CN220042573U - Ultraviolet laser resonant cavity, laser and laser processing device - Google Patents
Ultraviolet laser resonant cavity, laser and laser processing device Download PDFInfo
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- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 claims description 8
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- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 claims description 4
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- HIQSCMNRKRMPJT-UHFFFAOYSA-J lithium;yttrium(3+);tetrafluoride Chemical compound [Li+].[F-].[F-].[F-].[F-].[Y+3] HIQSCMNRKRMPJT-UHFFFAOYSA-J 0.000 claims description 3
- QWVYNEUUYROOSZ-UHFFFAOYSA-N trioxido(oxo)vanadium;yttrium(3+) Chemical compound [Y+3].[O-][V]([O-])([O-])=O QWVYNEUUYROOSZ-UHFFFAOYSA-N 0.000 claims description 3
- LSGOVYNHVSXFFJ-UHFFFAOYSA-N vanadate(3-) Chemical compound [O-][V]([O-])([O-])=O LSGOVYNHVSXFFJ-UHFFFAOYSA-N 0.000 claims description 3
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- QBLDFAIABQKINO-UHFFFAOYSA-N barium borate Chemical compound [Ba+2].[O-]B=O.[O-]B=O QBLDFAIABQKINO-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model provides an ultraviolet laser resonant cavity, a laser and a laser processing device, and relates to the technical field of laser. An ultraviolet laser resonator according to the first aspect, comprising: a start mirror, an end mirror, a first relay mirror, and a second relay mirror, wherein a light beam entering the resonant cavity reciprocates between the start mirror and the end mirror, the first relay mirror and the second relay mirror are arranged on an optical axis between the start mirror and the end mirror, and the light beam propagating from the start mirror to the end mirror sequentially passes through the first relay mirror, the second relay mirror, and the end mirror; a laser crystal, an optical modulator, and a frequency doubling crystal disposed on the optical axis. The resonant cavity is provided with the optical modulator and the frequency doubling crystal, so that the resonant cavity can control the Q value of laser in the cavity, and high-power laser pulses are output.
Description
Technical Field
The utility model relates to the technical field of lasers, in particular to an ultraviolet laser resonant cavity, a laser and a laser processing device.
Background
Ultraviolet laser has wide application prospect in the fields of material processing, photoetching and microlithography, medical treatment, scientific research and the like, and becomes a new research direction at present. Ultraviolet lasers can be classified into, for example, liquid lasers, gas lasers, fiber lasers, and solid lasers according to the gain material. However, the liquid laser is affected by the gain material, and its power and beam quality are limited. The plastic sealed container of the gas laser has high technical requirements, limited service life and the like. Although the output power of the fiber laser can be tens of watts, there are many factors affecting the quality of the light beam, expensive devices, etc. The solid laser has the advantages of long service life, good beam quality, stable power and the like. The resonant cavity is an important component of the ultraviolet laser for reflecting the light waves emitted by the pump source back and forth therein to provide optical energy feedback.
In the prior art, a high-power ultraviolet laser generally needs to use a plurality of pumping sources, which can influence the stable operation of oscillating light, and mode competition occurs in a resonant cavity, so that the light-light conversion efficiency is low, the ultraviolet light power is reduced, and the pulse width is prolonged.
Disclosure of Invention
The following is a summary of the subject matter described in detail herein. This summary is not intended to limit the scope of the claims.
In order to solve at least one of the above problems, an embodiment of the present utility model provides an ultraviolet laser resonator, a laser, and a laser processing apparatus, which achieve high-power ultraviolet laser output under a single pump source by means of Q-switching.
