CN219475389U - Terahertz sensor based on medium super surface - Google Patents
Terahertz sensor based on medium super surface Download PDFInfo
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- CN219475389U CN219475389U CN202220611505.1U CN202220611505U CN219475389U CN 219475389 U CN219475389 U CN 219475389U CN 202220611505 U CN202220611505 U CN 202220611505U CN 219475389 U CN219475389 U CN 219475389U
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Abstract
The utility model relates to the technical field of electromagnetism and discloses a terahertz sensor based on a dielectric super surface. The utility model solves the problems of high electromagnetic loss, single working mode and the like in the prior art.
Description
Technical Field
The utility model relates to the technical field of electromagnetism, in particular to a terahertz sensor based on a dielectric super surface.
Background
The chiral optical response mainly comprises optical activity and circular dichroism, and corresponds to the difference of the real part and the imaginary part of the equivalent refractive index of the chiral optical medium to the orthogonal circular polarized electromagnetic wave respectively. Chiral supersurfaces generally have stronger chiral optical response than natural chiral substances, and have great application potential in the aspect of regulating and controlling circularly polarized electromagnetic waves. Under the condition of normal incidence, the chiral super surface can realize polarization transformation, spin selective absorption, circularly polarized wave front control and the like of incident waves. These functions result from the fact that chiral structures break mirror symmetry and higher order rotational symmetry. Dielectric supersurfaces are typically capable of achieving a stronger chiral response than single layer metal structures. On the other hand, another type of chiral optical response can be observed in achiral structures, so-called exo-handedness, requiring oblique incidence of electromagnetic waves, which are easier to design.
Because of the excellent electromagnetic field local enhancement effect, the super surface is widely applied in the sensing field, and has good performance in the detection of biomacromolecules, cancer cells, pesticide components and the like. In particular, the super-surface is particularly prominent in the detection of chiral species. Both metal and all-dielectric type achiral structures are used for chiral molecule detection and enantiomer discrimination, and can significantly enhance the circular dichroism spectrum of molecules. In the terahertz band, metal chiral supersurfaces have been used for enhanced biochemical detection, however chiral metal structures have large ohmic losses and may have hidden dangers of unstable chemical properties in certain application scenarios. The all-dielectric structure not only can form strong magnetic response through displacement current in the unit, and can realize low-loss high-efficiency intrinsic or extrinsic chiral response, but also can be used for expanding the distribution range of a local field and enhancing the interaction between an electromagnetic near field and an object to be detected.
Disclosure of Invention
In order to overcome the defects of the prior art, the utility model provides a terahertz sensor based on a dielectric super-surface, which solves the problems of complex preparation, high electromagnetic loss, unstable chemical property, weak external handedness and the like in the prior art.
The utility model solves the problems by adopting the following technical scheme:
a terahertz sensor based on a dielectric super-surface comprises a substrate and a plurality of resonance units arranged on the surface of the substrate, wherein the resonance units are arranged in a matrix array.
As a preferable technical scheme, the resonance unit has an external chirality, and a notch is arranged on the resonance unit.
As a preferred embodiment, the resonance unit is cylindrical in shape.
As a preferable technical scheme, the cross section of the notch is rectangular.
As a preferable technical scheme, the resonance unit is a super-surface unit made of high-resistance silicon material.
As a preferred technical scheme, the substrate is a structure made of quartz.
As a preferred solution, several resonant cells are arranged in a square matrix array.
As a preferable embodiment, the radius of the resonance unit surface is 60 μm to 70 μm.
As a preferable embodiment, the notch has a cross section of 40 μm to 50 μm in length and 8 μm to 12 μm in width.
As a preferable embodiment, the sum of the thicknesses of the resonance unit and the substrate is 290 μm to 310 μm.
