CN219286362U - Substrate transfer equipment and semiconductor process machine - Google Patents

Abstract

The utility model provides substrate transfer equipment which comprises a main conveying device, a plurality of auxiliary conveying devices and a plurality of storage devices, wherein the main conveying device is used for conveying a plurality of substrates to main sheet discharging stations corresponding to the main conveying device one by one along a main conveying direction, the conveying device is used for taking down the substrates positioned at the main sheet discharging stations and conveying the substrates to auxiliary sheet feeding stations corresponding to the auxiliary conveying devices, the auxiliary conveying devices are used for conveying the substrates of the corresponding auxiliary sheet feeding stations to the corresponding auxiliary sheet discharging stations along an auxiliary conveying direction, the positions of the storage devices are in one-to-one correspondence with the positions of the auxiliary sheet discharging stations, and the storage devices are used for taking down and storing the substrates conveyed to the corresponding auxiliary sheet discharging stations. The utility model utilizes the plurality of auxiliary conveying devices and the storage device to jointly receive the upstream substrate, thereby improving the efficiency of the substrate transfer equipment for receiving and storing the substrate. The utility model also provides a semiconductor process machine.

Description

Substrate transfer equipment and semiconductor process machine

Technical Field

The utility model relates to the technical field of semiconductors, in particular to substrate transfer equipment and a semiconductor process machine comprising the same.

Background

Along with the progress of technology, the automation efficiency of semiconductor process equipment is higher and higher, and in the display screen production process, the existing working mode of the automatic production line flow production is that an upstream feeding device is used for placing a glass substrate into a substrate transfer device, a conveying device in the substrate transfer device is used for unidirectionally conveying the substrate, a plurality of substrates are conveyed to a storage device one by one, the storage device is used for lifting and storing the glass substrate, and a standby manipulator is used for taking the glass substrate into a next machine.

The efficiency of the upstream feeding equipment is higher, the substrate transfer equipment cannot efficiently transfer the glass substrate into the next stage of process equipment, the working efficiency of the upstream feeding equipment needs to be reduced to adapt to the beat time of the whole production line, and the efficiency of the automatic production line is lower.

Therefore, how to provide a substrate transfer apparatus capable of improving the substrate transfer efficiency is a technical problem to be solved in the art.

Disclosure of Invention

The present utility model is directed to a substrate transfer apparatus capable of improving substrate transfer efficiency, and a semiconductor process tool including the same.

In order to achieve the above object, as one aspect of the present utility model, there is provided a substrate transfer apparatus including a main conveying device for conveying a plurality of substrates one by one to a main sheet discharge station corresponding to the main conveying device in a main conveying direction, a transfer device for taking down the substrates located at the main sheet discharge station and conveying the substrates to sub sheet feed stations corresponding to the sub conveying devices, a plurality of sub conveying devices for conveying the substrates corresponding to the sub sheet feed stations to the sub sheet discharge stations in a sub conveying direction, and a plurality of storage devices having positions corresponding to positions of the sub sheet discharge stations one by one, the storage devices for taking down and storing the substrates transferred to the sub sheet discharge stations.

Optionally, the substrate transfer apparatus includes 2 of the sub-conveyors and 2 of the storage devices.

Optionally, the auxiliary conveying device comprises an auxiliary driving assembly and a plurality of auxiliary conveying assemblies, the auxiliary conveying assemblies are used for conveying the substrate along the auxiliary conveying direction, the auxiliary conveying assemblies are arranged at intervals along the auxiliary conveying direction, and the auxiliary driving assembly is used for driving the auxiliary conveying assemblies to work so as to drive the substrates borne on the auxiliary conveying assemblies to move along the auxiliary conveying direction.

Optionally, the auxiliary conveying assembly includes an auxiliary rotating shaft and a plurality of auxiliary conveying rollers, the axis of the auxiliary rotating shaft extends horizontally along the direction perpendicular to the auxiliary conveying direction, the auxiliary conveying rollers are coaxial with the auxiliary rotating shaft, and the plurality of auxiliary conveying rollers are arranged on the auxiliary rotating shaft at intervals along the axis direction of the auxiliary rotating shaft; the auxiliary driving assembly is used for driving a plurality of auxiliary rotating shafts to rotate in the same direction.

Optionally, the auxiliary conveying device further comprises an auxiliary conveying frame, and two ends of the auxiliary rotating shaft are movably arranged on the auxiliary conveying frame.

Optionally, the auxiliary driving assembly includes auxiliary driving piece and auxiliary driving shaft, auxiliary driving shaft is followed auxiliary direction of delivery extends, just be provided with a plurality of first auxiliary transmission gear on the auxiliary driving shaft, be provided with the second auxiliary transmission gear on the auxiliary rotation axis, a plurality of first auxiliary transmission gear with a plurality of on the auxiliary rotation axis second auxiliary transmission gear one-to-one meshing, auxiliary driving piece is used for the drive auxiliary driving shaft rotates, in order to drive a plurality of auxiliary driving shaft drives the corresponding auxiliary transmission gyro wheel syntropy rotation.

