CN220038190U - Special gas supply system - Google Patents

Abstract

The utility model discloses a special gas supply system, which comprises a special gas supply pipeline and a purging pipeline, wherein the special gas supply pipeline is used for supplying special gas towards a reaction cavity, the purging pipeline comprises a main pipeline and a plurality of branches communicated with the main pipeline, the branches are respectively communicated with the special gas supply pipeline, and inert gas purges the special gas supply pipeline, control components on the special gas supply pipeline and the reaction cavity through the main pipeline and the branches. The special gas supply system can enter the special gas supply pipeline from a specified position according to actual purging requirements so as to thoroughly purge the special gas supply pipeline, the control components on the special gas supply pipeline and the reaction cavity, so that no special gas residue exists in the special gas supply pipeline, the control components on the special gas supply pipeline and the reaction cavity, the safety is improved, and the service life of the control components is prolonged.

Description

Special gas supply system

Technical Field

The utility model relates to the field of photovoltaic equipment manufacturing, in particular to a special gas supply system.

Background

The process gas is widely applied to high-tech industries such as semiconductors, microelectronics, liquid crystal panels, solar cells and the like. The process equipment such as film deposition, doping, passivation and the like used in the industry all widely utilizes the process special gas as a process raw material to produce products, so that the requirement of the process special gas is high. The existing special gas supplementing system is simple in function, and an inert gas purging function is simply added to the main gas port, so that the special gas inlet pipeline and components of each reaction chamber cannot be effectively cleaned, and a certain proportion of special gas remains, so that pipeline pollution and component damage are caused.

Disclosure of Invention

The utility model aims to provide a special gas supply system which can be independently introduced into a special gas pipeline for purging and cleaning, and also can be introduced into a special gas control component for purging and cleaning the component, so that no special gas remains in the special gas pipeline and the component.

In order to achieve the technical effects, the technical scheme of the utility model is as follows:

the utility model discloses a special gas supply system, which comprises: a extra-gas supply line for supplying extra-gas toward the reaction chamber; the purging pipeline comprises a main pipeline, a first branch and a second branch, wherein the first branch and the second branch are communicated with the main pipeline, the first branch and the second branch are communicated with the special gas supply pipeline, and the connection position of the first branch and the special gas supply pipeline is located at the upstream of the connection position of the second branch and the special gas supply pipeline.

In some embodiments, the extra-gas supply pipeline is sequentially provided with a first control valve, a first pressure regulating valve, a first pressure gauge and a first one-way valve, and the first one-way valve is positioned at the upstream of the connection position of the first branch and the extra-gas supply pipeline.

In some specific embodiments, the first control valve comprises a manual control valve and a pneumatic control valve in series.

In some embodiments, the special gas supply pipeline is further provided with a first flowmeter and a second control valve in sequence, and a gas outlet of the second control valve is communicated with the reaction cavity.

In some specific embodiments, the extra gas supply system further comprises a check branch, two ends of the check branch are connected with the extra gas supply pipeline, one end of the check branch connected with the extra gas supply pipeline is located at the downstream of the connection position of the first branch and the extra gas supply pipeline, the other end of the check branch connected with the extra gas supply pipeline is located at the upstream of the first flowmeter, and a check flowmeter and a third control valve are arranged on the check branch.

In some more specific embodiments, a fourth control valve, a second check valve and a fifth control valve are further sequentially arranged on the special gas supply pipeline, and the fourth control valve, the second check valve and the fifth control valve are arranged in parallel with the check flowmeter and the third control valve.

In some embodiments, each branch is provided with a one-way control valve and an opening and closing control valve in sequence.

In some embodiments, the main pipeline is sequentially provided with a sixth control valve, a second pressure regulating valve, a second pressure gauge, a third one-way valve and a seventh control valve, and the seventh control valve is arranged between the main pipeline and the connection positions of two adjacent branches.

In some embodiments, at least one of the plurality of branches is directly connected to the reaction chamber.

In some specific embodiments, the branch connected to the reaction chamber is provided with a fourth check valve, a second flowmeter and an eighth control valve in sequence.

The special gas supply system has the following beneficial effects: in the actual working process, because the branches are respectively communicated with the special gas supply pipeline, inert gas can enter the special gas supply pipeline from a designated position according to the actual purging requirement in the actual purging process, the special gas supply pipeline and control components on the special gas supply pipeline can be thoroughly purged, and because the special gas supply pipeline is used for supplying special gas to the reaction cavity, the inert gas can finally enter the reaction cavity to purge the reaction cavity, so that the special gas supply pipeline, the control components on the special gas supply pipeline and the reaction cavity have no special gas residues, the safety is improved, and the working life of the control components is prolonged.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic diagram of a system for replenishing a specific gas according to an embodiment of the present utility model.

