CN111928978A - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
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- CN111928978A CN111928978A CN202010782754.2A CN202010782754A CN111928978A CN 111928978 A CN111928978 A CN 111928978A CN 202010782754 A CN202010782754 A CN 202010782754A CN 111928978 A CN111928978 A CN 111928978A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
Abstract
The invention discloses a pressure sensor, which is characterized in that a dielectric layer between a first electrode and a second electrode is arranged as an elastic body, conductive substances and/or pores are added in the elastic body, the Young modulus of the dielectric layer and the deformation resistance of the dielectric layer can be adjusted by adjusting the types, the sizes and the porosity of the conductive substances, and the required pressure test range and test sensitivity are obtained, so that the pressure sensor with the structure has wide applicability.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a pressure sensor.
Background
The pressure sensor for sensing the external pressure can adopt a capacitive sensor with a parallel plate structure, has the advantages of simple structure, low power consumption, easy large-area preparation, good stability and the like, and has wide application.
Wherein, different application scenarios require sensors with different performance, such as: in the case of detecting a small strain, a high sensitivity is required.
Therefore, how to adjust the performance of the pressure sensor to be suitable for different application scenarios is a technical problem to be solved urgently by those skilled in the art.
Disclosure of Invention
The embodiment of the invention provides a pressure sensor, which is used for adjusting the performance of the pressure sensor so as to be suitable for different application scenes.
An embodiment of the present invention provides a pressure sensor, including: the device comprises a first electrode, a second electrode and a medium layer, wherein the first electrode and the second electrode are oppositely arranged, and the medium layer is positioned between the first electrode and the second electrode;
the dielectric layer is an elastomer comprising conductive substances and/or pores.
The invention has the following beneficial effects:
according to the pressure sensor provided by the embodiment of the invention, the dielectric layer between the first electrode and the second electrode is set to be the elastic body, so that the Young modulus of the dielectric layer can be reduced, the deformation resistance of the dielectric layer can be reduced, and the stress detection can be realized under the condition of smaller stress. Furthermore, by adding the conductive substance and/or the pores in the elastic body and adjusting the type, the pore size and the porosity of the conductive substance, the Young modulus of the dielectric layer can be further adjusted, the deformation resistance of the dielectric layer can be further adjusted, the required pressure test range and test sensitivity can be obtained, and the pressure sensor with the structure has wide applicability.
Drawings
Fig. 1 is a schematic structural diagram of a pressure sensor provided in an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another pressure sensor provided in an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of another pressure sensor provided in an embodiment of the present invention;
fig. 4 is a schematic diagram illustrating the light transmittance of the first electrode or the second electrode according to an embodiment of the invention;
fig. 5 is a schematic view of the light transmittance of the pressure sensor provided in the embodiment of the present invention;
fig. 6 is a schematic diagram illustrating a pressure test result of a pressure sensor provided in an embodiment of the present invention;
FIG. 7 is a schematic diagram of the light transmittance of the electrodes corresponding to different spinning times provided in the embodiment of the present invention;
fig. 8 is a scanning electron microscope image of the first electrode or the second electrode provided in the embodiment of the present invention;
FIG. 9 is a scanning electron microscope view of a cross section of a dielectric layer provided in an embodiment of the present invention;
fig. 10 is a schematic diagram of the light transmittance of the dielectric layers with different porosities according to the embodiment of the present invention.
10-a first electrode, 11-a first transparent flexible substrate, 12-a first conductive layer, 20-a second electrode, 21-a second transparent flexible substrate, 22-a second conductive layer, 30-a dielectric layer, 30 a-a conductive substance, 30 b-a pore.
Detailed Description
A detailed description of a pressure sensor according to an embodiment of the present invention will be given below with reference to the accompanying drawings. It should be noted that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
An embodiment of the present invention provides a pressure sensor, as shown in fig. 1 to 3, which may include: a first electrode 10 and a second electrode 20 which are oppositely arranged, and a dielectric layer 30 which is positioned between the first electrode 10 and the second electrode 20;
the dielectric layer 30 is an elastomer including conductive material 30a and/or pores 30 b.
Therefore, the dielectric layer between the first electrode and the second electrode is set to be the elastic body, the Young modulus of the dielectric layer can be reduced, the deformation resistance of the dielectric layer is reduced, and the stress can be detected under the condition of smaller stress.