Optionally, one end of the secondary driving shaft is connected with the secondary driving member, and the other end of the secondary driving shaft is movably arranged on the secondary conveying frame.

Optionally, the secondary driving member is a rotary motor.

Optionally, storage device includes lifting unit, stores support and multiunit bracing piece, the bracing piece is fixed to be set up store on the support and along perpendicular to vice direction of delivery horizontal extension, every group the bracing piece highly uniform and along vice direction of delivery interval distribution, lifting unit is used for the drive store the support and drives bracing piece elevating movement, just the bracing piece can pass a plurality of in-process the space between the vice conveying unit.

Optionally, the storage support includes bottom support and a plurality of pairs of side support, a plurality of pairs of the bottom of side support with bottom support fixed connection, a plurality of pairs of side support is followed vice direction of delivery interval distribution, and every pair side support all is located a plurality of respectively vice conveying gyro wheel is followed the axis direction's of vice rotation axis both sides, every group the bracing piece all includes to fix a plurality of pairs of on the side support the bracing piece, lifting unit is used for the drive the bottom support drives a plurality of pairs of side support and a plurality of pairs of the bracing piece elevating movement fixed on the side support.

Optionally, the storage device includes 4 sets of the support bars.

Optionally, the substrate transfer apparatus further includes an alignment device corresponding to the storage device; the alignment device comprises an alignment clamp assembly and a pair of alignment assemblies, wherein the two alignment assemblies are positioned on two sides of the storage device along the axial direction of the auxiliary rotating shaft, and the alignment clamp assembly is used for driving the two auxiliary driving assemblies to synchronously close to opposite sides along the horizontal direction so that the two auxiliary driving assemblies push the corresponding substrates carried on the storage device from two sides to align the edges of the substrates.

Optionally, the butt clamp subassembly includes horizontal guide rail, drive module and a pair of moving platform, two moving platform activity sets up on the horizontal guide rail, two moving platform one-to-one with two return to normal subassembly fixed connection, drive module is used for driving two moving platform follows the horizontal guide rail moves and draws close or keep away from each other, in order to drive two return to normal subassembly draws in or opens.

Optionally, the driving module is a servo motor.

Optionally, the conveying device comprises a conveying assembly and a sucker assembly, the conveying assembly comprises a first horizontal module, a second horizontal module and a lifting module, the first horizontal module is used for driving the second horizontal module to move along a main conveying direction, the second horizontal module is used for driving the lifting module to move along a horizontal direction perpendicular to the main conveying direction, the lifting module is used for driving the sucker assembly to move up and down, the sucker assembly is used for adsorbing the substrate when the conveying assembly drives the sucker assembly to the main sheet discharging station so as to take off the substrate located at the main sheet discharging station, and releasing the substrate when the conveying assembly drives the sucker assembly to the auxiliary sheet discharging station so as to place the substrate at the auxiliary sheet discharging station.

Optionally, the first horizontal module comprises a pair of first guide rails and a pair of first sliding blocks, the second horizontal module comprises a second guide rail and a second sliding block, the lifting module comprises a third guide rail and a third sliding block, the two first guide rails extend along the main conveying direction and are arranged at intervals along the horizontal direction perpendicular to the main conveying direction, and the two first sliding blocks are movably arranged on the two first guide rails in a one-to-one correspondence manner; two ends of the second guide rail are fixedly connected with the two first sliding blocks respectively; the third guide rail is fixedly connected with the second sliding block; the sucking disc subassembly with third slider fixed connection.

Optionally, the conveying device further comprises a sucker mounting bracket, the sucker mounting bracket comprises a vertical plate, a transverse plate and a connecting strip, the vertical plate is vertically arranged, the transverse plate is horizontally arranged, the bottom of the vertical plate is fixedly connected with the transverse plate, the connecting strip intersects with the plane where the vertical plate is located and the plane where the transverse plate is located, and the connecting strip is connected between the vertical plate and the transverse plate; the vertical plate is fixedly connected with the third sliding block, and the transverse plate is fixedly connected with the sucker assembly.

Optionally, the main conveying device includes a main driving assembly and a plurality of main conveying assemblies, the main conveying assemblies are used for conveying the substrates along the main conveying direction, the main conveying assemblies are arranged at intervals along the main conveying direction, and the main driving assembly is used for driving the main conveying assemblies to work so as to drive the substrates borne on the main conveying assemblies to move along the main conveying direction.

Optionally, the main conveying assembly includes a main rotating shaft and a plurality of main conveying rollers, the axis of the main rotating shaft extends horizontally along a direction perpendicular to the main conveying direction, the main conveying rollers are coaxial with the main rotating shaft, and the plurality of main conveying rollers are arranged on the main rotating shaft at intervals along the axis direction of the main rotating shaft; the main driving component is used for driving a plurality of main rotating shafts to rotate in the same direction.

