CN220057015U

CN220057015U - Transfer device and vacuum coating equipment

Info

Publication number: CN220057015U
Application number: CN202321616948.0U
Authority: CN
Inventors: 黄永长; 朱振华; 龙汝磊; 吴萍
Original assignee: Optorun Shanghai Co Ltd
Current assignee: Optorun Shanghai Co Ltd
Priority date: 2023-06-25
Filing date: 2023-06-25
Publication date: 2023-11-21
Anticipated expiration: 2033-06-25

Abstract

The utility model relates to the technical field of vacuum coating, and particularly discloses a transfer device and vacuum coating equipment. The device is internally provided with a substrate jig conveying device, a positioning deviation correcting device, a lifting device and a mechanical claw module; the substrate jig conveying device is used for conveying the conveying device among the wafer feeding chamber, the conveying chamber and the wafer discharging chamber, and the conveying device passes through a lifting position in the conveying chamber and is used for accommodating the substrate jig; the lifting device can enable the substrate jig positioned at the waiting position to move between the waiting position and the clamping position; the mechanical claw module is used for carrying the substrate jig between the clamping position and the processing position. The device can accomplish the business turn over piece and the transport operation to base plate tool under the prerequisite that reduces broken vacuum risk, has promoted the effect of coating film.

Description

Transfer device and vacuum coating equipment

Technical Field

The utility model relates to the technical field of vacuum coating, in particular to a transfer device and vacuum coating equipment.

Background

When the coating equipment continuously coats, the coated substrate loaded on the substrate frame is taken out of the coating chamber after coating is completed, and the substrate to be coated is placed on the substrate frame in the coating chamber. In the prior art, when the film coating substrate is subjected to film coating and film coating, a vacuum film coating chamber is required to be broken in vacuum, and the film coating and film coating of the film coating substrate are manually completed, so that the production efficiency of vacuum film coating is low, the repeatability of continuous film coating is not easy to maintain, and the film coating quality is further affected. Especially for the extra-large overweight base plate or base plate jig with the diameter of tens of centimeters and the weight of more than 10 kg, when the extra-large overweight base plate or base plate jig needs to be conveyed at an angle, the process of loading and unloading the base plate is generally long in time consumption, and the coating efficiency and the coating effect are obviously affected.

In view of the foregoing, there is a need for a transfer device with a high degree of automation. The device can ensure that the upper and lower plates of the coating substrate are carried out under the state that the coating equipment is always in high vacuum, thereby avoiding the risk of vacuum breaking of the coating chamber and further realizing repeated and long-time continuous coating of the coating equipment under the condition that the coating environment of the coating chamber is ensured to be relatively stable.

Disclosure of Invention

The utility model aims to provide a transfer device and vacuum coating equipment, which are used for completing substrate jig wafer in-out operation and substrate jig conveying operation under the condition of reducing the influence of vacuum breaking on the high air pressure state in a conveying chamber as much as possible, so as to reduce the influence of vacuum breaking on coating and improve the film forming effect and the coating efficiency.

To achieve the purpose, the utility model adopts the following technical scheme:

the transfer device is used for transferring the substrate jig and comprises a wafer inlet chamber, a wafer carrying chamber and a wafer outlet chamber which are sequentially and selectively communicated, wherein the wafer inlet chamber and the wafer outlet chamber are both selectively communicated with the external environment, the wafer carrying chamber is selectively communicated with the film coating chamber, and the substrate jig conveying device, the positioning deviation correcting device, the lifting device and the mechanical claw module are arranged in the transfer device; the substrate jig conveying device is used for conveying a conveying device among the wafer feeding chamber, the conveying chamber and the wafer discharging chamber, and enabling the conveying device to pass through a lifting position positioned in the conveying chamber, wherein the conveying device is used for accommodating the substrate jig; the lifting device can enable the substrate jig positioned at the waiting position to move between the waiting position and the clamping position; the mechanical claw module is used for carrying the substrate jig between the clamping position and the processing position, and the processing position is located in the coating chamber.

