CN220106462U - Swing arm structure with deviation correcting function and die bonding equipment - Google Patents

Abstract

The utility model provides a swing arm structure with a correction function and crystal fixing equipment, wherein the swing arm structure comprises a swing arm rotating shaft, a plurality of elastic swing arms and a plurality of correction mechanisms; the swing arm rotating shaft rotates around the axis of the swing arm rotating shaft, and the axis of the swing arm rotating shaft extends along the up-down direction; each elastic swing arm comprises at least two elastic plates and two connecting pieces; the elastic plates are arranged at intervals along the up-down direction, the end parts of the first ends of the elastic plates are connected to the periphery of the swing arm rotating shaft, and the end part of the second end of at least one elastic plate is connected with a suction nozzle; each deviation correcting mechanism comprises a driving wheel, a driven wheel and a synchronous belt; the driving wheel is rotatably arranged between the first ends of the two elastic plates which are adjacent up and down, the driven wheel is rotatably arranged between the second ends of the two elastic plates, the driven wheel is connected with the suction nozzle, and the synchronous belt is wound around the peripheries of the driving wheel and the driven wheel; the elastic swing arm of the swing arm structure can alternately fix the crystal, and the deviation correcting mechanism can adjust the position of the wafer on the suction nozzle.

Description

Swing arm structure with deviation correcting function and die bonding equipment

Technical Field

The utility model relates to the technical field of die bonding equipment, in particular to a swing arm structure with a correction function and die bonding equipment.

Background

Currently, most die bonding equipment only has one swing arm, and the working process of the swing arm is as follows: the swing arm continuously rotates back and forth, when the swing arm rotates to the crystal feeding platform, the swing arm is pressed down by a motor to absorb a wafer, after crystal taking is completed, the swing arm is lifted up by the motor to rotate back, when the swing arm rotates to the crystal fixing platform (substrate), the swing arm is pressed down by the motor to fix the crystal, and after the crystal fixing is completed, the swing arm is lifted up by the motor to rotate again; therefore, after the crystal is taken or fixed, the swing arm needs to be decelerated and rotated backwards, so that the rotation speed of the swing arm is reduced, and the crystal fixing efficiency is reduced; in addition, the die bonding equipment of the single swing arm generally has no deviation correcting function (the deviation correcting function refers to adjusting the position of the wafer sucked by the suction nozzle on the swing arm before die bonding so as to adapt to the outline of the die bonding position on the die bonding platform), and if the position of the wafer sucked by the suction nozzle is not corrected, the die bonding precision is affected, and the die bonding quality is affected.

Disclosure of Invention

The utility model aims to provide a swing arm structure with a correction function and a die bonding device, wherein a plurality of elastic swing arms alternately perform die bonding along with rotation of a swing arm rotating shaft so as to improve die bonding efficiency, and each elastic swing arm is provided with a correction mechanism for correction so as to improve die bonding precision and further improve die bonding quality.

Therefore, in a first aspect, an embodiment of the present utility model provides a swing arm structure with a correction function, which includes a swing arm rotating shaft, a plurality of elastic swing arms, and a plurality of correction mechanisms; the swing arm rotating shaft rotates around the axis of the swing arm rotating shaft, and the axis of the swing arm rotating shaft extends along the up-down direction; the elastic swing arm is symmetrical about the center of the swing arm rotating shaft; each elastic swing arm comprises at least two elastic plates and two connecting pieces; the elastic plates are arranged at intervals along the up-down direction, the first end of each elastic plate is connected with one of the connecting pieces, the second end of each elastic plate is connected with the other connecting piece, the end parts of the first ends of the elastic plates are connected to the periphery of the swing arm rotating shaft, and the end parts of the second ends of at least one elastic plate are connected with suction nozzles; the deviation correcting mechanism corresponds to the elastic swing arm in number; each deviation correcting mechanism comprises a driving wheel, a driven wheel and a synchronous belt; the driving wheel is rotatably arranged between the first ends of the two elastic plates which are vertically adjacent, the driven wheel is rotatably arranged between the second ends of the two elastic plates, the driven wheel is connected with the suction nozzle, and the synchronous belt is wound around the peripheries of the driving wheel and the driven wheel.

In a second aspect, the present utility model further provides a die bonding apparatus, which includes at least one swing arm structure with a correction function as described in the first aspect.

