CN220023508U - Piezoelectric sensor - Google Patents
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- CN220023508U CN220023508U CN202321405061.7U CN202321405061U CN220023508U CN 220023508 U CN220023508 U CN 220023508U CN 202321405061 U CN202321405061 U CN 202321405061U CN 220023508 U CN220023508 U CN 220023508U
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Abstract
The utility model provides a piezoelectric sensor, and relates to the technical field of piezoelectric sensors. The piezoelectric sensor comprises a first shielding layer, a flexible substrate layer, a first electrode layer, a piezoelectric film layer, a second electrode layer, a protective layer and a second shielding layer which are sequentially arranged from bottom to top, wherein the first electrode layer is provided with a plurality of first electrode areas which are arranged at intervals, the second electrode layer is provided with a plurality of second electrode areas which are respectively arranged corresponding to the plurality of first electrode areas, the piezoelectric film layer is provided with a plurality of piezoelectric films which are arranged at intervals, and the plurality of piezoelectric films are respectively arranged between the plurality of first electrode areas and the plurality of second electrode areas correspondingly. The technical scheme is equivalent to dividing the piezoelectric film layer into a plurality of independent piezoelectric films, and only paving the piezoelectric films at positions corresponding to the first electrode areas, so that the use area of the piezoelectric films is reduced, the interaction force between the piezoelectric films is reduced, the piezoelectric films are not easy to break when stressed, and the service life of the piezoelectric sensor is prolonged.
Description
Technical Field
The utility model relates to the technical field of piezoelectric sensors, in particular to a piezoelectric sensor.
Background
Along with the improvement of living standard, people focus attention points on physical health problems gradually, but the sleep quality problem is one of the most prominent problems among a plurality of health problems faced by people, various data in sleep of people are collected, and then the data are processed and analyzed by a plurality of special means to obtain sleep health information, so that the sleep health problem is solved, and the function is realized through sleep monitoring equipment. The sleep monitoring equipment for bedding articles in the market mostly consists of a strip-shaped piezoelectric sensor, a data acquisition module at the rear end, a signal analysis processing module and a display module. This prior art has the following disadvantages:
first: the slender and thin piezoelectric sensor bends after being pressed on a soft mattress, shear stress is generated in the longitudinal direction, the longer the piezoelectric film is, the more obvious the phenomenon is, the long-term stress is applied, the piezoelectric film is fatal to the piezoelectric film with the thickness of tens of micrometers, the piezoelectric film is broken and fails, and the service life of the sleep monitoring equipment is shortened;
second,: the electrode is silk-screened or coated on the upper and lower surfaces of the large-area piezoelectric film, and then cut into the required size, the edge is inevitably worn;
third,: the piezoelectric film is fully distributed on the whole piezoelectric sensor, the use area of the piezoelectric film can be increased, the production process of the piezoelectric film is complex, the cost is high, and the cost is lower when the piezoelectric film is used.
Disclosure of Invention
The utility model aims to provide a piezoelectric sensor, which solves the technical problem that a piezoelectric film is easy to break and lose efficacy after being stressed in the piezoelectric sensor in the prior art.
According to the purpose of the utility model, the utility model provides a piezoelectric sensor, which comprises a first shielding layer, a flexible substrate layer, a first electrode layer, a piezoelectric film layer, a second electrode layer, a protective layer and a second shielding layer which are sequentially arranged from bottom to top;
the first electrode layer has a plurality of first electrode regions arranged at intervals, the second electrode layer has a plurality of second electrode regions arranged respectively corresponding to the plurality of first electrode regions, the piezoelectric film layer has a plurality of piezoelectric films arranged at intervals, and the plurality of piezoelectric films are respectively arranged between the plurality of first electrode regions and the plurality of second electrode regions.
Optionally, the first electrode layer includes a first patterned electrode and a first signal transmission electrode connected to each other, the first patterned electrode and the first signal transmission electrode are located on an upper surface of the flexible substrate layer, and the first patterned electrode includes the plurality of first electrode regions.
Optionally, the second electrode layer includes a second patterned electrode and a second signal transmission electrode that are connected to each other, where the second patterned electrode includes the plurality of second electrode regions and is located on the upper surface of the piezoelectric thin film layer, and the second signal transmission electrode is located on the upper surface of the flexible substrate layer and is staggered with the first signal transmission electrode.