As the preferred technical scheme of transfer device, advance the indoor piece conveyor and advance piece positioning mechanism that is equipped with of piece, advance the piece conveyor and be used for with advance the indoor conveying device of piece passes through advance the piece position and conveys to the base plate tool conveyor input, advance piece positioning mechanism selectively drive be located advance the conveying device of piece position contact or break away from advance piece conveyor.

As the preferred technical scheme of transfer device, go out the indoor piece conveyor and go out piece positioning mechanism that is equipped with of piece, go out piece conveyor be used for with the substrate tool conveyor output carry the device to go out the piece indoor through going out the piece position conveying, go out piece positioning mechanism selectivity drive be located go out the piece position carry the device contact or break away from go out piece conveyor.

As the preferred technical scheme of transfer device, base plate tool conveyor includes slide rail frame and a plurality of transport pivot, transport pivot rotate connect in slide rail frame, a plurality of transport pivot is followed the length direction interval distribution of slide rail frame, coaxial rigid coupling has the transport gyro wheel in the transport pivot, the transport gyro wheel can with conveyor contacts.

As a preferred technical scheme of the transfer device, the substrate jig conveying device further comprises a conveying driving rotating shaft and a conveying driving unit, wherein the conveying driving rotating shaft extends along the length direction of the sliding rail frame, and the conveying driving unit is coaxially and fixedly connected to one end of the conveying driving rotating shaft and is used for driving the conveying driving rotating shaft to rotate around the axis of the conveying driving rotating shaft; the driving rotating shafts are coaxially and fixedly connected with first transmission rollers, the end parts of the conveying rotating shafts are coaxially and fixedly connected with second transmission rollers, the number of the second transmission rollers is the same as that of the second transmission rollers, and each first transmission roller is in transmission connection with one second transmission roller.

As the preferred technical scheme of transfer device, the slide rail frame has two and is parallel to each other, carry the pivot simultaneously with two slide rail frame rotates to be connected, the top rotation of slide rail frame is connected with a plurality of auxiliary guide pulleys, and is a plurality of auxiliary guide pulleys are followed the length direction interval distribution of slide rail frame, just auxiliary guide pulley can with the lateral wall normal running fit of conveyor.

As the preferred technical scheme of transfer device, transfer device still includes location deviation correcting device, location deviation correcting device can be in the transmission position with the lifting position is removed, is located the transmission position location deviation correcting device with the conveyer interval sets up, is located the lifting position location deviation correcting device with the bottom of conveyer offsets and leans on, makes the base plate tool is located the waiting position.

As the preferable technical scheme of the transfer device, the lifting device comprises a lifting platform and a lifting slide rail, wherein the lifting platform is arranged on the lifting slide rail in a sliding manner along the length direction of the lifting slide rail, and the lifting platform is used for driving the substrate jig to move between the waiting position and the clamping position.

As the preferred technical scheme of transfer device, the gripper module is connected with translation straight line module, gripper module slides and locates and carries the claw slide rail, translation straight line module can drive gripper module is followed carry the length direction of claw slide rail and remove, makes gripper module can be partial stretch into the coating film room.

The vacuum coating equipment comprises a coating chamber for coating the substrate jig and the transfer device, wherein a positioning device is further arranged in the coating chamber and can position the substrate jig at the processing position.

The utility model has the beneficial effects that:

this transfer device has avoided the direct contact of transport room and external environment through setting up the mode of advance piece room, transport room and play piece room of selectivity intercommunication in proper order, has reduced the influence that broken vacuum caused to the transport room to can accomplish the business turn over piece operation of base plate tool and the transport operation of base plate tool by base plate tool conveyor, lifting means and gripper module under the prerequisite that keeps the indoor high vacuum state of coating film, reduce the influence that broken vacuum caused the coating film operation from this, improve film forming effect and the coating film efficiency of base plate on the base plate tool. The substrate jig conveying device realizes the conveying of the conveying device between the chambers, and the conveying of the substrate jig between the conveying chamber and the coating chamber can be realized through the lifting in place of the lifting device and the clamping action of the mechanical claw module.

