CN115367470A - Graphite boat transfer device - Google Patents
Graphite boat transfer device Download PDFInfo
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- CN115367470A CN115367470A CN202211045436.3A CN202211045436A CN115367470A CN 115367470 A CN115367470 A CN 115367470A CN 202211045436 A CN202211045436 A CN 202211045436A CN 115367470 A CN115367470 A CN 115367470A
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- plate
- sliding
- graphite boat
- frame
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
Abstract
The invention discloses a graphite boat transfer device which comprises a supporting device for bearing a graphite boat, a clamping piece device for clamping a silicon wafer and a feeding device for lifting and moving the graphite boat to the supporting device, wherein the clamping piece device is arranged on one side of the top surface of the supporting device, the feeding device is arranged on the front portion of the supporting device, and the clamping piece device comprises a moving plate, a rotating assembly, a lifting assembly and a clamping piece assembly. The graphite boat conveying device solves the problems that when the existing graphite boat is transferred, the graphite boat is conveyed to a feeding machine by means of a trolley, then the graphite boat needs to be conveyed manually for feeding, the conveying process is complicated, and the labor intensity is high.
Description
Technical Field
The invention relates to the technical field of graphite boat transfer equipment, in particular to a graphite boat transfer device.
Background
Application number is 202120806650.0, and the name is a graphite boat transfer device for PECVD, including the box and set up buffer memory frame and two transfer mechanisms in the box, the buffer memory frame is used for keeping in the graphite boat, the buffer memory frame is located between two transfer mechanisms, be provided with the year flitch that is used for bearing the graphite boat on the transfer mechanism, transfer mechanism is used for driving year flitch, transfers the graphite boat to the buffer memory frame on, through the design of transfer mechanism and buffer memory frame, realizes the change and the transportation of graphite boat, need not operating personnel and waits for, realizes the serialization of graphite boat production and processing, has improved the efficiency of production.
When the graphite boat after the processing is completed is transported, the graphite boat is transported to the feeding machine by means of the cart, then the graphite boat needs to be transported manually to be loaded, the transporting process is complicated, the labor intensity is high, and the silicon wafers in the graphite boat can not be well clamped after the transportation so as to be taken out.
Disclosure of Invention
The invention aims to provide a graphite boat conveying device, which aims to solve the problems.
The invention is realized by the following steps:
the utility model provides a graphite boat transfer device, including the strutting arrangement who is used for bearing the graphite boat, a loading attachment that is used for the clamping piece device of centre gripping silicon chip and is used for lifting removal graphite boat to strutting arrangement, strutting arrangement's top surface one side is provided with the clamping piece device, and strutting arrangement's front portion is provided with loading attachment, the clamping piece device includes the movable plate, rotating assembly, lifting unit and clamping piece subassembly, wherein be provided with the runner assembly who is used for turning to directly over the movable plate, and the vertical upwards installation in top of rotating assembly has lifting unit, and the lifting unit upper level is provided with the clamping piece subassembly that is used for centre gripping silicon chip.
Further, strutting arrangement includes quick-witted case and roof, wherein the top surface coparallel of machine case is fixed with the roof, and the top surface one side of roof runs through the bottom surface level and has seted up a plurality of spouts, and equal horizontal slidable mounting has the balladeur train that bears that is used for bearing the graphite boat in a plurality of spouts, and the top surface opposite side of roof is fixed with a plurality of frames of placing that are used for holding the silicon chip, the inside horizontal fixed mounting of machine case has a plurality of first cylinders, and the output of a plurality of first cylinders is connected on the bottom face that bears the balladeur train.
Furthermore, the movable plate is horizontally fixed on the rear end face of the top plate, two first sliding rods are horizontally fixed on the top face of the movable plate, the middle of the top face of the movable plate penetrates through the bottom face, through grooves are formed in the middle of the top face of the movable plate, bearing blocks are vertically fixed at two ends of the bottom face of the movable plate, translation screw rods are rotationally connected between the bearing blocks through bearings, and a fourth motor used for driving the translation screw rods is horizontally mounted on the bearing blocks at one end of the movable plate.
Further, the runner assembly is including removing the seat, it sets up directly over the movable plate to remove the seat level, and remove the bottom surface of seat on the level be fixed with the slip cover establish the first slide on the first slide bar, and remove the vertical logical groove level that runs through on the movable plate downwards in bottom surface middle part of seat and be fixed with the translation barrel, and translation barrel and translation screw thread through-fit are connected, it is connected with the pivot to rotate upwards through the bearing is vertical on the top surface of removal seat, and horizontal installation has driven gear in the pivot, vertical upwards install first motor on the top surface of removal seat, and the output of first motor install with driven gear meshing's driving gear.
