CN217425922U

CN217425922U - Substrate clamp

Info

Publication number: CN217425922U
Application number: CN202121526070.2U
Authority: CN
Inventors: 张强
Original assignee: Coreway Optech Co ltd
Current assignee: Coreway Optech Co ltd
Priority date: 2021-07-06
Filing date: 2021-07-06
Publication date: 2022-09-13
Anticipated expiration: 2031-07-06

Abstract

The utility model discloses a substrate clamp, which comprises a clamping plate and a cover plate; a plurality of clamping strips are arranged on the top surface of the clamping plate in parallel, and the clamping strips are arranged at intervals along the longitudinal direction of the clamping plate; the cover plate is provided with a plurality of clamping grooves which penetrate through the surface of the cover plate in parallel, and the clamping grooves are arranged at intervals along the longitudinal direction of the cover plate; the cover plate covers the clamping plate, and a clamping strip can be embedded into each clamping groove; the clamping plate or the cover plate is connected with a clamping mechanism, and the clamping mechanism is used for driving the clamping plate or the cover plate to move longitudinally so that the front side wall of the clamping strip is close to the front inner wall of the clamping groove or the rear side wall of the clamping strip is close to the rear inner wall of the clamping groove; or the clamping plate and the cover plate are respectively connected with a clamping mechanism, and the two clamping mechanisms respectively drive the clamping plate and the cover plate to longitudinally move towards opposite directions, so that the front side wall of the clamping strip is close to the front inner wall of the clamping groove or the rear side wall of the clamping strip is close to the rear inner wall of the clamping groove. The clamp can conveniently clamp a plurality of substrates.

Description

Substrate clamp

Technical Field

The utility model relates to an electronic components processing field refers in particular to a substrate anchor clamps.

Background

An electronic component with an electrode pattern usually needs to be clamped by a clamp in the processing process, and then a photoetching machine is used for carrying out operations such as patterned exposure on the substrate, so that the electrode pattern on a photoetching plate is transferred onto the substrate; when the prior substrate is subjected to side exposure and other operations, the substrate needs to be erected, then clamped by a clamp, and then subjected to exposure and other operations; the existing clamp has a complex structure and low clamping efficiency, and cannot clamp a plurality of substrates; each clamp can only clamp one substrate, so that the clamping efficiency is low, batch operation cannot be performed, and the product processing efficiency is low. Therefore, it is necessary to design a new clamp capable of clamping a plurality of substrates at one time.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a: in view of the above problems, a substrate holder is provided, which can conveniently hold a plurality of substrates.

The utility model adopts the technical scheme as follows:

a substrate clamp comprises a clamping plate and a cover plate; a plurality of clamping strips are arranged on the top surface of the clamping plate in parallel, and the clamping strips are arranged at intervals along the longitudinal direction of the clamping plate; the cover plate is provided with a plurality of clamping grooves which penetrate through the surface of the cover plate in parallel, and the clamping grooves are arranged at intervals along the longitudinal direction of the cover plate; the cover plate covers the clamping plate, and a clamping strip can be embedded into each clamping groove;

the clamping plate or the cover plate is connected with a clamping mechanism, and the clamping mechanism is used for driving the clamping plate or the cover plate to move longitudinally so that the front side wall of the clamping strip is close to the front inner wall of the clamping groove or the rear side wall of the clamping strip is close to the rear inner wall of the clamping groove;

or the clamping plate and the cover plate are respectively connected with a clamping mechanism, and the two clamping mechanisms respectively drive the clamping plate and the cover plate to longitudinally move towards opposite directions, so that the front side wall of the clamping strip is close to the front inner wall of the clamping groove or the rear side wall of the clamping strip is close to the rear inner wall of the clamping groove.

Furthermore, the clamping strips and the clamping grooves are distributed in parallel at equal intervals.

Furthermore, the number of the card strips is equal to that of the card slots.