Drawings

FIG. 1 is a schematic diagram of a vacuum coating apparatus according to an embodiment of the present utility model;

FIG. 2 is a side view of a transfer device provided in an embodiment of the present utility model;

FIG. 3 is a top view of a transfer device according to an embodiment of the present utility model;

FIG. 4 is a side view of a substrate jig transporting apparatus, a positioning and rectifying apparatus, a transporting apparatus and a substrate jig according to an embodiment of the present utility model;

FIG. 5 is a schematic diagram of a substrate jig transporting apparatus, a positioning and correcting apparatus, a transporting apparatus and a substrate jig according to an embodiment of the present utility model;

fig. 6 is a schematic structural diagram of a substrate jig transporting device, a positioning and rectifying device, a lifting device, a conveying device and a substrate jig according to an embodiment of the utility model.

In the figure:

100. a conveying device;

200. a film plating chamber;

310. a substrate jig conveying device; 311. a slide rail frame; 312. an auxiliary guide wheel; 313. a conveying rotating shaft; 314. conveying rollers; 315. a second drive roller; 316. a first drive roller; 317. conveying and driving the rotating shaft; 318. a conveyance driving unit; 320. positioning and correcting device; 330. a lifting device; 331. lifting the platform; 332. lifting the sliding rail; 333. a carrying claw slide rail; 334. a translation linear module;

400. a transfer device; 410. a sheet feeding chamber; 420. a slice outlet chamber; 430. a carrying room;

510. a sheet feeding and conveying device; 520. a sheet discharging and conveying device; 530. a sheet feeding positioning mechanism; 540. a sheet discharging positioning mechanism;

600. a substrate fixture.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first location" and "second location" are two distinct locations and wherein the first feature is "above," "over" and "over" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is level above the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

As shown in fig. 1 to 6, a substrate to be coated can be placed on the substrate jig 600.

The embodiment provides a transfer device 400, wherein the transfer device 400 is used for transferring a substrate jig 600, and comprises a wafer inlet chamber 410, a transfer chamber 430 and a wafer outlet chamber 420 which are sequentially and selectively communicated, wherein the wafer inlet chamber 410 and the wafer outlet chamber 420 are selectively communicated with the external environment, the transfer chamber 430 is selectively communicated with a coating chamber 200, and a substrate jig conveying device 310, a positioning deviation correcting device 320, a lifting device 330 and a mechanical claw module are arranged in the transfer device 400; the substrate jig transporting apparatus 310 is configured to transport the transporting apparatus 100 between the wafer loading chamber 410, the transporting chamber 430 and the wafer unloading chamber 420, and the transporting apparatus 100 is configured to receive the substrate jig 600 by passing the transporting apparatus 100 through a lifting position located in the transporting chamber 430; the lifting device 330 can enable the substrate jig 600 positioned at the waiting position to move between the waiting position and the clamping position; the gripper module is used to transport the substrate jig 600 between a clamping position and a processing position, the processing position being located within the coating chamber 200.

The transfer device 400 avoids the direct contact between the transfer chamber 430 and the external environment by arranging the wafer inlet chamber 410, the transfer chamber 430 and the wafer outlet chamber 420 which are sequentially and selectively communicated, and reduces the influence of vacuum breaking on the transfer chamber 430, so that the wafer inlet and outlet operation of the substrate jig 600 and the transfer operation of the substrate jig 600 can be completed by utilizing the substrate jig conveying device 310, the lifting device 330 and the gripper module on the premise of keeping the high vacuum state in the coating chamber 200, the influence of vacuum breaking on the coating operation is reduced, and the film forming effect and the coating efficiency of the substrate on the substrate jig 600 are improved. The substrate jig transporting device 310 carries the substrate jig 600 between the carrying chamber 430 and the plating chamber 200 by the lifting of the lifting device 330 and the clamping operation of the gripper modules.

In this embodiment, a feeding conveyor 510 and a feeding positioning mechanism 530 are disposed in the feeding chamber 410, the feeding conveyor 510 is configured to convey the conveying device 100 in the feeding chamber 410 to the input end of the substrate jig conveyor 310 through a feeding position, and the feeding positioning mechanism 530 selectively drives the conveying device 100 located at the feeding position to contact or separate from the feeding conveyor 510. The arrangement of the sheet feeding and conveying device 510 achieves the purpose of conveying the conveying device 100 in the sheet feeding chamber 410, and meanwhile, the sheet feeding and positioning mechanism 530 can be utilized to enable the conveying device 100 to leave or return to the sheet feeding and conveying device 510 in the sheet feeding chamber 410, so that the movement requirement of the conveying device 100 is met, the control of the working state of the conveying device 100 in the sheet feeding chamber 410 is facilitated, the working flexibility of the transferring device 400 is improved, and the risk of accidents in the operation process of the transferring device 400 is reduced.