Further, the lifting component comprises a sliding frame plate, a sliding block and a flat push plate, wherein the sliding frame plate is vertically arranged right above the moving seat, the bottom surface of the sliding frame plate is fixedly connected with the top surface of the rotating shaft, the sliding block is vertically and slidably arranged in the sliding frame plate, the flat push plate used for installing the clamping piece component is arranged at one end of the sliding block in a rotating mode, a second cylinder is vertically and downwardly arranged at the top of the sliding frame plate, the output end of the second cylinder is connected onto the sliding block, and a second motor is horizontally arranged at the other end of the sliding block.
Further, be provided with the revolving rack between flat push pedal and the slider, and the dwang on the revolving rack runs through the bearing and rotates the connection on the slider, and the dwang tip on the revolving rack is connected with the output of second motor, and the one end level that the revolving rack is close to flat push pedal is fixed with the second cylinder, and the other end of second cylinder is fixed on flat push pedal, has the telescopic link between flat push pedal and the slider, and the both ends of telescopic link are fixed respectively with flat push pedal and the slider adjacent terminal surface on.
Further, the clamping piece subassembly includes splint and clamping piece, and wherein the splint level sets up, and the one end of splint is fixed on the flat push pedal, and runs through on the splint and has seted up the amalgamation groove, and installs a plurality of slides along the horizontal direction on the top surface of splint, and a plurality of slides slidable mounting in the amalgamation groove on splint, and the vertical clamping piece that is fixed with downwards on the bottom surface of a plurality of slides.
Further, a plurality of positioning screw holes are vertically formed in the top surface of the clamping plate along the horizontal direction, fixing bolts are arranged on the sliding seat in a penetrating mode through vertical downward threads, the fixing bolts are matched with the positioning screw holes and used for installing the sliding seat on the clamping plate, the clamping plate is provided with a sucking disc in a penetrating mode, the sucking disc is communicated with a sucking pipe, the clamping plate is horizontally fixed with a suction pump, the air inlet of the suction pump is communicated with an air inlet pipe, and the air inlet pipe of the suction pump is communicated with the sucking pipe.
Further, the feeding device comprises a material supporting frame and a transfer plate, the material supporting frame is used for lifting the graphite boat for feeding, the transfer plate is used for transferring the graphite boat, the material supporting frame is vertically fixed on the front end face of the case, the transfer plate is arranged at the front portion of the material supporting frame, a slide way is vertically arranged on the vertical end faces of the two sides of the material supporting frame in a penetrating mode, the middle of the material supporting frame is vertically and rotatably connected with a material supporting screw rod through a bearing, a third motor is vertically and fixedly arranged on the bottom face of the material supporting frame, the output end of the third motor is connected to a rotating shaft at the bottom end of the material supporting screw rod, a material supporting sliding plate is vertically and slidably arranged in the slide way of the material supporting frame, a material supporting screw barrel which is in threaded fit with the material supporting screw rod is vertically arranged in a penetrating mode in the middle of the material supporting sliding plate, a second sliding rod is horizontally and fixedly arranged on the front end face of the material supporting sliding plate, a material supporting frame is horizontally and slidably arranged right above the second sliding rod, a second sliding barrel which is sleeved on the second sliding rod is horizontally and two ends of the top face of the material supporting frame are vertically and fixedly provided with a baffle plate, and a third air cylinder for compressing the graphite boat.
Further, install the gyro wheel on the bottom surface of transport plate, and evenly be fixed with a plurality of framves along the horizontal direction on the top surface of transport plate, and horizontal rotation is connected with a plurality of guide pulleys in a plurality of framves, the vertical upwards fixed with of top surface front end of transport plate pushes away the frame, and pushes away one side that the frame is close to the transport plate and be provided with the push pedal, and push away the frame and go up horizontal screw thread and run through and install and push away the material screw rod, and the one end that pushes away the material screw rod passes through the bearing and rotates to be connected in the push pedal, and a terminal surface level of push pedal is fixed with the third slide bar and runs through and pushes away the frame and be used for direction push pedal translation.