Compared with the prior art, the utility model has the following beneficial effects:
(1) The utility model has the advantages of simple preparation, low electromagnetic loss, stable chemical property and strong handedness, and can selectively work in chiral or achiral working modes;
(2) The utility model effectively expands the working mode of the sensor, enriches the sensing function and improves the detection performance.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a graph showing the variation of L1 with refractive index in the mode 1 of operation of the present utility model;
FIG. 3 is a graph showing the variation of L2 with refractive index in mode 1 of operation of the present utility model;
FIG. 4 is a graph showing the peak variation of L1 in the working mode 1 of the present utility model;
FIG. 5 is a graph showing the peak variation of L2 in the working mode 1 of the present utility model;
FIG. 6 is a graph showing the variation of C1 with refractive index in mode 2 of operation of the present utility model;
FIG. 7 is a graph showing the variation of C2 with refractive index in mode 2 of operation of the present utility model;
FIG. 8 is a graph showing the peak change of C1 in the working mode 2 of the present utility model;
FIG. 9 is a graph showing the peak change of C2 in the working mode 2 of the present utility model;
FIG. 10 is a graph of C1 spectrum when the thickness of the object to be measured takes different values in the working mode 2 of the present utility model;
FIG. 11 is a graph showing the sensing performance of the present utility model in mode 2 when the thickness of the object to be measured takes different values.
The reference numerals and corresponding part names in the drawings: 1. resonance unit, 2, substrate, 3, breach.
Detailed Description
The present utility model will be described in further detail with reference to examples and drawings, but embodiments of the present utility model are not limited thereto.
Example 1
As shown in fig. 1 to 11, the utility model aims to provide a terahertz sensor based on a dielectric super surface, which solves the problems of single mode and high electromagnetic loss of the existing terahertz sensor.
The aim of the utility model is realized by the following technical scheme:
step one, a high-resistance silicon super-surface unit (a plurality of resonance units 1) with strong extrinsic chirality is designed. According to the principle of chiral generation, the unit structure needs to have in-plane mirror symmetry and only one symmetry axis. Thus, the desired shape characteristics can be achieved by introducing a rectangular notch 3 in the cylindrical structure. In the terahertz band, high-resistance silicon has a refractive index as high as 3.45 and a negligible absorption coefficient, and is selected as a unit material, and quartz with a lower refractive index is used as the substrate 2. And simulating the super-surface unit by using numerical simulation software, and obtaining strong terahertz extrinsic chiral response by adjusting structural parameters.
And step two, starting the working mode 1. And irradiating the super surface carrying the object to be detected by using the linear polarization terahertz wave, wherein the polarization direction of the incident wave is consistent with the symmetry axis direction of the super surface unit. The concentration or the type of the object to be measured is changed, the transmission spectrum of the sample is measured, and the working frequency band is 1.05-1.1THz. The linear polarization terahertz wave excites polarization resonance of the dielectric in the silicon unit, two resonance peaks appear in the transmission spectrum, and the resonance frequencies are named as L1 and L2 in sequence from low to high. Wherein L1 has a narrow spectral line, is extremely sensitive to refractive index changes and is used for high-precision detection, and L2 has a wide spectral line and is used for detection of refractive index changes in a large range. Mode 1 only needs to measure the linear polarization terahertz spectrum once, is simple and convenient, and has wider applicability.
And step three, starting an operation mode 2. And respectively irradiating the super surface carrying the object to be detected by using the left-handed and right-handed circularly polarized terahertz waves, changing the concentration or the type of the object to be detected, respectively measuring the transmission spectrum of the sample, wherein the working frequency band is 1.05-1.1THz, and calculating to obtain a circular dichroism spectrum. The obliquely incident circularly polarized terahertz wave selectively excites the resonance of the dielectric medium in the silicon unit, two resonance peaks appear in the transmission circular dichroism spectrum, the resonance frequencies are sequentially named as C1 and C2 from low to high, and the spectrum characteristics and the application mode are similar to those of linear polarization. The mode 2 multi-time measurement method can effectively eliminate achiral absorption of the polar object to be measured on terahertz waves and improve the signal-to-noise ratio of the resonance peak measurement result.
Further, the thickness of the object to be measured is changed, and terahertz sensing under different thicknesses is realized. The thickness of the object to be measured is gradually increased to 120 mu m at intervals of 20 mu m, meanwhile, the concentration or the type of the object to be measured is changed, the transmission linear polarized spectrum of the mode 1 and the circular dichroism of the mode 2 are tested, and the working performance of the sensor under different thicknesses is compared.
