CN220131300U - Automatic storage device of graphite dish - Google Patents
Automatic storage device of graphite dish Download PDFInfo
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- CN220131300U CN220131300U CN202321574795.8U CN202321574795U CN220131300U CN 220131300 U CN220131300 U CN 220131300U CN 202321574795 U CN202321574795 U CN 202321574795U CN 220131300 U CN220131300 U CN 220131300U
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- discharging
- automated
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 116
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 116
- 239000010439 graphite Substances 0.000 title claims abstract description 116
- 238000003860 storage Methods 0.000 title claims abstract description 108
- 238000007599 discharging Methods 0.000 claims abstract description 44
- 230000000007 visual effect Effects 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 18
- 239000000463 material Substances 0.000 description 13
- 238000007664 blowing Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000032258 transport Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
The utility model provides an automatic graphite disc storage device, which is characterized in that a storage area is provided with a plurality of graphite disc storage positions, a feeding area and a discharging area which are inserted in the storage area, and a transfer area is arranged at the position of the feeding area; the feeding area is provided with a first parking space and a first mechanical arm; a second mechanical arm is also arranged in the annular surrounding space of the storage area; the discharging area is provided with a portal frame, a chuck platform is arranged in the portal frame, and the chuck platform is sequentially provided with a discharging disc and a discharging position from inside to outside. According to the automatic graphite disc storage device, the automatic storage of the fed graphite discs can be realized through the first mechanical arm and the second mechanical arm, and the automatic discharge of the stored graphite discs can be realized through the second mechanical arm and the portal frame, so that the automatic storage and the automatic storage of the graphite discs are realized as a whole, the manual workload is reduced, and the production efficiency is improved.
Description
Technical Field
The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to an automatic storage device for a graphite disc.
Background
Graphite disks are capable of withstanding high temperature, high pressure environments, and have excellent chemical stability and thermal conductivity, and are therefore widely used as wafer carrier disks in semiconductor manufacturing processes, such as metal-organic chemical vapor deposition.
The used graphite discs are required to be baked at a high temperature to remove residual impurities such as organic metal compounds and the like remained on the surfaces of the graphite discs, the baking time is long, a single machine is required to be provided with a plurality of graphite discs for use in turn in order to ensure normal production of the machine (such as metal organic compound chemical vapor deposition equipment (MOVCD equipment) for producing light-emitting diodes), and the baked graphite discs are generally stored in a storage cabinet in batches in consideration of the difference between the working period of the machine and the baking period of the graphite discs, and are taken out from the storage cabinet to be used at the machine end when the machine has production requirements.
In the prior art, the graphite disc is stored in and taken out and is manually carried, the working strength is high (the mass of a single graphite disc can reach 16 kg, the diameter can reach 785 mm), the transportation efficiency is low, and risks such as easy collision damage, dislocation of storage positions, falling in the carrying process and the like exist.
Disclosure of Invention
Based on the above, the utility model aims to provide an automatic storage device for graphite discs, so as to realize automatic storage and taking of the graphite discs and improve the storage and taking efficiency of the graphite discs.
In one aspect, the present utility model provides an automated graphite disk storage device comprising:
the graphite plate storage device comprises a storage area which is annularly arranged, wherein a plurality of graphite plate storage positions which are circumferentially arranged along the storage area are arranged in the storage area;
the feeding area and the discharging area are arranged between the graphite disc storage positions in an interpenetration way;
the transfer area is arranged in the annular surrounding space of the storage area, is aligned and matched with the feeding area, and is provided with a horizontal bearing platform;
wherein, the feeding area is provided with a first parking space and a first mechanical arm;
a second mechanical arm is further arranged in the annular surrounding space of the storage area, and the second mechanical arm and the first mechanical arm are both connected to an industrial personal computer;
the discharging area is provided with a portal frame, a chuck platform is arranged in the portal frame, a discharging disc and a discharging position are sequentially arranged on the chuck platform from inside to outside, and a second parking space is correspondingly arranged on the discharging position.
Optionally, the graphite disc storage location is a vertical structure, and includes a plurality of horizontal bearing locations arranged at vertical intervals.