Further, the clamping mechanism is connected with the cover plate; the clamping mechanism comprises a push-pull plate, a left guide rod, a right guide rod, a left spring, a right spring, a left sliding block and a right sliding block; the push-pull plate is positioned at the front ends of the clamping plate and the cover plate, and the push-pull plate is parallel to the clamping strip and the guide groove; the left guide rod and the right guide rod are respectively arranged on the left side and the right side of the cover plate, the front ends of the left guide rod and the right guide rod are fixedly connected with the push-pull plate, the left sliding block and the right sliding block are respectively sleeved on the left guide rod and the right guide rod, the left sliding block and the right sliding block are respectively fixedly arranged on the left side and the right side of the cover plate, and the cover plate can move back and forth along the left guide rod and the right guide rod; the left spring and the right spring are sleeved on the left guide rod and the right guide rod respectively; the front end of the left spring is connected with the push-pull plate, and the rear end of the left spring is connected with the left sliding block; the front end of the right spring is connected with the push-pull plate, and the rear end of the right spring is connected with the right sliding block;

the substrate fixture further comprises a fixing mechanism used for limiting the push-pull plate and the clamping plate to move in the horizontal direction.

Further, the fixing mechanism is a fixing bottom plate, and the middle part of the fixing bottom plate is provided with a mounting groove; the rear end of the fixed bottom plate is provided with a clamping plate longitudinal limiting groove and a clamping plate transverse limiting groove; the clamping plate transverse limiting groove is positioned at the rear end of the mounting groove, and the front end of the clamping plate transverse limiting groove is communicated with the rear end of the mounting groove; the clamping plate longitudinal limiting groove penetrates through the left side wall and the right side wall of the clamping plate transverse limiting groove and extends to the left side and the right side of the fixed bottom plate; the front end of the fixed bottom plate is provided with a push-pull plate longitudinal limiting groove, the push-pull plate longitudinal limiting groove is positioned at the front end of the mounting groove, and the push-pull plate longitudinal limiting groove penetrates through the left side wall and the right side wall of the mounting groove and extends towards the left side and the right side of the fixed bottom plate; the clamping plate, the cover plate, the left guide rod and the right guide rod are positioned in the mounting groove; the rear end of the clamping plate is embedded into the transverse clamping plate limiting groove, the left side and the right side of the rear end of the clamping plate are provided with longitudinal clamping plate limiting strips, and the longitudinal clamping plate limiting strips are embedded into the longitudinal clamping plate limiting grooves; the push-pull plate is embedded into the longitudinal limit groove of the push-pull plate.

Furthermore, a plurality of positioning convex strips are arranged on the surface of the clamping plate in parallel, and the positioning convex strips are arranged at intervals along the transverse direction of the clamping plate; the positioning convex strips are divided into a plurality of sections by the clamping strips on the clamping plates.

Furthermore, two positioning convex strips are arranged on the surface of the clamping plate in parallel, are symmetrical about the longitudinal axis of the clamping plate and are arranged on the left side and the right side of the clamping plate.

Furthermore, the height and the width of the positioning convex strip are smaller than those of the clamping strips.

Furthermore, two cover plate supporting strips are arranged at the bottom of the cover plate; the cover plate supporting strips are arranged on the left side and the right side of the cover plate and extend along the longitudinal direction of the cover plate; when the apron lid is on the cardboard, the cardboard is located between two apron support bars, just the bottom of apron support bar contacts with the bottom of mounting groove.

Furthermore, the height of the cover plate supporting strip is greater than the sum of the heights of the clamping plate and the positioning convex strip.

To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:

the clamp of the utility model has a plurality of clamping strips and clamping grooves, so that the clamp can clamp a plurality of workpieces; the operation is convenient, and the number of the clamps is reduced; simultaneously, relative movement takes place for cardboard or apron to press from both sides the substrate tightly, the utility model discloses only need drive cardboard or apron through one or two clamping mechanism and take place relative movement alright accomplish the clamping in batches, do not need every substrate all to go the elasticity degree of adjusting the clamping alone, convenient operation.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

fig. 2 is a top view of the present invention;

FIG. 3 is a structural view of the card;

FIG. 4 is a structural view of the cover plate;

FIG. 5 is a block diagram of the mounting plate;

FIG. 6 is an enlarged view of the positioning tabs;

fig. 7 is a schematic view of a structure of a substrate.

