CN220092384U

CN220092384U - Dry cleaning device for graphite boat

Info

Publication number: CN220092384U
Application number: CN202321276769.7U
Authority: CN
Inventors: 张威; 李斯; 彭宜昌; 王成; 许烁烁
Original assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Current assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Priority date: 2023-05-24
Filing date: 2023-05-24
Publication date: 2023-11-28
Anticipated expiration: 2033-05-24

Abstract

The utility model discloses a dry cleaning device for a graphite boat, which comprises a vacuum cavity, a first electrode plate and a second electrode plate, wherein the first electrode plate and the second electrode plate are arranged in the vacuum cavity, a placing space for placing the graphite boat is formed between the first electrode plate and the second electrode plate, the first electrode plate and the second electrode plate are used for ionizing process gas between the first electrode plate and the second electrode plate in an electrified state, and an air inlet and an air outlet are formed in the vacuum cavity. The setting mode of the double electrode plates can ionize process gas to the maximum extent by adjusting the voltage, current and power of the two electrode plates, enhance the energy and frequency of plasma directing to bombard the surface of the graphite boat, effectively improve the utilization rate of etching gas and the etching cleaning rate of the graphite boat, further shorten the cleaning time, overcome the limitation caused by the space between the two electrode plates or the size of a vacuum cavity, and the setting of the double electrode plates ensures that the discharge is more uniform, the coverage is wide and the cleaning uniformity is better.

Description

Dry cleaning device for graphite boat

Technical Field

The utility model relates to the technical field of graphite boat cleaning, in particular to a dry graphite boat cleaning device.

Background

The graphite boat is a carrier for plating the antireflection film on the solar cell, and in the production process, as the graphite boat is repeatedly used, the surface of the graphite boat is continuously plated with a silicon nitride film, and when the film grows to a certain thickness, the film plating process effect of the cell is affected, and the graphite boat needs to be taken off line for cleaning and maintenance. The cleaning mode mainly comprises wet cleaning and dry cleaning, wherein the wet cleaning has low cleaning efficiency and long time consumption, high-concentration HF/HCl is required to be used, potential safety hazards exist, and the waste liquid treatment cost is increased. In the mainstream dry cleaning graphite boat technology, a mode that a radio frequency power supply is connected with discharge in a graphite boat reaction cavity is adopted, the graphite boat is not easy to isolate from the inner wall of the cavity in insulation treatment, insulation materials are easy to strike fire and break through at an insulation splicing gap, and etching gas NF is etched ₃ Adequate ionization is not obtained; in addition, the voltage of the two ends of the discharge is regulated by changing the conditions in the reaction vacuum chamber so as to enhance the ionization bombardment frequency of the gas, and the method is limited to a great extent, so that the optimal effect of the dry etching process cannot be exerted, and the ideal cleaning purpose cannot be achieved. Two dry cleaning machine schemes for graphite boats are disclosed in the chinese patent application No. CN 201120465184.0: scheme one, firstly, using radio frequency power supply to ionize NF ₃ The gas is introduced from the gas inlet of the reaction cavity of the graphite boat to generate active plasma, the plasma and the silicon nitride film layer on the surface of the graphite boat are subjected to chemical reaction to form volatilizable gas, the volatilizable gas is removed, the outlet of the reaction cavity is connected with a vacuum molecular pump, the requirement of the vacuum degree of the reaction cavity is maintained, and the reaction waste gas is pumped out to achieve the aim of cleaning. The second scheme is different from the first scheme in that the radio frequency power supply is only arranged outside the cavity, and the radio frequency power supply leading-out electrode is connected with the graphite boat in the reaction cavity. Both schemes have significant drawbacks: in the scheme that a radio frequency power supply is arranged in a mode of discharging in a gas path pipeline at the front end of a reaction cavity, ionized plasma is introduced into the cavityCan be consumed on the wall of the reaction cavity, the rest part flows in a long distance without a designated direction, the energy loss of charged particles in the plasma is serious, a small number of the charged particles react with a silicon nitride film layer on the surface of the graphite boat, the graphite boat is easy to etch slowly, the etching uniformity is poor, and a large amount of NF needs to be introduced ₃ The gas and the long enough cleaning time can not ensure the cleaning effect; in the second scheme, the graphite boat is connected with the radio frequency power supply, compared with the first scheme, the bombardment quantity of plasmas to the boat body can be increased, but the graphite boat which is possibly connected with the radio frequency power supply is ignited with the inner wall of the reaction cavity at the position close to the reaction cavity, so that uniform etching cleaning cannot be ensured, and even the graphite boat is damaged due to the ignition. The two schemes are not suitable for simultaneously cleaning two or more graphite boats in a large reaction cavity, and have no obvious advantage compared with wet cleaning.