Optionally, the arrangement ring of the storage area is a square ring;
a ground rail is further arranged in the annular surrounding space of the storage area, is parallel to the long side of the square ring, and is centrally arranged in the annular surrounding space;
the second mechanical arm is movably connected with the ground rail so as to reciprocate along the ground rail.
Optionally, the feeding area and the discharging area are arranged on the long side of the square ring and on the same side.
Optionally, the transfer area is arranged at a position corresponding to the middle part of the long side of the square ring.
Optionally, the material taking areas are two, and are respectively arranged at two sides of the material feeding area.
Optionally, at least two second mechanical arms are provided.
Optionally, the chuck platform is still provided with the check position, check position set up in the blowing dish with between the discharge position, the top of check position still is provided with graphite dish information identification camera, graphite dish information identification camera with the driver of chuck platform with the industrial computer is connected.
Optionally, the first parking space and the second parking space are further provided with photoelectric switches corresponding to the automatic guided vehicles.
Optionally, the first mechanical arm and the second mechanical arm are both provided with 3D visual recognition cameras, and are both connected to the industrial personal computer.
The automatic graphite disc storage device is provided with storage areas which are annularly arranged, a plurality of graphite disc storage positions are circumferentially arranged along the storage areas, a feeding area and a discharging area are alternately arranged among the graphite disc storage positions, a transfer area is arranged in an annular surrounding space of the storage areas, is aligned and matched with the feeding area, and is provided with a horizontal bearing platform; the feeding area is provided with a first parking space and a first mechanical arm, and a graphite disc carried by a feeding carrier parked in the first parking space can be transported to the transfer area through the first mechanical arm; a second mechanical arm is further arranged in the annular surrounding space of the storage area, the second mechanical arm and the first mechanical arm are both connected to the industrial personal computer, and the graphite disc in the transfer area can be transferred and stored to the graphite disc storage position through the second mechanical arm; the discharging area is provided with the portal frame, be provided with chuck platform in the portal frame, chuck platform has set gradually blowing dish and discharge gate from interior to exterior, the discharge gate corresponds and is provided with the second parking stall, and the graphite dish in the graphite dish storage position is transported to the blowing dish to the accessible second robotic arm, and the chuck platform of rethread portal frame transports the graphite dish in the blowing dish to the discharge gate, realizes the automatic handling of ejection of compact, has realized the automatic access of graphite dish on the whole, has reduced manual work volume, has improved production efficiency. And mechanical handling can reduce risk of collision damage, position dislocation and falling in the handling process caused by artificial factors, improve reliability of handling and storage and reduce risk of damage of the graphite disc.
Drawings
Fig. 1 is a schematic structural diagram of an automated graphite disk storage device according to an embodiment of the present utility model.
Description of main reference numerals: the system comprises a storage area 10, a feeding area 20, a discharging area 30, a transfer area 40, an industrial personal computer 60, a graphite disc storage area 11, a graphite disc 01, a first mechanical arm 21, a feeding carrier 22, a second mechanical arm 51, a ground rail 52, a portal frame 31, a discharging disc 311, a checking area 312, a discharging area 313 and a graphite disc information identification camera 314.
The utility model will be further described in the following detailed description in conjunction with the above-described figures.
Detailed Description
In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. Several embodiments of the utility model are presented in the figures. This utility model may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "mounted" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
In the prior art, the graphite disc is stored in and taken out and is manually carried, the working strength is high (the mass of a single graphite disc can reach 16 kg, the diameter can reach 785 mm), the transportation efficiency is low, and risks such as easy collision damage, dislocation of storage positions, falling in the carrying process and the like exist.
Based on the problems existing in the prior art, the utility model aims to provide an automatic storage device for graphite discs, so as to realize mechanical execution of feeding and discharging transportation of the graphite discs, reduce manual handling requirements, reduce production working strength and improve production efficiency, and the specific structure of the automatic storage device is as follows.
Referring to fig. 1, a main structural diagram of an automatic storage device for graphite disks in an embodiment of the present utility model is shown, and the automatic storage device for graphite disks mainly comprises a storage area 10, a feeding area 20, a discharging area 30 and related mechanical arms, so that graphite disks 01 can be transported by the mechanical arms in the storage area 10, the feeding area 20 and the discharging area 30.