Reference numerals:

100. a special gas supply pipeline;

210. a main pipeline; 220. a first branch; 230. a second branch; 240. a third branch;

300. verification branch

401. A first control valve; 4011. a manual control valve; 4012. a pneumatic control valve; 402. a first pressure regulating valve; 403. a first pressure gauge; 404. a first one-way valve; 405. a first flowmeter; 406. a second control valve; 407. checking the flowmeter; 408. a third control valve; 409. a fourth control valve; 410. a second one-way valve; 411. a fifth control valve; 412. a fifth check valve; 413. a ninth control valve; 414. a sixth one-way valve; 415. a tenth control valve; 416. a sixth control valve; 417. a second pressure regulating valve; 418. a second pressure gauge; 419. a third one-way valve; 420. a seventh control valve; 421. a fourth one-way valve; 422. a second flowmeter; 423. an eighth control valve; 424. a special gas monitor.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The specific structure of the extra-gas supply system according to the embodiment of the utility model will be described below with reference to fig. 1.

The utility model discloses a special gas supply system, as shown in fig. 1, the special gas supply system comprises a special gas supply pipeline 100 and a purging pipeline, wherein the special gas supply pipeline 100 is used for supplying special gas to a reaction cavity, the purging pipeline comprises a main pipeline 210 and a plurality of branches communicated with the main pipeline 210, the branches are respectively communicated with the special gas supply pipeline 100, and inert gas purges the special gas supply pipeline 100, control components on the special gas supply pipeline 100 and the reaction cavity through the main pipeline 210 and the branches.

It can be understood that in the actual working process, since the multiple branches are respectively communicated with the extra-gas supply pipeline 100, in the actual purging process, inert gas can enter the extra-gas supply pipeline 100 from a designated position according to the actual purging requirement, so that the extra-gas supply pipeline 100 and control components on the extra-gas supply pipeline 100 can be thoroughly purged, and because the extra-gas supply pipeline 100 is used for supplying extra-gas to the reaction cavity, the inert gas can finally enter the reaction cavity to purge the reaction cavity, so that the extra-gas supply pipeline 100, the control components on the extra-gas supply pipeline 100 and the reaction cavity have no extra-gas residue, the safety is improved, and the service life of the control components is prolonged.

In some embodiments, as shown in fig. 1, a first control valve 401, a first pressure regulating valve 402, a first pressure gauge 403, and a first check valve 404 are sequentially disposed on the extra gas supply line 100. It can be appreciated that the first control valve 401 can control the on-off of the extra-gas supply pipeline 100, so that the extra-gas supply pipeline 100 is turned on and off according to actual needs in actual work, the first pressure regulating valve 402 can realize pressure stabilization for the extra-gas, ensure that the extra-gas in the extra-gas supply pipeline 100 can keep pressure stabilization and transportation, the first pressure gauge 403 can detect the air pressure of the extra-gas, and if the first pressure gauge 403 detects abnormality, the phenomenon of leakage or valve group damage is indicated, so that the monitoring of the extra-gas supply pipeline 100 is realized. The first check valve 404 ensures that the flow direction of the extra gas can only flow from the first control valve 401 to the first check valve 404, and avoids the phenomenon of the extra gas flowing backwards in the extra gas supply pipeline 100.

Optionally, the first control valve 401 is further provided with a special gas monitor 424, and the special gas monitor 424 is associated with the first control valve 401 and is controlled by the system. In the actual working process, if the extra gas monitor 424 detects the extra gas leakage, the system will close the first control valve 401 in time to avoid the extra gas leakage.

In some particular embodiments, as shown in fig. 1, the first control valve 401 includes a manual control valve 4011 and a pneumatic control valve 4012 in series. It will be appreciated that the first control valve 401 comprises a manual control valve 4011 and a pneumatic control valve 4012 in series, the other valve also ensuring the patency of the extra-gas supply line 100 if one of the valves fails. And if extra-gas leakage occurs, when the working environment is dangerous, the extra-gas supply pipeline 100 is closed directly through the pneumatic control valve 4012, the operator can enter the working environment without personal protection, the closing time of the extra-gas supply pipeline 100 is shortened, and the extra-gas leakage amount is reduced.