Along with the increasing market demand of solar cells, the dry etching cleaning equipment with more stable performance and better effect is required in the market by considering the cost of graphite boat cleaning materials, the cost of terminal pollution treatment, the cost of cleaning time and the like. In the existing dry cleaning technology, only a radio frequency power supply is loaded as a discharge form of a unique ionization driving source, and the limitation of etching rate and uniformity caused by the space size, the structural form and the like of a reaction cavity cannot be well solved. The key points of breaking through the technical difficulty of dry cleaning of the graphite boat are to strengthen the ionization rate of the process gas and the directional high-efficiency bombardment of the plasma on the surface of the graphite boat so as to accelerate the chemical reaction.

Disclosure of Invention

The utility model aims to solve the technical problem of overcoming the defects of the prior art and providing a graphite boat dry cleaning device with high cleaning efficiency and good cleaning uniformity.

In order to solve the technical problems, the utility model adopts the following technical scheme:

the utility model provides a graphite boat dry cleaning device, includes vacuum chamber and locates first electrode plate and the second electrode plate in the vacuum chamber, form the space of placing that is used for placing the graphite boat between first electrode plate and the second electrode plate, first electrode plate and second electrode plate are used for ionizing the process gas between the two under the circular telegram state, be equipped with air inlet and gas outlet on the vacuum chamber.

In the graphite boat dry cleaning device, preferably, the first electrode plate and the second electrode plate are respectively installed on two opposite inner walls of the vacuum chamber, and an insulating pad is arranged between the first electrode plate and the inner walls of the vacuum chamber and between the second electrode plate and the inner walls of the vacuum chamber.

In the graphite boat dry cleaning device, preferably, the first electrode plate and the second electrode plate are respectively located at the top and the bottom of the vacuum chamber.

In the graphite boat dry cleaning device, preferably, an installation opening is formed in the top wall of the vacuum chamber, the first electrode plate is embedded in the installation opening, and the second electrode plate is located on the bottom wall of the vacuum chamber.

In the graphite boat dry cleaning device, preferably, the insulating pad comprises a first insulating pad and a second insulating pad, and the first insulating pad is positioned between the first electrode plate and the mounting port; the second insulating pad is positioned between the second electrode plate and the bottom wall of the vacuum cavity.

In the graphite boat dry cleaning device, preferably, the second electrode plate is circumferentially provided with an insulating strip.

In the graphite boat dry cleaning device, preferably, the first insulating pad, the second insulating pad and the insulating strip are made of insulating materials, and the insulating materials are at least one of alumina, aluminum nitride, polytetrafluoroethylene, quartz, silicon carbide, silicon nitride and yttrium oxide.

In the above graphite boat dry cleaning device, preferably, an insulating support member for supporting the graphite boat is disposed in the placement space.

According to the graphite boat dry cleaning device, preferably, the insulating support piece comprises a metal support block, an insulating support block and a metal support column, wherein the metal support column is located on the second electrode plate, the insulating support block is located on the metal support column, and the metal support block is located on the insulating support block.

In the graphite boat dry cleaning device, preferably, the insulating support member is of a fully insulating structure.

In the graphite boat dry cleaning device, preferably, the insulating support member is of a fully insulating integrated structure.

In the graphite boat dry cleaning device, preferably, the insulating support member is made of an insulating material, and the insulating material is at least one of alumina, aluminum nitride, polytetrafluoroethylene, quartz, silicon carbide, silicon nitride and yttrium oxide.

In the graphite boat dry cleaning device, preferably, the insulating support member is of an integral structure.

In the above graphite boat dry cleaning device, preferably, the insulating support member is used for supporting boat feet or boat pages of the graphite boat.

According to the graphite boat dry cleaning device, preferably, the vacuum cavity is further internally provided with the flow equalizing pipe, the air inlet end of the flow equalizing pipe is connected with the air inlet, and the flow equalizing pipe is provided with a plurality of air outlet holes.

According to the graphite boat dry cleaning device, preferably, the vacuum cavity is further internally provided with the flow equalizing plate, and the flow equalizing plate is arranged close to the air inlet.

In the graphite boat dry cleaning device, preferably, the air inlet is located at one end of the vacuum chamber, and the air outlet is located at the other end of the vacuum chamber.

In the graphite boat dry cleaning device, preferably, the air inlet is positioned at the top or the bottom of the vacuum cavity.

In the graphite boat dry cleaning device, preferably, the plurality of air inlets are provided, and the plurality of air inlets are arranged on at least one of the top wall, the bottom wall and the side wall of the vacuum chamber.

In the graphite boat dry cleaning device, preferably, the first electrode plate and the second electrode plate are respectively connected with an external power source, and the external power source comprises a first electrode power source for connecting the first electrode plate and a second electrode power source for connecting the second electrode plate.

In the graphite boat dry cleaning device, preferably, the first electrode power supply is one of a radio frequency power supply, a high frequency power supply and a direct current power supply; the second electrode power supply is one of a radio frequency power supply, a high-frequency power supply and a direct current power supply.