Optionally, the first electrode region and the second electrode region have the same shape and size.
Optionally, the size of the piezoelectric film is equal to or greater than the size of the first electrode region, and the piezoelectric film completely covers the first electrode region.
Optionally, the first electrode area has a square, rounded rectangle, circle, diamond, ellipse or calabash shape.
Optionally, the plurality of first electrode regions are arranged at intervals along the length direction of the piezoelectric sensor, and a distance between two adjacent first electrode regions is any value ranging from 1mm to 200 mm.
Optionally, the dimension of the first electrode region along the length direction is any one value in the range of 1-200 mm.
Optionally, the thickness of the piezoelectric thin film layer is any value in the range of 1-100 μm.
Optionally, the material of the piezoelectric film layer is polyvinylidene fluoride.
The piezoelectric sensor comprises a first shielding layer, a flexible substrate layer, a first electrode layer, a piezoelectric film layer, a second electrode layer, a protective layer and a second shielding layer which are sequentially arranged from bottom to top, wherein the first electrode layer is provided with a plurality of first electrode areas which are arranged at intervals, the second electrode layer is provided with a plurality of second electrode areas which are respectively arranged corresponding to the plurality of first electrode areas, the piezoelectric film layer is provided with a plurality of piezoelectric films which are arranged at intervals, and the plurality of piezoelectric films are respectively arranged between the plurality of first electrode areas and the plurality of second electrode areas. The technical scheme is equivalent to dividing the piezoelectric film layer into a plurality of independent piezoelectric films, and only paving the piezoelectric films at positions corresponding to the first electrode area and the second electrode area, so that the use area of the piezoelectric films is reduced, the interaction force between the piezoelectric films is reduced, the piezoelectric films are not easy to break when stressed, and the service life of the piezoelectric sensor is prolonged.
The above, as well as additional objectives, advantages, and features of the present utility model will become apparent to those skilled in the art from the following detailed description of a specific embodiment of the present utility model when read in conjunction with the accompanying drawings.
Drawings
Some specific embodiments of the utility model will be described in detail hereinafter by way of example and not by way of limitation with reference to the accompanying drawings. The same reference numbers will be used throughout the drawings to refer to the same or like parts or portions. It will be appreciated by those skilled in the art that the drawings are not necessarily drawn to scale. In the accompanying drawings:
FIG. 1 is a schematic block diagram of a piezoelectric sensor according to one embodiment of the utility model;
FIG. 2 is a schematic block diagram of a first electrode layer of the piezoelectric sensor of FIG. 1;
FIG. 3 is a schematic block diagram of a second electrode layer of the piezoelectric sensor of FIG. 1;
fig. 4 is a schematic structural view of a piezoelectric thin film layer of the piezoelectric sensor shown in fig. 1.
Reference numerals:
100-piezoelectric sensor, 10-first shielding layer, 20-flexible substrate layer, 30-first electrode layer, 40-piezoelectric film layer, 50-second electrode layer, 60-protective layer, 70-second shielding layer, 31-first electrode region, 32-first signal transmission electrode, 41-piezoelectric film, 51-second electrode region, 52-second signal transmission electrode.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.
In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element in question must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature, i.e. one or more such features. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise. When a feature "comprises or includes" a feature or some of its coverage, this indicates that other features are not excluded and may further include other features, unless expressly stated otherwise.
Unless specifically stated and limited otherwise, the term "coupled" and the like are to be construed broadly and may be, for example, fixedly coupled, detachably coupled, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. Those of ordinary skill in the art will understand the specific meaning of the terms described above in the present utility model as the case may be.
Furthermore, in the description of the present embodiment, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, or may include both the first and second features not being in direct contact but being in contact by another feature therebetween. That is, in the description of the present embodiment, the first feature being "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature being "under" the second feature may be the first feature being directly under or obliquely under the second feature, or simply indicating that the first feature is level less than the second feature.
Unless otherwise defined, all terms (including technical and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs.