In the present embodiment, the storage areas 10 are arranged in a ring shape, and a plurality of graphite disk storage locations 11 arranged along the circumferential direction of the storage areas 10 are provided in the storage areas 10; the feeding area 20 and the discharging area 30 are arranged between the graphite disc storage positions 11 in an interpenetration way; the transfer zone 40 is disposed in the annular surrounding space of the storage zone 10, aligned with the feed zone 20, and is provided with a horizontally disposed tray.
Wherein the feeding zone 20 comprises a first parking space and a first robot arm 21; a second mechanical arm 51 is further arranged in the annular surrounding space of the storage area 10, and the second mechanical arm 51 and the first mechanical arm 21 are connected to the industrial personal computer 60 so as to coordinate the operation of the second mechanical arm 51 and the first mechanical arm 21 uniformly through the industrial personal computer 60; the discharging area 30 is provided with a portal frame 31, a chuck platform is arranged in the portal frame 31, a discharging disc 311 and a discharging position 313 are sequentially arranged on the chuck platform from inside to outside, and a second parking space is arranged at the position of the discharging position 313.
The feeding process comprises the following steps: the feeding carrier 22 carries batch graphite trays 01 to move to the first parking space of the feeding area 20, after the feeding carrier 22 is stable, the first mechanical arm 21 transfers the graphite trays 01 in the feeding carrier 22 to the transfer area 40 according to a certain sequence, and then the graphite trays 01 placed in the transfer area 40 are transferred to the vacant position of the graphite tray storage position 10 through the second mechanical arm 51, so that the feeding is stored.
The discharging flow comprises the following steps: when there is the ejection of compact demand, the ejection of compact carrier is berthhed to the second parking stall in ejection of compact district 30, makes the position that bears of ejection of compact carrier correspond with ejection of compact position 313, and industrial computer 60 control second robotic arm 51 presss from both sides in the graphite dish storage position 10 of storage district 10 and gets graphite dish 01, transfers to the blowing dish 311 in ejection of compact district 30, and the chuck platform of rethread portal frame 31 is with the graphite dish 01 of blowing on the dish 311 transport to ejection of compact position 313 and carry to ejection of compact carrier.
In the specific implementation, the industrial personal computer 60 is, for example, an industrial personal computer on which an MES (Manufacturing Execution System, chinese called a production execution system, or a manufacturing execution system) is mounted.
The infeed and outfeed carts 22 and 22 are AGVs (Automated Guided Vehicle, automatic guided vehicles for short, also referred to as auto guided carts, auto guided carts).
In this embodiment, the loading position of the feeding carrier 22 is a vertical loading position, and the graphite tray disposed at the loading position of the feeding carrier 22 is vertically erected.
In this embodiment, the graphite disc storage location 10 is of a vertical structure, and includes a plurality of horizontal bearing locations arranged at vertical intervals, so that a plurality of graphite discs can be stored in a single graphite disc storage location 10, and storage density is improved.
In this embodiment, the arrangement ring of the reservoir 10 is a square ring; a ground rail 52 is also arranged in the annular surrounding space of the storage area 10, and the ground rail 52 is parallel to the long side of the square ring and is centrally arranged in the annular surrounding space; the second mechanical arm 51 is movably connected with the ground rail 52 so as to reciprocate along the ground rail 52, so that the second mechanical arm 51 reciprocates along the ground rail 52 and can communicate with each graphite disc storage position 10 of the storage area 10, the operation speed is high, the ground rail is convenient to assemble, and the ground area utilization rate of the graphite disc automatic storage device is high.
In an alternative embodiment, the second robot arm 51 is coupled to the crown block movement mechanism.
In an alternative embodiment, the square arrangement of the storage area 10 has a rounded square shape, and the distance between the second mechanical arm 51 and the rounded square rounded area is consistent, so that the difficulty in controlling the distance in the operation of the second mechanical arm 51 can be reduced.