In the graphite boat dry cleaning device, preferably, a first electrode feed-in connection point for connecting with a first electrode power supply is arranged at the center of the first electrode plate, and a second electrode feed-in connection point for connecting with a second electrode power supply is arranged at the center of the second electrode plate.

Preferably, the graphite boat dry cleaning device is characterized in that the process gas is NF ₃ 。

In the graphite boat dry cleaning device, preferably, the air outlet is connected with a vacuum pump, and the vacuum pump is a vacuum molecular pump.

Compared with the prior art, the utility model has the advantages that:

(1) The graphite boat dry cleaning device is characterized in that a first electrode plate and a second electrode plate are arranged in a vacuum cavity, a placing space for placing a graphite boat is formed between the first electrode plate and the second electrode plate, process gas between the first electrode plate and the second electrode plate is ionized into plasma, and the plasma and a silicon nitride film layer on the surface of the graphite boat are subjected to chemical reaction to form volatilizable gas so as to achieve the cleaning purpose. The arrangement mode of the double electrode plates can ionize process gas to the maximum extent by adjusting the voltage, current and power of the first electrode plate and the second electrode plate, enhance the energy and frequency of plasma directed to bombard the surface of the graphite boat, effectively improve the utilization rate of etching gas and the etching cleaning rate of the graphite boat, and further shorten the cleaning time, thereby overcoming the limitation caused by the distance between the two electrode plates or the size of a vacuum cavity. Because the distance between the polar plates is too small, the energy of the plasma bombarding the graphite boat is too large, and the damage to the graphite boat body is easy to cause; otherwise, the distance between the polar plates is too large, the energy of the plasma bombarding the graphite boat is too small, the cleaning effect is poor, and the time is long. The too large or too small cavity can influence the uniformity of process gas distribution, the plasma energy density and the like, so as to influence the cleaning efficiency and the cleaning uniformity.

(2) Compared with the prior art, the single-radio-frequency discharge type electric discharge device has the advantages of more uniform discharge through the first electrode plate and the second electrode plate, wide coverage and better cleaning uniformity. The utility model solves the limitation that the existing single radio frequency dry cleaning graphite boat equipment adjusts the bias voltage at two ends of the vacuum cavity by changing the conditions in the vacuum cavity, can be compatible to clean graphite boats of different sizes, and the size of the vacuum cavity and the size of the electrode plates can be designed according to actual requirements so as to realize batch cleaning of the graphite boat, thereby improving the cleaning efficiency by times and really highlighting the advantages of cleaning the graphite boat by dry etching.

Drawings

FIG. 1 is a schematic cross-sectional view of a dry cleaning apparatus for graphite boats according to example 1 of the present utility model.

FIG. 2 is a schematic cross-sectional view of a dry cleaning apparatus for graphite boats according to example 2 of the present utility model.

FIG. 3 is a schematic cross-sectional view of a dry cleaning apparatus for graphite boats in example 3 of the present utility model.

FIG. 4 is a schematic cross-sectional view of a dry cleaning apparatus for graphite boats in example 4 of the present utility model.

FIG. 5 is a schematic longitudinal sectional view of a dry cleaning apparatus for graphite boats in example 4 of the present utility model.

FIG. 6 is a schematic longitudinal sectional view of a dry cleaning apparatus for graphite boats in example 5 of the present utility model.

Fig. 7 is a schematic structural view of a flow equalizing pipe in embodiment 5 of the present utility model.

FIG. 8 is a schematic longitudinal sectional view of a dry cleaning apparatus for graphite boats in example 6 of the present utility model.

FIG. 9 is a schematic longitudinal sectional view of a dry cleaning apparatus for graphite boats in example 6 of the present utility model.

FIG. 10 is a schematic longitudinal sectional view of a dry cleaning apparatus for graphite boats according to example 7 of the present utility model.

FIG. 11 is a schematic longitudinal sectional view of a dry cleaning apparatus for graphite boats in example 8 of the present utility model.

FIG. 12 is a schematic longitudinal sectional view of a dry cleaning apparatus for graphite boats in example 9 of the present utility model.

Legend description: 1. a vacuum chamber; 2. a first electrode plate; 21. a first electrode feed-in connection point; 3. a second electrode plate; 31. a second electrode feed-in connection point; 4. an insulating pad; 41. a first insulating pad; 42. a second insulating pad; 43. an insulating strip; 5. an insulating support; 51. a metal support block; 52. an insulating support block; 53. a metal support column; 6. an air inlet; 7. an air outlet; 8. a graphite boat; 81. boat feet; 82. boat pages; 9. a flow equalizing pipe; 91. an air inlet end; 92. an air outlet hole; 10. and a flow equalizing plate.

Detailed Description

As used in this disclosure and in the claims, the terms "a," "an," "the," and/or "the" are not specific to a singular, but may include a plurality, unless the context clearly dictates otherwise. The terms "first," "second," and the like, as used in this disclosure, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Likewise, the word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect.