Compared with the prior art, the invention has the beneficial effects that:
(1) When the silicon wafer clamping device is used, the graphite boat is driven to ascend in the vertical direction by the feeding device and reach the top plate of the case, then the graphite boat is placed on the bearing sliding frame, and then the silicon wafer is uniformly clamped and laid aside from the graphite boat by the clamping piece device, so that the silicon wafer clamping device is convenient to clamp and use;
(2) The supporting device comprises a case and a top plate, wherein the top plate is horizontally fixed on the top surface of the case, a plurality of sliding grooves are horizontally formed in one side of the top surface of the top plate through the bottom surface, bearing sliding frames used for bearing graphite boats are horizontally and slidably mounted in the sliding grooves, a plurality of placing frames used for containing silicon wafers are fixed on the other side of the top surface of the top plate, a plurality of first cylinders are horizontally and fixedly mounted in the case, and output ends of the first cylinders are connected to the bottom end surface of the bearing sliding frames, so that the first cylinders can be conveniently used for driving the bearing graphite boats to slide and transfer, and the later-stage movement for heating and loading the silicon wafers is facilitated;
(3) When the silicon wafer clamping device is used, the fourth motor drives the translation screw rod to rotate to drive the lifting assembly to horizontally slide on the movable plate, the position of a silicon wafer to be clamped is adjusted, then the second cylinder is used for vertically pushing the sliding block to vertically slide in the sliding frame plate, the height of the clamping piece is adjusted, then the sucking discs on the clamping pieces on the clamping piece assembly are utilized, the sucking pump is started to be communicated with the sucking discs through the sucking pipes, negative pressure is generated to adsorb the silicon wafer on the clamping piece, then the rotating assembly is utilized to rotate through the first motor driving gear in a matched mode with the driven gear on the rotating shaft, the clamping direction is changed, multi-directional clamping adjustment is achieved, and the clamping flexibility is improved.
(4) During the use, the transfer plate bears and carries the graphite boat to reach on taking off the work or material rest, then manually rotate and push away material screw horizontal pushing push pedal and carry out horizontal slip, promote the graphite boat and slide on the transfer plate, promote to send to and hold in the palm the material frame, then drive through the third motor and hold in the palm the material screw rod and rotate, drive in the vertical direction and hold in the palm the material frame and rise, reach on the roof of quick-witted case, then place the graphite boat on bearing the balladeur train.
(5) The graphite boat is placed on the top plate of the moving frame during use, the graphite boat moves to the feeding position of the supporting device, then the fifth cylinder is started to drive the sliding block seat to slide on the sliding strip, the sliding block seat is made to move right above the graphite boat, then the fourth cylinder is started to drive the sliding strip to move downwards towards the graphite boat, then the clamping frame is used for clamping two ends of the graphite boat under the driving of the sixth cylinder, and the graphite boat slides to the top plate of the case.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
Fig. 1 is a schematic view of the overall structure of a first embodiment of a graphite boat transfer device;
FIG. 2 is a schematic view showing an overall exploded structure of the first embodiment of the graphite boat transfer device;
FIG. 3 is an exploded view of the support device of the embodiment of the graphite boat transfer device;
fig. 4 is an exploded view of a material holder of the loading device of the first embodiment of the graphite boat transfer device;
FIG. 5 is an exploded view of a clamping device in an embodiment of a graphite boat transfer device;
FIG. 6 is an exploded view of the rotary assembly of the embodiment of the graphite boat transfer device;
FIG. 7 is an exploded view of the lift assembly of the embodiment of the graphite boat transfer device;
FIG. 8 is an exploded view of a clip assembly in an embodiment of a graphite boat transfer device;
FIG. 9 is a schematic view showing an exploded structure of a transfer plate in the loading device according to the first embodiment of the graphite boat transfer device;
FIG. 10 is a schematic view of the overall structure of a second embodiment of the graphite boat transfer device;
FIG. 11 is an exploded view of a loading device in a second embodiment of the graphite boat transfer device;
FIG. 12 is an exploded view of the clamping assembly of the embodiment of the graphite boat transfer device.