In this embodiment, the feeding area 20 and the discharging area 30 are disposed on the long side of the square ring and on the same side, and the industrial personal computer 60 is also disposed on the same side, so that the comprehensive occupation of the in-out space of the feeding area 20 and the discharging area 30 can be reduced, and convenience is provided for the practical arrangement of the automatic graphite disc storage device.
In this embodiment, the middle corresponding position of the long side of the square ring of the transfer area 40 is set up, which can balance the distance from the transfer area 40 to the graphite disk storage location 10, reduce the maximum single-pass movement distance of the second mechanical arm 51, reduce the single duration of clamping the graphite disk by the second mechanical arm 51, reduce the mechanical fatigue of the second mechanical arm 51, and increase the service life.
In this embodiment, two second mechanical arms 51 are provided, so that the working hours of the two second mechanical arms 51 can be uniform, the maintenance period of the two second mechanical arms 51 can be unified, and the maintenance cost can be reduced.
In this embodiment, the material taking area 30 is provided with two material taking areas, and is respectively disposed at two sides of the material feeding area 10, so that the material is discharged nearby, the work load of discharging is reduced, and the material can be simultaneously discharged by being matched with two second mechanical arms 51, so that the material discharging efficiency is improved.
According to the actual working requirements, more than two second mechanical arms 51 can be arranged, so that the discharging speed can be increased.
The automatic graphite disc storage device is not limited to storage of single-specification graphite discs, can be used for simultaneous storage of multiple-specification graphite discs, can discharge multiple-specification graphite discs in a partitioning mode at the same time when multiple material taking areas are arranged, provides graphite discs with corresponding specifications for multiple production machines, and improves production efficiency of a comprehensive production line.
In this embodiment, chuck platform still is provided with check position 312, check position 312 sets up between blowing dish 311 and ejection of compact position 313, check position 312's top still is provided with graphite dish information identification camera 314, graphite dish information identification camera 314 is connected with chuck platform's driver and industrial computer 60, be convenient for discern the graphite dish information that obtains actual ejection of compact, compare with the graphite dish information that the demand was discharged through industrial computer 60, when confirming that the graphite dish of actual ejection of compact is correct, carry out ejection of compact again, reduce wrong ejection of compact risk, improve automatic storage's ejection of compact accuracy.
The graphite disc information of the discharging can be stored in the discharging carrier, so that the discharging carrier can simultaneously carry the information of the graphite disc carried by the discharging carrier, and the graphite disc information can be used for receiving operations such as material taking check of a production machine table of the discharging.
In this embodiment, first parking stall and second parking stall still are provided with the photoelectric switch that corresponds with automatic guided vehicle, and the accessible photoelectric switch carries out the location of automatic guided vehicle to and signal interaction, for the automatic operation of automatic guided vehicle provides convenience, improves the degree of integration with the automation of automated production line.
In this embodiment, the first mechanical arm 21 and the second mechanical arm 51 are further provided with 3D visual recognition cameras, and are connected to the industrial personal computer 60, so that the information of the grabbed graphite disc and the automatic recognition of the bearing position in the graphite disc storage position 10 can be used to improve the intelligent degree.
The industrial personal computer 60 can track and record the specific placement position of each graphite disc through automatic identification of the information of the gripped graphite disc and the bearing position in the graphite disc storage position 10, and can accurately discharge the materials through the specific placement position of the graphite disc during discharging, and can provide convenience for accurate application requirements of the graphite disc and ensure production efficiency when the mixed storage of the graphite discs with multiple specifications or the use specifications of the graphite discs are strictly required.