Fig. 1 is a schematic structural view of a piezoelectric sensor 100 according to an embodiment of the present utility model, fig. 2 is a schematic structural view of a first electrode layer 30 of the piezoelectric sensor 100 shown in fig. 1, fig. 3 is a schematic structural view of a second electrode layer 50 of the piezoelectric sensor 100 shown in fig. 1, and fig. 4 is a schematic structural view of a piezoelectric thin film layer 40 of the piezoelectric sensor 100 shown in fig. 1. As shown in fig. 1 to 4, in this embodiment, the piezoelectric sensor 100 includes a first shielding layer 10, a flexible substrate layer 20, a first electrode layer 30, a piezoelectric thin film layer 40, a second electrode layer 50, a protective layer 60, and a second shielding layer 70, which are arranged in this order from bottom to top. The first electrode layer 30 has a plurality of first electrode regions 31 arranged at intervals, the second electrode layer 50 has a plurality of second electrode regions 51 arranged respectively corresponding to the plurality of first electrode regions 31, and the piezoelectric thin film layer 40 has a plurality of piezoelectric thin films 41 arranged at intervals, the plurality of piezoelectric thin films 41 being respectively arranged between the plurality of first electrode regions 31 and the plurality of second electrode regions 51.
This embodiment corresponds to dividing the piezoelectric film layer 40 into a plurality of independent piezoelectric films 41, and only laying the piezoelectric films 41 at positions corresponding to the first electrode region 31 and the second electrode region 51, so that the usage area of the piezoelectric films 41 is reduced, the interaction force between the piezoelectric films 41 is reduced, the piezoelectric films are not easy to break under stress, and the service life of the piezoelectric sensor 100 is prolonged.
Referring to fig. 2, in this embodiment, the first electrode layer 30 includes a first patterned electrode and a first signal transmission electrode 32 connected to each other, the first patterned electrode and the first signal transmission electrode 32 being located on the upper surface of the flexible substrate layer 20, the first patterned electrode including a plurality of first electrode regions 31. It is understood that the piezoelectric thin film layer 40 is formed only over the first patterned electrode.
Referring to fig. 3, in this embodiment, the second electrode layer 50 includes a second patterned electrode and a second signal transmission electrode 52 connected to each other, the second patterned electrode includes a plurality of second electrode regions 51 and is located on the upper surface of the piezoelectric film layer 40, and the second signal transmission electrode 52 is located on the upper surface of the flexible substrate layer 20 and is arranged offset from the first signal transmission electrode 32. It will be appreciated that the first signal transmitting electrode 32 and the second signal transmitting electrode 52 are formed directly on the flexible substrate layer 20, the piezoelectric film 41 is formed between the first electrode region 31 and the second electrode region 51, the piezoelectric film 41 is located on the first electrode region 31, and the second electrode region 51 is located on the piezoelectric film 41.
In this embodiment, the first electrode region 31 and the second electrode region 51 are identical in shape and size. The first electrode area 31 has a square, rounded rectangle, circle, diamond, oval or gourd-shaped shape, and the first electrode area 31 may be designed according to specific design requirements. In this embodiment, the shape of the piezoelectric film 41 is the same as the shape of the first electrode region 31. In other embodiments, the shape of the piezoelectric film 41 may also be designed according to specific design requirements.
In this embodiment, the size of the piezoelectric film 41 is equal to or larger than the size of the first electrode region 31, and the piezoelectric film 41 completely covers the first electrode region 31.
In this embodiment, the plurality of first electrode regions 31 are arranged at intervals in the length direction of the piezoelectric sensor 100, and the interval between adjacent two of the first electrode regions 31 is any one of values in the range of 1 to 200mm, for example, may be 1mm, 10mm, 30mm, 50mm, 80mm, 100mm, 120mm, 150mm, 180mm, 200mm, or the like. The dimension of the first electrode region 31 in the longitudinal direction of the piezoelectric sensor 100 is any value in the range of 1 to 200mm, and may be, for example, 1mm, 10mm, 30mm, 50mm, 80mm, 100mm, 120mm, 150mm, 180mm, 200mm, or the like.
In this embodiment, the thickness of the piezoelectric thin film layer 40 is any value in the range of 1 to 100 μm, and may be, for example, 1 μm, 10 μm, 30 μm, 50 μm, 80 μm, 100 μm, or the like.
