CN220057021U

CN220057021U - Transmission mechanism convenient to equipment

Info

Publication number: CN220057021U
Application number: CN202320598841.1U
Authority: CN
Inventors: 赵志强
Original assignee: Wuxi Core Spectrum Semiconductor Technology Co ltd
Current assignee: Wuxi Core Spectrum Semiconductor Technology Co ltd
Priority date: 2023-03-24
Filing date: 2023-03-24
Publication date: 2023-11-21
Anticipated expiration: 2033-03-24

Abstract

The utility model discloses a transmission mechanism convenient to assemble, which comprises a base, wherein a groove is formed in the middle of the bottom of the base, a driving motor is fixedly installed in the groove, a clamping seat is fixedly installed at the top output end of the driving motor through the base, and an inserting block is inserted into the inner side of the clamping seat. According to the utility model, the wafer can be just positioned in the middle of the quartz placing table through the inclined plane guide in the placing groove, so that the manipulator is convenient to adsorb and grasp, in the use process, if the wafer with different specifications is required to be processed, the pull ring is pulled to drive the limiting plate to draw the connecting shaft, the connecting shaft draws the clamping block to retract and leave the clamping groove, and the base block can be taken out, so that the quartz placing table with the placing grooves with different shapes can be conveniently replaced, and compared with the prior art, the quartz placing table is flexible and convenient to use, high in use capability and high in practicability.

Description

Transmission mechanism convenient to equipment

Technical Field

The utility model belongs to the technical field of normal pressure chemical deposition, and particularly relates to a transmission mechanism convenient to assemble.

Background

APCVD, atmospheric pressure chemical vapor deposition, refers to a chemical vapor deposition process that is performed at atmospheric pressure, which was originally employed for chemical vapor deposition. The process has the advantages of simple required system, high reaction speed, poor uniformity and poor step coverage capability, so that the process is generally used for thick medium deposition;

the patent number is CN202023214794.1, and the atmospheric pressure chemical vapor deposition equipment comprises an air inlet box, a diffusion head, a heating body assembly, a cross arm, a rotary table, a mechanical arm, a loading and carrying platform, a wafer skip, a fan filter unit and a vacuum system; the fan filter unit is arranged above the loading and carrying platform; the manipulator is arranged between the loading and carrying platform and the turntable; the cross arm is slidably arranged on one side, away from the manipulator, of the turntable, and the heating body assembly is arranged above the cross arm; the diffusion head is arranged right below the heating body assembly, and the air inlet box is communicated with the diffusion head; the vacuum system is used for providing a vacuum environment for the manipulator and the heating body component. The normal pressure chemical vapor deposition equipment can deposit various films at normal pressure, can effectively improve the integration level of the equipment, reduce the automation difficulty, reduce the occupied area and improve the productivity of the equipment;

above-mentioned technical scheme equipment is in the use period, comes the auxiliary transportation wafer through setting up the revolving stage, but its revolving stage structure is comparatively simple, and the revolving stage top lacks the holding location structure to the wafer, leads to the wafer to place stability not strong to lid technical scheme's revolving stage overall structure dismouting is comparatively inconvenient, makes the equipment maintenance comparatively loaded down with trivial details, consequently needs to improve it.

Disclosure of Invention

Aiming at the problems in the background art, the utility model aims to provide a transmission mechanism convenient to assemble, so as to solve the problems that in the prior art, the turntable is simple in structure, the top of the turntable is lack of a containing and positioning structure for the wafer, the placing stability of the wafer is not strong, and the whole structure of the turntable in the cover technical scheme is inconvenient to assemble and disassemble, so that equipment overhaul is complicated.

The technical aim of the utility model is realized by the following technical scheme:

the transmission mechanism comprises a base, wherein a groove is formed in the middle of the bottom of the base, a driving motor is fixedly installed in the groove, a clamping seat is fixedly installed at the top output end of the driving motor, an inserting block is inserted into the inner side of the clamping seat, a turntable is fixedly installed at the top of the inserting block, positioning mechanisms are fixedly installed at the top of the turntable at equal intervals in an annular shape, and installation mechanisms are fixedly installed at four corners of the bottom of the base;

the positioning mechanism comprises concave seats, the concave seats are fixedly arranged at the top of the turntable at equal intervals, base blocks are inserted into the inner sides of the concave seats, a quartz placing table is fixedly arranged at the top of the base blocks, a placing groove is formed in the top of the quartz placing table, and a limiting assembly is arranged on the outer sides of the concave seats;

the installation mechanism comprises a bending rod, the bending rod is fixedly installed at four corners of the bottom of the base, the bottoms of the bending rods are all rotationally connected with supporting shafts, positioning plates are fixedly installed at the bottoms of the supporting shafts, fixing screws are connected with the outer ends of the positioning plates in a threaded mode, and anti-skid plates are fixedly installed at the tops of the fixing screws.

