CN220120707U - 6-structure terahertz sensor based on metamaterial - Google Patents
6-structure terahertz sensor based on metamaterial Download PDFInfo
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- CN220120707U CN220120707U CN202321430334.3U CN202321430334U CN220120707U CN 220120707 U CN220120707 U CN 220120707U CN 202321430334 U CN202321430334 U CN 202321430334U CN 220120707 U CN220120707 U CN 220120707U
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- 239000002184 metal Substances 0.000 claims abstract description 164
- 229910052751 metal Inorganic materials 0.000 claims abstract description 164
- 239000000758 substrate Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- 239000004642 Polyimide Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 230000008859 change Effects 0.000 description 10
- 239000000126 substance Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 5
- 238000005457 optimization Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
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- 238000000862 absorption spectrum Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- QUCZBHXJAUTYHE-UHFFFAOYSA-N gold Chemical compound [Au].[Au] QUCZBHXJAUTYHE-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000000411 transmission spectrum Methods 0.000 description 1
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Abstract
The utility model relates to the technical field of terahertz sensors, and discloses a 6-type terahertz sensor based on a metamaterial, which is formed by periodically arranging a plurality of unit structures of cuboid structures in an x direction and a y direction, wherein each unit structure is composed of a basal layer and a metal layer fixedly arranged on the upper surface of the basal layer, the metal layer is of a 6-type structure which is arranged in a mirror symmetry way by taking the y direction as a symmetry axis, and openings of the 6-type structure face the symmetry axis. The sensor can generate two resonance peaks with higher Q value when terahertz waves are vertically incident, the resonance frequency is lower, the Q value is higher, the refractive index sensitivity is higher, experimental data show that the terahertz sensor can realize high-sensitivity sensing in the frequency range of 0.25-0.40 THz and 0.70-0.9 THz, and the obtained result is more accurate by combining the frequency shift amounts of the two resonance peaks to analyze an object to be detected, and the sensor has the advantages of simple structure, easiness in processing and the like.
Description
Technical Field
The utility model relates to the technical field of terahertz sensors, in particular to a 6-structure terahertz sensor based on a metamaterial.
Background
Terahertz waves (THz) are the electromagnetic wave of frequency range 0.1-10THz and bridge the microwave and infrared regions of the electromagnetic spectrum, attracting increasing attention over the past 20 years. The terahertz sensor is an important device for sensing detection, and has the advantages of no need of marking an object to be detected, less sample consumption, faster response, higher sensitivity and the like. By incidence of terahertz waves on the terahertz sensor and observation of the offset of the resonance peak in the S21 transmission curve, the type of an object, the concentration of liquid and the like can be judged, and the terahertz waves are harmless to organisms and the vibration frequency of most chemical substances and biomacromolecules is located in the terahertz frequency band, so that the terahertz sensor has wide application prospects in the fields of detection of biological and chemical samples and medicine. Disadvantages of the prior art: most terahertz sensors have low Q value and low refractive index sensitivity; the resonance peak is single, the influence of the outside on the resonance peak is larger, and larger errors are easy to generate; the resonant frequency is higher.
Disclosure of Invention
The utility model provides a metamaterial-based 6-type structure terahertz sensor, which has a lower resonant frequency, a higher Q value and a higher refractive index sensitivity.
The utility model is realized by the following technical scheme:
a6-type structure terahertz sensor based on metamaterial is formed by periodically arranging unit structures of a plurality of cuboid structures in the x direction and the y direction, wherein each unit structure is composed of a substrate layer and a metal layer fixedly arranged on the upper surface of the substrate layer, the metal layer is of two 6-type structures which are arranged in a mirror symmetry mode by taking the y direction as a symmetry axis, and openings of the 6-type structures face the symmetry axis.
As an optimization, the number of the unit structures in the x direction is not less than 8.
As an optimization, the number of the unit structures in the y direction is not less than 15.
Preferably, the length of the structural unit in the x direction is 200 μm and the length in the y direction is 100 μm.
Preferably, the thickness of the substrate layer is 10 μm, and a non-destructive flexible polyimide material is used, and the dielectric constant epsilon=3.5.
Preferably, the thickness of the metal layer is 0.2 mu m, the adopted material is gold, and the conductivity is 4.561e+07S/m.
As optimization, the metal layer is a 6-shaped structure formed by a first metal strip, a second metal strip, a third metal strip, a fourth metal strip and a fifth metal strip which are sequentially connected end to end, the first metal strip, the third metal strip and the fifth metal strip are parallel to the x direction, the second metal strip, the fourth metal strip and the y direction are parallel, and the fifth metal strip is positioned between the first metal strip and the third metal strip.