Furthermore, by adding the conductive substance and/or the pores in the elastic body and adjusting the type, the pore size and the porosity of the conductive substance, the Young modulus of the dielectric layer can be further adjusted, the deformation resistance of the dielectric layer can be further adjusted, the required pressure test range and test sensitivity can be obtained, and the pressure sensor with the structure has wide applicability.
Optionally, in the embodiment of the present invention, the light transmittance of the dielectric layer is not less than 40%;
the first electrode and the second electrode are both made of transparent flexible materials.
Therefore, the pressure sensor is a flexible sensor with high light transmittance, and can be applied to scenes with certain light transmittance requirements, such as medical scenes, so that the application field of the pressure sensor can be expanded, and the application range is expanded.
1. Setting a dielectric layer:
optionally, in an embodiment of the present invention, the material making the elastomer includes: silica gel aliphatic aromatic random copolyester or polydimethylsiloxane;
the conductive substance includes: metal nanowires (as shown in fig. 1) and/or conductive particles (not shown).
Therefore, the dielectric layer has certain light transmittance, the requirement of a light-transmitting application scene can be met, and meanwhile, due to the existence of the conductive substance, the detection range of the stress can be widened.
The metal nanowire can be but not limited to a silver nanowire, the length of the metal nanowire can be set to be 50 micrometers to 100 micrometers, and the diameter of the metal nanowire can be set to be about 30 micrometers, so that when the metal nanowire is included in the elastic body, the elastic body can have high light transmittance, and meanwhile, the elastic body has a wide stress detection range.
The conductive particles may be, but are not limited to, metal particles, such as metallic silver, etc., in order to widen the detection range of the stress.
In addition, when the elastomer is produced, the material to be used is not limited to the above, and may be an elastomer other than a silicone-aliphatic aromatic random copolyester or polydimethylsiloxane, and is not limited thereto.
Optionally, in an embodiment of the present invention, the elastomer comprises a conductive substance;
the mass ratio of the conductive substance doped in the elastomer is 1% to 8%.
That is, when the conductive substance is included in the elastic body, the doping concentration of the conductive substance needs to be defined to ensure that the elastic body has high light transmittance, thereby obtaining a flexible pressure sensor with high light transmittance and high sensitivity.
Optionally, in an embodiment of the present invention, the elastomer comprises pores;
the porosity is 8% -65%.
Wherein porosity is positively correlated to sensitivity, but porosity is negatively correlated to light transmittance.
That is, when the elastic body includes pores, the porosity needs to be defined to ensure that the elastic body has high light transmittance, thereby obtaining a flexible pressure sensor having high light transmittance and high sensitivity.
Certainly, in the specific implementation, the elastomer can be doped with the conductive substance and provided with the pores, and the mass ratio of the conductive substance doped in the elastomer needs to be ensured to be 1% to 8%, and meanwhile, the porosity needs to be ensured to be 8% -65%, so as to ensure that the elastomer has high light transmittance.
Alternatively, in the present embodiment, the diameter of the pores may be set to 30 to 500 micrometers.
In this way, by setting the diameter of the aperture, the young's modulus of the pressure sensor can be adjusted, thereby adjusting the sensitivity and detection range of the pressure sensor.
The manufacturing method of the pore can comprise the following steps:
adding soluble particles when manufacturing the elastomer; wherein the soluble particles may comprise: salt granules, lactose granules, sucrose granules, etc.;
after the elastomer is cured, the cured elastomer is placed in water and ultrasonic waves are introduced to dissolve the soluble particles in the water, corresponding pores are formed at the positions of the soluble particles, and finally the elastomer with the pores is obtained.
And, if the elastomer includes pores and a conductive material, the manufacturing method may include:
coating a conductive substance on the surface of the soluble particles;
adding the soluble particles coated with the conductive substance into a precursor for preparing the elastomer;
after curing treatment, obtaining an elastomer doped with soluble particles coated with a conductive substance;
and (3) placing the cured elastomer in water and introducing ultrasound to dissolve the soluble particles in the water, forming corresponding pores at the positions of the soluble particles, and finally obtaining the elastomer with the pores and the conductive substance.