According to a first aspect of the present utility model, there is provided an ultraviolet laser resonator comprising: a group of mirrors including a start mirror, an end mirror, a first relay mirror, and a second relay mirror, a light beam entering the resonant cavity reciprocating between the start mirror and the end mirror, the first relay mirror and the second relay mirror being disposed on an optical axis between the start mirror and the end mirror, the light beam propagating from the start mirror to the end mirror sequentially passing through the first relay mirror and the second relay mirror to reach the end mirror; the light beam propagating from the end mirror to the start mirror passes through the second relay mirror and the first relay mirror in order to reach the start mirror; the laser crystal is positioned on the optical axis and is arranged between the first relay reflector and the second relay reflector; the optical modulator is positioned on the optical axis and is arranged between the starting point reflector and the first relay reflector; and the frequency doubling crystal is positioned on the optical axis and is arranged between the second relay reflector and the end reflector.
According to the ultraviolet laser resonant cavity of the first aspect of the utility model, the resonant cavity can control the Q value of laser in the cavity by arranging the optical modulator and the frequency doubling crystal in the resonant cavity, so that high-power laser pulses are output.
In some embodiments, the starting mirror includes a first collection surface located on a side of the starting mirror facing the light modulator and/or the ending mirror includes a second collection surface located on a side of the ending mirror facing the frequency doubling crystal.
In some embodiments, the first relay mirror includes a first light diffusing surface located on a side of the first relay mirror facing the laser crystal.
In some embodiments, the light modulator is an acousto-optic modulator.
In some embodiments, the frequency doubling crystal comprises a first frequency doubling crystal and a second frequency doubling crystal, the first frequency doubling crystal is an LBO crystal, the second frequency doubling crystal is an LBO crystal, and the first frequency doubling crystal is connected in series with the second frequency doubling crystal.
In some embodiments, a side of the second frequency doubling crystal facing the second relay mirror has a notch that causes the light beam propagating from the first relay mirror to the end point mirror to enter the second frequency doubling crystal at brewster's angle.
In some embodiments, the laser crystal is one of a neodymium-doped yttrium vanadate crystal, a neodymium-doped gadolinium vanadate crystal, a neodymium-doped yttrium aluminum garnet crystal, a ytterbium-doped yttrium aluminum garnet crystal, a neodymium-doped lithium fluoride yttrium crystal, and a neodymium-doped potassium gadolinium tungstate crystal.
According to a second aspect of the embodiment of the present utility model, a laser is provided, which includes a pump source, a condensing optical path, and a resonant cavity, where the resonant cavity is an ultraviolet laser resonant cavity as described in any one of the above; light beams emitted from the pump source enter the resonant cavity from the first relay reflector along the condensing light path.
In some embodiments, the pump light has a wavelength of 1064nm; the light condensing optical path comprises a first light condensing lens and a second light condensing lens, and the pump light enters the light condensing optical path from the first light condensing lens.
According to a third aspect of the embodiments of the present utility model, there is also provided a laser processing apparatus including: the ultraviolet laser resonant cavity is described above.
It is to be understood that the advantages of the second to third aspects compared with the related art are the same as those of the first aspect compared with the related art, and reference may be made to the related description in the first aspect, which is not repeated herein.
Additional features and advantages of the utility model will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model. The objectives and other advantages of the utility model will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
Fig. 1 is a schematic view of the structure of an ultraviolet laser resonator according to an embodiment of the present utility model.
Fig. 2 is a schematic diagram of the structure of an ultraviolet laser resonator according to an embodiment of the present utility model.
Fig. 3 is a schematic diagram of the structure of a laser according to an embodiment of the present utility model.
Reference numerals: 101: a starting point mirror; 102: a first relay mirror; 103: a second relay mirror; 104: an end point mirror; 105: a laser crystal; 106: an optical modulator; 107: a frequency doubling crystal; 108: a first frequency doubling crystal; 109: a second frequency doubling crystal; 110: a notch; 201: a light condensing light path; 202: a transmission path; 203: and a pump source.
Detailed Description
In the following description, for purposes of explanation and not limitation, specific details are set forth such as the particular system architecture, techniques, etc., in order to provide a thorough understanding of the embodiments of the present utility model. It will be apparent, however, to one skilled in the art that embodiments of the utility model may be practiced in other embodiments, which depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, optical paths, and methods are omitted so as not to obscure the description of the embodiments of the present utility model with unnecessary detail.
