CN220189586U

CN220189586U - Sliding shaft type conductive clamping flower basket structure

Info

Publication number: CN220189586U
Application number: CN202321640738.5U
Authority: CN
Inventors: 张三洋; 邵玉林
Original assignee: Wuxi Kunsheng Intelligent Equipment Co ltd
Current assignee: Wuxi Kunsheng Intelligent Equipment Co ltd
Priority date: 2023-06-27
Filing date: 2023-06-27
Publication date: 2023-12-15
Anticipated expiration: 2033-06-27

Abstract

The utility model discloses a sliding shaft type conductive clamping flower basket structure which comprises a first fixing plate and a second fixing plate, wherein a fixing shaft is fixedly connected between the first fixing plate and the second fixing plate, a connected elastic sheet is fixedly connected to the left side surface of the first fixing plate, an electrode sheet is fixedly connected to the left side surface of the connected elastic sheet and near the top edge, a mounting hole is formed in the surface of the connected elastic sheet, a sliding shaft is mounted in the mounting hole through a nut, and a first clamping point is fixedly connected to the front side surface and the rear side surface of the sliding shaft. Through above-mentioned structure, through setting up disjunctor shell fragment, can adopt disjunctor shell fragment with a plurality of sliding shaft zonulae occludens together effectively, can guarantee the electric conductivity of sliding shaft effectively, can utilize the elasticity that disjunctor shell fragment deformation produced to promote the sliding shaft simultaneously and carry out the location clamp to the silicon chip.

Description

Sliding shaft type conductive clamping flower basket structure

Technical Field

The utility model relates to the technical field of basket clamps, in particular to a sliding shaft type conductive clamping basket structure.

Background

The silicon wafer enters an inserting procedure after photoresist is removed, and then the basket clamp is required to be used for positioning and clamping the silicon wafer.

The clamping mechanism of the existing flower basket clamp adopts single-sided multi-clamping-point linkage to position and clamp the silicon wafer, although the efficiency of clamping the silicon wafer can be effectively improved, the sliding shaft of the mounting clamping point penetrates through the fixing plates on two sides and is in sliding contact with the fixing plates, and due to the adoption of hole type sliding contact, the conductivity between the fixing plates and the sliding shaft is somewhat low, and further the electroplating quality of the silicon wafer can be influenced.

Disclosure of Invention

The utility model provides a sliding shaft type conductive clamping flower basket structure, which can effectively adopt an integral elastic piece to tightly connect a plurality of sliding shafts together, can effectively ensure the conductivity of the sliding shafts, and can simultaneously utilize the elastic force generated by deformation of the integral elastic piece to push the sliding shafts to position and clamp silicon wafers.

In order to achieve the above purpose, a sliding shaft type conductive clamping flower basket structure is provided, which comprises a first fixing plate and a second fixing plate, a fixed shaft is fixedly connected between the first fixing plate and the second fixing plate, a conjoined elastic sheet is fixedly connected to the left side surface of the first fixing plate, an electrode plate is fixedly connected to the left side surface of the conjoined elastic sheet and is close to the top edge, a mounting hole is formed in the surface of the conjoined elastic sheet, a sliding shaft is mounted in the mounting hole through a nut, a first clamping point is fixedly connected to the front side surface and the rear side surface of the sliding shaft, a second clamping point is fixedly connected to the front side surface and the rear side surface of the fixed shaft, and the other end of the sliding shaft penetrates through the second fixing plate. Through setting up first fixed plate and second fixed plate be for the effect of conveniently constituteing a basket of flowers frame with fixed axle and sliding axle, be for the effect of conveniently guaranteeing the holistic stability of basket of flowers through setting up the fixed axle, be for conveniently utilizing the elasticity that shell fragment deformation produced to exert pressure to the sliding axle through setting up disjunctor shell fragment for first pinch point cooperates with the second pinch point and carries out the effect that the location was pressed from both sides tightly to the silicon chip, be for conveniently carrying out the circular telegram to whole basket of flowers anchor clamps through setting up the electrode slice, and then electroplate the effect of operation to the silicon chip, be for the effect of conveniently installing the sliding axle through setting up the mounting hole, make the sliding axle can freely slide the effect, be for conveniently driving first pinch point through setting up the sliding axle and move, be convenient for carry out the effect of pressing from both sides tightly and unclamping to the silicon chip.

According to the sliding shaft type conductive clamping flower basket structure, the first clamping points are arranged in a downward inclined mode, the second clamping points are arranged in an upward inclined mode, and the positions of the first clamping points correspond to the positions of the second clamping points. By arranging the first clamping point obliquely downwards and arranging the second clamping point upwards, the first clamping point and the second clamping point can be ensured to correspond.

According to the sliding shaft type conductive clamping flower basket structure, silicon wafers are arranged between the first clamping points and the second clamping points, and the number of the silicon wafers is multiple.

According to the sliding shaft type conductive clamping flower basket structure, the upper surface of the fixed shaft is fixedly connected with a supporting block, and the upper surface of the supporting block is in sliding contact with the lower surface of the sliding shaft. The supporting blocks are arranged to facilitate the positioning and supporting of the sliding shaft.

According to the sliding shaft type conductive clamping flower basket structure, the sectional shape of the sliding shaft and the sectional shape of the fixed shaft are rectangular, and two ends of the sliding shaft are fixedly connected with cylindrical connecting rods. The cylindrical connecting rod is arranged to conveniently penetrate through the first fixing plate and the second fixing plate.

According to the sliding shaft type conductive clamping flower basket structure, the first clamping points on the sliding shaft and the second clamping points on the fixed shaft are distributed at equal intervals.