Optionally, the main conveying device further comprises a main conveying frame, and two ends of the main rotating shaft are movably arranged on the main conveying frame.

Optionally, the main drive assembly includes main driving piece and main drive shaft, main drive shaft is followed main direction of transfer extends, just be provided with a plurality of first main drive gears on the main drive shaft, be provided with the second main drive gear on the main rotation axis, a plurality of first main drive gear with a plurality of on the main rotation axis second main drive gear one-to-one meshing, main driving piece is used for the drive main drive shaft rotates, in order to drive a plurality of main drive shaft drives the correspondence main transfer gyro wheel is the same direction of rotation.

Optionally, one end of the main driving shaft is connected with the main driving member, and the other end of the main driving shaft is movably arranged on the main conveying frame.

Optionally, the main driving member is a rotating electric machine.

Optionally, the substrate transfer apparatus further includes an outer frame, and the sub-transfer frame is fixedly disposed on the outer frame.

Optionally, the main conveying frame is fixedly arranged on the outer frame.

Optionally, the horizontal guide rail is fixedly arranged on the outer frame.

Optionally, the lifting assembly is fixedly arranged on the outer frame.

Optionally, the first guide rail is fixedly arranged on the outer frame.

As a second aspect of the present utility model, there is provided a semiconductor process machine including an inspection machine for inspecting a substrate and loading the inspected substrate onto the main transfer device, a substrate transfer apparatus for removing a plurality of substrates stored in each of the storage devices and transferring the plurality of substrates removed each time to the substrate storage apparatus, a substrate storage apparatus, and the substrate transfer apparatus described above.

In the substrate transfer equipment and the semiconductor process machine provided by the utility model, the substrate transfer equipment comprises the main conveying device, the transmission device and the plurality of auxiliary conveying devices, wherein the main conveying device is used for receiving the upstream substrate, the transmission device can transfer the substrate which is transmitted to the main discharging station on the main conveying device to the plurality of auxiliary conveying devices, each auxiliary conveying device respectively carries out subsequent substrate storage operation with the corresponding storage device, so that the substrate which is being transmitted on the main conveying device does not need to wait for the lifting and storage of the previous substrate at the main discharging station, and the plurality of auxiliary conveying devices and the storage devices are used for jointly receiving the upstream substrate, thereby improving the efficiency of the substrate transfer equipment for receiving and storing the substrate, and further effectively improving the transmission efficiency of the whole semiconductor production line.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model, and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the description serve to explain, without limitation, the utility model. In the drawings:

fig. 1 is a schematic side view of a substrate transfer apparatus according to an embodiment of the present utility model along an angle;

fig. 2 is a schematic top view of a substrate transfer apparatus according to an embodiment of the present utility model;

FIG. 3 is a schematic side view of a substrate transfer apparatus according to another embodiment of the present utility model;

fig. 4 is a schematic structural view of a secondary conveying device in the substrate transfer apparatus according to the embodiment of the present utility model;

fig. 5 is a schematic structural view of a main conveying device in the substrate transfer apparatus according to the embodiment of the present utility model;

fig. 6 is a schematic structural view of a conveying device in the substrate transfer apparatus according to the embodiment of the present utility model;

FIG. 7 is a schematic bottom view of the transfer device of FIG. 6;

fig. 8 is a schematic structural view of a storage device in a state in the substrate transfer apparatus according to the embodiment of the present utility model;

fig. 9 is a schematic structural view of a storage device in another state in the substrate transfer apparatus according to the embodiment of the present utility model;

fig. 10 is a schematic structural view of an alignment device in a substrate transfer apparatus according to an embodiment of the present utility model;

fig. 11 is a schematic structural view of an alignment device in a state in a substrate transfer apparatus according to an embodiment of the present utility model;

fig. 12 is a schematic structural view of an alignment device in another state in the substrate transfer apparatus according to the embodiment of the present utility model;

fig. 13 is a schematic structural diagram of a semiconductor processing machine according to an embodiment of the present utility model.

Reference numerals illustrate:

100: the main transfer device 110: main drive assembly

111: the main driving member 112: main driving shaft

120: main transfer assembly 121: main rotating shaft

122: main transfer roller 130: main conveying frame

200: transmission device 210: first horizontal module

211: first rail 212: first slider

220: the second horizontal module 221: second guide rail

222: second slider 230: lifting module

231: third guide rail 232: third slide block

240: suction cup assembly 250: sucker mounting bracket

300: secondary transfer device 310: auxiliary drive assembly

311: the sub-drive member 312: auxiliary drive shaft

320: a secondary transfer assembly 321: auxiliary rotating shaft

322: the sub-conveying roller 330: auxiliary conveying frame

400: storage device 410: lifting assembly

420: storage rack 421: bottom bracket

422: side stand 430: support bar

500: alignment device 510: butt clamp assembly

511: horizontal guide rail 512: driving module

513: mobile platform 520: resetting component

600: outer frame 10: inspection machine

20: the substrate transfer apparatus 30: substrate transfer equipment

40: substrate storage device A1: main feeding station

A2: main sheet discharging station B1: auxiliary tablet feeding station

B2: auxiliary sheet discharging station

Detailed Description

The following describes specific embodiments of the present utility model in detail with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the utility model, are not intended to limit the utility model.