A terahertz sensor based on a dielectric supersurface, comprising the steps of:
step one, designing a super-surface unit structure (a plurality of resonance units 1) with intrinsic chirality. According to the principle of chiral generation outside the super surface, the unit structure needs to meet the condition that there is only one in-plane mirror symmetry axis. This requirement can be achieved by introducing a rectangular notch 3 in the cylindrical unit. High-resistance silicon has a refractive index of up to 3.45 and a negligible absorption coefficient in the terahertz band, and therefore it is selected as a cell material, and quartz of a lower refractive index is used as the substrate 2. The commercial numerical simulation software is utilized to simulate the super-surface unit, the transmission terahertz spectrum of linear polarization and circular polarization is observed, the resonant mode is analyzed by combining the electromagnetic field distribution at the resonant peak, and the structural parameters are continuously adjusted to obtain the linear polarization resonant peak with high quality factor and strong terahertz extrinsic chiral response.
And secondly, irradiating the to-be-detected object-super-surface composite sample by using linear polarization terahertz waves to start the working mode 1. To ensure efficient excitation of the resonant modes, the polarization direction of the incident wave needs to be consistent with the direction of the symmetry axis of the subsurface unit. The concentration or the type of the object to be measured is changed, the transmission spectrum of the sample is measured, and the designed working frequency range is 1.05-1.1THz. In this mode of operation, a linearly polarized incident wave will excite polarization-selective resonances in the silicon cell, with two resonance peaks in the transmission spectrum. Designated as L1 and L2 in order from low to high in resonance frequency, where L1 has a narrow spectral line, is extremely sensitive to refractive index changes for high accuracy detection, e.g., 1% refractive index change. Whereas L2 has a broader spectral line for detection of a wide range of refractive index changes, e.g. 20% refractive index change.
And thirdly, irradiating the super surface bearing the object to be detected by using the left-handed and right-handed circularly polarized terahertz waves respectively to start the working mode 2. Then changing the concentration or the type of the object to be detected, respectively measuring the circular polarization transmission spectrum of the sample, and calculating to obtain a circular dichroism spectrum, wherein the working frequency band is 1.05-1.1THz, and the calculating method comprises the following steps:
T CD ＝|T lr | 2 +|T rr | 2 -(|T ll | 2 +|T rl | 2 )；
wherein T is ij (i, j=r, l) is the transmission coefficient of each circular polarization. Obliquely incident circularly polarized terahertz waves will selectively excite resonances of the dielectric in the silicon cell, resulting in two resonance peaks in the transmitted circular dichroism spectrum. The resonant frequencies are named as C1 and C2 in sequence from low to high, and the spectrum characteristics and the application modes are similar to linear polarization. Many polar objects to be measured show obvious absorption to terahertz waves, and the mode 2 multiple measurement method can effectively eliminate the achiral absorption, improve the signal-to-noise ratio of the resonance peak measurement result and eliminate interference.
Further, the thickness of the object to be measured is changed, and terahertz sensing under different thicknesses is realized. The height of the super-surface unit is 100 μm, and the thickness of the object to be measured may be smaller than this value in practical application. Therefore, the thickness of the object to be measured is gradually increased to 120 μm from 20 μm at intervals, and simultaneously the concentration or the type of the object to be measured is changed, and the transmission linear polarization spectrum of the mode 1 and the circular dichroism spectrum of the mode 2 are tested to compare the working performance of the sensor under different thicknesses.
The beneficial effects of the utility model are as follows:
the metal super-surface sensor has stronger ohmic loss, and the chemical stability can not be ensured when detecting various biochemical objects to be detected. Single-layer metal chiral structures generally have weak chiral responses, while double-layer or multi-layer structures are more difficult to process. In addition, conventional subsurface sensors typically can only operate in one mode, either chiral or achiral. Therefore, the proposal of the all-dielectric extrinsic chiral super-surface sensor well solves the problems, has simple preparation, low loss, stable chemical property and strong extrinsic chirality, and can selectively work in chiral or achiral working modes.
The all-dielectric super-surface sensor provided by the utility model has two working modes of normal incidence and oblique incidence, and the device can be respectively used as an achiral device and a chiral device and is respectively sensed by using a linear polarization transmission spectrum and a circular dichroism spectrum. Two operating frequencies can be used in both modes, with a high refractive index resolution and a large detection range, respectively. The working mode, detection performance, stability and other indexes of the sensor are effectively expanded.