As optimization, the widths of the first metal strip, the second metal strip, the third metal strip, the fourth metal strip and the fifth metal strip are equal, and the first metal strip, the second metal strip, the third metal strip, the fourth metal strip and the fifth metal strip which are connected end to end in sequence are provided with square overlapped parts, and the side lengths of the overlapped parts are the widths of the first metal strip, the second metal strip, the third metal strip, the fourth metal strip and the fifth metal strip;
the lengths of the first metal strip and the third metal strip comprising the overlapped part are 60 mu m;
the second metal strip including the overlapping portion has a length of 70 μm;
the length of the fourth metal strip including the overlapping portion is 55 μm;
the length of the fifth metal strip including the overlapping portion is 35 μm.
Preferably, the widths of the first metal strip, the second metal strip, the third metal strip, the fourth metal strip and the fifth metal strip are 10 μm.
As an optimization, the distance between two symmetrical 6-shaped metal layers is 40 μm, the distance between the metal structure formed by the two metal layers and the upper, left and right boundaries of the basal layer of the unit structure where the metal structure is located is 20 μm, and the distance between the metal structure and the lower boundary of the basal layer of the unit structure where the metal structure is located is 10 μm.
Compared with the prior art, the utility model has the following advantages and beneficial effects:
the sensor can generate two resonance peaks with higher Q value when terahertz waves are vertically incident, the resonance frequency is lower, the Q value is higher, the refractive index sensitivity is higher, experimental data show that the terahertz sensor can realize high-sensitivity sensing in the frequency range of 0.25-0.40 THz and 0.70-0.9 THz, and the obtained result is more accurate by combining the frequency shift amounts of the two resonance peaks to analyze an object to be detected, and the sensor has the advantages of simple structure, easiness in processing and the like.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the principles of the utility model. In the drawings:
fig. 1 is a schematic structural diagram of a metamaterial-based terahertz sensor with a 6-type structure;
fig. 2 is a schematic structural diagram of a unit structure of a metamaterial-based terahertz sensor with a 6-type structure according to the present utility model;
FIG. 3 is an S21 curve of a terahertz sensor of a 6-type structure based on a metamaterial according to the present utility model
FIG. 4 is a graph of the variation of the low frequency resonance peak when measuring substances with different refractive indexes;
FIG. 5 is a graph of the variation of the high frequency resonance peak when measuring substances with different refractive indexes;
FIG. 6 is a plot of resonant frequency point as a function of refractive index;
fig. 7 is a schematic structural diagram of a sample to be measured placed on a metamaterial-based terahertz sensor of type 6 structure according to the present utility model.
In the drawings, the reference numerals and corresponding part names:
1-substrate layer, 2-metal layer, 2 a-first metal strip, 2 b-second metal strip, 2 c-third metal strip, 2 d-fourth metal strip, 2 e-fifth metal strip, 3-sample to be tested.
Detailed Description
For the purpose of making apparent the objects, technical solutions and advantages of the present utility model, the present utility model will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present utility model and the descriptions thereof are for illustrating the present utility model only and are not to be construed as limiting the present utility model.
Terahertz wave: refers to a band of frequencies between electronics and photonics;
metamaterial: an artificial electromagnetic material can be made to show the characteristics which the natural material does not have by regulating the unit structure of the artificial electromagnetic material, and has the function of enhancing the local electromagnetic field;
terahertz sensor: the method is very sensitive to the change of dielectric constant of the metamaterial surface medium, and is characterized by shifting resonance peaks in spectrum, and the type of an object or the concentration of liquid can be judged through the shift of the resonance peaks.
Q value: when the resonant frequency of the system is constant and the signal amplitude does not change with time, the ratio of the energy stored in the system to the energy provided by the outside of each period is Q value. Can be used to embody the property of optical resonance.
Q＝f/FWHM (1)
f is the resonant frequency and FWHM is the half width of the resonant peak.
Refractive index sensitivity S: the change amount of the frequency shift of the corresponding resonance peak per change unit 1 of the refractive index is reflected, and the larger the S is, the better the sensing performance is. The refractive index sensitivity can be expressed as:
S＝Δf/Δn (2)
Δf is the amount of change in the frequency corresponding to the resonance peak, and Δn is the amount of change in the refractive index.
The present embodiment 1 provides a metamaterial-based 6-type terahertz sensor, as shown in fig. 1, comprising a plurality of unit structures of cuboid structures periodically arranged in an x direction and a y direction, each unit structure comprising a substrate layer 1 and a metal layer 2 fixedly arranged on the upper surface of the substrate layer 1, wherein the metal layer 2 is of two 6-shaped structures which are arranged in mirror symmetry with the y direction as a symmetry axis, and openings of the 6-shaped structures face the symmetry axis.
As shown in fig. 1, the x-direction refers to the longest side of the cuboid, the y-direction refers to the second longest side of the cuboid, and the z-direction is the shortest side of the cuboid.