In the conventional substrate transfer apparatus, the storage device is generally of a double-layer design, and the storage device is lifted once every time the transfer device transfers one substrate to the storage device, so as to take off one substrate, and the downstream robot is used for taking off the two substrates once every time the storage device takes off and stores the two substrates.

However, in the existing substrate transfer apparatus, the conveying device is designed as a single channel, and in the process of lifting the substrate before reaching the storage device, the rear substrate can only continue to be conveyed forward after waiting for the completion of the lifting action of the previous substrate on the conveying device, so that the substrate conveying efficiency of the substrate transfer apparatus cannot be matched with the conveying efficiency of the upstream feeding apparatus, and the conveying efficiency of the whole automatic assembly line is reduced.

To solve the above-mentioned problems, as an aspect of the present utility model, there is provided a substrate transfer apparatus, as shown in fig. 1 to 3, which includes a main conveyor 100, a conveyor 200, a plurality of auxiliary conveyors 300, and a plurality of storage devices 400, wherein the main conveyor 100 is configured to convey a plurality of substrates (glass substrates) one by one to a main outfeed station A2 corresponding to the main conveyor 100 along a main conveying direction (as shown in fig. 2, a left half of the main conveyor 100 is a main outfeed station A1, a right half is a main outfeed station A2), the conveyor 200 is configured to remove a substrate located at the main outfeed station A2, and convey the substrate to an auxiliary infeed station B1 corresponding to the plurality of auxiliary conveyors 300 (as shown in fig. 2, a left half of the auxiliary conveyors 300 is an auxiliary infeed station B1, a right half is an auxiliary outfeed station B2), the auxiliary conveyors 300 is configured to convey the substrate corresponding to the auxiliary infeed station B1 along the auxiliary conveying direction to the corresponding auxiliary outfeed station B2, and the plurality of storage devices 400 are configured to be stored in the storage devices 400 corresponding to the sub-outfeed station B2 one to the plurality of storage devices.

In the present utility model, the substrate transfer apparatus includes a main conveyor 100, a conveyor 200, and a plurality of auxiliary conveyors 300, wherein (a main feeding station A1 of) the main conveyor 100 is used for receiving an upstream substrate, the conveyor 200 can transfer the substrate transferred from the main conveyor 100 to the main feeding station A2 to the plurality of auxiliary conveyors 300, and each auxiliary conveyor 300 performs a subsequent substrate storage operation with a corresponding storage device 400, so that the substrate being transferred from the main conveyor 100 does not have to wait for a previous substrate to be lifted and stored by the storage device at the main feeding station A2, and the plurality of auxiliary conveyors 300 and the storage devices 400 are utilized to receive the upstream substrate together, thereby improving the efficiency of receiving and storing the substrate by the substrate transfer apparatus, and further effectively improving the transmission efficiency of the whole semiconductor production line.

As an alternative embodiment of the present utility model, as shown in fig. 2 and 3, the substrate transfer apparatus includes 2 sub-conveyors 300 and 2 storages 400.

As an alternative embodiment of the present utility model, as shown in fig. 2, the main conveyance direction coincides with the sub conveyance direction.

As an alternative embodiment of the present utility model, as shown in fig. 4, the sub-transfer apparatus 300 includes a sub-driving assembly 310 and a plurality of sub-transfer assemblies 320, the sub-transfer assemblies 320 are used for transferring substrates along a sub-transfer direction, the plurality of sub-transfer assemblies 320 are arranged at intervals along the sub-transfer direction, and the sub-driving assembly 310 is used for driving the plurality of sub-transfer assemblies 320 to operate so as to drive the substrates carried on the plurality of sub-transfer assemblies 320 to move along the sub-transfer direction.

As an alternative embodiment of the present utility model, as shown in fig. 4, the sub-transfer assembly 320 includes a sub-rotation shaft 321 and a plurality of sub-transfer rollers 322, the axis of the sub-rotation shaft 321 extends horizontally perpendicular to the sub-transfer direction, the sub-transfer rollers 322 are coaxial with the sub-rotation shaft 321, and the plurality of sub-transfer rollers 322 are disposed on the sub-rotation shaft 321 at intervals along the axis direction of the sub-rotation shaft 321. The sub driving assembly the sub transferring assembly 320 is used to drive the plurality of sub rotating shafts 321 to rotate in the same direction.

As an alternative embodiment of the present utility model, as shown in fig. 4, the sub-transmission apparatus 300 further includes a sub-transmission frame 330, and both ends of the sub-rotation shaft 321 are movably disposed on the sub-transmission frame 330.

