CN220118628U - Door valve for sealing vacuum cavity - Google Patents
Door valve for sealing vacuum cavity Download PDFInfo
- Publication number
- CN220118628U CN220118628U CN202321613427.XU CN202321613427U CN220118628U CN 220118628 U CN220118628 U CN 220118628U CN 202321613427 U CN202321613427 U CN 202321613427U CN 220118628 U CN220118628 U CN 220118628U
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- vacuum cavity
- groove
- block
- fixedly connected
- cavity body
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- 238000007789 sealing Methods 0.000 title claims abstract description 41
- 230000007246 mechanism Effects 0.000 claims description 7
- 230000008859 change Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000001125 extrusion Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- Pressure Vessels And Lids Thereof (AREA)
Abstract
The utility model discloses a door valve for sealing a vacuum cavity, which relates to the technical field of vacuum cavities and comprises a vacuum cavity body, wherein a connecting block is fixedly connected to the outer side of the vacuum cavity body, a door cover plate is movably hinged to the upper side of the connecting block through a hinge, a second hollow block is fixedly connected to the outer side of the door cover plate, and a threaded rod is connected to the inner side of the second hollow block.
Description
Technical Field
The utility model relates to the technical field of vacuum cavities, in particular to a door valve for sealing a vacuum cavity.
Background
The vacuum chamber is a structure developed to reduce the number of vacuum chambers in semiconductor applications, the wafer capacity of which is almost unchanged, and which employs a moving vacuum equipped with a preset air bearing of a differential pressure vacuum groove. The product features improved static and dynamic response of machine positioning, shortened pumping time and stabilizing time, etc.
In the prior art, the inner wall surface of the vacuum cavity adsorbs a large amount of gas molecules or other organic matters to become a gas release source influencing the vacuum degree. In order to realize ultrahigh vacuum, the cavity is baked at a high temperature of 150-250 ℃ so as to promote the gas on the surface and in the material to be released as soon as possible, when the vacuum cavity is used, the door plate is covered and sealed through the sealing ring, so that the vacuum of the vacuum cavity is ensured, but because the vacuum cavity is baked at a high temperature when in use, the sealing ring is easy to deform and poor in sealing due to high temperature, most of the sealing rings are fixedly connected with the vacuum cavity, and the sealing ring is difficult to replace after deformation.
Disclosure of Invention
Aiming at the problems in the prior art, the utility model aims to provide a door valve for sealing a vacuum cavity, which can effectively solve the problems that the vacuum cavity needs to be baked at high temperature when in use, the sealing ring is easy to deform and poor in sealing due to high temperature, most of the sealing rings are fixedly connected with the vacuum cavity, and the sealing ring is difficult to replace after deformation.
In order to solve the problems, the utility model adopts the following technical scheme:
the utility model provides a vacuum cavity is sealed with door valve, includes the vacuum cavity body, the outside fixedly connected with connecting block of vacuum cavity body, the upside of connecting block is through hinge activity hinge has a door apron, the outside fixedly connected with second hollow piece of door apron, the inside threaded connection of second hollow piece has the threaded rod, the outside fixedly connected with first hollow piece of vacuum cavity body, just threaded rod threaded connection is in the inside of first hollow piece, the upside of vacuum cavity body is provided with the go-between, the upside fixedly connected with sealing washer of go-between, the downside of go-between is provided with joint mechanism;
the clamping mechanism comprises a sliding block fixedly connected to the lower side of the connecting ring, a first placing groove is formed in the upper side of the vacuum cavity body, the sliding block is slidably connected to the inside of the first placing groove, a clamping groove is formed in one side of the sliding block, a clamping block is arranged in the clamping groove, a second placing groove is formed in the inside of the vacuum cavity body, the second placing groove is communicated with the first placing groove, the clamping block is slidably connected to the inside of the second placing groove, a first spring is fixedly connected to the inside of the second placing groove, the first spring is fixedly connected to the clamping block, and a unclamping assembly is arranged on one side of the clamping block.
As a preferable scheme of the utility model, the unclamping assembly comprises a connecting rod fixedly connected to one side of the clamping block, a first hollow groove is formed in the outer side of the vacuum cavity body, the first hollow groove is communicated with the second placing groove, and the connecting rod is slidably connected in the first hollow groove.
As a preferable scheme of the utility model, a limit groove is formed in the vacuum cavity body, the limit groove is communicated with the second placing groove, a limit ring is fixedly connected to the upper side of the clamping block, and the limit ring is slidably connected in the limit groove.
As a preferable scheme of the utility model, a second hollow groove is formed in the vacuum cavity body, the second hollow groove is communicated with the first placing groove, a second spring is fixedly connected to the vacuum cavity body in the second hollow groove, an extrusion plate is arranged on the upper side of the second spring, and the extrusion plate is fixedly connected with the sliding block.