The sensing device based on the super surface has a flattened compact structure and high sensitivity sensing performance, and the chiral super surface has unique advantages in chiral substance detection and corresponding isomer recognition. The utility model provides a chiral-achiral spectrum dual-mode sensor based on an all-dielectric terahertz super surface. The achiral superatomic structure has extremely high extrinsic chirality under the irradiation of oblique incidence terahertz waves, and can respectively utilize transmitted linear polarization spectrums and circular dichroism spectrum as sensing indexes under the two conditions of perpendicular incidence and oblique incidence of the terahertz waves. The linear polarized spectrum working mode only needs to measure the transmission spectrum once, and has wide applicability. The circular dichroism chromatographic working mode can eliminate achiral terahertz absorption of an object to be detected through multiple measurements, and has higher signal-to-noise ratio. The maximum refractive index-frequency change rates for the two modes of operation were-128.5 GHz/RIU and-124.7 GHz/RIU, respectively. In addition, two resonance peaks can be utilized in both working states, and the detection is respectively aimed at high-precision and large-range refractive index change. The utility model has the advantages of simple structure, low manufacturing cost, various sensing modes and the like.
Example 2
As further optimization of embodiment 1, this embodiment includes all the technical features of embodiment 1, as shown in fig. 1 to 11, and in addition, this embodiment further includes the following technical features:
the utility model relates to the technical field of novel artificial electromagnetic materials and terahertz science, which consists of a cylindrical resonant cell array (a plurality of resonant cells 1 are arranged in a matrix array to form the resonant cell array) with rectangular notches 3 made of high-resistance silicon materials and a substrate 2 made of quartz materials.
A terahertz sensor based on a dielectric super-surface comprises a substrate 2 and a plurality of resonance units 1 arranged on the surface of the substrate 2, wherein the resonance units 1 are arranged in a matrix array.
As a preferable technical scheme, the resonance unit 1 has an external chirality, and a notch 3 is arranged on the resonance unit 1.
As a preferred embodiment, the resonance unit 1 is cylindrical in shape.
As a preferred embodiment, the cross-section of the notch 3 is rectangular.
As a preferable technical solution, the resonance unit 1 is a super-surface unit made of high-resistance silicon material.
As a preferred embodiment, the substrate 2 is a structure made of quartz.
As a preferred solution, several resonator elements 1 are arranged in a square matrix array.
As a preferable embodiment, the radius of the surface of the resonance unit 1 is 60 μm to 70 μm.
As a preferable embodiment, the notch 3 has a cross section of 40 μm to 50 μm in length and 8 μm to 12 μm in width.
As a preferable embodiment, the sum of the thicknesses of the resonance unit 1 and the substrate 2 is 290 μm to 310 μm.
Preferably, when the terahertz wave is perpendicularly incident, the linear polarization transmission wave is used as a sensing spectrum, namely the working mode 1; when the terahertz wave is obliquely incident, a transmission circular dichroism spectrum is used as a sensing spectrum, namely the working mode 2.
Preferably, the period of the resonant cell array is 150 μm, the radius is 65 μm, and the length and width of the rectangular slot are 45 μm and 12 μm respectively.
Preferably, the total thickness of the sensor is 300 μm, wherein the resonant cell array pillar height is 100 μm and the thickness of the substrate 2 is 200 μm.
When in use, the following steps are adopted:
(1) As shown in FIG. 1, the design is in the form of a chiral medium super-surface structure. In order to make the superatom have only one in-plane mirror symmetry axis, a rectangular slot is introduced in the high-resistance silicon cylinder, and the substrate 2 is quartz. The cell period p=150 microns, the cylinder height h1=100 microns, the radius r=65 microns, the length and width of the slot l=45 microns, d=12 microns, respectively. The refractive indices of high-resistance silicon and quartz are 3.45 and 2.13, respectively.
(2) The sensor is operated in mode 1, i.e. linear polarized wave incidence. The sensing performance of the device is characterized in a way that changes the refractive index around the superatom. First, the resonance peaks L1 and L2 have different response characteristics to refractive index changes, where L1 is very sensitive to refractive index, e.g. it almost disappears when n=1.1 in the surrounding environment, and L2 can undergo a large refractive index change. Therefore, i have used these two peaks for sensing with high accuracy and wide range of refractive index variations, respectively. As shown in fig. 2 and 3, the refractive index change steps set for L1 and L2 are 0.01 and 0.2, respectively, and both peak changes exhibit good linearity. FIGS. 4 and 5 show the peak frequency variation of L1 and L2, respectively, both showing good linearity with refractive index-frequency variation rates of-128.5 GHz/RIU and; -28.6GHz/RIU.