As an alternative embodiment of the present utility model, as shown in fig. 4, the secondary driving assembly 310 includes a secondary driving member 311 and a secondary driving shaft 312, the secondary driving shaft 312 extends along the secondary conveying direction, a plurality of first secondary transmission gears are disposed on the secondary driving shaft 312, a second secondary transmission gear is disposed on the secondary rotating shaft 321, the plurality of first secondary transmission gears are engaged with the second secondary transmission gears on the plurality of secondary rotating shafts 321 in a one-to-one correspondence manner, and the secondary driving member 311 is used for driving the secondary driving shaft 312 to rotate so as to drive the plurality of secondary driving shafts 312 to drive the corresponding secondary conveying rollers 322 to rotate in the same direction.

As an alternative embodiment of the present utility model, as shown in fig. 4, one end of the sub driving shaft 312 is connected to the sub driving member 311, and the other end of the sub driving shaft 312 is movably disposed on the sub conveying frame 330.

As an alternative embodiment of the present utility model, the sub-driver 311 is a rotary motor.

As an alternative embodiment of the present utility model, as shown in fig. 8 and 9, the storage device 400 includes a lifting assembly 410, a storage rack 420, and a plurality of groups of support bars 430, the support bars 430 are fixedly disposed on the storage rack 420 and horizontally extend along a direction perpendicular to the secondary conveying direction, each group of support bars 430 has a uniform height and is spaced along the secondary conveying direction, the lifting assembly 410 is used for driving the storage rack 420 to drive the support bars 430 to move up and down, and the support bars 430 can pass through gaps among the plurality of secondary conveying assemblies 320 during the lifting process.

That is, in the embodiment of the present utility model, the horizontal projection of each set of support rods 430 corresponds to the gap between the auxiliary conveying members 320, as shown in fig. 8 to 9, the lifting assembly 410 can drive the storage rack 420 to lift the support rods 430, so that each set of support rods 430 passes through the auxiliary conveying device 300 upwards, and each set of support rods 430 lifts up the substrate 1 on the auxiliary conveying device 300, and finally each set of support rods 430 stores one substrate 1.

In order to improve the adaptability of the substrate transfer apparatus to substrates of different specifications, as a preferred embodiment of the present utility model, as shown in fig. 8 and 9, the storage rack 420 includes a bottom rack 421 and a plurality of pairs of side racks 422, the bottoms of the pairs of side racks 422 are fixedly connected to the bottom rack 421, the pairs of side racks 422 are spaced apart in the auxiliary conveying direction, and each pair of side racks 422 is respectively located at both sides of the plurality of auxiliary conveying rollers 322 in the axial direction of the auxiliary rotating shaft 321, each group of support bars 430 includes a plurality of pairs of support bars 430 fixed to the pairs of side racks 422, and the lifting assembly 410 is used for driving the bottom rack 421 to lift the pairs of side racks 422 and the support bars 430 fixed to the pairs of side racks 422.

That is, the distribution of the pairs of side supports 422 fixed to the bottom support 421 in the horizontal direction corresponds to each group of support bars 430, and when the elevating assembly 410 is used to drive the bottom support 421 to be elevated, the pairs of side supports 422 and the support bars 430 fixed thereto are all inserted between the sub-conveying assemblies 320 to be elevated.

In the embodiment of the present utility model, each group of support rods 430 is divided into a plurality of pairs, and each pair of support rods 430 is respectively located on the side supports 422 on both sides, so as to allow each auxiliary conveyor 300 to transfer substrates of different specifications (as long as the distance between each pair of support rods 430 is smaller than the width of the substrate with the smallest specification and size to be transferred, and the distance between each pair of support rods 422 is larger than the width of the substrate with the largest specification and size to be transferred), thereby improving the adaptability of the substrate transfer apparatus to substrates of different specifications.

As an alternative embodiment of the present utility model, as shown in fig. 8 and 9, the storage device 400 includes 4 sets of support bars 430. That is, as shown in fig. 9, the storage device 400 is capable of storing 4 substrates 1.

In order to improve the stability of the substrate position, as a preferred embodiment of the present utility model, as shown in fig. 3, the substrate transfer apparatus further includes an alignment device 500 corresponding to the position of the storage device 400. As shown in fig. 10, the alignment device 500 includes a pair of alignment members 520 and a pair of alignment members 510, wherein the pair of alignment members 520 are located at two sides of the storage device 400 along the axial direction of the secondary rotation shaft 321, and the pair of alignment members 510 are used for driving the two alignment members 520 to synchronously move toward opposite sides along the horizontal direction, so that the two alignment members 520 push the corresponding plurality of substrates carried on the storage device 400 from two sides to align the edges of the plurality of substrates.