Further, a sheet discharging and conveying device 520 and a sheet discharging and positioning mechanism 540 are disposed in the sheet discharging chamber 420, the sheet discharging and conveying device 520 is used for conveying the conveying device 100 at the output end of the substrate jig conveying device 310 into the sheet discharging chamber 420 through the sheet discharging position, and the sheet discharging and positioning mechanism 540 selectively drives the conveying device 100 at the sheet discharging position to contact or separate from the sheet discharging and conveying device 520. The setting of the sheet discharging and conveying device 520 achieves the purpose of conveying the conveying device 100 in the conveying chamber 430, and meanwhile, the sheet discharging and positioning mechanism 540 can be utilized to enable the conveying device 100 to leave or return to the sheet discharging and conveying device 520 in the sheet discharging chamber 420, so that the movement requirement of the conveying device 100 is met, the control of the working state of the conveying device 100 in the sheet discharging chamber 420 is facilitated, the working flexibility of the transferring device 400 is improved, and the risk of accidents in the operation process of the transferring device 400 is reduced.

The transfer device further comprises a positioning and rectifying device 320, the positioning and rectifying device 320 can move between a conveying position and a lifting position, the positioning and rectifying device 320 positioned at the conveying position is arranged at intervals with the conveying device 100, and the positioning and rectifying device 320 positioned at the lifting position abuts against the bottom of the conveying device 100, so that the substrate jig 600 is positioned at a waiting position.

The positioning deviation correcting device 320 enables the conveying device 100 at the lifting position to leave or return to the substrate jig conveying device 310, so that the substrate jig 600 is ensured to be accurately positioned at the waiting position, and the subsequent actions can be conveniently and smoothly completed.

In this embodiment, the substrate jig conveying device 310 includes a sliding rail frame 311 and a plurality of conveying shafts 313, the conveying shafts 313 are rotatably connected to the sliding rail frame 311, the conveying shafts 313 are distributed at intervals along the length direction of the sliding rail frame 311, conveying rollers 314 are coaxially and fixedly connected to the conveying shafts 313, and the conveying rollers 314 can contact with the conveying device 100. The conveying rollers 314 are in contact with the conveying device 100 to achieve the purpose of conveying, so that the substrate jig conveying device 310 can accurately drive the conveying device 100, the conveying stability of the conveying device 100 is improved, the structural cooperation of the substrate jig conveying device 310 and the positioning deviation correcting device 320 is facilitated, and the setting difficulty of the positioning deviation correcting device 320 is reduced.

Further, the substrate jig conveying device 310 further includes a conveying driving shaft 317 and a conveying driving unit 318, the conveying driving shaft 317 extends along the length direction of the sliding rail frame 311, and the conveying driving unit 318 is coaxially and fixedly connected to one end of the conveying driving shaft 317, for driving the conveying driving shaft 317 to rotate around its own axis; the driving shafts 317 are coaxially and fixedly connected with first transmission rollers 316, the end part of each conveying shaft 313 is coaxially and fixedly connected with second transmission rollers 315, the number of the second transmission rollers 315 is the same as that of the second transmission rollers 315, and each first transmission roller 316 is in transmission connection with one second transmission roller 315. Through the rotation driving of the conveying driving rotating shaft 317 and the transmission cooperation of the first transmission roller 316 and the second transmission roller 315, the purpose of synchronously driving the conveying roller 314 is achieved, and further the transmission action of the substrate jig conveying device 310 on the conveying device 100 in the length direction of the sliding rail frame 311 is achieved. The improved structure is simple, the occupied space is small, the working stability is high, and the efficient operation of the substrate jig conveying device 310 is ensured.