As a preferable scheme of the utility model, the outer side of the connecting ring is fixedly connected with a guide rod, the outer side of the vacuum cavity body is fixedly connected with a third hollow block, and the guide rod is slidably connected in the third hollow block.
As a preferable scheme of the utility model, one side of the connecting rod is fixedly connected with a fixed block, and the diameter of the fixed block is larger than that of the connecting rod.
Compared with the prior art, the utility model has the advantages that:
1. people can pull the connecting rod to drive the fixture block to move out of the inside of draw-in groove in this device, and the slider just can not be limited by the fixture block this moment to can follow the inside roll-off of first standing groove, people alright dismantle and change go-between and sealing washer this moment, more conveniently change, be applicable to the sealing washer because of the high temperature appears under the condition of deformation damage.
2. The inside in this device second hollow tank can be used to place the second spring, and the stripper plate then can be driven by the slider and remove to extrude the second spring and shrink, when people pulling the connecting rod lets the fixture block break away from the slider, the second spring just can be automatic to pop up the slider, need not people to pull the connecting rod always, also can dismantle the go-between, more convenient and simple.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is an enlarged schematic view of the structure of FIG. 1A according to the present utility model;
FIG. 3 is a first cross-sectional schematic view of the present utility model;
FIG. 4 is a second cross-sectional schematic view of the present utility model;
fig. 5 is an enlarged schematic view of the structure of fig. 4B according to the present utility model.
The reference numerals in the figures illustrate:
1. a vacuum chamber body; 21. a connecting block; 22. a door cover plate; 23. a connecting ring; 24. a seal ring; 25. a first hollow block; 26. a second hollow block; 27. a threaded rod; 31. a first placement groove; 32. a slide block; 33. a clamping groove; 34. a clamping block; 35. a second placement groove; 36. a first spring; 41. a first hollow groove; 42. a connecting rod; 51. a limit groove; 52. a limiting ring; 61. a second hollow groove; 62. a second spring; 63. an extrusion plate; 71. a third hollow block; 72. a guide rod; 8. and a fixed block.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model. It is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present utility model are within the protection scope of the present utility model.
Examples:
referring to fig. 1-5, a door valve for sealing a vacuum cavity comprises a vacuum cavity body 1, wherein a connecting block 21 is fixedly connected to the outer side of the vacuum cavity body 1, a door cover plate 22 is movably hinged to the upper side of the connecting block 21 through a hinge, the connecting block 21 can be used for connecting the connecting block 21 and the door cover plate 22, the door cover plate 22 can rotate on the upper side of the vacuum cavity body 1, and meanwhile, a connecting ring 23 and a sealing ring 24 can be smoothly placed between the connecting block 21 and the door cover plate 22.
In addition, the outside fixedly connected with second hollow piece 26 of door apron 22, the inside threaded connection of second hollow piece 26 has threaded rod 27, the outside fixedly connected with first hollow piece 25 of vacuum cavity body 1, and threaded rod 27 threaded connection is in the inside of first hollow piece 25, the inside of first hollow piece 25 and second hollow piece 26 can be used to connect threaded rod 27, thereby reach the effect of stably connecting vacuum cavity body 1 and door apron 22, still accessible rotatory threaded rod 27 breaks away from first hollow piece 25 and second hollow piece 26 simultaneously, be convenient for open door apron 22, the upside of vacuum cavity body 1 is provided with go-between 23, go-between 23's upside fixedly connected with sealing washer 24, go-between 23 can be used to connect sealing washer 24 and joint mechanism, and sealing washer 24 then can seal the gap between vacuum cavity body 1 and the door apron 22, the downside of go-between 23 is provided with joint mechanism.
The clamping mechanism comprises a sliding block 32 fixedly connected to the lower side of the connecting ring 23, a first placing groove 31 is formed in the upper side of the vacuum cavity body 1, the sliding block 32 is slidably connected to the inner side of the first placing groove 31, a clamping groove 33 is formed in one side of the sliding block 32, a clamping block 34 is arranged in the clamping groove 33, the sliding block 32 can be used for placing the sliding block 32 in the inner side of the first placing groove 31, the sliding block 32 can be used for connecting the connecting ring 23, the clamping block 34 can be used for placing the clamping block 34 in the clamping groove 33, the sliding block 32 can be limited by the clamping groove 33, the sliding block 32 is not easy to separate from the first placing groove 31, accordingly, the connecting ring 23 and the sealing ring 24 can be stably arranged on the upper side of the vacuum cavity body 1 and can be used and sealed smoothly, the upper side of the clamping block 34 is an inclined plane and can be extruded by the sliding block 32 to move, and therefore the movement of the clamping block 34 is more convenient.