After each group of support bars 430 of the storage device 400 carries one substrate 1, as shown in fig. 10 to 11, the opposite clamp assembly 510 drives the two aligning assemblies 520 to close to each other and clamp the plurality of substrates 1 therebetween, so that edges of the plurality of substrates 1 are aligned. Subsequently, as shown in fig. 11 to 12, the centering and clamping assembly 510 drives the two centering assemblies 520 apart to release the plurality of substrates 1, at which time the plurality of substrates 1 have been aligned.

In the embodiment of the utility model, the substrate transfer device further comprises an alignment device 500, and the alignment device 500 can be mutually close by the two alignment assemblies 520 so as to align the horizontal projections of the plurality of substrates, thereby realizing automatic alignment among the plurality of substrates and ensuring the stability of the positions of the substrates.

As a preferred embodiment of the present utility model, as shown in fig. 3, the substrate transfer apparatus includes a plurality of alignment devices 500, and positions of the plurality of alignment devices 500 correspond to positions of the plurality of storage devices 400 one by one.

As an alternative embodiment of the present utility model, as shown in fig. 10, the butt-clip assembly 510 includes a horizontal rail 511, a driving module 512 and a pair of moving platforms 513, where the two moving platforms 513 are movably disposed on the horizontal rail 511, the two moving platforms 513 are fixedly connected with the two correcting assemblies 520 in a one-to-one correspondence, and the driving module 512 is used for driving the two moving platforms 513 to move along the horizontal rail 511 and close to or separate from each other so as to drive the two correcting assemblies 520 to fold or open.

As an alternative embodiment of the present utility model, the driving module 512 is a servo motor.

To ensure the yield of the substrate products, as a preferred embodiment of the present utility model, as shown in fig. 6 and 7, the transfer device 200 includes a transport assembly including a first horizontal module 210, a second horizontal module 220, and a lifting module 230, the first horizontal module 210 is used to drive the second horizontal module 220 to move in a main transfer direction, the second horizontal module 220 is used to drive the lifting module 230 to move in a horizontal direction perpendicular to the main transfer direction, the lifting module 230 is used to drive the suction cup assembly 240 to move up and down, the suction cup assembly 240 is used to suck the substrate when the transport assembly drives the suction cup assembly 240 to the main sheet discharging station A2 to remove the substrate at the main sheet discharging station A2, and to release the substrate when the transport assembly drives the suction cup assembly 240 to the sub sheet feeding station B1 to place the substrate at the sub sheet feeding station B1.

In the embodiment of the utility model, the transmission device 200 picks up and puts down the substrate through the sucker assembly 240, and the sucker assembly 240 is in flexible contact with the substrate, so that collision between a mechanical structure and the substrate is avoided, the integrity of the substrate is ensured, and the yield of the substrate product is improved.

As an alternative embodiment of the present utility model, as shown in fig. 6 and 7, the first horizontal module 210 includes a pair of first guide rails 211 and a pair of first sliders 212, the second horizontal module 220 includes a second guide rail 221 and a second slider 222, the lifting module 230 includes a third guide rail 231 and a third slider 232, the two first guide rails 211 extend along the main conveying direction and are arranged at intervals along the horizontal direction perpendicular to the main conveying direction, and the two first sliders 212 are movably arranged on the two first guide rails 211 in a one-to-one correspondence; two ends of the second guide rail 221 are fixedly connected with the two first sliding blocks 212 respectively; the third guide rail 231 is fixedly connected with the second slider 222; the suction cup assembly 240 is fixedly connected with the third slider 232.

As an alternative embodiment of the present utility model, as shown in fig. 6 and 7, the transmission device 200 further includes a suction cup mounting bracket 250, where the suction cup mounting bracket 250 includes a vertical plate, a horizontal plate and a connection bar, the vertical plate is vertically disposed, the horizontal plate is horizontally disposed, the bottom of the vertical plate is fixedly connected with the horizontal plate, the connection bar intersects both the plane where the vertical plate is located and the plane where the horizontal plate is located, and the connection bar is connected between the vertical plate and the horizontal plate; the riser is fixedly connected with the third slider 232 and the cross plate is fixedly connected with the suction cup assembly 240.

As an alternative embodiment of the present utility model, as shown in fig. 5, the main transfer apparatus 100 includes a main driving assembly 110 and a plurality of main transfer assemblies 120, the main transfer assemblies 120 are configured to transfer substrates in a main transfer direction, the plurality of main transfer assemblies 120 are disposed at intervals in the main transfer direction, and the main driving assembly 110 is configured to drive the plurality of main transfer assemblies 120 to operate so as to drive the substrates carried on the plurality of main transfer assemblies 120 to move in the main transfer direction.

As an alternative embodiment of the present utility model, as shown in fig. 5, the main transfer assembly 120 includes a main rotation shaft 121 and a plurality of main transfer rollers 122, the axis of the main rotation shaft 121 extends horizontally perpendicular to the main transfer direction, the main transfer rollers 122 are coaxial with the main rotation shaft 121, and the plurality of main transfer rollers 122 are disposed on the main rotation shaft 121 at intervals along the axis direction of the main rotation shaft 121.