In addition, the diameter of the pores is the same as that of the soluble granules, so if the diameter of the pores is to be defined, the soluble granules having the corresponding diameter can be selected, and therefore, if the diameter of the pores is to be controlled to be 30 to 500 micrometers, the soluble granules having the diameter of 30 to 500 micrometers can be selected by means of grinding and sieving.
Wherein, during the sieving, soluble granules with different sizes can be obtained by adopting sieves with different meshes, for example, soluble granules with the diameter of about 40 microns can be sieved by adopting a 360-mesh sieve.
Optionally, in the embodiment of the present invention, as shown in fig. 1, the thickness d0 of the dielectric layer is 500 micrometers to 800 micrometers.
Therefore, the Young modulus of the elastic body can be adjusted by controlling the thickness of the medium layer, and the sensitivity of the pressure sensor is further adjusted to meet the requirements of different application scenes.
2. Arrangement of the first and second electrodes:
case 1: the first electrode and the second electrode are both transparent flexible electrodes.
Alternatively, in an embodiment of the present invention, as shown in fig. 1, the first electrode 10 includes: a first transparent flexible substrate 11 and a first conductive layer 12 positioned on the surface of the first flexible substrate 11, wherein the first conductive layer 12 is positioned on the side of the first transparent flexible substrate 11 facing the second electrode 20;
the second electrode 20 includes: a second transparent flexible substrate 21 and a second conductive layer 22 located on the surface of the second flexible substrate 21, wherein the second conductive layer 22 is located on the side of the second transparent flexible substrate 21 facing the first electrode 10;
the first conductive layer 11 and the second conductive layer 21 are made of the same material.
Therefore, the first electrode and the second electrode have high light transmittance and flexibility, and the pressure sensor is a flexible sensor with high light transmittance and can be applied to an electronic skin scene, so that the application range of the pressure sensor can be expanded.
Optionally, in an embodiment of the present invention, the materials for manufacturing the first transparent flexible substrate and the second transparent flexible substrate each include one or more of the following: polyethylene terephthalate, parylene, polydimethylsiloxane, polyethylene naphthalate, and polyimide;
the material for manufacturing the first conductive layer comprises: graphene and/or metal nanofibers.
In practical applications, when the materials for manufacturing the first transparent flexible substrate and the second transparent flexible substrate are selected, other transparent flexible materials may be used besides the materials given above, and the materials are not limited herein.
Moreover, when the first conductive layer and the second conductive layer are manufactured by using graphene and/or metal nanofibers, the obtained first conductive layer and the second conductive layer are very small in thickness, namely very thin, so that the first conductive layer and the second conductive layer can be transferred onto the corresponding transparent flexible substrates in a wet transfer mode to form the first electrode and the second electrode.
Optionally, in the embodiment of the present invention, the number of layers of the graphene may be set to 5 to 10.
When the first conductive layer and the second conductive layer comprise graphene, the number of layers of the graphene is positively correlated with the conductivity, but the number of layers of the graphene is negatively correlated with the light transmittance.
For example, if the number of graphene layers is 5 to 10, the light transmittance of the first conductive layer is 70 to 85%.
And, optionally, the selected graphene may be single-layer graphene, and may also be multi-layer graphene, as long as the total number of layers of graphene is ensured to be 5 to 10.
Therefore, when the first conductive layer and the second conductive layer are made of graphene, the number of layers of graphene needs to be limited, so that the first electrode and the second electrode which are made of graphene have high light transmittance and high conductivity.
Optionally, in this embodiment of the present invention, taking the first conductive layer as an example, if the material for manufacturing the first conductive layer includes metal nanofibers, the first conductive layer may be manufactured by electrospinning, where the electrospinning time may be controlled to be, but is not limited to, 5 minutes to 30 minutes, and then the first conductive layer has higher light transmittance and better conductivity.
Taking the metal nanofibers included in the first conductive layer as silver nanofibers as an example, the light transmittance of the first conductive layer may be 72% to 90% and the conductivity of the first conductive layer is high when electrospinning for 5 minutes to 30 minutes.
That is, the time of electrospinning is inversely related to the light transmittance, but positively related to the electrical conductivity.
Therefore, in order to obtain a high-performance, high-transmittance, high-sensitivity, flexible pressure sensor, it is necessary to control the electrospinning time so that the pressure sensor has superior performance.