In this embodiment, the longest side of the cell structure is 200 μm, i.e., px=200 μm, the second longest side of the cell structure is 100 μm, i.e., py=100 μm, and the shortest side is 10 μm, i.e., pz=10 μm.
The unit structures are periodically arranged in the x direction and the y direction, the number of the unit structures is not less than 8 x 15, the area of the terahertz sensor is larger than the diameter of an incident terahertz wave light spot, each unit structure consists of a metal layer and a substrate layer, the shortest side of each unit structure is the thickness of the substrate layer, and the substrate layer is made of a lossless flexible Polyimide (Polyimide) material with dielectric constant epsilon=3.5.
The thickness of the metal layer was 0.2 μm, and gold (gold) was used as the material, and the conductivity thereof was 4.561e+07S/m.
The unit structure of the terahertz sensor is shown in fig. 2, the metal layers are composed of two 6-type metal layers, namely a resonant structure, the two 6-type metal layers are in mirror symmetry, and each 6-type metal layer is formed by connecting 5 metal strips end to end.
As shown in fig. 2, the metal layer is a "6" structure formed by a first metal strip 2a, a second metal strip 2b, a third metal strip 2c, a fourth metal strip 2d and a fifth metal strip 2e connected end to end in sequence, the first metal strip 2a, the third metal strip 2c and the fifth metal strip 2e are parallel to the x direction, the second metal strip 2b, the fourth metal strip 2d are parallel to the y direction, and the fifth metal strip 2e is located between the first metal strip 2a and the third metal strip 2 c.
Specifically, the widths of the first metal strip 2a, the second metal strip 2b, the third metal strip 2c, the fourth metal strip 2d and the fifth metal strip 2e are equal, in this embodiment, the widths w=10μm of the first metal strip 2a, the second metal strip 2b, the third metal strip 2c, the fourth metal strip 2d and the fifth metal strip 2e,
the first metal strip 2a, the second metal strip 2b, the third metal strip 2c, the fourth metal strip 2d and the fifth metal strip 2e which are connected end to end in sequence are provided with square overlapped parts, and the side length of each overlapped part is the width of the first metal strip 2a, the second metal strip 2b, the third metal strip 2c, the fourth metal strip 2d and the fifth metal strip 2 e; i.e. the overlapping portion has a side length of 10 μm.
In the metal structure, the lengths of the two first metal strips 2a and the two third metal strips 2c including the overlapping portion are each 60 μm, that is, a=60 μm;
in the metal structure, the length of the two second metal strips 2b including the overlapping portion is 70 μm, that is, b1=70 μm;
in the metal structure, the length of the two fourth metal strips 2d including the overlapping portion is 55 μm, that is, b2=55 μm;
in the metal structure, the length of the two fifth metal strips 2e including the overlapping portion is 35 μm, i.e., c=35 μm.
In the same cell structure, the two symmetrical "6" -shaped metal layers 2 are spaced apart by 40 μm, the distances from the metal structure formed by the two metal layers 2 to the upper, left and right boundaries of the base layer 1 of the cell structure where the metal structure is located are 20 μm, and the distances from the metal structure to the lower boundary of the base layer 1 of the cell structure where the metal structure is located are 10 μm, and the directions of the upper, lower, left and right directions are described in fig. 2.
G1=5 μm, g2=5 μm in fig. 2.
Fig. 3 is an S21 curve when a terahertz wave perpendicularly enters a metal layer on the surface of the terahertz sensor, where the S21 curve is a curve of a ratio of energy of a transmitted electromagnetic wave to energy of an incident electromagnetic wave, which may also be referred to as a transmission curve, and a transmission coefficient. It can be seen that relatively sharp resonance peaks appear at both 0.366THz and 0.882THz, with low and high frequency resonance peaks having Q values of about 35.1 and 36.6, respectively.
Fig. 4 and 5 are each a transmission spectrum obtained by allowing terahertz waves to pass through the sensor when a layer of an object to be measured having a thickness of 5 μm is added to the surface of the sensor, fig. 4 is a graph showing the change of the low-frequency resonance peak when measuring substances having different refractive indexes, and fig. 5 is a graph showing the change of the high-frequency resonance peak when measuring substances having different refractive indexes. As can be seen from the graph, as the refractive index of the object to be measured gradually increases, the absorption spectrum starts to have obvious red shift, and the amount of shift and the change of the refractive index have good linear correlation. The metamaterial structure provided by the utility model can be used for quantitatively detecting substances and qualitatively distinguishing different substances, and the movement of the absorption spectrum resonance frequency is linear, so that the sensor provided by the utility model has good sensing performance and sensitivity, and in practical application, a required sensing detection effect can be achieved by dripping substances or powder to be detected on the surface of the sensor.