Further, as a preferable technical scheme, the cross section shape and the side shape of the placing groove are both isosceles trapezoids, and the overlook shape of the placing groove is rectangular.

Further, as the preferable technical scheme, the bottom equidistant annular fixed mounting of carousel has the fixed block, the bottom of fixed block is equipped with universal ball and the bottom of universal ball is laminated with the top of carousel and is connected.

Further, as a preferable technical scheme, the bottom view shape of the insert block is a regular hexagon, and the inner side top view shape of the clamping seat is also a regular hexagon.

Further, as the preferred technical scheme, spacing subassembly includes cassette and draw-in groove, cassette fixed mounting is in the outside of concave type seat, the draw-in groove is seted up in the outside of basic block, the equal fixed mounting in inboard both ends of cassette has spacing spring, the inner fixed mounting of spacing spring has the fixture block, the inner of fixture block runs through concave type seat grafting in the draw-in groove is inboard.

Further, as a preferable technical scheme, the side surface of the clamping block is in a right trapezoid shape, and the inclined surface of the clamping block is arranged at the upper end of the inner side.

Further, as a preferable technical scheme, a connecting shaft is fixedly installed on the outer side of the clamping block, and the outer end of the connecting shaft penetrates through the clamping frame.

Further, as a preferable technical scheme, a limiting plate is fixedly arranged on the outer side of the connecting shaft, and two groups of pull rings are fixedly arranged on the outer end of the limiting plate.

In summary, the utility model has the following advantages:

firstly, through setting up positioning mechanism for this device can place the standing groove of quartz placing table with the wafer when using, at this moment because the cross section and the side shape of standing groove are isosceles trapezoid, thereby through the inclined plane direction in the standing groove, make the wafer can just be in the middle of the quartz placing table, thereby make things convenient for the manipulator to adsorb and snatch, and in the use, if need when handling to the wafer of different specifications, only need to pull the pull ring and drive the limiting plate and draw the connecting axle, the connecting axle draws the fixture block to shrink and leave the draw-in groove, alright take out the basic block, thereby the quartz placing table that has different shape standing grooves of convenient replacement, make this device use comparatively more nimble and convenient compared with prior art scheme, the usability is stronger;

second, through setting up installation mechanism, make this device during the use, the accessible places the base on the mesa of equipment, through the pivot of rotating the pole bottom of bending this moment, it is inboard to turn to drive the locating plate through the pivot, twist the bottom of fixing screw upwards laminating equipment mesa through the locating plate this moment, can assist unable adjustment base, the base is fixed after accomplishing, through inserting the inboard of cassette with the inserted block, can fixed carousel, when needing to dismantle, only need not hard up fixing screw and with the inserted block pull out can, thereby make this device be convenient for assemble in prior art scheme and dismantle, the convenience of equipment maintenance clearance has been improved.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a bottom view of the present utility model;

FIG. 3 is a block diagram of a female seat of the present utility model;

fig. 4 is a block diagram of a spacing assembly of the present utility model.

Reference numerals: 1. base, 2, recess, 3, driving motor, 4, cassette, 5, insert block, 6, carousel, 7, positioning mechanism, 71, concave seat, 72, the basic block, 73, quartz place the platform, 74, the standing groove, 75, spacing subassembly, 751, the clamping frame 752, the clamping groove, 753, spacing spring, 754, fixture block, 755, connecting axle, 756, limiting plate, 8, installation mechanism, 81, bending lever, 82, fulcrum, 83, positioning plate, 84, fixing screw, 85, antiskid plate, 9, fixed block, 10, universal ball.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1

Referring to fig. 1-4, a transmission mechanism convenient for assembly according to this embodiment includes a base 1, a groove 2 is provided in the middle of the bottom of the base 1, a driving motor 3 is fixedly installed in the groove 2, a clamping seat 4 is fixedly installed at the top output end of the driving motor 3 penetrating through the base 1, an inserting block 5 is inserted into the inner side of the clamping seat 4, a turntable 6 is fixedly installed at the top of the inserting block 5, positioning mechanisms 7 are fixedly installed at the top of the turntable 6 at equal intervals in a ring shape, and installation mechanisms 8 are fixedly installed at four corners of the bottom of the base 1;