Detailed Description

To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the present invention, the embodiments and the features of the embodiments may be combined with each other without conflict.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which the products of the present invention are conventionally placed in use, or the position or positional relationship which the skilled person conventionally understand, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element to which the reference is made must have a specific position, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1-7, the utility model discloses a substrate clamp, which comprises a clamping plate 2 and a cover plate 1; a plurality of clamping strips 4 are arranged on the top surface of the clamping plate 2 in parallel, and the clamping strips 4 are arranged at intervals along the longitudinal direction of the clamping plate 2; a plurality of clamping grooves 7 penetrating through the surface of the cover plate 1 are formed in the cover plate 1 in parallel, and the clamping grooves 7 are arranged at intervals along the longitudinal direction of the cover plate 1; the cover plate 1 covers the clamping plate 2, and each clamping groove 7 can be embedded with a clamping strip 4;

the clamping plate 2 or the cover plate 1 is connected with a clamping mechanism, and the clamping mechanism is used for driving the clamping plate 2 or the cover plate 1 to move longitudinally, so that the front side wall of the clamping strip 4 is close to the front inner wall of the clamping groove 7 or the rear side wall of the clamping strip 4 is close to the rear inner wall of the clamping groove 7;

or the clamping plate 2 and the cover plate 1 are respectively connected with a clamping mechanism, and the two clamping mechanisms respectively drive the clamping plate 2 and the cover plate 1 to longitudinally move towards opposite directions, so that the front side wall of the clamping strip 4 is close to the front inner wall of the clamping groove 7 or the rear side wall of the clamping strip 4 is close to the rear inner wall of the clamping groove 7.

Because the substrate is of a sheet structure, when the substrate is erected, the substrate can be inserted into a gap between the inner wall of the clamping groove 7 and the clamping strip 4 and can be clamped by the clamping strip 4 and the inner wall of the clamping groove 7; due to the existence of the plurality of clamping strips 4 and clamping grooves 7, the clamp can clamp a plurality of workpieces; the operation is convenient, and the use number of the clamps is reduced.

The utility model makes the clamping plate 2 or the cover plate 1 move relatively to clamp the substrate, and the substrate can be placed between the front side wall of the clamping strip 4 and the front inner wall of the clamping groove 7 to be clamped; or can be placed between the rear side wall of the clamping strip 4 and the rear inner wall of the clamping groove 7 for clamping; the movement of the clamping plate 2 and/or the cover plate 1 is realized by a clamping mechanism; the clamping mechanism can be an air cylinder, a lead screw transmission mechanism, a chain transmission mechanism and the like, and drives the clamping plate 2 and/or the cover plate 1 to move towards different directions, so that the clamping strips 4 and the clamping grooves 7 loosen or clamp the substrate.

The clamping strips 4 and the clamping grooves 7 are distributed in parallel at equal intervals; the substrate can be uniformly distributed on the clamp, and subsequent exposure, cutting and other operations are facilitated.

The number of the card strips 4 and the card slots 7 is equal.

In order to simplify the equipment and reduce the production, manufacture and use cost, the clamping mechanism is connected with the cover plate 1; the clamping mechanism comprises a push-pull plate 12, a left guide rod, a right guide rod 8, a left spring, a right spring 10, a left sliding block and a right sliding block 9; the push-pull plate 12 is positioned at the front ends of the clamping plate 2 and the cover plate 1, and the push-pull plate 12 is parallel to the clamping strip 4 and the guide groove; the left guide rod and the right guide rod 8 are respectively arranged on the left side and the right side of the cover plate 1, the front ends of the left guide rod and the right guide rod 8 are fixedly connected with the push-pull plate 12, the left sliding block and the right sliding block 9 are respectively sleeved on the left guide rod and the right guide rod 8, the left sliding block and the right sliding block 9 are respectively fixedly arranged on the left side and the right side of the cover plate 1, and the cover plate 1 can move back and forth along the left guide rod and the right guide rod 8; the left spring and the right spring 10 are respectively sleeved on the left guide rod and the right guide rod 8; the front end of the left spring is connected with the push-pull plate 12, and the rear end of the left spring is connected with the left sliding block; the front end of the right spring 10 is connected with the push-pull plate 12, and the rear end is connected with the right sliding block 9;

the substrate holder further comprises a fixing mechanism for restricting the push-pull plate 12 and the chucking plate 2 from moving in the horizontal direction.