In the figure: 1. a support device; 11. a chassis; 12. a top plate; 13. a chute; 14. a load carriage; 15. a first cylinder; 16. placing a frame; 2. a clip device; 21. moving the plate; 22. a first slide bar; 23. a bearing seat; 24. translating the screw rod; 25. a rotating assembly; 251. a movable seat; 252. a first spool; 253. translating the screw cylinder; 254. a rotating shaft; 255. a first motor; 256. a driving gear; 257. a driven gear; 26. a lifting assembly; 261. a bezel plate; 262. a slider; 263. a second cylinder; 264. a second motor; 265. rotating the frame; 266. a horizontal push cylinder; 267. a telescopic rod; 268. a flat push plate; 27. a clip assembly; 271. a splint; 272. assembling the grooves; 273. a slide base; 274. a clip; 275. fixing the bolt; 276. positioning the screw hole; 277. a suction cup; 278. a straw; 279. a suction pump; 31. a material supporting frame; 32. a material supporting screw rod; 321. a third motor; 33. a material supporting sliding plate; 331. a material supporting screw cylinder; 332. a second slide bar; 34. a material supporting frame; 341. a second slide drum; 342. a baffle plate; 343. a third cylinder; 35. a transfer plate; 351. a roller; 36. supporting a frame; 361. a guide wheel; 37. pushing the frame; 38. pushing the plate; 381. a third slide bar; 39. a pusher screw; 41. a movable frame; 42. a top plate; 43. a clamping assembly; 431. a slide bar; 432. a support plate; 433. a fourth cylinder; 434. a fourth slide bar; 435. a fifth cylinder; 436. a slider seat; 437. a clamping frame; 438. and a sixth cylinder.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
Example 1:
referring to fig. 1, 2, 3, 4, 5, 6, 7, 8 and 9, a graphite boat transfer device includes a support device 1 for supporting a graphite boat, a clip device 2 for holding a silicon wafer, and a feeding device for lifting and moving the graphite boat onto the support device 1, the clip device 2 is disposed on one side of the top surface of the support device 1, and the feeding device is disposed on the front portion of the support device 1, the clip device 2 includes a moving plate 21, a rotating assembly 25, an elevating assembly 26 and a clip assembly 27, wherein the rotating assembly 25 for turning is disposed right above the moving plate 21, the elevating assembly 26 is vertically and upwardly disposed on the top of the rotating assembly 25, and the clip assembly 27 for holding a silicon wafer is horizontally disposed on the elevating assembly 26, when in use, the graphite boat is lifted by the feeding device in the vertical direction, and reaches the top plate 12 of the case 11, then the graphite boat is placed on the carriage 14, then the silicon wafer is uniformly held and laid aside from the graphite boat by the clip device 2, thereby facilitating subsequent holding, and the clip device 2 can better adjust the position of the graphite boat and the angle for holding the silicon wafer.
Referring to fig. 3, the supporting device 1 includes a case 11 and a top plate 12, wherein the top plate 12 is horizontally fixed on the top surface of the case 11, a plurality of sliding grooves 13 are horizontally formed through the bottom surface on one side of the top surface of the top plate 12, a carriage 14 for carrying a graphite boat is horizontally and slidably mounted in the sliding grooves 13, a plurality of placing frames 16 for containing silicon wafers are fixed on the other side of the top surface of the top plate 12, a plurality of first cylinders 15 are horizontally and fixedly mounted inside the case 11, and output ends of the first cylinders 15 are connected to the bottom end surface of the carriage 14, so that the graphite boat is driven by the first cylinders 15 to be slidably transported, and the silicon wafers are heated and loaded in a later stage.
Referring to fig. 5, 6, 7 and 8, the moving plate 21 is horizontally fixed on the rear end surface of the top plate 12, two first sliding bars 22 are horizontally fixed on the top surface of the moving plate 21, a through groove is formed in the middle of the top surface of the moving plate 21 through the bottom surface, bearing blocks 23 are vertically fixed at both ends of the bottom surface of the moving plate 21, a translation screw 24 is rotatably connected between the bearing blocks 23 through a bearing, a fourth motor for driving the translation screw 24 is horizontally installed on the bearing block 23 at one end of the moving plate 21, the translation screw 24 is driven to rotate by the fourth motor, the rotating assembly 25 includes a moving seat 251, the moving seat 251 is horizontally arranged right above the moving plate 21, a first sliding cylinder 252 slidably sleeved on the first sliding bar 22 is horizontally fixed on the bottom surface of the moving seat 251, a translation screw 253 is horizontally fixed in the through groove formed in the moving seat 251 and vertically downward through the bottom surface of the moving plate 