In this embodiment, the first shielding layer 10 and the second shielding layer 70 are conductive cloth, the conductive cloth is a polyester fiber cloth, after being pre-treated, metal nickel is plated, then a high-conductivity copper layer is plated on the nickel, oxidation-resistant and corrosion-resistant nickel metal is plated on the copper layer, and the combination of copper and nickel provides excellent conductivity and good electromagnetic shielding effect, and the shielding range is 100K-3GHz. The first and second shielding layers 10 and 70 are completely wrapped around the outer surfaces of the flexible substrate layer 20 and the protective layer 60 of the piezoelectric sensor and are insulated from the first and second signal transmitting electrodes 32 and 52.
In this embodiment, the flexible substrate layer 20 is one of a film-like ethylene-vinyl acetate copolymer, polyethylene terephthalate, polyimide, polyethylene naphthalate, polydimethylsiloxane, polycarbonate, polyurethane, polymethyl methacrylate. The first electrode layer 30 and the second electrode layer 50 are one or more of silver nanowires, silver paste, copper nanowires, or conductive polymer PEDOT/PSS (poly 3, 4-ethylenedioxythiophene/polystyrene sulfonic acid). The protective layer 60 is one of a film-like ethylene-vinyl acetate copolymer, polyethylene terephthalate, polyimide, polyethylene naphthalate, polydimethylsiloxane, polycarbonate, polyurethane, polymethyl methacrylate, and is specifically provided on the upper surface of the second electrode layer 50 by means of adhesion or provided on the upper surface of the second electrode layer 50 and the upper surface of the flexible substrate layer 20 by means of screen printing or spin coating or coating with one or more liquid high molecular polymers such as PDMS, TPU, TPE, PE.
In this embodiment, the material of the piezoelectric thin film layer 40 is polyvinylidene fluoride, i.e., PVDF, and as a sensitive material, one or more of dimethylformamide, acetoacetate, tetramethylurea, butanone, trimethyl phosphate, and triethyl phosphate are used as solvents, and auxiliaries such as an antifoaming agent, a leveling agent, and a thickener are added to prepare a piezoelectric slurry, which is tightly bonded to the surface of the first patterned electrode of the first electrode layer 30 in a coating or screen printing manner, and then dried in an infrared tunnel furnace, a blast drying oven, or a vacuum drying oven, and then annealed.
The steps for preparing piezoelectric sensor 100 in this example are as follows: firstly, one of flexible high molecular polymer film ethylene-vinyl acetate copolymer, polyethylene terephthalate, polyimide, polyethylene naphthalate, polydimethylsiloxane, polycarbonate, polyurethane and polymethyl methacrylate is selected as the flexible substrate layer 20, and the thickness is 10-1500 mu m. Then, the first electrode layer 30 is fabricated, one or more of silver nanowires, silver paste, copper nanowires or conductive polymer PEDOT/PSS (poly 3, 4-ethylenedioxythiophene/polystyrene sulfonic acid) are tightly combined on the flexible substrate by coating or etching or screen printing, and are placed in a high-temperature furnace for curing. And then the piezoelectric film layer 40 is manufactured, the surface of the first patterned electrode is completely covered with the piezoelectric slurry in a coating or screen printing mode, and the piezoelectric film layer is dried and annealed at high temperature to form a film. And then the second electrode layer 50 is fabricated, one or more of silver nanowires, silver paste, copper nanowires, or conductive polymer PEDOT/PSS (poly 3, 4-ethylenedioxythiophene/polystyrene sulfonic acid) are tightly bonded on the piezoelectric film layer 40 and the flexible substrate by coating or etching or screen printing, and are cured in a high temperature furnace. Then, the piezoelectric thin film is polarized, and a high voltage of 5 to 35MV/cm is applied to the first signal transmission electrode 32 of the first electrode layer 30 and the second signal transmission electrode 52 of the second electrode layer 50 which are connected to each other at a high voltage. Finally, the first shielding layer 10 and the second shielding layer 70 are manufactured, a layer of conductive cloth is stuck on the upper surface and the lower surface of the flexible substrate and the protective layer 60, and the tail ends of the conductive cloth are insulated from the first electrode layer 30 and the second electrode layer 50.