In this embodiment, two slide rail frames 311 are provided and parallel to each other, the conveying shaft 313 is simultaneously rotatably connected with the two slide rail frames 311, the top ends of the slide rail frames 311 are rotatably connected with a plurality of auxiliary guide wheels 312, the plurality of auxiliary guide wheels 312 are distributed at intervals along the length direction of the slide rail frames 311, and the auxiliary guide wheels 312 can be rotatably matched with the side walls of the conveying device 100. The design that the conveying rotating shaft 313 is connected to the two parallel sliding rail frames 311 in a rotating way is beneficial to realizing stress balance on the conveying rotating shaft 313, and the driving capability of the conveying rollers 314 on the conveying device 100 is ensured; the auxiliary guide wheels 312 are arranged on two sides to limit the conveying device 100, so that the risk that the conveying device 100 is separated from the substrate jig conveying device 310 due to accidents is greatly reduced, the hidden danger that the conveying device 400 operates unexpectedly is reduced, the condition that the conveying device 400 stops operating due to accidents is reduced, the smooth operation of the conveying device 400 is ensured, and the working efficiency of the conveying device 400 is improved.

Illustratively, the positioning deviation correcting device 320 includes a substrate jig lifting assembly and a lifting driving assembly, wherein the lifting driving assembly is used for driving the substrate jig lifting assembly to lift along the vertical direction; when the positioning and rectifying device 320 is at the lifting position, the lifting driving assembly passes through the substrate jig conveying device 310. Specifically, the lift drive assembly passes between two adjacent transport shafts 313. The lifting and lowering actions of the conveying device 100 are completed by the substrate jig lifting assembly in a lifting manner along the vertical direction, so that the conveying device 100 can leave or return to the substrate jig conveying device 310, the action of the positioning deviation correcting device 320 is simple and small in amplitude, the running stability is high, and the space is saved. The lifting driving assembly can penetrate through the design of the substrate jig conveying device 310, effectively compresses the space occupied by the positioning deviation correcting device 320, and is beneficial to reducing the volume of the carrying room 430, and meanwhile, the risk of position conflict between the positioning deviation correcting device 320 and other components is greatly reduced.

In the present embodiment, the lifting device 330 includes a lifting platform 331 and a lifting rail 332, the lifting platform 331 is slidably disposed on the lifting rail 332 along a length direction of the lifting rail 332, and the lifting platform 331 is used for driving the substrate fixture 600 to move between a waiting position and a clamping position. By virtue of the design that the lifting platform 331 slides along the length direction of the lifting slide rail 332, the lifting action of the substrate jig 600 between the waiting position and the clamping position can be completed, and the lifting device 330 has a simple structure and high working stability.

Illustratively, the gripper module is connected to the translational linear module 334, and the gripper module is slidably disposed on the gripper rail 333, and the translational linear module 334 can drive the gripper module to move along the length direction of the gripper rail 333, so that the gripper module can partially extend into the coating chamber 200. By means of the design that the gripper modules are slidably arranged on the conveying gripper sliding rails 333, the conveying action of the substrate jig 600 between the clamping position and the processing position can be completed, and the gripper modules are simple in structure and high in working stability.

The embodiment also provides vacuum coating equipment, which comprises a coating chamber 200 for coating the substrate jig 600 and the transfer device 400, wherein a positioning device is further arranged in the coating chamber 200, and the positioning device can position the substrate jig 600 positioned at the processing position.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims

1. Transfer device for transfer base plate tool (600), its characterized in that, including advancing piece room (410), transport room (430) and play piece room (420) of selective intercommunication in proper order, advance piece room (410) with go out piece room (420) all with external environment selective intercommunication, transport room (430) and coating film room (200) selective intercommunication, be equipped with in the transfer device:

a substrate jig transporting device (310) for transporting a transporting device (100) between the wafer inlet chamber (410), the transporting chamber (430) and the wafer outlet chamber (420), and passing the transporting device (100) through a lifting position located in the transporting chamber (430), wherein the transporting device (100) is used for accommodating the substrate jig (600);

a lifting device (330) capable of moving the substrate jig (600) located at a waiting position between the waiting position and a chucking position;

and the mechanical claw module is used for carrying the substrate jig (600) between the clamping position and the processing position, and the processing position is positioned in the coating chamber (200).