In some embodiments, as shown in fig. 1, a first flowmeter 405 and a second control valve 406 are further disposed on the extra gas supply pipeline 100 in sequence, and an air outlet of the second control valve 406 is communicated with the reaction chamber. It can be appreciated that the first flowmeter 405 can accurately measure the gas flow of the extra-gas supply pipeline 100 flowing to the reaction chamber, so as to realize accurate control of the gas inflow of the reaction chamber. The added second control valve 406 can be opened or closed according to actual needs to control whether to output the extra gas towards the reaction chamber.

Optionally, the second control valve 406 is a pneumatic valve, whereby automatic control of the extra-gas supply line 100 can be achieved.

In some specific embodiments, as shown in fig. 1, the extra gas supply system further includes a check branch 300, where both ends of the check branch 300 are connected to the extra gas supply pipeline 100, and a check flowmeter 407 and a third control valve 408 are disposed on the check branch 300. It can be appreciated that, in the actual working process, after the third control valve 408 is opened, the extra gas can flow from the calibration branch 300 to the calibration flowmeter 407 and the first flowmeter 405 in sequence, so that the first flowmeter 405 can be calibrated according to the detection data of the calibration flowmeter 407 and the detection data of the first flowmeter 405, so as to ensure the detection accuracy of the first flowmeter 405, and further ensure that the first flowmeter 405 can accurately measure the gas flow of the extra gas supply pipeline 100 flowing to the reaction chamber.

Optionally, the third control valve 408 is a pneumatic valve. Thereby, the automatic control of the verification branch 300 can be realized.

In some more specific embodiments, as shown in fig. 1, a fourth control valve 409, a second check valve 410, and a fifth control valve 411 are further disposed on the extra gas supply line 100 in sequence, and the fourth control valve 409, the second check valve 410, and the fifth control valve 411 are disposed in parallel with the check flow meter 407 and the third control valve 408. It can be appreciated that in the process of checking the first flowmeter 405, it is necessary to avoid the extra gas flowing through the first flowmeter 405 from other pipelines, so as to ensure that the extra gas can only flow through the check flowmeter 407 and the first flowmeter 405 in sequence, and in this embodiment, the fourth control valve 409 and the fifth control valve 411 can cut off the other pipelines from flowing through the first flowmeter 405, so as to ensure the accuracy of checking. The added second check valve 410 can ensure that the flow direction of the extra gas can only flow from the fourth control valve 409 to the fifth control valve 411, thereby avoiding the backflow phenomenon of the gas in the reaction cavity from the fifth control valve 411 to the fourth control valve 409.

Optionally, the fourth control valve 409 is a manual valve and the fifth control valve 411 is a pneumatic valve.

In some embodiments, as shown in fig. 1, each branch is provided with a one-way control valve and an opening and closing control valve in sequence. It can be appreciated that, according to the foregoing, in the actual working process, the purge air flow may purge the extra-gas supply pipeline 100 or the control components of the extra-gas supply pipeline 100 from multiple branches, and the unidirectional control valve and the opening/closing control valve may open or close the corresponding branches according to the actual needs, so as to meet the actual purge requirement. The additionally arranged one-way control valve can avoid the occurrence of the phenomenon of gas backflow in the branch.

In some embodiments, as shown in fig. 1, a sixth control valve 416, a second pressure regulating valve 417, a second pressure gauge 418, a third check valve 419 and a seventh control valve 420 are sequentially disposed on the main pipe 210, and the seventh control valve 420 is disposed between the connection positions of the main pipe 210 and the adjacent two branches.

It can be appreciated that the sixth control valve 416 can control the on-off of the main pipeline 210, so that the main pipeline 210 is opened and closed according to actual needs in actual operation, the second pressure regulating valve 417 can realize pressure stabilization on the inert gas, ensure that the inert gas in the main pipeline 210 can be conveyed in a pressure-stabilizing manner, and the second pressure gauge 418 can detect the air pressure of the inert gas, if the first pressure gauge 403 detects abnormality, it indicates that leakage or valve group damage exists, so as to realize monitoring of the main pipeline 210. Third check valve 419 ensures that the flow of inert gas can only flow from sixth control valve 416 to third check valve 419, avoiding the reverse flow of inert gas in main line 210. According to the foregoing, in the actual working process, the purge gas flow can purge the extra gas supply pipeline 100 or the control components of the extra gas supply pipeline 100 from multiple branches, and when the inert gas does not need to pass through a certain branch, the seventh control valve 420 adjacent to the branch can be directly closed, so that the control is very convenient. Optionally, the sixth control valve 416 and the seventh control valve 420 are both manual valves.