It should be noted that although a logical order is illustrated in the flowchart, in some cases, the steps illustrated or described may be performed in an order different from that in the flowchart. The terms first, second and the like in the description and in the claims and in the above-described figures, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order.
For convenience and brevity of expression, part of basic optical path adjusting devices, such as concave lenses, convex lenses, reflectors, optical fiber paths and optical repeaters, are omitted in the embodiment, and these optical path adjusting devices may actually need to be arranged at all positions in the optical path of the embodiment of the present utility model, and the setting method thereof does not affect the implementation of the beneficial effects of the embodiment of the present utility model. In addition, part of the known circuits, connection structures, circuit internal structures, processor and chip structures, known sensing devices and light measuring devices are omitted, and the utility model does not limit the structures and does not affect the realization of the beneficial effects of the embodiment of the utility model.
It should also be appreciated that references to "one embodiment" or "some embodiments" or the like described in the specification of an embodiment of the present utility model mean that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the present utility model. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," and the like in the specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments" unless expressly specified otherwise. The terms "comprising," "including," "having," and variations thereof, are intended to be "including but not limited to," unless otherwise specifically limited to, the description of embodiments of the present utility model, unless otherwise specified, is intended to be broadly construed, and that the terms set, mounted, connected, and the like, as such terms, used herein, shall be interpreted as having a reasonable meaning to those skilled in the art in light of the detailed description of the embodiments of the present utility model.
The following is a description of terms that may be involved in the present utility model.
Thermal lens: the conventional lens generates a non-uniform temperature field inside thereof by absorbing laser energy under the irradiation of a fundamental mode gaussian beam, thereby causing a refractive index gradient distribution, thereby forming a thermal lens. Thus, when the absorbed laser energy becomes high, an additional focusing effect is generated on the laser light.
Solid-state laser: lasers using solid laser materials as gain media, for example, using various laser crystals (e.g., corundum (NaAlSi) 2 O 6 ) Yttrium aluminum garnet (Y) 3 Al 5 ，O 12 ) Calcium tungstate (CaWO) 4 ) Calcium fluoride (CaF) 2 ) Yttrium aluminate (YAlO) 3 ) Etc.).
Laser Q-switching: is a special technique adopted for compressing the output pulse width of the laser and improving the peak power of the pulse. The Q value of the resonant cavity is determined by two factors, namely the loss in the cavity and the optical feedback capability of the reflecting mirror; the higher the Q value, the lower the required pumping threshold, i.e. the easier the laser is to oscillate. In the case of a general pulsed solid-state laser, the oscillation duration of the pulsed laser in the cavity is approximately the same as the optical pump pulse time (in the order of milliseconds or so) unless special technical measures are taken, and therefore the pulse power level of the output laser is always limited. If a special technology is adopted, the Q value of the resonant cavity is intentionally reduced without generating laser oscillation within a quite long period of time after the start of the pulse of the optical pump, the population inversion degree in the working substance is continuously increased by accumulation of the optical pump; then at a specific selected moment, the Q value of the resonant cavity is suddenly and rapidly increased, so that laser oscillation occurs rapidly in the cavity, and the energy of the reverse particle number accumulated to a higher degree is concentrated and rapidly released in a short time interval, so that laser output with very narrow pulse width and high peak power can be obtained.
An acousto-optic Q-switch is used for modulating the reflectivity of a medium in a resonant cavity by an acousto-optic switch to adjust the Q value. When the sound-light medium passes through the ultrasonic wave, the modulation strain field of the ultrasonic wave is coupled to the optical refractive index by virtue of the photoelastic effect, which is equivalent to an optical phase grating, so that the light beam passing through the sound-light medium is diffracted and deviated from the original propagation direction. By selecting parameters of the acousto-optic Q-switching device and the resonant cavity, the diffraction of the oscillating beam deviates from the laser oscillation direction, so that the loss of the resonant cavity is increased, the Q value is reduced, and the laser oscillation is prevented.
Ultraviolet lasers are widely used in industry, medical treatment, military and other fields. The solid ultraviolet laser has the advantages of low cost, simple structure, low requirement on using conditions, long service life, stable beam quality and the like.