As an alternative embodiment of the present utility model, as shown in fig. 5, the main conveyor 100 further includes a main conveyor frame 130, and both ends of the main rotation shaft 121 are movably disposed on the main conveyor frame 130.

As an alternative embodiment of the present utility model, as shown in fig. 5, the main driving assembly 110 includes a main driving member 111 and a main driving shaft 112, the main driving shaft 112 extends along a main conveying direction, a plurality of first main transmission gears are disposed on the main driving shaft 112, a second main transmission gear is disposed on the main rotating shaft 121, the plurality of first main transmission gears are engaged with the second main transmission gears on the plurality of main rotating shafts 121 in a one-to-one correspondence manner, and the main driving member 111 is used for driving the main driving shaft 112 to rotate so as to drive the plurality of main driving shafts 112 to drive the corresponding main conveying rollers 122 to rotate in the same direction.

As an alternative embodiment of the present utility model, as shown in fig. 5, one end of the main driving shaft 112 is connected to the main driving member 111, and the other end of the main driving shaft 112 is movably disposed on the main transfer frame 130.

As an alternative embodiment of the present utility model, the main driving member 111 is a rotary motor.

As an alternative embodiment of the present utility model, as shown in fig. 1 to 3, the substrate transfer apparatus further includes an outer frame 600, and the sub-transfer frame 330 is fixedly provided on the outer frame 600.

As an alternative embodiment of the present utility model, the main transfer frame 130 is fixedly provided on the outer frame 600.

As an alternative embodiment of the present utility model, the horizontal guide rails 511 are fixedly provided on the outer frame 600.

As an alternative embodiment of the present utility model, the lifting assembly 410 is fixedly provided on the outer frame 600.

As an alternative embodiment of the present utility model, the first rail 211 is fixedly provided on the outer frame 600.

As an alternative embodiment of the present utility model, the main conveying frame 130, the auxiliary conveying frame 330, the storage rack 420 and the outer frame 600 are all made of aluminum profiles.

As a second aspect of the present utility model, there is provided a semiconductor process tool, as shown in fig. 13, comprising an inspection machine 10, a substrate transfer apparatus 30, a substrate storage apparatus 40, and a substrate transfer apparatus 20 provided in an embodiment of the present utility model, the inspection machine 10 being configured to inspect a substrate and load the inspected substrate (i.e., a substrate determined to be qualified (e.g., required for parameters such as size, finish, etc.) to a main conveyor 100, the substrate transfer apparatus 30 being configured to remove a plurality of substrates stored in each storage apparatus 400, and transfer the plurality of substrates removed each time to the substrate storage apparatus 40.

As an alternative embodiment of the present utility model, as shown in fig. 13, the substrate transfer apparatus 30 includes a plurality of robots 31, the plurality of robots 31 being in one-to-one correspondence with the plurality of storage devices 400, the robots 31 being configured to take a plurality of substrates at a time from the corresponding storage devices 400 and transport the substrates to the substrate storage apparatus 40.

As an alternative embodiment of the present utility model, the substrate storage apparatus 40 may be a glass substrate carrier (CST, i.e., clip).

In the semiconductor process machine provided by the utility model, the substrate transfer device comprises the main conveying device 100, the transmission device 200 and the plurality of auxiliary conveying devices 300, wherein (the main sheet feeding station A1 of) the main conveying device 100 is used for receiving the upstream substrate, the transmission device 200 can transfer the substrate which is transmitted to the main sheet discharging station A2 on the main conveying device 100 to the plurality of auxiliary conveying devices 300, each auxiliary conveying device 300 respectively carries out subsequent substrate storage operation with the corresponding storage device 400, so that the substrate which is being transmitted on the main conveying device 100 does not need to wait for the previous substrate to be lifted and stored by the storage device at the main sheet discharging station A2, the plurality of auxiliary conveying devices 300 and the storage device 400 are utilized for jointly receiving the upstream substrate, the substrate transfer device receiving and storing efficiency is improved, and the transmission efficiency of the whole semiconductor production line can be further effectively improved.

It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present utility model, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the utility model, and are also considered to be within the scope of the utility model.

Claims (10)

1. The substrate transfer equipment is characterized by comprising a main conveying device, a plurality of auxiliary conveying devices and a plurality of storage devices;

the main conveying device is used for conveying the plurality of substrates to the main sheet discharging station corresponding to the main conveying device one by one along the main conveying direction;

the conveying device is used for taking down the substrate positioned at the main sheet discharging station and conveying the substrate to a plurality of auxiliary sheet feeding stations corresponding to the auxiliary conveying devices;

the auxiliary conveying device is used for conveying the substrate of the corresponding auxiliary sheet feeding station to the corresponding auxiliary sheet discharging station along the auxiliary conveying direction;

the positions of the storage devices are in one-to-one correspondence with the positions of the auxiliary sheet discharging stations, and the storage devices are used for taking down and storing a plurality of substrates transmitted to the corresponding auxiliary sheet discharging stations.