21, the translation screw 253 is in threaded through fit connection with the translation screw 24, the top surface of the moving seat 251 is vertically and upwardly rotatably connected with a rotating shaft 254 through a bearing, a driven gear 257 is horizontally installed on the rotating shaft 254, a first motor 255 is vertically and upwardly installed on the top surface of the moving seat 251, a driving gear 256 meshed with the driven gear 257 is installed at the output end of the first motor 255, the lifting assembly 26 comprises a sliding frame plate 261, a sliding block 262 and a flat push plate 268, wherein the sliding frame plate 261 is vertically arranged right above the moving seat 251, the bottom surface of the sliding frame plate 261 is fixedly connected with the top surface of the rotating shaft 254, a sliding block 262 is vertically and slidably installed in the sliding frame plate 261, the flat push plate 268 used for installing the clip component 27 is rotatably arranged at one end of the sliding block 262, a second cylinder 263 is vertically and downwardly installed at the top of the sliding frame plate 261, and the output end of the second cylinder 263 is connected to the sliding block 262, a second motor 264 is horizontally installed at the other end of the sliding block 262, a rotating frame 265 is installed between the flat push plate 268 and the sliding block 262, a rotating rod on the rotating frame 265 penetrates through the sliding block 262 and is rotatably connected, the end part of the rotating rod on the rotating frame 265 is connected with the output end of the second motor 264, a flat push cylinder 266 is horizontally fixed at one end of the rotating frame 265 close to the flat push plate 268, the other end of the flat push cylinder 266 is fixed on the flat push plate 268, an expansion link 267 is arranged between the flat push plate 268 and the sliding block 262, both ends of the expansion link 267 are respectively fixed on the end surfaces of the flat push plate 268 adjacent to the sliding block 262, the expansion link 267 is equivalent to a sliding guide rod, the clamping piece assembly 27 comprises a clamping plate 271 and a clamping piece 274, wherein the clamping plate 271 is horizontally arranged, one end of the clamping plate 271 is fixed on the flat push plate 268, an assembling groove 272 is penetratingly formed on the clamping plate 271, and a plurality of sliding seats 273 are installed on the top surface of the clamping plate 271 along the horizontal direction, the plurality of sliding seats 273 are slidably mounted in the assembly grooves 272 on the clamping plate 271, clamping pieces 274 are vertically and downwardly fixed on the bottom surfaces of the plurality of sliding seats 273, a plurality of positioning screw holes 276 are vertically formed in the top surface of the clamping plate 271 along the horizontal direction, fixing bolts 275 are vertically and downwardly threaded on the sliding seats 273 in a penetrating manner, the fixing bolts 275 are matched with the positioning screw holes 276 for mounting the sliding seats 273 on the clamping plate 271, suction cups 277 are respectively and penetratingly mounted on the clamping pieces 274, suction pumps 278 are communicated with the suction cups 277, suction pumps 279 are horizontally fixed on the clamping plate 271, air inlets of the suction pumps 279 are communicated with air inlet pipes, the air inlet pipes of the suction pumps 279 are communicated with the suction pipes 278, when the silicon wafer clamping device is used, the translation screw rods 24 are driven by a fourth motor to rotate to drive the lifting assembly 26 to horizontally slide on the moving plate 21, the position for clamping the silicon wafer is adjusted, and then the second air cylinder 263 is used for vertically pushing the sliding block 262 to vertically slide in the sliding frame 261, the height of the clamping piece is adjusted, then the sucking discs 277 on the plurality of clamping pieces 274 on the clamping piece assembly 27 are utilized, the sucking pump 279 is started to be communicated with the sucking discs 277 through the sucking pipes 278, negative pressure is generated to adsorb silicon wafers on the clamping pieces 274, then the rotating assembly 25 is utilized to drive the driving gear 256 to be matched with the driven gear 257 on the rotating shaft through the first motor 255 to rotate, so that the clamping direction is changed, multi-directional clamping adjustment is achieved, the clamping flexibility is improved, the angle can be adjusted when the silicon wafers are placed through the second motor 264, and the sucking pipes 278 are prevented from entering the touch placing frame 16. In this embodiment, two placing frames 16 are provided, corresponding to two graphite boats, and the object to be clamped by the clip assembly 27 can be selected by providing the horizontal pushing cylinder 266 and the telescopic rod 267.