This embodiment provides a long life, low cost piezoelectric sensor 100 for sleep monitoring. The piezoelectric film layer 40 is divided into a plurality of piezoelectric films 41, and the piezoelectric films 41 are only paved at the positions corresponding to the first electrode areas 31, so that the use area of the piezoelectric films 41 is reduced, the interaction force between the piezoelectric films 41 is reduced, the service life of the piezoelectric sensor 100 is prolonged, in addition, the piezoelectric films 41 of the embodiment are directly screen-printed or coated on the first electrode areas 31, the bonding force with the first electrode areas 31 is good, and phenomena such as glue overflow and degumming cannot be caused after long-term bending.
By now it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the utility model have been shown and described herein in detail, many other variations or modifications of the utility model consistent with the principles of the utility model may be directly ascertained or inferred from the present disclosure without departing from the spirit and scope of the utility model. Accordingly, the scope of the present utility model should be understood and deemed to cover all such other variations or modifications.
Claims (10)
1. The piezoelectric sensor is characterized by comprising a first shielding layer, a flexible substrate layer, a first electrode layer, a piezoelectric film layer, a second electrode layer, a protective layer and a second shielding layer which are sequentially arranged from bottom to top;
the first electrode layer has a plurality of first electrode regions arranged at intervals, the second electrode layer has a plurality of second electrode regions arranged respectively corresponding to the plurality of first electrode regions, the piezoelectric film layer has a plurality of piezoelectric films arranged at intervals, and the plurality of piezoelectric films are respectively arranged between the plurality of first electrode regions and the plurality of second electrode regions.
2. The piezoelectric sensor according to claim 1, wherein,
the first electrode layer comprises a first patterned electrode and a first signal transmission electrode which are connected with each other, the first patterned electrode and the first signal transmission electrode are positioned on the upper surface of the flexible substrate layer, and the first patterned electrode comprises a plurality of first electrode areas.
3. The piezoelectric sensor according to claim 2, wherein,
the second electrode layer comprises a second patterned electrode and a second signal transmission electrode which are connected with each other, the second patterned electrode comprises a plurality of second electrode areas and is positioned on the upper surface of the piezoelectric film layer, and the second signal transmission electrode is positioned on the upper surface of the flexible substrate layer and is staggered with the first signal transmission electrode.
4. The piezoelectric sensor according to claim 3, wherein,
the first electrode region and the second electrode region have the same shape and size.
5. The piezoelectric sensor of claim 4, wherein the piezoelectric sensor is configured to,
the size of the piezoelectric film is equal to or larger than the size of the first electrode region, and the piezoelectric film completely covers the first electrode region.
6. The piezoelectric sensor of claim 5, wherein the piezoelectric sensor is configured to,
the first electrode area is square, round corner rectangular, round, diamond-shaped, elliptic or calabash-shaped in appearance.
7. The piezoelectric sensor of claim 6, wherein the piezoelectric sensor is configured to,
the plurality of first electrode regions are arranged at intervals along the length direction of the piezoelectric sensor, and the distance between two adjacent first electrode regions is any value ranging from 1mm to 200 mm.
8. The piezoelectric sensor of claim 7, wherein the piezoelectric sensor is configured to,
the dimension of the first electrode region along the length direction is any one value in the range of 1-200 mm.
9. Piezoelectric sensor according to any one of claims 1-8, characterized in that,
the thickness of the piezoelectric thin film layer is any value in the range of 1-100 μm.
10. Piezoelectric sensor according to any one of claims 1-9, characterized in that,
the piezoelectric film layer is made of polyvinylidene fluoride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321405061.7U CN220023508U (en) | 2023-06-05 | 2023-06-05 | Piezoelectric sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321405061.7U CN220023508U (en) | 2023-06-05 | 2023-06-05 | Piezoelectric sensor |
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| Publication Number | Publication Date |
|---|---|
| CN220023508U true CN220023508U (en) | 2023-11-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202321405061.7U Active CN220023508U (en) | 2023-06-05 | 2023-06-05 | Piezoelectric sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220023508U (en) |
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2023
- 2023-06-05 CN CN202321405061.7U patent/CN220023508U/en active Active
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