2. The substrate transfer apparatus according to claim 1, wherein the sub-carrying device includes a sub-driving assembly and a plurality of sub-carrying assemblies,

the auxiliary conveying assembly is used for conveying the substrate along the auxiliary conveying direction, and a plurality of auxiliary conveying assemblies are arranged at intervals along the auxiliary conveying direction;

the auxiliary driving assembly is used for driving the plurality of auxiliary conveying assemblies to work so as to drive the substrates carried on the plurality of auxiliary conveying assemblies to move along the auxiliary conveying direction.

3. The substrate transfer apparatus according to claim 2, wherein the sub-transfer assembly includes a sub-rotation shaft whose axis extends horizontally perpendicular to the sub-transfer direction, and a plurality of sub-transfer rollers coaxial with the sub-rotation shaft, and the plurality of sub-transfer rollers are provided on the sub-rotation shaft at intervals in an axis direction of the sub-rotation shaft; the auxiliary driving assembly is used for driving a plurality of auxiliary rotating shafts to rotate in the same direction.

4. The substrate transfer apparatus of claim 3, wherein the storage device comprises a lifting assembly, a storage rack, and a plurality of sets of support bars;

the support rods are fixedly arranged on the storage support and horizontally extend along the direction perpendicular to the auxiliary conveying direction, each group of support rods are identical in height and are distributed along the auxiliary conveying direction at intervals, the lifting assembly is used for driving the storage support to drive the support rods to move up and down, and the support rods can penetrate through gaps among the auxiliary conveying assemblies in the lifting process.

5. The substrate transfer apparatus according to claim 4, wherein the storage rack comprises a bottom rack and a plurality of pairs of side racks, bottoms of the pairs of side racks are fixedly connected with the bottom rack, the pairs of side racks are spaced apart along the auxiliary conveying direction, each pair of side racks is respectively located at two sides of the plurality of auxiliary conveying rollers along the axis direction of the auxiliary rotating shaft, each group of support bars comprises a plurality of pairs of support bars fixed on the pairs of side racks, and the lifting assembly is used for driving the bottom rack to drive the pairs of side racks and the support bars fixed on the pairs of side racks to move up and down.

6. The substrate transfer apparatus according to claim 4, further comprising an alignment device corresponding to the storage device position;

the alignment device comprises an alignment clamp assembly and a pair of alignment assemblies, wherein the two alignment assemblies are positioned on two sides of the storage device along the axial direction of the auxiliary rotating shaft, and the alignment clamp assembly is used for driving the two auxiliary driving assemblies to synchronously close to opposite sides along the horizontal direction so that the two auxiliary driving assemblies push the corresponding substrates carried on the storage device from two sides to align the edges of the substrates.

7. The substrate transfer apparatus according to any one of claims 1 to 6, wherein the transport device includes a transport assembly including a first horizontal module, a second horizontal module, and a lifting module, and a suction cup assembly;

the first horizontal module is used for driving the second horizontal module to move along the main conveying direction;

the second horizontal module is used for driving the lifting module to move along a horizontal direction perpendicular to the main conveying direction;

the lifting module is used for driving the sucker assembly to move up and down, and the sucker assembly is used for adsorbing the substrate when the transportation assembly drives the sucker assembly to the main sheet discharging station so as to take down the substrate positioned at the main sheet discharging station, and releasing the substrate when the transportation assembly drives the sucker assembly to the auxiliary sheet discharging station so as to place the substrate at the auxiliary sheet discharging station.

8. The substrate transfer apparatus according to any one of claims 1 to 6, wherein the main conveying device includes a main driving assembly and a plurality of main conveying assemblies;

the main conveying assembly is used for conveying the substrate along the main conveying direction, and a plurality of main conveying assemblies are arranged at intervals along the main conveying direction;

the main driving assembly is used for driving the main conveying assemblies to work so as to drive the substrates carried on the main conveying assemblies to move along the main conveying direction.

9. The substrate transfer apparatus according to claim 8, wherein the main transfer assembly includes a main rotation shaft and a plurality of main transfer rollers, an axis of the main rotation shaft extending horizontally perpendicular to the main transfer direction, the main transfer rollers being coaxial with the main rotation shaft, and the plurality of main transfer rollers being disposed on the main rotation shaft at intervals in an axis direction of the main rotation shaft; the main driving component is used for driving a plurality of main rotating shafts to rotate in the same direction.

10. A semiconductor process machine comprising an inspection machine for inspecting a substrate and loading the inspected substrate onto the main conveyor, a substrate transfer apparatus for removing a plurality of substrates stored in each of the storage devices and transferring the removed plurality of substrates to the substrate storage apparatus, a substrate storage apparatus, and the substrate transfer apparatus according to any one of claims 1 to 9.

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