(1) In some known techniques, multiple pump sources are selected to obtain a larger laser power, but the multiple pump sources will affect the stable operation of the oscillating light, and mode competition occurs in the resonant cavity, so that the light-to-light conversion efficiency is low, the ultraviolet light power is reduced, and the pulse width is prolonged. (2) On the other hand, ultraviolet lasers typically have multiple frequency doubling crystals, so that the overall cavity length is long and the volume occupied is large.
Fig. 1 is a schematic diagram of an ultraviolet laser resonator 100 according to an embodiment of the present utility model. Fig. 2 is a schematic structural diagram of an ultraviolet laser resonator 100 according to an embodiment of the present utility model.
Referring to fig. 1 and 2, based on the above-described problems, the present utility model uses an ultraviolet laser resonator 100 suitable for Q-switching technology. The ultraviolet laser resonator 100 includes:
a start mirror 101, a first relay mirror 102, a second relay mirror 103, and an end mirror 104; the light beam entering the ultraviolet laser resonator 100 along the preset angle can round and trip between the starting point reflector 101 and the end point reflector 104, specifically, the first relay reflector 102, the second relay reflector 103 and the end point reflector 104 are sequentially transmitted and returned in the original path; thereby forming a main optical path of the cavity and defining an optical axis of the cavity.
A laser crystal 105 disposed between the first relay mirror 102 and the second relay mirror 103; as a gain medium of the laser, it is stimulated to amplify the light beam by the influence of the light beam entering the laser crystal 105. For example, the laser crystal 105 may be a Nd: YVO4 (yttrium vanadate doped with neodymium), nd: gdVO4 (gadolinium vanadate doped with neodymium), nd: YAG (yttrium aluminum garnet doped with neodymium), yb: YAG (yttrium aluminum garnet doped with ytterbium), nd: YLF (lithium yttrium fluoride doped with neodymium), nd: KGW (potassium gadolinium tungstate doped with neodymium) crystal.
A light modulator 106 disposed between the start mirror 101 and the first relay mirror 102; the quality factor Q of the whole ultraviolet resonant cavity is adjusted as an optical switch, and the resonant cavity outputs laser pulses when a preset condition is reached.
A frequency doubling crystal 107 is provided between the second relay mirror 103 and the end point mirror 104. As the frequency doubling crystal 107 that converts the light beam into a high-frequency light beam, the light beam passing through the frequency doubling crystal is caused by one kind of phase matching or two kinds of phase matching.
The optical axis of the entire ultraviolet laser resonator 100 is adjusted by adjusting at least one of the start mirror 101, the first relay mirror 102, the second relay mirror 103, and the end mirror 104, and the laser crystal 105, the optical modulator 106, and the frequency doubling crystal 107 are all mounted on the optical axis. It is easy to understand that the advantageous effects of the present utility model can be achieved even if the laser crystal 105, the optical modulator 106, the frequency doubling crystal do not completely coincide with the optical axis. Other optical elements such as diaphragms, mirrors, lenses may also be added to the uv cavity to further modulate the optical axis position.
The ultraviolet laser resonant cavity 100 has at least the following beneficial effects that (1) the high-power ultraviolet laser output of a single pump source is realized through the Q-switched principle; (2) Compared with the known linear resonant cavity and the V-shaped resonant cavity, the ultraviolet resonant cavity reduces the space required for deploying the resonant cavity on the premise of not reducing the cavity length, and can be suitable for smaller lasers.