The utility model provides a swing arm structure with a deviation correcting function and a die bonding device, which have the beneficial effects that compared with the prior art:

the swing arm rotating shaft rotates to drive the plurality of elastic swing arms to rotate so as to alternately absorb the wafer on the wafer supply platform and fix the wafer on the wafer fixing platform, thereby improving the wafer fixing efficiency; and after each elastic swing arm takes the crystal, before die bonding, the driving wheel in the elastic swing arm can rotate, and drive the synchronous belt and the driven wheel to rotate, so as to drive the suction nozzle to rotate, thereby correcting the deviation of the wafer sucked on the suction nozzle, adjusting the position of the wafer sucked on the suction nozzle to adapt to the outline of the die bonding position on the die bonding platform, so as to improve the die bonding precision and further improve the die bonding quality.

The die bonding equipment disclosed by the utility model is applied to at least one swing arm structure with the deviation correcting function, so that the die bonding efficiency and the die bonding precision can be improved.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the present utility model, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art. In addition, in the drawings, like parts are designated with like reference numerals and the drawings are not drawn to actual scale.

FIG. 1 is a schematic diagram of a swing arm structure according to an embodiment of the present utility model;

FIG. 2 is a schematic structural view of the swing arm structure shown in FIG. 1 from another perspective;

FIG. 3 is a schematic structural view of the deviation rectifying mechanism in the swing arm structure shown in FIG. 1;

fig. 4 is a schematic diagram of a positional relationship between the elastic plate and the timing belt of the swing arm structure shown in fig. 1;

reference numerals illustrate:

1. a swing arm rotating shaft; 2. an elastic swing arm; 21. an elastic plate; 22. a connecting piece; 23. a suction nozzle; 3. a deviation correcting mechanism; 31. a driving wheel; 32. driven wheel; 33. a synchronous belt; 34. a deviation rectifying motor; 35. a deviation correcting rotating shaft; 36. a bearing; 37. an air pipe joint; 4. a spindle motor; 5. a mounting base; 6. a pressing mechanism; 61. pressing down the connecting rod; 7. and an abutting plate.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1 to 4, an embodiment of the present utility model proposes, in a first aspect, a swing arm structure having a deviation rectifying function, which includes a swing arm rotating shaft 1, a plurality of elastic swing arms 2, and a plurality of deviation rectifying mechanisms 3; the swing arm rotating shaft 1 rotates around the axis thereof, and the axis of the swing arm rotating shaft 1 extends along the up-down direction; the elastic swing arm 2 is centrally symmetrical about the swing arm rotating shaft 1; each elastic swing arm 2 comprises at least two elastic plates 21 and two connecting pieces 22; the elastic plates 21 are arranged at intervals along the up-down direction, the first end of each elastic plate 21 is connected with one of the connecting pieces 22, the second end of each elastic plate 21 is connected with the other connecting piece 22, the end part of the first end of each elastic plate 21 is connected with the periphery of the swing arm rotating shaft 1, and the end part of the second end of at least one elastic plate 21 is connected with a suction nozzle 23; the deviation correcting mechanism 3 corresponds to the elastic swing arm 2 in number; each deviation correcting mechanism 3 comprises a driving wheel 31, a driven wheel 32 and a synchronous belt 33; the driving wheel 31 is rotatably disposed between the first ends of two adjacent elastic plates 21, the driven wheel 32 is rotatably disposed between the second ends of the two elastic plates 21, the driven wheel 32 is connected to the suction nozzle 23, and the synchronous belt 33 is wound around the peripheries of the driving wheel 31 and the driven wheel 32.

Based on the above technical scheme, the swing arm rotating shaft 1 rotates to drive the plurality of elastic swing arms 2 to rotate so as to alternately absorb the wafer on the wafer supply platform and fix the wafer on the wafer fixing platform, thereby improving the wafer fixing efficiency, and the plurality of elastic swing arms 2 are symmetrical about the center of the swing arm rotating shaft 1, so that the swing arm rotating shaft 1 can continuously rotate along one direction without reducing the speed, namely the elastic swing arms 2 can not reduce the speed, thereby improving the wafer fixing efficiency; and after each elastic swing arm 2 takes the crystal, before the crystal is fixed, the driving wheel 31 in the elastic swing arm 2 can rotate and drive the synchronous belt 33 and the driven wheel 32 to rotate so as to drive the suction nozzle 23 to rotate, thereby correcting the deviation of the wafer sucked on the suction nozzle 23, adjusting the position of the wafer sucked on the suction nozzle 23 to adapt to the outline of the crystal fixing position on the crystal fixing platform so as to improve the crystal fixing precision and further improve the crystal fixing quality.