Due to the structure, when the push-pull plate 12 and the clamping plate 2 are fixed, if the spring is in a compressed state, the spring can push the cover plate 1 to move backwards along the two guide rods, and the clamping position of the clamp is a gap between the front side wall of the clamping strip 4 and the front inner wall of the clamping groove 7; if the spring is in a stretched state, the spring can pull the cover plate 1 to move forwards along the two guide rods, and the clamping position of the clamp is a gap between the rear side wall of the clamping strip 4 and the rear inner wall of the clamping groove 7. The utility model discloses the displacement of apron 1 provides through elasticity or the pulling force of spring, and for clamping mechanism such as cylinder, lead screw drive mechanism, chain drive, the cost is lower, and need not consume the electric energy, and the clamping is safer.

Further, the fixing mechanism is a fixing bottom plate 3, and a mounting groove 14 is formed in the middle of the fixing bottom plate 3; the rear end of the fixed bottom plate 3 is provided with a clamping plate longitudinal limiting groove 13 and a clamping plate transverse limiting groove 17; the clamping plate transverse limiting groove 17 is positioned at the rear end of the mounting groove 14, and the front end of the clamping plate transverse limiting groove 17 is communicated with the rear end of the mounting groove 14; the clamping plate longitudinal limiting groove 13 penetrates through the left side wall and the right side wall of the clamping plate transverse limiting groove 17 and extends towards the left side and the right side of the fixed bottom plate 3; the front end of the fixed bottom plate 3 is provided with a push-pull plate longitudinal limiting groove 15, the push-pull plate longitudinal limiting groove 15 is positioned at the front end of the mounting groove 14, and the push-pull plate longitudinal limiting groove 15 penetrates through the left side wall and the right side wall of the mounting groove 14 and extends towards the left side and the right side of the fixed bottom plate 3; the clamping plate 2, the cover plate 1, the left guide rod and the right guide rod 8 are positioned in the mounting groove 14; the rear end of the clamping plate 2 is embedded into the clamping plate transverse limiting groove 17, the left side and the right side of the rear end of the clamping plate 2 are provided with clamping plate longitudinal limiting strips 6, and the clamping plate longitudinal limiting strips 6 are embedded into the clamping plate longitudinal limiting grooves 13; the push-pull plate 12 is embedded in the longitudinal limit groove 15 of the push-pull plate.

Due to the structure, the fixing mechanism is of a plate-shaped structure, and all parts can be concentrated together when the clamping plate 2, the cover plate 1, the left guide rod and the right guide rod 8 are located in the mounting groove 14, so that structural dispersion is avoided. Meanwhile, as shown in fig. 1 and 2, the left and right widths of the mounting groove 14 are wide, which facilitates the movement of the cover plate 1.

Further, a plurality of positioning convex strips 5 are arranged on the surface of the clamping plate 2 in parallel, and the positioning convex strips 5 are arranged at intervals along the transverse direction of the clamping plate 2; the positioning convex strips 5 are divided into a plurality of sections by the clamping strips 4 on the clamping plate 2.

As shown in fig. 7, the positioning groove 16 is formed at the bottom of the substrate, and when the positioning protruding strip 5 is embedded into the positioning groove 16, the substrate can be limited from moving left and right, so that the substrate can be aligned on the fixture in a front-back manner, and the subsequent operations such as cutting can be facilitated.

The face of cardboard 2 is gone up the parallel two location sand grips 5 that are provided with, location sand grip 5 is symmetrical about the longitudinal axis of cardboard 2, sets up in the left and right sides of cardboard 2.

The height and the width of the positioning convex strip 5 are both smaller than the clamping strip 4. If the height of the convex strip is too high, clamping is unstable.