The utility model has the beneficial effects that: through setting up disjunctor shell fragment, can adopt disjunctor shell fragment with a plurality of sliding shaft zonulae occludens together effectively, can guarantee the electric conductivity of sliding shaft effectively, can utilize the elasticity that disjunctor shell fragment deformation produced to promote the sliding shaft simultaneously and carry out the location clamp to the silicon chip.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described below with reference to the drawings and examples;

FIG. 1 is a perspective view of the outer structure of a slide-shaft conductive clamping basket structure of the present utility model;

FIG. 2 is an elevational view of the outer structure of a slide-shaft conductive clamping basket structure of the present utility model;

FIG. 3 is a top view of the outer structure of a slide-shaft conductive clamping basket structure of the present utility model;

FIG. 4 is an enlarged view of FIG. 1A in accordance with the present utility model;

FIG. 5 is a schematic diagram of a second embodiment of the present utility model;

fig. 6 is an enlarged view of B of fig. 5 in accordance with the present utility model.

Legend description:

1. a first fixing plate; 2. a second fixing plate; 3. an electrode sheet; 4. a conjoined elastic sheet; 5. a sliding shaft; 6. a fixed shaft; 7. a silicon wafer; 8. a first pinch point; 9. and a second pinch point.

Detailed Description

Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.

Embodiment one:

referring to fig. 1 to 4, the sliding shaft type conductive clamping flower basket structure according to the embodiment of the utility model comprises a first fixing plate 1 and a second fixing plate 2, wherein a fixing shaft 6 is fixedly connected between the first fixing plate 1 and the second fixing plate 2, a conjoined elastic sheet 4 is fixedly connected to the left side surface of the first fixing plate 1, an electrode sheet 3 is fixedly connected to the left side surface of the conjoined elastic sheet 4 and near the top edge, a mounting hole is formed in the surface of the conjoined elastic sheet 4, a sliding shaft 5 is mounted in the mounting hole through a nut, a first clamping point 8 is fixedly connected to the front side surface and the rear side surface of the sliding shaft 5, a second clamping point 9 is fixedly connected to the front side surface and the rear side surface of the fixing shaft 6, and the other end of the sliding shaft 5 penetrates through the second fixing plate 2.

The first clamping points 8 are arranged in a downward inclined mode, the second clamping points 9 are arranged in an upward inclined mode, the positions of the first clamping points 8 correspond to the positions of the second clamping points 9, silicon wafers 7 are arranged between the first clamping points 8 and the second clamping points 9, and the number of the silicon wafers 7 is multiple.

The upper surface of the fixed shaft 6 is fixedly connected with a supporting block, and the upper surface of the supporting block is in sliding contact with the lower surface of the sliding shaft 5.

The cross section of the sliding shaft 5 and the cross section of the fixed shaft 6 are rectangular, two ends of the sliding shaft 5 are fixedly connected with cylindrical connecting rods, and a first clamping point 8 on the sliding shaft 5 and a second clamping point 9 on the fixed shaft 6 are distributed at equal intervals.

Embodiment two:

referring to fig. 5 and 6, the embodiment of the present utility model is different from the first embodiment in that the clamping points installed in the middle are integrated, the integrated clamping points are installed on the sliding shaft 5 and the fixed shaft 6 by screws, the integrated clamping points are shaped like wings, the integrated clamping points are made of flexible materials,

working principle: when the silicon wafer positioning and clamping device is used, the sliding shaft 5 is pushed to move leftwards, the conjoined elastic sheet 4 deforms to generate elastic force, the first clamping point 8 and the second clamping point 9 are separated, then the silicon wafer 7 is placed between the first clamping point 8 and the second clamping point 9, and then the conjoined elastic sheet 4 resets, so that the silicon wafer 7 is positioned and clamped.

The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.

Claims

1. The utility model provides a conductive clamping flower basket structure of sliding shaft, its characterized in that, includes first fixed plate (1) and second fixed plate (2), fixedly connected with fixed axle (6) between first fixed plate (1) and second fixed plate (2), the left side surface fixedly connected with disjunctor shell fragment (4) of first fixed plate (1), the left side surface and be close to top edge fixedly connected with electrode slice (3) of disjunctor shell fragment (4), the mounting hole has been seted up on the surface of disjunctor shell fragment (4), sliding shaft (5) are installed through the nut to the inside of mounting hole, the front side surface and the rear side surface fixedly connected with first pinch point (8) of sliding shaft (5), the equal fixedly connected with second pinch point (9) of front side surface and rear side surface of fixed axle (6), the other end of sliding shaft (5) runs through second fixed plate (2).

2. A sliding shaft type conductive clamping flower basket structure according to claim 1, wherein the first clamping point (8) is arranged in a downward inclined mode, the second clamping point (9) is arranged in an upward inclined mode, and the position of the first clamping point (8) corresponds to the position of the second clamping point (9).

3. A sliding shaft type conductive clamping flower basket structure according to claim 1, wherein silicon wafers (7) are arranged between the first clamping points (8) and the second clamping points (9), and the number of the silicon wafers (7) is multiple.

4. A sliding shaft type conductive clamping flower basket structure according to claim 1, characterized in that the upper surface of the fixed shaft (6) is fixedly connected with a supporting block, and the upper surface of the supporting block is in sliding contact with the lower surface of the sliding shaft (5).

5. The sliding shaft type conductive clamping flower basket structure according to claim 1, wherein the sectional shape of the sliding shaft (5) and the sectional shape of the fixed shaft (6) are rectangular, and two ends of the sliding shaft (5) are fixedly connected with cylindrical connecting rods.

6. A sliding shaft type conductive clamping flower basket structure according to claim 1, characterized in that the first clamping points (8) on the sliding shaft (5) and the second clamping points (9) on the fixed shaft (6) are all equidistantly distributed.