FIG. 6 is a graph showing the change of the resonant frequency point with the refractive index, wherein the slope of the fitted curve is the refractive index sensitivity of the sensor, and the refractive index sensitivities of the low-frequency and high-frequency resonant peaks obtained by calculating according to the formula (2) are 67GHz/RIU and 127GHz/RIU, respectively.
The prepared sample 3 of the object to be measured with the thickness of 5 mu m is placed on the metal surface of the sensor, terahertz waves with different frequencies are vertically incident on the surface of the terahertz sensor, resonance peaks in a transmission curve have obvious frequency shift compared with resonance peaks in the transmission curve before the object to be measured is not added, the refractive index of the object to be measured can be estimated through the frequency shift of the low-frequency resonance peak and the high-frequency resonance peak, and the category of the object can be judged according to the obtained refractive index.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the utility model, and is not meant to limit the scope of the utility model, but to limit the utility model to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the utility model are intended to be included within the scope of the utility model.
Claims (10)
1. The 6-type structure terahertz sensor based on the metamaterial is characterized by comprising a plurality of unit structures of cuboid structures which are periodically arranged in the x direction and the y direction, wherein each unit structure comprises a substrate layer (1) and a metal layer (2) fixedly arranged on the upper surface of the substrate layer (1), the metal layer (2) is of two 6-type structures which are arranged in a mirror symmetry mode by taking the y direction as a symmetry axis, and openings of the 6-type structures face the symmetry axis.
2. The metamaterial-based 6-type structure terahertz sensor according to claim 1, wherein the number of unit structures in the x-direction is not less than 8.
3. The metamaterial-based 6-type structure terahertz sensor according to claim 1, wherein the number of unit structures in the y-direction is not less than 15.
4. The metamaterial-based 6-type structure terahertz sensor according to claim 1, wherein the length of the structural unit in the x direction is 200 μm and the length in the y direction is 100 μm.
5. A metamaterial-based 6-type structured terahertz sensor according to claim 1, wherein the thickness of the base layer (1) is 10 μm, and a lossless flexible polyimide material is used, with dielectric constant epsilon=3.5.
6. The metamaterial-based 6-type structured terahertz sensor according to claim 1, wherein the thickness of the metal layer (2) is 0.2 μm, the adopted material is gold, and the conductivity is 4.561e+07s/m.
7. The metamaterial-based 6-type structured terahertz sensor according to claim 1, wherein the metal layer is a 6-shaped structure composed of a first metal strip (2 a), a second metal strip (2 b), a third metal strip (2 c), a fourth metal strip (2 d) and a fifth metal strip (2 e) which are sequentially connected end to end, the first metal strip (2 a), the third metal strip (2 c) and the fifth metal strip (2 e) are parallel to the x direction, the second metal strip (2 b) and the fourth metal strip (2 d) are parallel to the y direction, and the fifth metal strip (2 e) is located between the first metal strip (2 a) and the third metal strip (2 c).
8. The metamaterial-based 6-type structured terahertz sensor according to claim 7, wherein the first metal strip (2 a), the second metal strip (2 b), the third metal strip (2 c), the fourth metal strip (2 d) and the fifth metal strip (2 e) are equal in width, and the first metal strip (2 a), the second metal strip (2 b), the third metal strip (2 c), the fourth metal strip (2 d) and the fifth metal strip (2 e) which are sequentially connected end to end have square overlapping portions, and the side lengths of the overlapping portions are the widths of the first metal strip (2 a), the second metal strip (2 b), the third metal strip (2 c), the fourth metal strip (2 d) and the fifth metal strip (2 e);
the lengths of the first metal strip (2 a) and the third metal strip (2 c) comprising the overlapped part are 60 μm;
the second metal strip (2 b) comprising the overlapping portion has a length of 70 μm;
-the length of the fourth metal strip (2 d) comprising the overlapping portion is 55 μm;
the length of the fifth metal strip (2 e) including the overlapping portion is 35 μm.
9. The metamaterial-based 6-type structured terahertz sensor according to claim 8, wherein the widths of the first metal strip (2 a), the second metal strip (2 b), the third metal strip (2 c), the fourth metal strip (2 d) and the fifth metal strip (2 e) are 10 μm.
10. The metamaterial-based 6-type terahertz sensor according to claim 9, wherein two symmetrical 6-shaped metal layers (2) are separated by 40 μm, the distances from the metal structure formed by the two metal layers (2) to the upper, left and right boundaries of the base layer (1) of the unit structure where the metal structure is located are 20 μm, and the distances from the metal structure to the lower boundary of the base layer (1) of the unit structure where the metal structure is located are 10 μm.
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| CN202321430334.3U CN220120707U (en) | 2023-06-06 | 2023-06-06 | 6-structure terahertz sensor based on metamaterial |
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| CN202321430334.3U CN220120707U (en) | 2023-06-06 | 2023-06-06 | 6-structure terahertz sensor based on metamaterial |
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