Referring to fig. 2, 4 and 9, the feeding device includes a material supporting frame 31 for lifting the graphite boat for feeding and a transfer plate 35 for transferring the graphite boat, wherein the material supporting frame 31 is vertically fixed on the front end surface of the case 11, the transfer plate 35 is disposed at the front portion of the material supporting frame 31, slideways are vertically penetrated through the vertical end surfaces at the two sides of the material supporting frame 31, the middle portion of the material supporting frame 31 is vertically and rotatably connected with a material supporting screw rod 32 through a bearing, a third motor 321 is vertically fixed on the bottom surface of the material supporting frame 31, the output end of the third motor 321 is connected to the rotating shaft at the bottom end of the material supporting screw rod 32, a material supporting sliding plate 33 is vertically and slidably mounted in the slideway of the material supporting frame 31, a material supporting screw cylinder 331 which is in threaded fit with the material supporting screw rod 32 is vertically penetrated through and fixed in the middle portion of the material supporting sliding plate 33, a second sliding rod 332 is horizontally fixed on the front end surface of the material supporting sliding plate 33, and a material supporting frame 34 is horizontally and slidably disposed right above the second sliding rod 332, a second sliding cylinder 341 which is sleeved on the second sliding rod 332 in a sliding manner is horizontally fixed on the bottom surface of the material supporting frame 34, baffle plates 342 are vertically fixed at both ends of the top surface of the material supporting frame 34, a third cylinder 343 for compressing a graphite boat is horizontally fixed on the baffle plates 342, rollers 351 are installed on the bottom surface of the transfer plate 35, a plurality of support frames 36 are uniformly fixed on the top surface of the transfer plate 35 along the horizontal direction, a plurality of guide wheels 361 are connected in the support frames 36 in a horizontal rotating manner, a push frame 37 is vertically and upwardly fixed at the front end of the top surface of the transfer plate 35, a push plate 38 is arranged on one side of the push frame 37 close to the transfer plate 35, a push screw rod 39 is installed on the push frame 37 in a penetrating manner through a horizontal thread, one end of the push screw rod 39 is rotatably connected on the push plate 38 through a bearing, a third sliding rod 381 is horizontally fixed on one end surface of the push plate 38 and penetrates through the push frame 37 for guiding the push plate 38 to translate, during use, the transfer plate 35 carries graphite boats to reach the stripping frame 31, the pushing screw 39 is manually rotated to horizontally push the push plate 38 to horizontally slide, the graphite boats are pushed to slide on the transfer plate 35 and are pushed to be conveyed to the material supporting frame 34, the material supporting screw 32 is driven to rotate by the third motor 321, the material supporting frame 34 is driven to ascend in the vertical direction and reaches the top plate 12 of the case 11, and then the graphite boats are placed on the bearing sliding frame 14.
The working principle is as follows: when the silicon wafer clamping device is used, a transfer plate 35 on the feeding device is used for carrying a graphite boat to the stripping frame 31, then a pushing screw 39 is manually rotated to horizontally push a push plate 38 to horizontally slide, the graphite boat is pushed to slide on the transfer plate 35 to be conveyed to the material supporting frame 34, then a third motor 321 is used for driving a material supporting screw 32 to rotate, the material supporting frame 34 is driven to ascend in the vertical direction to reach the top plate 12 of the case 11, then the graphite boat is placed on the bearing sliding frame 14, and then the silicon wafer is uniformly clamped and laid in the placing frame 16 by the clamping piece device 2, so that the clamping use is facilitated.
Example 2:
the device provided by the embodiment of the present invention has the same implementation principle and the same technical effects as those of the embodiment 1, and for brief description, corresponding contents in the embodiment 1 can be referred to for the points not mentioned in the embodiment.
Referring to fig. 10, 11 and 12, the loading device includes a moving frame 41 and a clamping assembly 43, the moving frame 41 includes a bottom plate and a top plate 42, wherein the top plate 42 is fixed above the bottom plate via a plurality of vertical rods, rollers are mounted on the bottom surface of the bottom plate, the clamping assembly 43 includes a horizontally disposed slide bar 431, the slide bar 431 is disposed above the top plate 42, a support plate 432 is vertically fixed on the front end of the top plate 42, a fourth cylinder 433 is vertically fixed upwards on the top surface of the support plate 432, an output end of the fourth cylinder 433 is connected to the bottom surface of the slide bar 431, a fourth slide bar 434 is vertically fixed downwards on the bottom surface of the end of the slide bar 431, the fourth slide bar 434 is vertically inserted into the support plate 432 in a sliding manner, a slide block seat 436 is slidably connected to the slide bar 431, a fifth cylinder 435 is horizontally fixed on one end of the slide bar 431, an output end of the fifth cylinder 435 is connected to the slide block seat 436, two ends of the slide block seat 436 are slidably connected to a clamping frame 437, a sixth cylinder 438 is horizontally fixed on the slide block seat 436, an output end of the sixth cylinder 437, when the slide block 431 is used, the graphite boat supporting device is moved to the upper end of the graphite boat supporting device, and the graphite boat supporting device is driven to move on the graphite boat supporting seat 433, and then the graphite boat supporting seat 436, and the graphite boat supporting device is moved to move on the graphite boat supporting seat 436, and the graphite boat supporting seat 1, and the graphite boat supporting seat 436.