(3) The working mode 2 of the sensor takes a transmission circular dichroism spectrum of the super surface as a sensing spectrum. Fig. 6 and 7 show the variation of circular dichroism peaks C1 and C2, respectively, with ambient refractive index. Similar to the working mode 1, C1 and C2 are used as high-precision and wide-range refractive index change detection tools respectively, and it can be seen that the variation spectrum rule is similar to that of linear polarized light spectrum. The peak frequency variation of the two peaks is shown in FIGS. 8 and 9, where the frequencies decrease with increasing refractive index, at-124.7 GHz/RIU and-29.3 GHz/RIU, respectively.
(4) The thickness of the superatom is 100 micrometers, and sometimes the thickness of the test object may be less than this value. Therefore, the sensing performance of the super surface when the object to be measured takes different thickness values is shown here, taking the C1 peak in the operation mode 2 as an example. FIG. 10 shows a transmission circle dichroism spectrum C1 with the thickness H of the measured object ranging from 20 to 120 microns, and the resonance frequency of C1 is found to be relatively sensitive to the value of H when the thickness of the measured object is smaller than the super-atomic height. We show the operating characteristics of the sensor at different thicknesses in figure 11. As the thickness of the test object gradually approaches the height of the silicon pillar, the refractive index detection sensitivity gradually increases, because the test object is more fully contacted with the local field around the super atom.
In summary, the patent obtains the dual-mode terahertz sensor based on the all-dielectric super-surface through a brand new super-surface structure design and application scheme. Refractive index sensing based on achiral and chiral spectrums can be respectively realized under the irradiation of normal incidence ray polarized terahertz waves and oblique incidence circular polarized terahertz waves. The refractive index-frequency change rates achieved in the two working modes are-128.5 GHz/RIU and-124.7 GHz/RIU respectively, and two resonance peaks can be utilized in the two working states, so that the refractive index change detection is respectively carried out for high precision and large range. The novel sensing scheme effectively expands the working mode of the sensor, enriches the sensing function and improves the detection performance.
As described above, the present utility model can be preferably implemented.
The foregoing description of the preferred embodiment of the utility model is not intended to limit the utility model in any way, but rather to cover all modifications, equivalents, improvements and alternatives falling within the spirit and principles of the utility model.
Claims (9)
1. The terahertz sensor based on the dielectric super surface is characterized by comprising a substrate (2) and a plurality of resonance units (1) arranged on the surface of the substrate (2), wherein the resonance units (1) are arranged in a matrix array; the resonance unit (1) has an external chirality, and a notch (3) is arranged on the resonance unit (1).
2. Terahertz sensor based on dielectric supersurface according to claim 1, characterized in that the resonant unit (1) is cylindrical in shape.
3. A terahertz sensor based on dielectric supersurface according to claim 2, characterized in that the cross-sectional shape of the notch (3) is rectangular.
4. A terahertz sensor based on dielectric supersurface according to claim 3, characterized in that the resonant unit (1) is a supersurface unit made of high resistance silicon material.
5. A terahertz sensor based on dielectric supersurface according to claim 4, characterized in that the substrate (2) is a structure made of quartz.
6. A terahertz sensor based on dielectric supersurface according to any one of claims 2 to 5, characterized in that several resonant cells (1) are arranged in a square matrix array.
7. The terahertz sensor based on dielectric super-surface according to claim 6, characterized in that the radius of the surface of the resonance unit (1) is 60 μm-70 μm.
8. Terahertz sensor based on dielectric supersurface according to claim 7, characterized in that the cross section of the notch (3) is 40-50 μm long and 8-12 μm wide.
9. A terahertz sensor based on dielectric supersurface according to claim 8, characterized in that the sum of the thicknesses of the resonating unit (1) and the substrate (2) is 290 μm to 310 μm.
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| WO2024159594A1 (en) * | 2023-02-01 | 2024-08-08 | 广东大湾区空天信息研究院 | Terahertz-level chiral metasurface sensor and system for identifying lactic acid enantiomers |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2024159594A1 (en) * | 2023-02-01 | 2024-08-08 | 广东大湾区空天信息研究院 | Terahertz-level chiral metasurface sensor and system for identifying lactic acid enantiomers |
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