The correction mechanism 3 and the elastic swing arms 2 are corresponding in number, and the driving wheel 31, the synchronous belt 33 and the driven wheel 32 of one correction mechanism 3 are correspondingly arranged in one elastic swing arm 2 (between two elastic plates 21 which are adjacent up and down), so that a plurality of elastic swing arms 2 and parts of the correction mechanism 3 on the elastic swing arms are centrosymmetric about the swing arm rotating shaft 1, the force born by the swing arm rotating shaft 1 is relatively balanced, and the rotating force of the swing arm rotating shaft 1 can be well controlled when crystal taking or crystal fixing is carried out, and the rotating acceleration/deceleration of the swing arm rotating shaft 1 can be well controlled.

However, the deviation correcting mechanism 3 arranged on the swing arm rotating shaft 1 increases the burden of a motor for driving the swing arm rotating shaft 1 to rotate, so that the motor is excessively fast in strain, and in order to lighten the burden of the motor, the structure of the elastic swing arm 2 is optimized; specifically, the elastic swing arm 2 includes at least two elastic plates 21 and two connecting pieces 22, the elastic plates 21 include metal elastic plates 21 and plastic elastic plates 21, and generally light metal or high polymer plastic is selected, and the elastic swing arm 2 is light and fatigue-resistant, and therefore the weight of the elastic swing arm 2 is light, and the burden of a motor is reduced.

In addition, a plurality of elastic swing arms 2 are arranged on the swing arm rotating shaft 1, compared with the die bonding equipment with a single swing arm structure, the rotating speed of the swing arm rotating shaft 1 can be slightly lower and can be 7 times or half of the rotating shaft rotating speed of the die bonding equipment with the single swing arm structure, but the die bonding efficiency of the plurality of elastic swing arms 2 on the swing arm rotating shaft 1 is higher than that of the die bonding equipment with the single swing arm structure; in some embodiments, it is preferable to provide two elastic swing arms 2 on the swing arm shaft 1.

Specifically, the deviation rectifying mechanism 3 further includes a deviation rectifying motor 34, the driving wheel 31 is disposed inside the connecting piece 22 located at the first end of the elastic plate 21, the deviation rectifying motor 34 is disposed above the elastic plate 21 with the highest position, and a power output end of the deviation rectifying motor 34 extends downward to be connected with the driving wheel 31; the connecting piece 22 at the first end of the elastic plate 21 is also connected to the periphery of the swing arm rotating shaft 1, so that the gravity of the swing arm rotating shaft 1, the elastic swing arm 2 and the deviation correcting mechanism 3 is concentrated and distributed at a position close to the swing arm rotating shaft 1, thereby reducing the rotating torque of the swing arm rotating shaft 1 and easily driving the swing arm rotating shaft 1 to rotate and stopping the rotation of the swing arm rotating shaft 1; in addition, the stress on the swing arm rotating shaft 1 is relatively balanced, acceleration and deceleration are easy to control, the length of the elastic swing arm 2 (the elastic plate 21) can be prolonged, and the prolonged elastic swing arm 2 can be used for die bonding of some large-size substrates.

Further, the deviation rectifying mechanism 3 further includes a deviation rectifying rotating shaft 35, the deviation rectifying rotating shaft 35 penetrates through the second end of the elastic plate 21, a bearing 36 is connected between the deviation rectifying rotating shaft 35 and the elastic plate 21, the driven wheel 32 is sleeved on the periphery of the deviation rectifying rotating shaft 35, the lower end of the deviation rectifying rotating shaft 35 is connected with the suction nozzle 23, and the rotation of the driven wheel 32 can drive the deviation rectifying rotating shaft 35 to rotate, so as to drive the suction nozzle 23 to rotate; in addition, in order to conveniently control the rotation angle of the suction nozzle 23, the axis of the deviation correcting rotary shaft 35 is collinear with the center line of the suction nozzle 23.