In some embodiments, the light beam as the fundamental frequency light may enter the resonant cavity from the first relay mirror 102, then be emitted to the laser crystal 105 and excited and amplified at the laser crystal 105, and reflected to the frequency doubling crystal 107 by the second relay mirror 103, frequency doubling is achieved by nonlinear optical effect, then the light beam is inverted by the end point mirror 104, and the principle of reversibility of the optical path is installed, and then the light beam propagates to the first relay mirror 102, and then propagates to the optical modulator 106 after being reflected by the first relay mirror 102, enters the starting point mirror 101, is reflected again to the first relay mirror 102 by the starting point mirror 101, and repeats the above process until the optical modulator 106 changes the Q value of the resonant cavity, at this time, the laser pulse will be output at the frequency doubling crystal 107 and leave the ultraviolet laser resonant cavity 100, in order to obtain high quality ultraviolet laser, light can be split at the frequency doubling crystal 107, and the frequency tripled or the frequency tripled laser pulse is separated and then output.
It is easy to understand that the beam as the fundamental light may enter the ultraviolet laser resonator 100 of the present utility model from other positions, for example, from the starting point mirror 101, or enter from other positions of the resonator using other spectroscopic apparatuses, and the position where the beam as the fundamental light enters the ultraviolet laser resonator 100 of the embodiment of the present utility model does not affect the achievement of the beneficial effects of the present utility model. However, the embodiment in which the beam as the fundamental frequency light is coupled from the first relay mirror 102 into the resonator can further compress the space occupied by the laser having the ultraviolet laser resonator 100 of the present utility model because this arrangement can shorten the wiring required when the pump source and the gain medium use the same power supply. Also in other embodiments, the spacing between the start mirror 101 and the first relay mirror 102 is larger and the spacing between the second relay mirror 103 and the end mirror 104 is smaller, so that the pump source can be placed near the second relay mirror 103 and the end mirror 104 and output from the first relay mirror 102 to further fold the laser.
In some embodiments, the spot inside the ultraviolet laser resonator 100 is further tuned. Such that the starting mirror 101 comprises a first collecting surface, which is located on the side of the starting mirror 101 facing the light modulator 106. For example, the starting mirror 101 may be provided as a plano-concave lens with the concave side facing the light modulator 106, or a micro-nano structure may be engraved on the starting mirror 101 so that the light beam reflected by the starting mirror 101 is condensed toward the light modulator 106. In some embodiments, the end mirror 104 may also be made to include a second light converging surface on a side of the end mirror 104 facing the frequency doubling crystal 107. For example, the end mirror 104 may be configured as a plano-concave lens with the concave side facing the frequency doubling crystal 107, or a micro-nano structure may be engraved on the end mirror 104 so that the light beam reflected by the end mirror 104 is condensed toward the frequency doubling crystal 107. By means of the method, the optical axis of the resonant cavity can be better adjusted in the building process of the ultraviolet laser resonant cavity 100, and the quality of laser pulses output by the ultraviolet laser resonant cavity 100 is improved.
In some embodiments, to better adjust the optical axis of the ultraviolet laser resonator 100, the first relay mirror 102 includes a first light diffusing surface that is located on a side of the first relay mirror 102 that faces the laser crystal 105. For example, the first relay reflector 102 may be configured as a plano-convex lens, where a convex surface faces the laser crystal 105, or a micro-nano structure may be engraved on the end reflector 104, so that the optical axis of the ultraviolet laser resonator 100 may be changed substantially by only slightly moving the first relay reflector 102.
The light modulator 106 may be, for example, an electro-optic modulator, an acousto-optic modulator, a saturable absorbing dye, a color center crystal, or the like. However, the use of an electro-optic modulator significantly changes the polarization of the beam in the resonant cavity, which easily affects the phase matching of the beam at the frequency doubling crystal 107, while the saturable absorption dye is a passive Q-switching means, so that the use of an acousto-optic modulator is a preferred embodiment.
The frequency doubling crystals may include, for example, a first frequency doubling crystal 108 and a second frequency doubling crystal 109, the first frequency doubling crystal 108 being disposed closer to the end mirror 104 than the second frequency doubling crystal 109. The first frequency doubling crystal 108 is used as a frequency doubling crystal, the second frequency doubling crystal 109 is used as a frequency tripling crystal, the light beam propagating from the end point reflecting mirror 104 to the first frequency doubling crystal 108 generates frequency doubling light and fundamental frequency light through the first frequency doubling crystal 108, and then the generated fundamental frequency light and frequency doubling light enter the second frequency doubling crystal 109 to generate the fundamental frequency light, frequency doubling light and frequency tripling light. Thereby realizing frequency multiplication of the light beam, and when the quality factor Q in the ultraviolet laser resonator 100 is adjusted to a preset value, an ultraviolet laser pulse is emitted from the second frequency multiplication crystal 109.