In some embodiments, as shown in FIG. 1, at least one of the plurality of branches is directly connected to the reaction chamber. It will be appreciated that in the actual working process, the inert gas may be required or used as the shielding gas in the reaction chamber, and in this embodiment, at least one of the multiple branches is directly connected to the reaction chamber, so that the special gas supply system of this embodiment may further introduce the inert gas into the reaction chamber to purge or serve as the shielding gas in the reaction chamber. In addition, in the actual working process, the branch can be used as an air supply passage of the reaction cavity and also can be used as a back pressure passage of the reaction cavity, and the branch can be specifically selected according to actual needs.

In some specific embodiments, as shown in fig. 1, the branch connected to the reaction chamber is sequentially provided with a fourth check valve 421, a second flowmeter 422, and an eighth control valve 423. It can be appreciated that the fourth check valve 421 can avoid the reverse flow of the gas in the third branch 240, the second flowmeter 422 can measure the gas entering the reaction chamber, and the eighth control valve 423 can control the on-off of the third branch 240. Optionally, the eighth control valve 423 is a pneumatic valve.

Examples:

a specific gas supply system according to an embodiment of the present utility model will be described below with reference to fig. 1.

As shown in fig. 1, the extra gas supply system includes an extra gas supply line 100 for supplying extra gas toward the reaction chamber, and a purge line 100 including a main line 210 and first, second and third branches 220, 230 and 240 communicating with the main line 210, the first and second branches 220 and 230 communicating with the extra gas supply line 100, and a connection position of the first branch 220 and the extra gas supply line 100 is located upstream of a connection position of the second branch 230 and the extra gas supply line 100. The special gas supply pipeline 100 is sequentially provided with a manual control valve 4011, a pneumatic control valve 4012, a first pressure regulating valve 402, a first pressure gauge 403, a first one-way valve 404, a fourth control valve 409, a second one-way valve 410 and a fifth control valve 411, the downstream of the fifth control valve 411 comprises two branch pipelines, each branch pipeline is connected with one reaction cavity, and each branch pipeline is provided with the first one-way valve 404 and the first flowmeter 405 which are sequentially arranged. Both ends of the check branch 300 are connected with the extra gas supply pipeline 100, one end of the check branch 300 connected with the extra gas supply pipeline 100 is located at the downstream of the connection position of the first branch 220 and the extra gas supply pipeline 100, the other end of the check branch 300 connected with the extra gas supply pipeline 100 is located at the upstream of the first flowmeter 405, and the check branch 300 is provided with a check flowmeter 407 and a third control valve 408. The check flow meter 407 and the third control valve 408 are arranged in parallel with the fourth control valve 409, the second check valve 410 and the fifth control valve 411. The main pipeline 210 is sequentially provided with a sixth control valve 416, a second pressure regulating valve 417, a second pressure gauge 418, a third check valve 419 and a seventh control valve 420, wherein the sixth control valve 416, the second pressure regulating valve 417, the second pressure gauge 418 and the third check valve 419 are all positioned at the upstream of the connection position of the first branch 220 and the main pipeline 210, and the seventh control valve 420 is positioned between the connection position of the first branch 220 and the main pipeline 210 and the connection position of the second branch 230 and the main pipeline 210. The first branch 220 is provided with a fifth check valve 412 and a ninth control valve 413 in sequence. The second branch 230 is provided with a sixth check valve 414 and a tenth control valve 415 in sequence. The third branches 240 are two in parallel arrangement, and each third branch 240 is sequentially provided with a fourth one-way valve 421, a second flowmeter 422 and an eighth control valve 423, and an outlet of the eighth control valve 423 is connected with the furnace tube.

The second control valve 406, the third control valve 408, the fifth control valve 411, and the eighth control valve 423 are pneumatic valves, and the fourth control valve 409, the ninth control valve 413, the tenth control valve 415, the sixth control valve 416, and the seventh control valve 420 are manual valves.

The gas path of the extra-gas supply system of this embodiment is as follows,

an inert gas circuit; the inert gas passes through the sixth control valve 416, then passes through the second pressure regulating valve 417, stabilizes the pressure of the inert gas, and is displayed by the second pressure gauge 418, and is divided into two branches (the first branch 220 is one branch, the second branch 230 and the third branch 240 are the other branch) by the third one-way valve 419, and the inert gas of the first branch 220 sweeps the special gas supply pipeline 100 through the fifth one-way valve 412 and the ninth control valve 413 (the associated cleaning pipeline can be additionally provided with multiple paths according to actual needs); the other path is branched to the second branch 230 and the third branch 240 through the seventh control valve 420, and the inert gas of the second branch 230 cleans the special gas supply pipeline 100, the first flowmeter 405, the second control valve 406, the check flowmeter 407, the fourth control valve 409, the second check valve 410 and other devices through the sixth check valve 414 and the tenth control valve 415; the inert gas in the third branch 240 is divided into two branches by the fourth check valve 421, and sequentially passes through the second flowmeter 422 and the eighth control valve 423 to enter the two reaction chambers respectively, which may also be the back pressure of different reaction chambers.