The automatic graphite disc storage device is provided with storage areas which are annularly arranged, a plurality of graphite disc storage positions are circumferentially arranged along the storage areas, a feeding area and a discharging area are alternately arranged among the graphite disc storage positions, a transfer area is arranged in an annular surrounding space of the storage areas, is aligned and matched with the feeding area, and is provided with a horizontal bearing platform; the feeding area is provided with a first parking space and a first mechanical arm, and a graphite disc carried by a feeding carrier parked in the first parking space can be transported to the transfer area through the first mechanical arm; a second mechanical arm is further arranged in the annular surrounding space of the storage area, the second mechanical arm and the first mechanical arm are both connected to the industrial personal computer, and the graphite disc in the transfer area can be transferred and stored to the graphite disc storage position through the second mechanical arm; the discharging area is provided with the portal frame, be provided with chuck platform in the portal frame, chuck platform has set gradually blowing dish and discharge gate from interior to exterior, the discharge gate corresponds and is provided with the second parking stall, and the graphite dish in the graphite dish storage position is transported to the blowing dish to the accessible second robotic arm, and the chuck platform of rethread portal frame transports the graphite dish in the blowing dish to the discharge gate, realizes the automatic handling of ejection of compact, has realized the automatic access of graphite dish on the whole, has reduced manual work volume, has improved production efficiency. And mechanical handling can reduce risk of collision damage, position dislocation and falling in the handling process caused by artificial factors, improve reliability of handling and storage and reduce risk of damage of the graphite disc.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing examples illustrate only a few specific embodiments of the utility model, which are described in greater detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.
Claims (10)
1. An automated graphite disk storage unit comprising:
the graphite plate storage device comprises a storage area which is annularly arranged, wherein a plurality of graphite plate storage positions which are circumferentially arranged along the storage area are arranged in the storage area;
the feeding area and the discharging area are arranged between the graphite disc storage positions in an interpenetration way;
the transfer area is arranged in the annular surrounding space of the storage area, is aligned and matched with the feeding area, and is provided with a horizontal bearing platform;
wherein, the feeding area is provided with a first parking space and a first mechanical arm;
a second mechanical arm is further arranged in the annular surrounding space of the storage area, and the second mechanical arm and the first mechanical arm are both connected to an industrial personal computer;
the discharging area is provided with a portal frame, a chuck platform is arranged in the portal frame, a discharging disc and a discharging position are sequentially arranged on the chuck platform from inside to outside, and a second parking space is correspondingly arranged on the discharging position.
2. The automated graphite disk storage unit of claim 1, wherein the graphite disk storage station is of a vertical configuration comprising a plurality of horizontal load-bearing stations arranged in a vertical spacing.
3. The automated graphite disk storage unit of claim 1 wherein,
the arrangement ring of the storage area is a square ring;
a ground rail is further arranged in the annular surrounding space of the storage area, is parallel to the long side of the square ring, and is centrally arranged in the annular surrounding space;
the second mechanical arm is movably connected with the ground rail so as to reciprocate along the ground rail.
4. The automated graphite disk storage unit of claim 3, wherein the infeed area and outfeed area are disposed on a long side of the square ring and on a same side.
5. The automated graphite disk storage unit of claim 4, wherein the staging area is disposed in a middle corresponding position on the long side of the square ring.
6. The automated graphite disk storage unit of claim 4, wherein the take-out area is provided in two and is disposed on each side of the feed area.
7. The automated graphite disk storage unit of claim 1 or 6, wherein the second robotic arm is provided with at least two.
8. The automated graphite disc storage unit of claim 1, wherein the chuck platform is further provided with a check position, the check position is disposed between the discharging disc and the discharging position, a graphite disc information identification camera is further disposed above the check position, and the graphite disc information identification camera is connected with a driver of the chuck platform and the industrial personal computer.
9. The automated graphite disk storage unit of claim 1, wherein the first parking space and the second parking space are further provided with a photoelectric switch corresponding to an automated guided vehicle.
10. The automated graphite disk storage unit of claim 1, wherein the first and second robotic arms are each further provided with a 3D visual recognition camera and are each connected to the industrial personal computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321574795.8U CN220131300U (en) | 2023-06-20 | 2023-06-20 | Automatic storage device of graphite dish |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321574795.8U CN220131300U (en) | 2023-06-20 | 2023-06-20 | Automatic storage device of graphite dish |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220131300U true CN220131300U (en) | 2023-12-05 |
Family
ID=88956889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321574795.8U Active CN220131300U (en) | 2023-06-20 | 2023-06-20 | Automatic storage device of graphite dish |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220131300U (en) |
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2023
- 2023-06-20 CN CN202321574795.8U patent/CN220131300U/en active Active
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