The working principle is as follows: during use, a graphite boat is placed on the top plate 42 of the moving frame 41 and moves to a feeding position of the supporting device 1, then the fifth air cylinder 435 is started to drive the sliding block seat 436 to slide on the sliding strip 431, the sliding block seat 436 moves right above the graphite boat, then the fourth air cylinder 433 is started to drive the sliding strip 431 to move downwards towards the graphite boat, then the clamping frame 437 is driven by the sixth air cylinder 438 to clamp two ends of the graphite boat and slide to the top plate 12 of the case 11, then the graphite boat is placed on the bearing sliding frame 14, and then the silicon wafers are uniformly clamped and laid in the placing frame 16 by the clamping piece device 2, so that clamping and use are facilitated.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A graphite boat transfer device is characterized in that: including strutting arrangement (1) that is used for bearing the weight of the graphite boat, clamping piece device (2) that are used for the centre gripping silicon chip and be used for lifting and remove the graphite boat to the loading attachment on strutting arrangement (1), top surface one side of strutting arrangement (1) is provided with clamping piece device (2), and the front portion of strutting arrangement (1) is provided with loading attachment, clamping piece device (2) are including moving plate (21), rotating assembly (25), lifting unit (26) and clamping piece subassembly (27), wherein are provided with directly over moving plate (21) and are used for turning to rotating assembly (25), and the vertical upwards installation in top of rotating assembly (25) lifting unit (26), and lifting unit (26) upper level is provided with clamping piece subassembly (27) that are used for the centre gripping silicon chip.
2. The graphite boat transfer device according to claim 1, wherein the support device (1) comprises a case (11) and a top plate (12), wherein the top plate (12) is horizontally fixed on the top surface of the case (11), a plurality of sliding grooves (13) are horizontally formed through the bottom surface of one side of the top surface of the top plate (12), a bearing carriage (14) for bearing the graphite boat is horizontally and slidably mounted in each sliding groove (13), a plurality of placing frames (16) for placing silicon wafers are fixed on the other side of the top surface of the top plate (12), a plurality of first cylinders (15) are horizontally and fixedly mounted in the case (11), and output ends of the first cylinders (15) are connected to the bottom end surface of the bearing carriage (14).
3. The graphite boat conveying device according to claim 2, wherein the moving plate (21) is horizontally fixed on the rear end face of the top plate (12), two first sliding rods (22) are horizontally fixed on the top surface of the moving plate (21), a through groove is formed in the middle of the top surface of the moving plate (21) and penetrates through the bottom surface, bearing blocks (23) are vertically fixed at two ends of the bottom surface of the moving plate (21), a translation screw (24) is rotatably connected between the bearing blocks (23) through a bearing, and a fourth motor for driving the translation screw (24) is horizontally installed on the bearing block (23) at one end of the moving plate (21).
4. The graphite boat transfer device according to claim 3, wherein the rotating assembly (25) comprises a moving seat (251), the moving seat (251) is horizontally arranged right above the moving plate (21), a first sliding barrel (252) which is slidably sleeved on the first sliding rod (22) is horizontally fixed on the bottom surface of the moving seat (251), a translation screw barrel (253) is horizontally fixed on the middle portion of the bottom surface of the moving seat (251) and vertically penetrates through a through groove in the moving plate (21) downwards, the translation screw barrel (253) is in threaded fit connection with the translation screw (24), a rotating shaft (254) is vertically and upwards rotatably connected to the top surface of the moving seat (251) through a bearing, a driven gear (257) is horizontally arranged on the rotating shaft (254), a first motor (255) is vertically and upwards arranged on the top surface of the moving seat (251), and a driving gear (256) which is meshed with the driven gear (257) is arranged at an output end of the first motor (255).
5. The graphite boat transfer device according to claim 4, wherein the lifting assembly (26) comprises a sliding frame plate (261), a sliding block (262) and a flat push plate (268), wherein the sliding frame plate (261) is vertically arranged right above the moving seat (251), the bottom surface of the sliding frame plate (261) is fixedly connected with the top surface of the rotating shaft (254), the sliding block (262) is vertically and slidably arranged in the sliding frame plate (261), the flat push plate (268) for mounting the clamping piece assembly (27) is rotatably arranged at one end of the sliding block (262), a second air cylinder (263) is vertically and downwardly arranged at the top of the sliding frame plate (261), the output end of the second air cylinder (263) is connected to the sliding block (262), and a second motor (264) is horizontally arranged at the other end of the sliding block (262).