When the first conductive layer is manufactured in an electrostatic spinning manner, the specific process may include:
carrying out electrostatic spinning on the polyvinyl alcohol solution to obtain polyvinyl alcohol nanofibers; wherein, in the polyvinyl alcohol solution, the mass fraction of the polyvinyl alcohol can be but is not limited to 10 wt%;
manufacturing an electrode layer on the surface of the obtained polyvinyl alcohol nanofiber; the electrode layer can be but not limited to be manufactured in a magnetron sputtering mode, and the electrode layer can be but not limited to be a silver electrode layer;
and dissolving the polyvinyl alcohol in a wet transfer mode, and transferring the silver nano-fibers onto the first transparent substrate to obtain the first electrode.
Case 2: the first electrode and the second electrode are flexible electrodes.
That is, in this case 2, there is no requirement for the first electrode and the second electrode to be light-transmissive, and at this time:
alternatively, in the embodiment of the present invention, the first electrode and the second electrode may be fabricated by using a flexible printing technique, an evaporation technique, or an electroplating technique.
Therefore, the manufactured first electrode and the second electrode not only have better conductivity, but also have higher stability; meanwhile, the first electrode and the second electrode which are manufactured by adopting the flexible printing technology can also be provided with individualized and customized welding holes so as to be convenient for connecting the pressure sensor with a measuring instrument subsequently and simplify the processing process during subsequent application.
The following describes a process for fabricating a pressure sensor in conjunction with a specific embodiment.
The first embodiment is as follows:
for example, the first electrode and the second electrode are both made of flexible transparent single-layer graphene and polyethylene terephthalate (PET for short), and the semitransparent dielectric layer is made of silica gel aliphatic aromatic random copolyester (Ecoflex for short) doped with silver nanowires.
The preparation process comprises the following steps:
(1) manufacturing a first electrode and a second electrode:
firstly, growing a single-layer graphene sheet on a copper base (such as but not limited to a copper sheet), spin-coating a layer of thin photoresist on the copper base with the graphene sheet, drying, and then putting the dried copper base into 5mol/L FeCl3In the solution, dissolving copper base;
② in FeCl3After the solution is placed for about 10min, the copper-based solution is completely dissolved, and at the moment, the photoresist suspended in the solution and carrying the single-layer graphene is fished up by adopting a transparent PET substrate;
thirdly, cleaning the photoresist of the single-layer graphene attached to the surface of the PET substrate for multiple times (for example, but not limited to, three times) by using acetone to wash away the photoresist, then putting the photoresist into a baking oven, and drying the photoresist to obtain the flexible, transparent and well-conductive first electrode and second electrode.
Referring to fig. 4, the area indicated by the dashed line box 1 indicates the area where the single-layer graphene is located, white paper BZ as a background can still be seen in the area, and the dashed line 2 indicates the light transmittance of the transparent flexible substrate (i.e., PET), which indicates that the electrode obtained by the above method has high light transmittance.
(2) Manufacturing a dielectric layer:
selecting 1.2g of Ecoflex A and 1.2g of Ecoflex B with equal mass, mixing and stirring uniformly;
doping Ag NWs (namely silver nanowires) with the length of 30 mu M according to the mass ratio of M (Ecoflex) to M (Ag NWs) of 1: 0.055%, uniformly mixing and stirring, filtering bubbles, pouring into a 3D groove (4cm multiplied by 6cm multiplied by 1cm), standing for 30min and drying;
and thirdly, peeling the dried medium layer from the 3D groove to obtain the medium layer with better transparency and sensitivity.
And finally, assembling the first electrode, the second electrode and the dielectric layer to obtain the capacitive pressure sensor.
Referring to fig. 5, a dotted circle 3 indicates the position of the pressure sensor, and it can be seen from the figure that when the pressure sensor is covered on the pattern, the background pattern can still be seen, which illustrates that the pressure sensor obtained by the above method has high light transmittance.
Moreover, after the pressure sensor obtained above is subjected to a pressure test, the obtained result is shown in fig. 6, and the pressure sensor can show a relatively obvious response under different pressures (which can also be understood as pressure, and the pressure is expressed by the pressure magnitude at this time); that is, the pressure testing range of the pressure sensor obtained by the above method may be: 5.7kPa to 95.5 kPa.