The inside of the deviation correcting rotating shaft 35 is communicated, the lower end of the deviation correcting rotating shaft 35 is communicated with the inside of the suction nozzle 23, the upper end of the deviation correcting rotating shaft is connected with an air pipe joint 37, the air pipe joint 37 is configured to be communicated with a negative pressure device, and the negative pressure device can form negative pressure at the lower end position of the suction nozzle 23 through the air pipe joint 37 and the deviation correcting rotating shaft 35, so that the suction nozzle 23 can suck wafers, and can drive the wafers to rotate and carry out die bonding; the air pipe connector 37 is pressed on the upper end of the deviation correcting rotating shaft 35 through a gland, and sealing elements which can be silica gel pieces, sponge pieces, soft plastic pieces and the like are arranged between the air pipe connector 37 and the deviation correcting rotating shaft 35 as well as between the deviation correcting rotating shaft 35 and the suction nozzle 23 for sealing.

The swing arm structure further comprises a rotating shaft motor 4 and an installation seat 5, wherein the swing arm rotating shaft 1 is rotatably arranged at the bottom of the installation seat 5, the rotating shaft motor 4 is arranged at the upper side of the installation seat 5, the power output end of the rotating shaft motor 4 extends downwards and is connected with the upper end of the swing arm rotating shaft 1, and the rotating shaft motor 4 can drive the swing arm rotating shaft 1 to rotate so as to take out crystals or fix crystals; in the utility model, the rotating shaft motor 4 does not bear the gravity of the swing arm rotating shaft 1 and parts thereon, and only provides torque to drive the swing arm rotating shaft 1 to rotate, so that the strain suffered by the rotating shaft motor 4 is not too high, and the swing arm rotating shaft motor 4 can be put into die bonding work for a long time.

The swing arm structure further comprises a plurality of pushing mechanisms 6, the pushing mechanisms 6 correspond to the elastic swing arms 2 in number, the pushing mechanisms 6 are centrally symmetrical about the swing arm rotating shafts 1, the pushing mechanisms 6 comprise pushing connecting rods 61, the pushing connecting rods 61 are slidably arranged on the mounting seats 5 along the up-down direction, the lower ends of the pushing connecting rods 61 are abutted against the second ends of the elastic plates 21 with the highest positions, and the pushing connecting rods 61 slide downwards and press the elastic plates 21 so as to enable the elastic plates to move downwards and take or fix crystals; when the crystal is taken or fixed, the displacement of the downward sliding or upward moving of the downward pressing connecting rod 61 is only a few micrometers, and the utility model adopts a motor plus a cam or a screw nut for driving or directly adopts a linear motor for driving.

The pushing mechanism 6 is arranged on the mounting seat 5 and cannot rotate along with the swing arm rotating shaft 1, so that the burden of the rotating shaft motor 4 can be reduced; after the pressing link 61 slides down and presses the elastic plate 21, the pressing link 61 moves up, and the second end of the elastic plate 21 rebounds upward so that it performs the crystal picking or crystal fixing again.

The first end of the elastic plate 21 is fixedly connected with the periphery of the swing arm rotating shaft 1, and the second end of the elastic plate can be tilted upwards; the swing arm structure further comprises a plurality of abutting plates 7, the abutting plates 7 are arranged above the elastic swing arms 2, the abutting plates 7 are in one-to-one correspondence with the elastic swing arms 2, the abutting plates 7 are in central symmetry with the swing arm rotating shaft 1, the first ends of the abutting plates 7 are connected to the periphery of the swing arm rotating shaft 1, the lower sides of the second ends are in abutting connection with the upper sides of the second ends of the elastic swing arms 2, leveling screws are arranged at the second ends of the abutting plates 7, the lower ends of the leveling screws are in abutting connection with the second ends of the elastic plates 21 with the highest positions, and the leveling screws are used for leveling the levelness of the elastic plates 21 so as to conveniently control the downward pressing distance of the second ends of the elastic plates 21 and ensure die bonding precision.

The embodiment of the utility model also provides a die bonding device in a second aspect, which comprises at least one swing arm structure with a deviation rectifying function as described in the first aspect, wherein the die bonding device has higher die bonding efficiency and die bonding precision compared with the die bonding device with a single swing arm structure.

It should be noted that references in the specification to "one embodiment," "an example embodiment," "some embodiments," etc., indicate that the embodiment described may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is submitted that it is within the knowledge of one skilled in the art to effect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.

It should be readily understood that the terms "on … …", "above … …" and "above … …" in this disclosure should be interpreted in the broadest sense such that "on … …" means not only "directly on something", but also includes "on something" with intermediate features or layers therebetween, and "above … …" or "above … …" includes not only the meaning "on something" or "above" but also the meaning "above something" or "above" without intermediate features or layers therebetween (i.e., directly on something).