6. The graphite boat transfer device according to claim 5, wherein a rotating frame (265) is arranged between the flat push plate (268) and the sliding block (262), a rotating rod on the rotating frame (265) is connected to the sliding block (262) in a penetrating and rotating mode through a bearing, the end portion of the rotating rod on the rotating frame (265) is connected with the output end of the second motor (264), a second cylinder (263) is horizontally fixed to one end, close to the flat push plate (268), of the rotating frame (265), the other end of the second cylinder (263) is fixed to the flat push plate (268), an expansion link (267) is arranged between the flat push plate (268) and the sliding block (262), and two ends of the expansion link (267) are respectively fixed to end faces, adjacent to the flat push plate (268) and the sliding block (262).
7. The graphite boat transfer device according to claim 6, wherein the clamping piece assembly (27) comprises a clamping plate (271) and a clamping piece (274), wherein the clamping plate (271) is horizontally arranged, one end of the clamping plate (271) is fixed on a flat push plate (268), a splicing groove (272) is formed in the clamping plate (271) in a penetrating manner, a plurality of sliding seats (273) are horizontally arranged on the top surface of the clamping plate (271), the sliding seats (273) are slidably arranged in the splicing groove (272) in the clamping plate (271), and the clamping piece (274) is vertically fixed on the bottom surfaces of the sliding seats (273) downwards.
8. The graphite boat transfer device according to claim 7, wherein a plurality of positioning screw holes (276) are vertically formed in the top surface of the clamp plate (271) along the horizontal direction, fixing bolts (275) are vertically and downwardly threaded on the slide base (273) in a penetrating manner, the fixing bolts (275) are matched with the positioning screw holes (276) to mount the slide base (273) on the clamp plate (271), suction cups (277) are respectively mounted on the clamping pieces (274) in a penetrating manner, suction pipes (278) are communicated with the suction cups (277), suction pumps (279) are horizontally fixed on the clamp plate (271), air inlets of the suction pumps (279) are communicated with air inlet pipes, and the air inlet pipes of the suction pumps (279) are communicated with the suction pipes (278).
9. The graphite boat transfer device according to claim 2, wherein the loading device comprises a material carrier (31) for lifting the graphite boat for loading and a transfer plate (35) for transferring the graphite boat, wherein the material supporting frame (31) is vertically fixed on the front end surface of the case (11), a transfer plate (35) is arranged at the front part of the material supporting frame (31), and slideways are vertically penetrated on the vertical end surfaces at the two sides of the material supporting frame (31), the middle part of the material supporting frame (31) is vertically and rotatably connected with a material supporting screw rod (32) through a bearing, a third motor (321) is vertically fixed on the bottom surface of the material supporting frame (31), and the output end of the third motor (321) is connected on the rotating shaft at the bottom end of the material supporting screw rod (32), a material supporting sliding plate (33) is vertically and slidably arranged in a slideway of the material supporting frame (31), and a material supporting screw cylinder (331) which is in threaded fit with the material supporting screw rod (32) vertically penetrates through the middle part of the material supporting sliding plate (33), a second sliding rod (332) is horizontally fixed on the front end surface of the material supporting sliding plate (33), and a material supporting frame (34) is horizontally arranged right above the second sliding rod (332) in a sliding way, a second sliding cylinder (341) which is sleeved on the second sliding rod (332) in a sliding way is horizontally fixed on the bottom surface of the material supporting frame (34), and both ends of the top surface of the material supporting frame (34) are vertically fixed with baffle plates (342), and a third cylinder (343) used for compressing the graphite boat is horizontally fixed on the baffle (342).
10. The graphite boat conveying device according to claim 9, wherein rollers (351) are mounted on the bottom surface of the transfer plate (35), a plurality of support frames (36) are uniformly fixed on the top surface of the transfer plate (35) along the horizontal direction, a plurality of guide wheels (361) are horizontally connected in the support frames (36) in a rotating manner, a pushing frame (37) is vertically fixed on the front end of the top surface of the transfer plate (35) upwards, a pushing plate (38) is arranged on one side, close to the transfer plate (35), of the pushing frame (37), a pushing screw (39) is mounted on the pushing frame (37) in a penetrating manner through a horizontal thread, one end of the pushing screw (39) is rotatably connected on the pushing plate (38) through a bearing, and a third sliding rod (381) is horizontally fixed on one end surface of the pushing plate (38) and penetrates through the pushing frame (37) for guiding the pushing plate (38) to translate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211045436.3A CN115367470B (en) | 2022-08-30 | 2022-08-30 | Graphite boat transfer device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211045436.3A CN115367470B (en) | 2022-08-30 | 2022-08-30 | Graphite boat transfer device |
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| CN115367470A true CN115367470A (en) | 2022-11-22 |
| CN115367470B CN115367470B (en) | 2023-10-13 |
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|---|---|
| CN115367470B (en) | 2023-10-13 |
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