In addition, the second standing groove 35 has been seted up to the inside of vacuum cavity body 1, and second standing groove 35 is linked together with first standing groove 31, and fixture block 34 sliding connection is in the inside of second standing groove 35, vacuum cavity body 1 is located the inside fixedly connected with first spring 36 of second standing groove 35, and fixedly connected between first spring 36 and the fixture block 34, the inside of second standing groove 35 can be used to place first spring 36, and first spring 36 then can be used to support fixture block 34, let fixture block 34 be difficult for removing more stably, still can be contracted by the extrusion of fixture block 34 simultaneously, and rebound the fixture block 34 and reset to the inside of draw-in groove 33, one side of fixture block 34 is provided with the unclamping subassembly.
Specifically, the unclamping assembly comprises a connecting rod 42 fixedly connected to one side of the clamping block 34, a first hollow groove 41 is formed in the outer side of the vacuum cavity body 1, the first hollow groove 41 is communicated with the second placing groove 35, the connecting rod 42 is slidably connected to the inside of the first hollow groove 41, the inside of the first hollow groove 41 can be used for placing the connecting rod 42, the connecting rod 42 can be pulled to move by people, the clamping block 34 is driven to move together, the clamping block 34 is separated from the clamping groove 33, the sliding block 32 can slide, at the moment, people can detach and replace the connecting ring 23 and the sealing ring 24, and the unclamping assembly is suitable for the situation that deformation damage occurs to the sealing ring 24 due to high temperature.
Specifically, the limiting groove 51 is formed in the vacuum cavity body 1, the limiting groove 51 is communicated with the second placing groove 35, the limiting ring 52 is fixedly connected to the upper side of the clamping block 34, the limiting ring 52 is slidably connected to the inside of the limiting groove 51, the limiting groove 51 can be used for limiting the moving distance of the limiting ring 52, the clamping block 34 is limited through the limiting ring 52, and the clamping block 34 is not easy to slam against the sliding block 32 when the first spring 36 rebounds against the clamping block 34, so that damage to both the clamping block 34 and the sliding block 32 is not easy to occur.
Specifically, the second hollow groove 61 has been seted up to the inside of vacuum cavity body 1, and second hollow groove 61 is linked together with first standing groove 31, vacuum cavity body 1 is located the inside fixedly connected with second spring 62 of second hollow groove 61, the upside of second spring 62 is provided with stripper plate 63, and fixed connection between stripper plate 63 and the slider 32, the inside of second hollow groove 61 can be used for placing second spring 62, and stripper plate 63 then can be driven by slider 32 and remove, and extrude second spring 62 and shrink, when people pulling connecting rod 42 lets fixture block 34 break away from slider 32, second spring 62 just can be automatic to rebound slider 32 upwards, need not people to pull connecting rod 42 always, also can dismantle connecting ring 23, it is more convenient and simple.
Specifically, the outside fixedly connected with guide bar 72 of go-between 23, the outside fixedly connected with third hollow piece 71 of vacuum cavity body 1, and guide bar 72 sliding connection is in the inside of third hollow piece 71, third hollow piece 71 accessible guide bar 72 plays the guide effect to go-between 23 for people can let the inside of guide bar 72 slide into third hollow piece 71 earlier when installing go-between 23, thereby make slider 32 can be smooth remove to the inside of first standing groove 31, do not need carefully to align any more, it is more convenient.
Specifically, one side fixedly connected with fixed block 8 of connecting rod 42, and the diameter of fixed block 8 is greater than the diameter of connecting rod 42, and people can pull the bigger fixed block 8 of diameter to drive connecting rod 42 and remove for the phenomenon that is difficult for the pulling appears because of connecting rod 42 is too thin easily.
The working principle and the using flow of the utility model are as follows: when the device is used, the connecting ring 23 is firstly placed on the upper side of the vacuum cavity body 1, the connecting ring 23 is moved downwards, the connecting ring 23 drives the sealing ring 24 and the sliding block 32 to move together, then the sliding block 32 moves into the first placing groove 31, meanwhile, the sliding block 32 presses the inclined surface of the clamping block 34 to enable the clamping block 34 to move, meanwhile, the clamping block 34 presses the first spring 36 to shrink, when the clamping groove 33 moves to one side of the clamping block 34, the first spring 36 can rebound the clamping block 34 to move into the clamping groove 33, the sliding block 32 is limited, the sliding block 32 is not easy to move, the connecting ring 23 and the sealing ring 24 can be stabilized on the upper side of the vacuum cavity body 1, then the door cover plate 22 can be rotated, then the threaded rod 27 in the second hollow block 26 is connected into the first hollow block 25 through rotating threads, the door cover plate 22 can be stabilized on the upper side of the vacuum cavity body 1, and the sealing effect is achieved through the sealing ring 24.