The utility model is described in further detail below with reference to the drawings and specific examples of the specification.

Example 1:

fig. 1 shows a specific embodiment of a graphite boat dry cleaning device of the present utility model, which comprises a vacuum chamber 1, a first electrode plate 2 and a second electrode plate 3 arranged in the vacuum chamber 1, a placing space for placing a graphite boat 8 is formed between the first electrode plate 2 and the second electrode plate 3, the first electrode plate 2 and the second electrode plate 3 are used for ionizing process gas between the first electrode plate and the second electrode plate in an electrified state, and an air inlet 6 and an air outlet 7 are arranged on the vacuum chamber 1. The gas inlet 6 is used for introducing a process gas such as NF ₃ And the air outlet 7 is connected withA vacuum pump, preferably a vacuum molecular pump.

The working process of the graphite boat dry cleaning device is as follows: under vacuum, a process gas such as NF ₃ The method comprises the steps of leading a vacuum cavity 1 from an air inlet 6, starting a power supply connected with the two electrode plates, enabling glow discharge to be generated between a first electrode plate 2 and a second electrode plate 3, ionizing process gas into active plasma, enabling the plasma to bombard the surface of a graphite boat 8 in the vacuum cavity 1 by self-biasing, and increasing potential difference between the first electrode power supply and the second electrode power supply by adjusting voltage, current and power of the first electrode power supply and the second electrode power supply, so that the plasma obtains enough electric potential energy, the bombardment energy of the plasma is enhanced, a film coating layer on the surface of the graphite boat 8 is fully bombarded, and volatilizable waste gas generated by reaction of the plasma is pumped out of the vacuum cavity 1 through a vacuum molecular pump so as to achieve the aim of cleaning the graphite boat 8.

The arrangement mode of the double electrode plates in the graphite boat dry cleaning device of the embodiment can ionize process gas to the maximum extent by adjusting the voltage, current and power of the first electrode plate 2 and the second electrode plate 3, enhance the energy and frequency of the plasma to bombard the surface of the graphite boat 8, effectively improve the utilization rate of etching gas and the etching cleaning rate of the graphite boat 8, and further shorten the cleaning time, thereby overcoming the limitation caused by the distance between the two electrode plates or the size of a vacuum cavity; compared with single-radio-frequency discharge, the discharge through the first electrode plate and the second electrode plate is more uniform, the coverage area is wide, and the cleaning uniformity is better. The embodiment solves the limitation that the existing single-radio-frequency dry cleaning graphite boat 8 equipment adjusts the bias voltage at two ends of the vacuum cavity only by changing the conditions in the vacuum cavity, can be used for compatibly cleaning graphite boats 8 with different sizes, and the sizes of the vacuum cavity 1 and the electrode plates can be designed according to actual requirements so as to realize batch cleaning of the graphite boats 8, so that the cleaning efficiency is improved in a multiplied way, and the advantages of cleaning the graphite boats 8 by dry etching are truly highlighted.

In this embodiment, the first electrode plate 2 and the second electrode plate 3 are respectively installed on two opposite inner walls of the vacuum chamber 1, and an insulating pad 4 is disposed between the first electrode plate 2 and the second electrode plate 3 and the inner wall of the vacuum chamber 1. Therefore, the occurrence of cavity ignition can be avoided, unstable current, voltage and power are caused, the speed and uniformity of gas ionization are affected, the cleaning effect is further affected, the electrode plates are damaged, and the service life of the electrode plates is shortened.

In this embodiment, the first electrode plate 2 and the second electrode plate 3 are respectively located at the top and bottom of the vacuum chamber 1. The graphite boat 8 is normally placed forward under the limitation of gravity and the strength of the boat page 82 of the graphite boat 8, so that the gap between the boat page 82 of the graphite boat 8 is upward, and the graphite boat 8 is mainly cleaned by cleaning the boat page 82.

In this embodiment, the top wall of the vacuum chamber 1 is provided with an installation opening, the first electrode plate 2 is embedded in the installation opening, and the second electrode plate 3 is located on the bottom wall of the vacuum chamber 1. The cover plate structure and the installation mode of the first electrode plate 2 provide convenience for insulation treatment between the electrode plate and the cavity wall while considering installation firmness and convenience.

In the present embodiment, the insulating pad 4 includes a first insulating pad 41 and a second insulating pad 42, the first insulating pad 41 being located between the first electrode plate 2 and the mounting port; the second insulating pad 42 is located between the second electrode plate 3 and the bottom wall of the vacuum chamber 1. Thereby, the first electrode plate 2 is separated from the cavity wall of the vacuum cavity 1 through the first insulating pad 41, and the second electrode plate 3 is separated from the cavity wall of the vacuum cavity 1 through the second insulating pad 42, so that the cavity ignition is avoided.