Two cover plate supporting strips 11 are arranged at the bottom of the cover plate 1; the cover plate supporting strips 11 are arranged on the left side and the right side of the cover plate 1 and extend along the longitudinal direction of the cover plate 1; when the cover plate 1 is covered on the clamping plate 2, the clamping plate 2 is positioned between the two cover plate supporting bars 11, and the bottoms of the cover plate supporting bars 11 are contacted with the bottoms of the mounting grooves 14. The height of the cover plate supporting strip 11 is larger than the sum of the heights of the clamping plate 2 and the positioning convex strips 5.

Because the existence of this apron support bar 11, can avoid lapping between 1 and cardboard 2 often friction and cause wearing and tearing, lead to the clamping precision to descend, the highly sum that is greater than cardboard 2 and location sand grip 5 of board support bar simultaneously also avoids lapping 1 bottom and location sand grip 5 within a definite time and takes place wearing and tearing.

When the clamping mechanism is connected with the cover plate 1 and clamps a workpiece through the action of a spring, the working principle is as follows:

when the adopted spring is in a compression state, the spring can push the cover plate 1 to move backwards along the two guide rods, the substrate is placed in a gap between the front side wall of the clamping strip 4 and the front inner wall of the clamping groove 7 at the moment, and the positioning raised line 5 on the clamp is embedded into the positioning groove 16 at the bottom of the substrate, so that the substrate is clamped by the front side wall of the clamping strip 4 and the front inner wall of the clamping groove 7.

When the adopted spring is in a pressing and stretching state, the spring can pull the cover plate 1 to move forwards along the two guide rods, the substrate is placed in a gap between the rear side wall of the clamping strip 4 and the rear inner wall of the clamping groove 7, and the positioning convex strip 5 on the clamp is embedded into the positioning groove 16 at the bottom of the substrate, so that the substrate is clamped by the front side wall of the clamping strip 4 and the front inner wall of the clamping groove 7.

During operation, as long as place the substrate at the clamping station, apron 1 just can press from both sides tight a plurality of substrates under the effect of spring, easy operation facilitates the use, does not need every substrate to go to adjust the elasticity degree of clamping alone.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims

1. A substrate holder, characterized by: the clamping plate comprises a clamping plate (2) and a cover plate (1); a plurality of clamping strips (4) are arranged on the top surface of the clamping plate (2) in parallel, and the clamping strips (4) are arranged at intervals along the longitudinal direction of the clamping plate (2); a plurality of clamping grooves (7) penetrating through the surface of the cover plate (1) are formed in the cover plate (1) in parallel, and the clamping grooves (7) are arranged at intervals along the longitudinal direction of the cover plate (1); the cover plate (1) covers the clamping plate (2), and each clamping groove (7) can be embedded with a clamping strip (4);

the clamping plate (2) or the cover plate (1) is connected with a clamping mechanism, and the clamping mechanism is used for driving the clamping plate (2) or the cover plate (1) to move longitudinally, so that the front side wall of the clamping strip (4) is close to the front inner wall of the clamping groove (7) or the rear side wall of the clamping strip (4) is close to the rear inner wall of the clamping groove (7);

or the clamping plate (2) and the cover plate (1) are respectively connected with a clamping mechanism, and the two clamping mechanisms respectively drive the clamping plate (2) and the cover plate (1) to longitudinally move towards opposite directions, so that the front side wall of the clamping strip (4) is close to the front inner wall of the clamping groove (7) or the rear side wall of the clamping strip (4) is close to the rear inner wall of the clamping groove (7).

2. The substrate holder of claim 1, wherein: the clamping strips (4) and the clamping grooves (7) are distributed in parallel at equal intervals.

3. The substrate holder of claim 1, wherein: the number of the clamping strips (4) is equal to that of the clamping grooves (7).