When the high temperature that produces when vacuum cavity body 1 when using lets sealing washer 24 appear deformation damage, can stimulate connecting rod 42 at first, connecting rod 42 can drive fixture block 34 and remove, thereby let fixture block 34 break away from in the inside of draw-in groove 33, slider 32 just can not be spacing by fixture block 34 this moment, thereby can follow the inside roll-off of first standing groove 31, people alright dismantle and change go on connecting ring 23 and sealing washer 24 at this moment, more conveniently change, so far can solve vacuum cavity body 1 need carry out the high temperature when using toast, this can lead to sealing washer 24 to appear deformation and sealing difference because of the high temperature easily, and most sealing washer 24 all are connected with vacuum cavity body 1 between fixed, lead to sealing washer 24 to be difficult to change the problem after the deformation.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical solution and the modified concept thereof, within the scope of the present utility model.
Claims (6)
1. The utility model provides a door valve for vacuum cavity seal, includes vacuum cavity body (1), its characterized in that: the vacuum cavity comprises a vacuum cavity body (1), wherein a connecting block (21) is fixedly connected to the outer side of the vacuum cavity body (1), a door cover plate (22) is movably hinged to the upper side of the connecting block (21) through a hinge, a second hollow block (26) is fixedly connected to the outer side of the door cover plate (22), a threaded rod (27) is connected to the inner side of the second hollow block (26) in a threaded manner, a first hollow block (25) is fixedly connected to the outer side of the vacuum cavity body (1), the threaded rod (27) is connected to the inner side of the first hollow block (25) in a threaded manner, a connecting ring (23) is arranged on the upper side of the vacuum cavity body (1), a sealing ring (24) is fixedly connected to the upper side of the connecting ring (23), and a clamping mechanism is arranged on the lower side of the connecting ring (23);
the clamping mechanism comprises a sliding block (32) fixedly connected to the lower side of a connecting ring (23), a first placing groove (31) is formed in the upper side of a vacuum cavity body (1), the sliding block (32) is slidably connected to the inside of the first placing groove (31), a clamping groove (33) is formed in one side of the sliding block (32), a clamping block (34) is arranged in the clamping groove (33) of the sliding block (32), a second placing groove (35) is formed in the inside of the vacuum cavity body (1), the second placing groove (35) is communicated with the first placing groove (31), the clamping block (34) is slidably connected to the inside of the second placing groove (35), a first spring (36) is fixedly connected to the inside of the vacuum cavity body (1) and is fixedly connected between the first spring (36) and the clamping block (34), and a unclamping assembly is arranged on one side of the clamping block (34).
2. A door valve for sealing a vacuum chamber according to claim 1, wherein: the unclamping assembly comprises a connecting rod (42) fixedly connected to one side of the clamping block (34), a first hollow groove (41) is formed in the outer side of the vacuum cavity body (1), the first hollow groove (41) is communicated with the second placing groove (35), and the connecting rod (42) is slidably connected to the inside of the first hollow groove (41).
3. A door valve for sealing a vacuum chamber according to claim 1, wherein: the vacuum cavity is characterized in that a limiting groove (51) is formed in the vacuum cavity body (1), the limiting groove (51) is communicated with the second placing groove (35), a limiting ring (52) is fixedly connected to the upper side of the clamping block (34), and the limiting ring (52) is slidably connected to the inside of the limiting groove (51).
4. A door valve for sealing a vacuum chamber according to claim 1, wherein: the inside of vacuum cavity body (1) has seted up second hollow groove (61), just second hollow groove (61) are linked together with first standing groove (31), inside fixedly connected with second spring (62) that vacuum cavity body (1) are located second hollow groove (61), the upside of second spring (62) is provided with stripper plate (63), just fixed connection between stripper plate (63) and slider (32).
5. A door valve for sealing a vacuum chamber according to claim 1, wherein: the outside fixedly connected with guide bar (72) of go-between (23), the outside fixedly connected with third hollow piece (71) of vacuum cavity body (1), just guide bar (72) sliding connection is in the inside of third hollow piece (71).
6. A door valve for sealing a vacuum chamber according to claim 2, wherein: one side of the connecting rod (42) is fixedly connected with a fixed block (8), and the diameter of the fixed block (8) is larger than that of the connecting rod (42).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321613427.XU CN220118628U (en) | 2023-06-25 | 2023-06-25 | Door valve for sealing vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321613427.XU CN220118628U (en) | 2023-06-25 | 2023-06-25 | Door valve for sealing vacuum cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220118628U true CN220118628U (en) | 2023-12-01 |
Family
ID=88914620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321613427.XU Active CN220118628U (en) | 2023-06-25 | 2023-06-25 | Door valve for sealing vacuum cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220118628U (en) |
-
2023
- 2023-06-25 CN CN202321613427.XU patent/CN220118628U/en active Active
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