In this embodiment, the first insulating pad 41 and the second insulating pad 42 are made of an insulating material, and the insulating material is at least one of alumina, aluminum nitride, polytetrafluoroethylene, quartz, silicon carbide, silicon nitride, and yttrium oxide. The insulating material adopted in the embodiment has good insulativity, corrosion resistance, high temperature resistance, high hardness and wear resistance, and can be well adapted to complex environments such as strong corrosiveness in a cleaning cavity on the premise of solving the problems of good insulativity and high strength of the insulating pad 4.

In this embodiment, be equipped with in the space of placing and be used for supporting graphite boat 8's insulating support piece 5 for graphite boat 8 is insulated with the cavity wall of electrode plate, vacuum chamber 1 when wasing, avoids taking place the intracavity and fires, damages graphite boat 8, the protection boat body that can be better.

Specifically, the insulating support 5 is used to support legs 81 of the graphite boat 8. The insulating support 5 comprises a metal support block 51, an insulating support block 52 and a metal support column 53, wherein the metal support column 53 is positioned on the second electrode plate 3, the insulating support block 52 is positioned on the metal support column 53, the metal support block 51 is positioned on the insulating support block 52, multiple groups of insulating support 5 are adopted for multi-point support, the support position such as a boat angle 81 or a boat page 82 can be flexibly adjusted, the blocking of a support structure to a graphite boat 8 boat body is reduced as far as possible, and the graphite boat 8 boat body is fully contacted with ionized process gas. The supporting structure formed by combining the metal piece and the insulating piece has better supporting strength.

In the embodiment, the graphite boat 8 is completely insulated from the vacuum cavity 1 by the insulating support piece 5, and the two electrode plates are respectively separated from the cavity wall of the vacuum cavity 1 by the first insulating pad 41 and the second insulating pad 42, so that the problems of uneven etching and cleaning and even damage to the boat body caused by sparking between the electrode plates and the cavity wall of the vacuum cavity 1 and between the electrode plates and the graphite boat 8 are avoided, and the service life of the graphite boat 8 is prolonged.

In this embodiment, the first electrode plate 2 and the second electrode plate 3 are respectively connected to an external power source including a first electrode power source for connecting the first electrode plate 2 and a second electrode power source for connecting the second electrode plate 3.

In this embodiment, the first electrode power supply is a radio frequency power supply, and the second electrode power supply is a direct current power supply. The radio frequency power supply ionizes the process gas into plasma, the direct current power supply plays a role in biasing, and the difference of potential energy between the two polar plates is adjusted to accelerate the bombardment of the plasma, accelerate the process, shorten the time and enhance the cleaning effect.

In this embodiment, the center of the first electrode plate 2 is provided with a first electrode feed-in connection point 21 for connecting to a first electrode power supply, and the center of the second electrode plate 3 is provided with a second electrode feed-in connection point 31 for connecting to a second electrode power supply. The electrode feed-in connection points of the two electrode plates are positioned at the center symmetry point of the electrode plates, so that uniform discharge can be well ensured.

In this embodiment, the first electrode feed-in connection point 21 is provided with an upward protruding connection portion, and the second electrode feed-in connection point 31 is provided with an upward protruding connection portion, and the two connection portions are respectively connected with the first electrode power supply and the second electrode power supply. When the connection part corresponding to the second electrode feed-in connection point 31 passes through the second insulation pad 42 and the bottom wall of the vacuum cavity 1 and is connected with the second electrode power supply, the insulation material is wrapped at the position that the connection part passes through the bottom wall of the vacuum cavity 1. Of course, in other embodiments, the connection of the electrode feed connection point to the electrode power supply may be accomplished using wires with an insulating outer layer.

Example 2:

as shown in fig. 2, as a preferred embodiment, the structure of the present embodiment is substantially the same as that of embodiment 1, and also includes a vacuum chamber 1, and a first electrode plate 2 and a second electrode plate 3 provided in the vacuum chamber 1, a placement space for placing a graphite boat 8 is formed between the first electrode plate 2 and the second electrode plate 3, the first electrode plate 2 and the second electrode plate 3 are used for ionizing a process gas therebetween in an energized state, and an air inlet 6 and an air outlet 7 are provided in the vacuum chamber 1. The gas inlet 6 is used for introducing a process gas such as NF ₃ And the like, the air outlet 7 is connected with a vacuum pump, preferably a vacuum molecular pump.

The main difference lies in that the insulating support piece 5 in this embodiment is designed as an integral structure, and the insulating performance of the graphite boat 8 and the second electrode plate 3 can be improved by adopting the full insulating medium support, so that possible parasitic discharge and point discharge are avoided, the cleaning effect is better ensured, and the integral structure is better than the split structure, and the use is convenient.

In this embodiment, the insulating support 5 is made of an insulating material, which is at least one of alumina, aluminum nitride, polytetrafluoroethylene, quartz, silicon carbide, silicon nitride, and yttrium oxide. The support structure made of the insulating material of the embodiment has good insulativity, corrosion resistance, high temperature resistance, high hardness and wear resistance, better meets the requirements of the insulating support piece 5 on insulativity and mechanical strength, and can better adapt to complex environments such as strong corrosiveness in a cleaning cavity.