In order to obtain high-quality tripled frequency ultraviolet laser pulses, a beam splitting device, such as a coating film or a beam splitter, may be disposed at an end of the second frequency doubling crystal 109 near the second relay mirror 103, so as to realize beam splitting output of the tripled frequency ultraviolet laser pulses.
It will be readily appreciated that the frequency doubling conversion efficiency of the frequency doubling may be controlled in some embodiments by adjusting the spot size of the first frequency doubling crystal 108. In the embodiment of the present utility model, the light spot may be implemented in the following manner (1) to increase the intensity of the pump light, where the thermal lens effect in the resonant cavity is increased, so that the light spot on the first frequency doubling crystal 108 becomes smaller. (2) By adjusting the second condensing surface of the end mirror 104, the light beam is better focused onto the first frequency doubling crystal 108.
A notch 110 is provided on a side of the second frequency doubling crystal 109 facing the second relay mirror 103, and specifically, the notch 110 enables the frequency-doubled laser pulse and the frequency-tripled laser pulse propagating from the second frequency doubling crystal 109 to be split without being blocked by the second relay mirror 103, thereby leaving the ultraviolet laser resonator 100. The notch 110 is, for example, a brewster angle relative to the second relay mirror 103, so that the light beam propagating from the first relay mirror 102 to the end mirror 104 enters the second frequency doubling crystal 109 at the brewster angle, and the angles of the fundamental frequency light, the frequency doubling laser pulse and the frequency tripling laser pulse leaving the second frequency doubling crystal 109 are not uniform, so that the purpose of light splitting is achieved. However, the splitting may be implemented by inserting a harmonic color separator or plating a splitting film on the surface of the second frequency doubling crystal 109, but in this embodiment, since a portion of the fundamental frequency light is filtered out and cannot return to the uv laser resonator 100, the light conversion efficiency is lower than in the embodiment using the notch 110.
In some embodiments, the first frequency doubling crystal 108 is provided as an LBO crystal and the second frequency doubling crystal 109 is provided as an LBO (lithium triborate, liB 3 O 5 ) Crystals, but obviously BB0 (low temperature phase barium metaborate, beta-BaB 2 O 4 ) An isononlinear crystal, but taking into account the frequency multiplication of the ultraviolet laserAbility, the use of LBO crystals is a preferred embodiment.
Although in the above embodiments, it is mentioned that the ultraviolet laser resonator 100 of the present utility model may use a single pump source, it is easy to understand that the use of multiple pump sources does not hinder the achievement of the beneficial effects of the present utility model.
Although in the above-described embodiment, the frequency doubling crystal 107 of the present utility model is mentioned to include the first frequency doubling crystal 108 and the second frequency doubling crystal 109, in some embodiments, since the wavelength of the light beam input from the pump source is short, for example, the input blue-violet light of 400 to 460nm, only the frequency doubling is required to obtain the ultraviolet laser pulse, and thus the frequency doubling crystal 107 may include only the second frequency doubling crystal 109.
Fig. 3 is a schematic structural diagram of a laser according to an embodiment of the present utility model.
Referring to fig. 3, the above-mentioned ultraviolet laser resonator 100 may be simply placed in any ultraviolet laser 10 requiring a pumping source, and the light beam emitted from the pumping source may be formed along a light-condensing optical path 201 and a transmission path 202 of the ultraviolet laser 10, and the light-condensing optical path 201 may be formed of, for example, two lenses, so that the light beam emitted from the transmission path matches the radius of the fundamental mode spot of the ultraviolet laser resonator 100, and for example, the light-condensing optical path 201 may be formed of a pair of plano-concave lenses, or a pair of plano-convex lenses. The transmission path is, for example, a collimated light path composed of a plurality of lens mirrors, or an optical fiber. It will be readily appreciated that the provision of a laser does not affect the achievement of at least one of the benefits of the inventive ultraviolet laser resonator 100, and therefore the inventive ultraviolet laser resonator 100 may also be replaced as a resonator in an existing laser.