2. The transfer device according to claim 1, wherein a feeding conveying device (510) and a feeding positioning mechanism (530) are disposed in the feeding chamber (410), the feeding conveying device (510) is configured to convey the conveying device (100) in the feeding chamber (410) to the input end of the substrate jig conveying device (310) through a feeding position, and the feeding positioning mechanism (530) selectively drives the conveying device (100) located at the feeding position to contact with or separate from the feeding conveying device (510).

3. The transfer device according to claim 1, wherein a sheet discharging conveying device (520) and a sheet discharging positioning mechanism (540) are disposed in the sheet discharging chamber (420), the sheet discharging conveying device (520) is used for conveying the conveying device (100) at the output end of the substrate jig conveying device (310) into the sheet discharging chamber (420) through a sheet discharging position, and the sheet discharging positioning mechanism (540) selectively drives the conveying device (100) located at the sheet discharging position to contact with or separate from the sheet discharging conveying device (520).

4. The transfer device according to claim 1, wherein the substrate jig conveying device (310) comprises a sliding rail frame (311) and a plurality of conveying rotating shafts (313), the conveying rotating shafts (313) are rotatably connected to the sliding rail frame (311), the conveying rotating shafts (313) are distributed at intervals along the length direction of the sliding rail frame (311), conveying rollers (314) are coaxially fixedly connected to the conveying rotating shafts (313), and the conveying rollers (314) can be in contact with the conveying device (100).

5. The transfer device according to claim 4, wherein the substrate jig conveying device (310) further comprises a conveying driving shaft (317) and a conveying driving unit (318), the conveying driving shaft (317) extends along the length direction of the sliding rail frame (311), and the conveying driving unit (318) is coaxially fixedly connected to one end of the conveying driving shaft (317) and is used for driving the conveying driving shaft (317) to rotate around the axis thereof; the driving rotating shafts (317) are coaxially and fixedly connected with first transmission rollers (316), the end parts of the conveying rotating shafts (313) are coaxially and fixedly connected with second transmission rollers (315), the number of the second transmission rollers (315) is the same as that of the second transmission rollers (315), and each first transmission roller (316) is in transmission connection with one second transmission roller (315).

6. The transfer device according to claim 4, wherein two slide rail frames (311) are provided and are parallel to each other, the conveying rotating shaft (313) is simultaneously connected with the two slide rail frames (311) in a rotating manner, a plurality of auxiliary guide wheels (312) are connected to the top ends of the slide rail frames (311) in a rotating manner, the auxiliary guide wheels (312) are distributed at intervals along the length direction of the slide rail frames (311), and the auxiliary guide wheels (312) can be in rotating fit with the side walls of the conveying device (100).

7. The transfer device according to claim 1, further comprising a positioning and rectifying device (320), wherein the positioning and rectifying device (320) is movable between a transfer position and a lifting position, the positioning and rectifying device (320) in the transfer position is spaced from the conveying device (100), and the positioning and rectifying device (320) in the lifting position abuts against the bottom of the conveying device (100) so that the substrate jig (600) is positioned in the waiting position.

8. The transfer device according to claim 1, wherein the lifting device (330) comprises a lifting platform (331) and a lifting slide rail (332), the lifting platform (331) is slidably arranged on the lifting slide rail (332) along the length direction of the lifting slide rail (332), and the lifting platform (331) is used for driving the substrate fixture (600) to move between the waiting position and the clamping position.

9. The transfer device according to any one of claims 1 to 8, wherein the gripper module is connected to a translational linear module (334), the gripper module is slidably disposed on a conveying gripper rail (333), and the translational linear module (334) can drive the gripper module to move along a length direction of the conveying gripper rail (333), so that the gripper module can partially extend into the coating chamber (200).

10. Vacuum coating equipment, characterized in that the equipment comprises a coating chamber (200) for coating a substrate jig (600) and a transfer device according to any one of claims 1-9, wherein a positioning device is further arranged in the coating chamber (200), and the positioning device can position the substrate jig (600) at the processing position.