4. The substrate holder of claim 1, wherein: the clamping mechanism is connected with the cover plate (1); the clamping mechanism comprises a push-pull plate (12), a left guide rod, a right guide rod (8), a left spring, a right spring (10), a left sliding block and a right sliding block (9); the push-pull plate (12) is positioned at the front ends of the clamping plate (2) and the cover plate (1), and the push-pull plate (12) is parallel to the clamping strip (4) and the guide groove; the left guide rod and the right guide rod (8) are respectively arranged on the left side and the right side of the cover plate (1), the front ends of the left guide rod and the right guide rod (8) are fixedly connected with the push-pull plate (12), the left sliding block and the right sliding block (9) are respectively sleeved on the left guide rod and the right guide rod (8), the left sliding block and the right sliding block (9) are respectively fixedly arranged on the left side and the right side of the cover plate (1), and the cover plate (1) can move back and forth along the left guide rod and the right guide rod (8); the left spring and the right spring (10) are respectively sleeved on the left guide rod and the right guide rod (8); the front end of the left spring is connected with the push-pull plate (12), and the rear end of the left spring is connected with the left sliding block; the front end of the right spring (10) is connected with the push-pull plate (12), and the rear end of the right spring is connected with the right sliding block (9);

the substrate clamp also comprises a fixing mechanism which is used for limiting the push-pull plate (12) and the clamping plate (2) to move in the horizontal direction.

5. The substrate holder according to claim 4, wherein: the fixing mechanism is a fixing bottom plate (3), and the middle part of the fixing bottom plate (3) is provided with a mounting groove (14); the rear end of the fixed bottom plate (3) is provided with a clamping plate longitudinal limiting groove (13) and a clamping plate transverse limiting groove (17); the clamping plate transverse limiting groove (17) is positioned at the rear end of the mounting groove (14), and the front end of the clamping plate transverse limiting groove (17) is communicated with the rear end of the mounting groove (14); the clamping plate longitudinal limiting groove (13) penetrates through the left side wall and the right side wall of the clamping plate transverse limiting groove (17) and extends towards the left side and the right side of the fixed bottom plate (3); the front end of the fixed bottom plate (3) is provided with a push-pull plate longitudinal limiting groove (15), the push-pull plate longitudinal limiting groove (15) is positioned at the front end of the mounting groove (14), and the push-pull plate longitudinal limiting groove (15) penetrates through the left side wall and the right side wall of the mounting groove (14) and extends towards the left side and the right side of the fixed bottom plate (3); the clamping plate (2), the cover plate (1), the left guide rod and the right guide rod (8) are positioned in the mounting groove (14); the rear end of the clamping plate (2) is embedded into a clamping plate transverse limiting groove (17), the left side and the right side of the rear end of the clamping plate (2) are provided with clamping plate longitudinal limiting strips (6), and the clamping plate longitudinal limiting strips (6) are embedded into clamping plate longitudinal limiting grooves (13); the push-pull plate (12) is embedded into the longitudinal limit groove (15) of the push-pull plate.

6. The substrate holder of claim 1, 2, 3, 4 or 5, wherein: the surface of the clamping plate (2) is also provided with a plurality of positioning convex strips (5) in parallel, and the positioning convex strips (5) are arranged at intervals along the transverse direction of the clamping plate (2); the positioning convex strips (5) are divided into a plurality of sections by the clamping strips (4) on the clamping plate (2).

7. The substrate holder of claim 6, wherein: the clamping plate is characterized in that two positioning convex strips (5) are arranged on the surface of the clamping plate (2) in parallel, and the positioning convex strips (5) are symmetrical about the longitudinal axis of the clamping plate (2) and are arranged on the left side and the right side of the clamping plate (2).

8. The substrate holder of claim 7, wherein: the height and the width of the positioning convex strip (5) are both smaller than the clamping strip (4).

9. The substrate holder of claim 8, wherein: the bottom of the cover plate (1) is provided with two cover plate supporting strips (11); the cover plate supporting strips (11) are arranged on the left side and the right side of the cover plate (1) and extend along the longitudinal direction of the cover plate (1); when the cover plate (1) covers the clamping plate (2), the clamping plate (2) is positioned between the two cover plate supporting strips (11), and the bottoms of the cover plate supporting strips (11) are in contact with the bottoms of the mounting grooves (14).

10. The substrate holder of claim 9, wherein: the height of the cover plate support strip (11) is greater than the sum of the heights of the clamping plate (2) and the positioning convex strips (5).