the positioning mechanism 7 comprises concave seats 71, the concave seats 71 are fixedly arranged at the top of the turntable 6 at equal intervals, base blocks 72 are inserted into the inner sides of the concave seats 71, a quartz placing table 73 is fixedly arranged at the top of the base blocks 72, a placing groove 74 is formed in the top of the quartz placing table 73, and a limiting component 75 is arranged at the outer sides of the concave seats 71;

the installation mechanism 8 comprises a bending rod 81, the bending rod 81 is fixedly installed at four corners of the bottom of the base 1, the bottoms of the bending rods 81 are respectively and rotatably connected with a support shaft 82, the bottoms of the support shafts 82 are fixedly installed with positioning plates 83, the outer ends of the positioning plates 83 are in threaded connection with fixing screws 84, and the tops of the fixing screws 84 are fixedly provided with anti-skid plates 85.

Example 2

Referring to fig. 1 to 4, in order to achieve the purpose of convenience in placement of wafers on the basis of embodiment 1, the placement groove 74 is innovatively designed in this embodiment, specifically, the cross-sectional shape and the side shape of the placement groove 74 are both set to be isosceles trapezoids, and the top view shape of the placement groove 74 is set to be rectangular; through setting up standing groove 74, can be when using, through the inclined plane direction in the standing groove 74, and then make the wafer at the standing groove 74 internal centering, and then make things convenient for the gripper to absorb.

Referring to fig. 1-4, in order to achieve the purpose of improving the rotation stability of the turntable 6, the bottom of the turntable 6 in this embodiment is fixed with a fixed block 9 in a circular ring shape at equal intervals, the bottom of the fixed block 9 is provided with a universal ball 10, and the bottom of the universal ball 10 is in fit connection with the top of the turntable 6; through setting up universal ball 10 of fixed block 9 bottom, can auxiliary stay carousel 6, improve carousel 6 driven stability.

Referring to fig. 1-4, in order to achieve the purpose of improving the stability of the insert block 5, the insert block 5 of the present embodiment has a regular hexagon in the bottom view, and the inner side of the card seat 4 is also provided with a regular hexagon in the top view; through setting up regular hexagon's inserted block 5 and cassette 4, can improve the stability of inserted block 5 in the inboard of cassette 4, and then improve carousel 6 rotation stability.

Example 3

Referring to fig. 1-4, in this embodiment, in order to achieve the purpose of facilitating the disassembly and replacement of the quartz placement table 73 on the basis of embodiment 2, the present embodiment innovates the limiting assembly 75, specifically, the limiting assembly 75 includes a clamping rack 751 and a clamping groove 752, the clamping rack 751 is fixedly mounted on the outer side of the concave seat 71, the clamping groove 752 is opened on the outer side of the base block 72, limiting springs 753 are fixedly mounted at both ends of the inner side of the clamping rack 751, clamping blocks 754 are fixedly mounted at the inner ends of the limiting springs 753, and the inner ends of the clamping blocks 754 penetrate through the concave seat 71 and are inserted into the inner side of the clamping groove 752; through setting up spacing spring 753 and contradicting fixture block 754 and pegging graft the draw-in groove 752 inboard, can assist fixed base block 72, when needing to dismantle, only need draw-in spacing spring 753 drives the fixture block 754 shrink, can assist to drive fixture block 754 and take out in the draw-in groove 752, and then convenient to detach base block 72, the different quartz of convenient change places platform 73, makes things convenient for this device to use.

Referring to fig. 1 to 4, in order to achieve the purpose of improving the installation convenience, the side surface of the clamping block 754 of the present embodiment is in the shape of a right trapezoid, and the inclined surface of the clamping block 754 is disposed at the upper end of the inner side; by arranging the clamping block 754 to be right trapezoid and the inclined plane to be located on the inner side, the clamping block 754 can be conveniently abutted against and guided, and the base block 72 can be conveniently installed.

Referring to fig. 1-4, in order to achieve the purpose of improving the convenience of disassembling the device, a connecting shaft 755 is fixedly mounted on the outer side of a clamping block 754 in the embodiment, the outer end of the connecting shaft 755 penetrates through a clamping frame 751, a limiting plate 756 is fixedly mounted on the outer side of the connecting shaft 755, and two groups of pull rings are fixedly mounted on the outer end of the limiting plate 756; through setting up connecting axle 755, accessible pulling pull ring drives limiting plate 756 and draws connecting axle 755, and then conveniently dismantles and draw down fixture block 754, has improved the convenience of dismouting change quartz place the platform 73.

