrial waste gas in the semiconductor workshop.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.
Claims (9)
1. The utility model provides a but semiconductor workshop industrial waste gas collection processing apparatus of high-efficient processing, includes movable cover (7), its characterized in that: the dust removing device is characterized in that a sliding plate (19) is arranged inside the movable cover (7), one end of the sliding plate (19) is connected with a sliding block (14) in a sliding mode, one end of the sliding block (14) is movably connected with a connecting plate (16), and a plurality of dust removing nets (20) are distributed at the lower end of the connecting plate (16) from left to right in an equidistant mode.
2. The semiconductor workshop industrial waste gas collecting and treating device capable of being treated efficiently according to claim 1, wherein: one end of the dust removing net (20) far away from the movable cover (7) is provided with a dust removing box (10), and one end of the dust removing box (10) is connected with a second communicating pipe (6).
3. The semiconductor workshop industrial waste gas collecting and treating device capable of being treated efficiently according to claim 2, wherein: one end of the second communicating pipe (6) is provided with a condensing box (11), and the middle part of one end of the condensing box (11) is connected with a first communicating pipe (4).
4. The semiconductor workshop industrial waste gas collecting and treating device capable of being treated efficiently according to claim 3, wherein: one end of the first communication pipe (4) is provided with an air supply box (13), and the inside of the air supply box (13) is connected with an air inlet pipe (3) in a penetrating way.
5. The semiconductor workshop industrial waste gas collecting and treating device capable of being treated efficiently according to claim 4, wherein: one end outside of air feed case (13) is provided with control panel (2), one end that dust removal case (10) was kept away from to control panel (2) is connected with third communicating pipe (5).
6. The semiconductor workshop industrial waste gas collecting and treating device capable of being treated efficiently according to claim 5, wherein: one end of the third communicating pipe (5) is connected with a combustion furnace (12), and a raw material temporary storage box (1) is arranged in the middle of the top end of the combustion furnace (12).
7. The semiconductor workshop industrial waste gas collecting and treating device capable of being treated efficiently according to claim 3, wherein: the inside of condensing box (11) is provided with semiconductor refrigeration piece (9), the lower extreme that condensing box (11) were kept away from to semiconductor refrigeration piece (9) is provided with condensing piece (8).
8. The semiconductor workshop industrial waste gas collecting and treating device capable of being treated efficiently according to claim 2, wherein: an induced draft fan (17) is arranged in the second communicating pipe (6), and a cathode electrode plate (15) is arranged in the induced draft fan (17) far away from the dust removing box (10).
9. The semiconductor workshop industrial waste gas collecting and treating device capable of being treated efficiently according to claim 8, wherein: an anode electrode plate (18) is connected to the inside of the cathode electrode plate (15) far away from the dust removing box (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321407377.XU CN220214448U (en) | 2023-06-05 | 2023-06-05 | Semiconductor workshop industrial waste gas collecting and treating device capable of efficiently treating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321407377.XU CN220214448U (en) | 2023-06-05 | 2023-06-05 | Semiconductor workshop industrial waste gas collecting and treating device capable of efficiently treating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220214448U true CN220214448U (en) | 2023-12-22 |
Family
ID=89185863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321407377.XU Active CN220214448U (en) | 2023-06-05 | 2023-06-05 | Semiconductor workshop industrial waste gas collecting and treating device capable of efficiently treating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220214448U (en) |
-
2023
- 2023-06-05 CN CN202321407377.XU patent/CN220214448U/en active Active
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: An Efficient Industrial Waste Gas Collection and Treatment Device for Semiconductor Workshop Granted publication date: 20231222 Pledgee: Guanggu Branch of Wuhan Rural Commercial Bank Co.,Ltd. Pledgor: Wuhan blue ocean Intelligent Control Technology Co.,Ltd. Registration number: Y2024980009667 |