Example 3:

as shown in fig. 3, as a preferred embodiment, the structure of the present embodiment is substantially the same as that of embodiment 2, and also includes a vacuum chamber 1, and a first electrode plate 2 and a second electrode plate 3 provided in the vacuum chamber 1, a placement space for placing a graphite boat 8 is formed between the first electrode plate 2 and the second electrode plate 3, the first electrode plate 2 and the second electrode plate 3 are used for ionizing a process gas therebetween in an energized state, and an air inlet 6 and an air outlet 7 are provided in the vacuum chamber 1. The gas inlet 6 is used for introducing a process gas such as NF ₃ And the like, the air outlet 7 is connected with a vacuum pump, preferably a vacuum molecular pump.

The main difference is that in this embodiment, the second electrode plate 3 is circumferentially provided with insulating strips 43. The second electrode plate 3 is wrapped along the circumferential direction through the insulating strip 43, so that the situation that the second electrode plate 3 discharges to the side edge during high-frequency discharge can be avoided, and cavity ignition possibly caused during high-frequency discharge is avoided.

In this embodiment, the insulating bar 43 is made of an insulating material, which is at least one of alumina, aluminum nitride, polytetrafluoroethylene, quartz, silicon carbide, silicon nitride, and yttrium oxide. The insulating strip 43 made of the insulating material of the embodiment has good insulativity, corrosion resistance, high temperature resistance, high hardness and abrasion resistance.

In this embodiment, the insulating support 5 is used to support legs 81 of the graphite boat 8.

Example 4:

as shown in fig. 4 and 5, as a preferred embodiment, the structure of the present embodiment is substantially the same as that of embodiment 3, and the present embodiment also includes a vacuum chamber 1, and a first electrode plate 2 and a second electrode plate 3 provided in the vacuum chamber 1, wherein a space for placing a graphite boat 8 is formed between the first electrode plate 2 and the second electrode plate 3, the first electrode plate 2 and the second electrode plate 3 are used for ionizing a process gas therebetween in an energized state, and a gas inlet 6 and a gas outlet 7 are provided in the vacuum chamber 1. The gas inlet 6 is used for introducing a process gas such as NF ₃ And the like, the air outlet 7 is connected with a vacuum pump, preferably a vacuum molecular pump.

The main difference is that in this embodiment, the insulating support 5 is used to support the boat deck 82 of the graphite boat 8. Boat sheet 82 is in vertical contact with insulating support 5, i.e., the thickness edge of boat sheet 82 contacts insulating support 5, without impeding the effective cleaning of the boat body at the location where cleaning is desired. In this embodiment, the position of the graphite boat 8 supported by the insulating support member 5 is adjusted to avoid the electrode contact position of the boat feet 81, so as to avoid the influence of high-frequency alarm and the like on the service life of the graphite boat 8 in the subsequent process of the graphite boat 8 caused by unclean cleaning.

As shown in fig. 5, since the boat deck 82 has a weaker force than the boat legs 81, a plurality of insulating supports 5, such as 4, 6, 8, etc., may be used to directly support the boat deck 82 of the graphite boat 8 for stable support.

Example 5:

as shown in fig. 6, as a preferred embodiment, the structure of the present embodiment is substantially the same as that of embodiment 4, and also includes a vacuum chamber 1, and a first electrode plate 2 and a second electrode plate 3 provided in the vacuum chamber 1, a placement space for placing a graphite boat 8 is formed between the first electrode plate 2 and the second electrode plate 3, the first electrode plate 2 and the second electrode plate 3 are used for ionizing a process gas therebetween in an energized state, and an air inlet 6 and an air outlet 7 are provided in the vacuum chamber 1. The gas inlet 6 is used for introducing a process gas such as NF ₃ And the like, the air outlet 7 is connected with a vacuum pump, preferably a vacuum molecular pump.

The main difference is that in this embodiment, the vacuum chamber 1 is further provided with a flow equalizing pipe 9, an air inlet end 91 of the flow equalizing pipe 9 is connected with the air inlet 6, the flow equalizing pipe 9 is provided with a plurality of air outlet holes 92, and the flow equalizing pipe 9 is arranged along the inner wall of the vacuum chamber 1. The process gas led into the vacuum cavity 1 from the air inlet 6 can be well dispersed by arranging the equalizing pipe 9, so that plasma is uniformly dispersed, and the cleaning uniformity is improved. On the premise of ensuring the sufficient dispersion of the gas, the air tightness management of the vacuum cavity 1 is facilitated, and when the sealing is needed, the air inlet 6 and the air outlet 7 are only required to be closed.