The use principle and the advantages are that: when the clamping device is used, the base 1 is placed on the table top of the equipment, the supporting shaft 82 at the bottom of the bending rod 81 is rotated, the positioning plate 83 is driven to rotate to the inner side through the supporting shaft 82, the fixing screw 84 is twisted upwards, the bottom of the table top of the equipment is attached to the positioning plate 83, the base 1 can be assisted to fix the base 1, after the base 1 is fixed, the inserting block 5 is inserted into the inner side of the clamping seat 4, the rotating disc 6 can be fixed, the wafer is placed in the placing groove 74 of the quartz placing table 73 when in use, at this moment, the cross section and the side shape of the placing groove 74 are isosceles trapezium, and thus the wafer can be just positioned in the middle of the quartz placing table 73 through the inclined plane guide in the placing groove 74, thereby facilitating the adsorption grabbing of the manipulator, and in the use, if the clamping block 754 is required to be pulled to process the wafer with different specifications, the connecting shaft 755 is pulled to drive the limiting plate 756 to draw the connecting shaft, the clamping block 754 is retracted to leave the clamping groove 752, the base block 72 can be taken out, the quartz placing table 73 with different shapes, the placing table 74 is convenient to be placed in use, the shape and the wafer can be detached conveniently, and the wafer can be detached conveniently and detached by just by pulling the inserting block 5.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A drive mechanism convenient to equipment, its characterized in that: the novel rotary table comprises a base (1), wherein a groove (2) is formed in the middle of the bottom of the base (1), a driving motor (3) is fixedly installed in the groove (2), a clamping seat (4) is fixedly installed at the top output end of the driving motor (3) penetrating through the base (1), an inserting block (5) is inserted into the inner side of the clamping seat (4), a rotary table (6) is fixedly installed at the top of the inserting block (5), positioning mechanisms (7) are fixedly installed at the top of the rotary table (6) at equal intervals in an annular shape, and installation mechanisms (8) are fixedly installed at four corners of the bottom of the base (1);

the positioning mechanism (7) comprises concave seats (71), the concave seats (71) are fixedly arranged at the top of the turntable (6) at equal intervals, base blocks (72) are inserted into the inner sides of the concave seats (71), a quartz placing table (73) is fixedly arranged at the top of the base blocks (72), a placing groove (74) is formed in the top of the quartz placing table (73), and a limiting component (75) is arranged on the outer side of the concave seats (71);

the installation mechanism (8) comprises a bending rod (81), the bending rod (81) is fixedly installed at four corners of the bottom of the base (1), the bottom of the bending rod (81) is rotatably connected with a support shaft (82), the bottom of the support shaft (82) is fixedly provided with a positioning plate (83), the outer end of the positioning plate (83) is in threaded connection with a fixing screw (84), and the top of the fixing screw (84) is fixedly provided with a antiskid plate (85).

2. A transmission for facilitating assembly as defined in claim 1, wherein: the cross section shape and the side surface shape of the placement groove (74) are isosceles trapezoids, and the top view shape of the placement groove (74) is rectangular.

3. A transmission for facilitating assembly as defined in claim 2, wherein: the bottom equidistant fixed mounting that is of carousel (6) has fixed block (9), the bottom of fixed block (9) is equipped with universal ball (10) and the bottom of universal ball (10) is connected with the top laminating of carousel (6).

4. A transmission for facilitating assembly as defined in claim 3, wherein: the bottom view shape of the insert block (5) is a regular hexagon, and the inner side top view shape of the clamping seat (4) is also a regular hexagon.

5. A transmission for facilitating assembly as defined in claim 4, wherein: spacing subassembly (75) include card frame (751) and draw-in groove (752), card frame (751) fixed mounting is in the outside of concave seat (71), the outside in basic block (72) is seted up in draw-in groove (752), the inboard both ends of card frame (751) are all fixed mounting has spacing spring (753), the inner fixed mounting of spacing spring (753) has fixture block (754), the inner of fixture block (754) runs through concave seat (71) and pegs graft in draw-in groove (752) inboard.

6. A transmission for facilitating assembly as defined in claim 5, wherein: the side surface of the clamping block (754) is right trapezoid, and the inclined surface of the clamping block (754) is arranged at the upper end of the inner side.

7. A transmission for facilitating assembly as defined in claim 6, wherein: the outer side of the clamping block (754) is fixedly provided with a connecting shaft (755), and the outer end of the connecting shaft (755) penetrates through the clamping frame (751).

8. A transmission for facilitating assembly as defined in claim 7, wherein: the outside of connecting axle (755) fixed mounting has limiting plate (756), the outer end fixed mounting of limiting plate (756) has two sets of pull rings.