Special gas circuit: the extra gas is stabilized by the first pressure regulating valve 402 through the manual control valve 4011 and the pneumatic control valve 4012, is displayed by the first pressure gauge 403, passes through the first check valve 404 and is divided into two branches: one branch is connected to the check branch 300, and the opening and closing of the third control valve 408 check the two first flow meters 405 at any time through the third control valve 408; after the other branch passes through the fourth control valve 409 and the second one-way valve 410, firstly, the special gas is guided into the first flowmeter 405 through the opening of the fifth control valve 411, and then is controlled by the two first flowmeters 405 respectively, and the two second control valves 406 are opened to be respectively led into different reaction chambers, so that the even ventilation of the special gas is ensured. The first control valve 401 is also provided with a special gas monitor 424, and the special gas monitor 424 is associated with the first control valve 401 and is controlled by the system. The extra-gas monitor 424 detects the occurrence of extra-gas leakage, and the system closes the first control valve 401 in time.

The advantage of the extra-gas supply system of this embodiment is as follows:

first: the purge effect is improved, so that the pollution rate of the extra-gas supply pipeline 100 and related components is reduced, and the damage rate is reduced.

Second,: different first flow meters 405 correspond to different reaction chambers, so that the gas inlet flow is more accurate, and the process effect is improved.

Third,: the corresponding special gas monitor 424 is additionally arranged, so that the monitoring effect is more accurate, the special gas monitor 424 detects the phenomenon of special gas leakage, and the system can timely close the special gas supply pipeline 100;

fourth,: the verification branch 300 is additionally arranged, the verification flowmeter 407 is additionally arranged, and then the verification branch 300 is connected in series with the first flowmeter 405 for introducing the special gas of the reaction chamber to form the automatic verification branch 300, so that the function of automatically verifying the first flowmeter 405 can be completed.

In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.

Claims (10)

1. A special gas supply system, comprising:

a special gas supply line (100), wherein the special gas supply line (100) is used for supplying special gas towards the reaction cavity;

the purging pipeline comprises a main pipeline (210) and a plurality of branches communicated with the main pipeline (210), the branches are respectively communicated with the special gas supply pipeline (100), and inert gas is used for purging the special gas supply pipeline (100), control components on the special gas supply pipeline (100) and the reaction cavity through the main pipeline (210) and the branches.

2. The extra-gas supply system according to claim 1, wherein the extra-gas supply line (100) is provided with a first control valve (401), a first pressure regulating valve (402), a first pressure gauge (403) and a first check valve (404) in this order.

3. The extra-gas make-up system of claim 2 wherein the first control valve (401) comprises a manual control valve (4011) and a pneumatic control valve (4012) in series in sequence.

4. The extra-gas supply system according to claim 1, wherein a first flow meter (405) and a second control valve (406) are further arranged on the extra-gas supply pipeline (100) in sequence, and an air outlet of the second control valve (406) is communicated with the reaction cavity.

5. The extra gas supply system according to claim 4, further comprising a check branch (300), wherein both ends of the check branch (300) are connected to the extra gas supply line (100), and a check flowmeter (407) and a third control valve (408) are provided on the check branch (300).

6. The extra gas supply system according to claim 5, wherein a fourth control valve (409), a second check valve (410) and a fifth control valve (411) are further provided in this order on the extra gas supply line (100), and the fourth control valve (409), the second check valve (410) and the fifth control valve (411) are provided in parallel with the check flow meter (407) and the third control valve (408).

7. The make-up system according to any one of claims 1 to 6, wherein each of said branches is provided with a one-way control valve and an on-off control valve in sequence.

8. The extra gas supply system according to any one of claims 1 to 6, wherein a sixth control valve (416), a second pressure regulating valve (417), a second pressure gauge (418), a third check valve (419) and a seventh control valve (420) are sequentially provided on the main pipe (210), and the seventh control valve (420) is provided between the main pipe (210) and the connection positions of the adjacent two branches.

9. The extra-gas supply system of any one of claims 1-6 wherein at least one of the plurality of branches is directly connected to the reaction chamber.

10. The extra gas supply system according to claim 9 wherein the branch connected to the reaction chamber is provided with a fourth check valve (421), a second flowmeter (422), and an eighth control valve (423) in this order.