Preferably, in this embodiment, the air inlet 6 is located at one end of the vacuum chamber 1, the air outlet 7 is located at the other end of the vacuum chamber 1, the flow equalizing pipe 9 is an annular pipe attached to the inner wall of the inlet end of the vacuum chamber 1, and a plurality of small holes are formed in the annular pipe, as shown in fig. 7, the annular pipe is a circular annular pipe.

Example 6:

as another preferred embodiment, the structure of this embodiment is basically the same as that of embodiment 4, and also includes a vacuum chamber 1, and a first electrode plate 2 and a second electrode plate 3 disposed in the vacuum chamber 1, wherein a space for placing a graphite boat 8 is formed between the first electrode plate 2 and the second electrode plate 3, the first electrode plate 2 and the second electrode plate 3 are used for ionizing a process gas therebetween in an energized state, and a gas inlet 6 and a gas outlet 7 are provided in the vacuum chamber 1. The gas inlet 6 is used for introducing a process gas such as NF ₃ And the like, the air outlet 7 is connected with a vacuum pump, preferably a vacuum molecular pump.

The main difference is that in this embodiment, a flow equalizing plate 10 (i.e. a porous plate) is further disposed in the vacuum chamber 1, the flow equalizing plate 10 is disposed near the air inlet 6, and if the air inlet 6 is located at one end of the vacuum chamber 1, the flow equalizing plate 10 is disposed in the chamber near the air inlet 6.

Specifically, in this embodiment, the air inlet 6 may be located at the top or bottom of the vacuum chamber 1, as shown in fig. 8 and 9.

Example 7:

as shown in fig. 10, as another preferred embodiment, the structure of this embodiment is substantially the same as that of embodiment 5, and also includes a vacuum chamber 1, and a first electrode plate 2 and a second electrode plate 3 provided in the vacuum chamber 1, a placement space for placing a graphite boat 8 is formed between the first electrode plate 2 and the second electrode plate 3, the first electrode plate 2 and the second electrode plate 3 are for ionizing a process gas therebetween in an energized state, and an air inlet 6 and an air outlet 7 are provided in the vacuum chamber 1. The gas inlet 6 is used for introducing a process gas such as NF ₃ And the like, the air outlet 7 is connected with a vacuum pump, preferably a vacuum molecular pump.

The main difference is that the flow equalizing pipe 9 and the flow equalizing plate 10 are used at the same time. If necessary, the advantages of the flow equalizing pipe 9 and the flow equalizing plate 10 can be combined, and the process gas can be equalized to the maximum extent.

Example 8:

as another preferred embodiment, the structure of this embodiment is substantially the same as that of embodiment 6, and also includes a vacuum chamber 1 and first and second electrode plates 2 and 3 provided in the vacuum chamber 1, the first and second electrode plates 2 and 3A placing space for placing the graphite boat 8 is formed between the plates 3, the first electrode plate 2 and the second electrode plate 3 are used for ionizing process gas between the first electrode plate and the second electrode plate in an electrified state, and the vacuum cavity 1 is provided with an air inlet 6 and an air outlet 7. The gas inlet 6 is used for introducing a process gas such as NF ₃ And the like, the air outlet 7 is connected with a vacuum pump, preferably a vacuum molecular pump.

The main difference is that in the present embodiment, the air inlets 6 are plural, and the plural air inlets 6 are disposed on at least one of the top wall, the bottom wall and the side walls of the vacuum chamber 1, wherein the side walls refer to four side walls. The arrangement of the plurality of air inlets 6 in different directions can fully ensure the dispersion uniformity of the process gas in the vacuum cavity 1, thereby ensuring the uniformity of etching and cleaning of the graphite boat 8. Compared with the scheme that after single-port air intake, the flow equalizing pipe 9 or the flow equalizing plate 10 is adopted for dispersing, the multi-port air intake mode of the embodiment which is directly arranged on the cavity is more direct, and the space in the cavity of the vacuum cavity 1 is not additionally occupied.

As shown in fig. 11, a plurality of air inlets 6 are provided in the side wall of the vacuum chamber 1.

Example 9:

as shown in fig. 12, as another preferred embodiment, the structure of this embodiment is substantially the same as that of embodiment 8, and also includes a vacuum chamber 1, and a first electrode plate 2 and a second electrode plate 3 provided in the vacuum chamber 1, a placement space for placing a graphite boat 8 is formed between the first electrode plate 2 and the second electrode plate 3, the first electrode plate 2 and the second electrode plate 3 are for ionizing a process gas therebetween in an energized state, and an air inlet 6 and an air outlet 7 are provided in the vacuum chamber 1. The gas inlet 6 is used for introducing a process gas such as NF ₃ And the like, the air outlet 7 is connected with a vacuum pump, preferably a vacuum molecular pump.

The main difference is that in the present embodiment, a plurality of air inlets 6 are provided at the bottom wall of the vacuum chamber 1.

Of course, in other embodiments, multiple air inlets 6 may be provided on different chamber walls of the vacuum chamber 1 at the same time, if desired.