According to the ultraviolet laser resonant cavity, the ultraviolet laser resonant cavity can stably operate under a high-power pump source with the wavelength of 1064nm, and high-power ultraviolet light is obtained. In some embodiments, the optical power of the ultraviolet laser light emitted by the ultraviolet laser can simply exceed 20W.
Also, the above-described ultraviolet laser resonator 100 or ultraviolet laser 10 may be applied to any laser processing apparatus as a light source, and at least one advantageous effect of the ultraviolet laser resonator 100 or ultraviolet laser 10 of the present utility model can be achieved.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.
Claims (10)
1. An ultraviolet laser resonator, comprising:
a set of mirrors including a start mirror, an end mirror, a first relay mirror, and a second relay mirror, a beam entering the resonant cavity reciprocating between the start mirror and the end mirror,
the first relay mirror and the second relay mirror are disposed on an optical axis between the start mirror and the end mirror,
the light beam propagating from the start mirror to the end mirror passes through the first relay mirror and the second relay mirror in order to reach the end mirror;
the light beam propagating from the end mirror to the start mirror passes through the second relay mirror and the first relay mirror in order to reach the start mirror;
the laser crystal is positioned on the optical axis and is arranged between the first relay reflector and the second relay reflector;
the optical modulator is positioned on the optical axis and is arranged between the starting point reflector and the first relay reflector;
and the frequency doubling crystal is positioned on the optical axis and is arranged between the second relay reflector and the end reflector.
2. The ultraviolet laser resonator according to claim 1, wherein the starting mirror comprises a first collecting surface, the first collecting surface being located on a side of the starting mirror facing the light modulator, and/or
The end point reflector comprises a second light converging surface, and the second light converging surface is positioned on one surface of the end point reflector facing the frequency doubling crystal.
3. The ultraviolet laser resonator according to claim 1 or 2, wherein the first relay mirror comprises a first light diffusing surface, the first light diffusing surface being located on a side of the first relay mirror facing the laser crystal.
4. A uv laser resonator as claimed in claim 3 wherein the optical modulator is an acousto-optic modulator.
5. The ultraviolet laser resonator of claim 1 wherein the frequency doubling crystal comprises a first frequency doubling crystal and a second frequency doubling crystal, the first frequency doubling crystal being an LBO crystal, the second frequency doubling crystal being an LBO crystal, the first frequency doubling crystal being in series with the second frequency doubling crystal.
6. The ultraviolet laser resonator of claim 5 wherein a side of the second frequency doubling crystal facing the second relay mirror has a notch that causes the light beam propagating from the first relay mirror to the end point mirror to enter the second frequency doubling crystal at brewster's angle.
7. The ultraviolet laser resonator according to claim 5, wherein the laser crystal is one of a neodymium-doped yttrium vanadate crystal, a neodymium-doped gadolinium vanadate crystal, a neodymium-doped yttrium aluminum garnet crystal, a ytterbium-doped yttrium aluminum garnet crystal, a neodymium-doped lithium yttrium fluoride crystal, and a neodymium-doped potassium gadolinium tungstate crystal.
8. A laser is characterized by comprising a pumping source, a light condensing optical path and a resonant cavity,
the resonant cavity is an ultraviolet laser resonant cavity according to any one of claims 1 to 7;
pump light emitted from the pump source enters the resonant cavity from the first relay mirror along the condensing optical path.
9. The laser of claim 8, wherein the pump light has a wavelength of 1064nm;
the light condensing optical path comprises a first light condensing lens and a second light condensing lens, and the pump light enters the light condensing optical path from the first light condensing lens.
10. A laser processing apparatus, comprising:
an ultraviolet laser resonator as claimed in any one of claims 1 to 7.
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