Further, spatially relative terms, such as "below," "beneath," "above," "over," and the like, may be used herein for ease of description to describe one element or feature's relationship to another element or feature as illustrated. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein interpreted accordingly.

It should be noted that in this document, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.

Claims (10)

1. The swing arm structure with the deviation correcting function is characterized by comprising a swing arm rotating shaft, a plurality of elastic swing arms and a plurality of deviation correcting mechanisms;

the swing arm rotating shaft rotates around the axis of the swing arm rotating shaft, and the axis of the swing arm rotating shaft extends along the up-down direction;

the elastic swing arm is symmetrical about the center of the swing arm rotating shaft;

each elastic swing arm comprises at least two elastic plates and two connecting pieces;

the elastic plates are arranged at intervals along the up-down direction, the first end of each elastic plate is connected with one of the connecting pieces, the second end of each elastic plate is connected with the other connecting piece, the end parts of the first ends of the elastic plates are connected to the periphery of the swing arm rotating shaft, and the end parts of the second ends of at least one elastic plate are connected with suction nozzles;

the deviation correcting mechanism corresponds to the elastic swing arm in number;

each deviation correcting mechanism comprises a driving wheel, a driven wheel and a synchronous belt;

the driving wheel is rotatably arranged between the first ends of the two elastic plates which are vertically adjacent, the driven wheel is rotatably arranged between the second ends of the two elastic plates, the driven wheel is connected with the suction nozzle, and the synchronous belt is wound around the peripheries of the driving wheel and the driven wheel.

2. The swing arm structure with a deviation rectifying function according to claim 1, wherein the deviation rectifying mechanism further comprises a deviation rectifying motor, the driving wheel is arranged inside the connecting piece located at the first end of the elastic plate, the deviation rectifying motor is arranged above the elastic plate with the highest position, and a power output end of the deviation rectifying motor extends downwards to be connected with the driving wheel.

3. The swing arm structure with deviation correcting function according to claim 2, wherein the connecting piece located at the first end of the elastic plate is also connected to the periphery of the swing arm rotating shaft.

4. The swing arm structure with a deviation rectifying function according to claim 1, wherein the deviation rectifying mechanism further comprises a deviation rectifying rotating shaft;

the deviation correcting rotating shaft penetrates through the second end of the elastic plate, and a bearing is connected between the deviation correcting rotating shaft and the elastic plate;

the driven wheel is sleeved on the periphery of the deviation correcting rotating shaft;

the lower end of the deviation correcting rotating shaft is connected with the suction nozzle.

5. The swing arm structure with deviation correcting function according to claim 4, wherein the inside of the deviation correcting rotating shaft is communicated, the lower end of the deviation correcting rotating shaft is communicated with the inside of the suction nozzle, the upper end of the deviation correcting rotating shaft is connected with an air pipe joint, and the air pipe joint is configured to be communicated with a negative pressure device.

6. The swing arm structure with deviation rectifying function according to claim 1, further comprising a rotating shaft motor and a mounting seat;

the swing arm pivot rotate set up in the bottom of mount pad, the pivot motor set up in the upside of mount pad, just the power take off end of pivot motor stretches out downwards, and with the upper end of swing arm pivot is connected.

7. The swing arm structure with deviation correcting function according to claim 6, further comprising a plurality of pressing mechanisms corresponding in number to the elastic swing arms;

the pressing mechanism comprises a pressing connecting rod, the pressing connecting rod is arranged on the mounting seat in a sliding manner along the up-down direction, and the lower end of the pressing connecting rod is abutted to the second end of the elastic plate with the highest position.

8. The swing arm structure with deviation correcting function according to claim 7, further comprising a plurality of abutting plates, wherein the abutting plates are arranged above the elastic swing arms, the abutting plates are in one-to-one correspondence with the elastic swing arms, and the first ends of the abutting plates are connected to the periphery of the swing arm rotating shaft, and the lower sides of the second ends of the abutting plates are abutted against the upper sides of the second ends of the elastic swing arms.

9. The swing arm structure with deviation rectifying function according to claim 1, wherein the elastic plate comprises a metal elastic plate and a plastic elastic plate.

10. A die bonding apparatus comprising at least one swing arm structure having a rectification function as claimed in any one of claims 1 to 9.