While the utility model has been described with reference to preferred embodiments, it is not intended to be limiting. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art, or equivalent embodiments with equivalent variations can be made, without departing from the scope of the utility model. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present utility model shall fall within the scope of the technical solution of the present utility model.

Claims

1. A graphite boat dry cleaning device is characterized in that: the graphite boat comprises a vacuum cavity (1), and a first electrode plate (2) and a second electrode plate (3) which are arranged in the vacuum cavity (1), wherein a placement space for placing a graphite boat (8) is formed between the first electrode plate (2) and the second electrode plate (3), the first electrode plate (2) and the second electrode plate (3) are used for ionizing process gas between the first electrode plate and the second electrode plate in an electrified state, and an air inlet (6) and an air outlet (7) are arranged on the vacuum cavity (1); an insulating support piece (5) for supporting the graphite boat (8) is arranged in the placement space.

2. The dry cleaning device for graphite boats as claimed in claim 1, wherein: the first electrode plate (2) and the second electrode plate (3) are respectively arranged on two opposite inner walls of the vacuum cavity (1), and an insulating pad (4) is arranged between the first electrode plate (2) and the second electrode plate (3) and the inner walls of the vacuum cavity (1).

3. The dry cleaning device for graphite boats as claimed in claim 2, wherein: the first electrode plate (2) and the second electrode plate (3) are respectively positioned at the top and the bottom of the vacuum cavity (1).

4. A graphite boat dry cleaning apparatus according to claim 3, wherein: the top wall of the vacuum cavity (1) is provided with a mounting opening, the first electrode plate (2) is embedded in the mounting opening, and the second electrode plate (3) is positioned on the bottom wall of the vacuum cavity (1).

5. The dry cleaning device for graphite boats as claimed in claim 4, wherein: the insulating pad (4) comprises a first insulating pad (41) and a second insulating pad (42), and the first insulating pad (41) is positioned between the first electrode plate (2) and the mounting port; the second insulating pad (42) is positioned between the second electrode plate (3) and the bottom wall of the vacuum cavity (1).

6. The dry cleaning apparatus for graphite boats as claimed in claim 5, wherein: and an insulating strip (43) is arranged on the second electrode plate (3) in the circumferential direction.

7. The dry cleaning device for graphite boats as claimed in claim 1, wherein: the insulation support piece (5) comprises a metal support block (51), an insulation support block (52) and a metal support column (53), wherein the metal support column (53) is located on the second electrode plate (3), the insulation support block (52) is located on the metal support column (53), and the metal support block (51) is located on the insulation support block (52).

8. The dry cleaning device for graphite boats as claimed in claim 1, wherein: the insulating support piece (5) is of a full-insulating integrated structure.

9. The dry cleaning device for graphite boats as claimed in claim 1, wherein: the insulating support (5) is used for supporting boat legs (81) or boat pages (82) of the graphite boat (8).

10. The dry cleaning device for graphite boats as claimed in claim 1, wherein: the vacuum chamber (1) is internally provided with a flow equalizing pipe (9), an air inlet end (91) of the flow equalizing pipe (9) is connected with the air inlet (6), and a plurality of air outlet holes (92) are formed in the flow equalizing pipe (9).

11. The dry cleaning device for graphite boats as claimed in claim 1, wherein: and a flow equalizing plate (10) is further arranged in the vacuum cavity (1), and the flow equalizing plate (10) is arranged close to the air inlet (6).

12. The dry cleaning device for graphite boats as claimed in claim 1, wherein: the air inlet (6) is positioned at one end of the vacuum cavity (1), and the air outlet (7) is positioned at the other end of the vacuum cavity (1).

13. The graphite boat dry cleaning apparatus as set forth in claim 12, wherein: the air inlet (6) is positioned at the top or the bottom of the vacuum cavity (1).

14. The dry cleaning device for graphite boats as claimed in claim 1, wherein: the number of the air inlets (6) is multiple, and the air inlets (6) are arranged on at least one of the top wall, the bottom wall and the side wall of the vacuum cavity (1).

15. The dry cleaning apparatus for graphite boats according to any one of claims 1 to 14, wherein: the first electrode plate (2) and the second electrode plate (3) are respectively connected with an external power supply, and the external power supply comprises a first electrode power supply used for connecting the first electrode plate (2) and a second electrode power supply used for connecting the second electrode plate (3).

16. The graphite boat dry cleaning apparatus as set forth in claim 15, wherein: the first electrode power supply is one of a radio frequency power supply, a high-frequency power supply and a direct current power supply; the second electrode power supply is one of a radio frequency power supply, a high-frequency power supply and a direct current power supply.

17. The graphite boat dry cleaning apparatus as set forth in claim 15, wherein: the center of the first electrode plate (2) is provided with a first electrode feed-in connection point (21) for connecting a first electrode power supply, and the center of the second electrode plate (3) is provided with a second electrode feed-in connection point (31) for connecting a second electrode power supply.