Therefore, the detection of small pressure intensity is realized, the sensitivity of pressure intensity detection is improved, and meanwhile, the detection in a large range can be realized, so that the pressure sensor can be applied to various fields, and the application range of the pressure sensor is expanded.
Of course, the test result shown in fig. 6 is only the performance of the pressure sensor manufactured by using the above process parameters, and the test range and the test sensitivity of the pressure sensor can be adjusted by adjusting the process parameters, such as the doping amount of the silver nanowire and the length of the silver nanowire, so that the process parameters can be designed according to actual needs to meet the needs of various application scenarios, and the design flexibility is improved.
Example two:
for example, the first electrode and the second electrode are both made of silver nanofibers (abbreviated as Ag NFs) and PET, and the dielectric layer is made of Ecoflex with a porous foam structure.
The preparation process comprises the following steps:
(1) manufacturing a first electrode and a second electrode:
firstly, adopting a high-voltage electrostatic spinning mode, and selecting a polyvinyl alcohol (PVA for short) solution with the mass fraction of 10 wt% to prepare a PVA NFs precursor;
in the electrostatic spinning process, the transparency of the subsequent Ag NFs can be regulated and controlled by regulating the spinning time.
Secondly, sputtering metal silver on the surface of a PVA NFs precursor in a magnetron sputtering mode, and dissolving PVA in distilled water to obtain Ag NFs with a hollow structure;
and thirdly, transferring the Ag NFs with the hollow structure to a transparent substrate PET to obtain a first electrode and a second electrode.
Wherein, referring to fig. 7, the light transmittance of the obtained electrode (such as the first electrode or the second electrode) is shown by using different spinning times, (a) the spinning time corresponding to the graph is 5 minutes, (b) the spinning time corresponding to the graph is 15 minutes, and (c) the spinning time corresponding to the graph is 30 minutes; the dashed boxes indicate where the electrodes are located.
As can be seen from the figure: the light transmittance of the electrode gradually decreases as the spinning time increases.
Therefore, in practical situations, the spinning time can be adjusted according to the requirement on the light transmittance, so as to meet the requirement of an application scene and improve the flexibility of design.
Also, referring to fig. 8, which shows a scanning electron micrograph of an electrode (e.g., a first electrode or a second electrode) obtained in the above manner, it can be seen that: the diameter of the silver nano-fiber is about 600nm to 700nm, and a large number of silver nano-fibers are overlapped in a staggered mode, so that the electrode has high conductivity, signal transmission is facilitated, and normal work of the pressure sensor is guaranteed.
(2) Medium layer with porous foam structure:
selecting 1.2g of Ecoflex A and 1.2g of Ecoflex B with equal mass, mixing and stirring uniformly;
secondly, grinding NaCl particles for about 10min by using a grinding pestle, and screening by using a 180-mesh screen to obtain the NaCl particles with uniform pore size and diameter of about 80 mu m;
mixing NaCl particles according to the mixing ratio of M (Ecoflex) to M (NaCl) of 1:1, pouring the mixture into a 3D groove, standing for 30min, and drying;
wherein, the porosity of the dielectric layer can be adjusted by adjusting the proportion of the doped NaCl particles.
Fourthly, stripping the dried semi-finished product from the 3D groove, and putting the stripped semi-finished product into distilled water for ultrasonic treatment at the treatment temperature of 80 ℃ until NaCl particles are completely dissolved; and drying to obtain the porous foam structure elastomer with the pore size of about 80 mu m and the porosity of about 50 percent, wherein the elastomer is the dielectric layer.
And finally, assembling the first electrode, the second electrode and the dielectric layer to obtain the capacitive pressure sensor.
Referring to fig. 9, a cross-sectional scanning electron microscope image of the elastic body with the porous foam structure is shown, and as can be seen from the figure, the elastic body is filled with pores 30b, which can reduce the young's modulus of the elastic body, and further reduce the resistance of the elastic body to stress, so that the elastic body can be deformed by a smaller stress, and the detection sensitivity of the pressure sensor comprising the elastic body can be increased.
Also, referring to fig. 10, light transmittance of dielectric layers having different porosities is shown, (a) graph showing light transmittance of a dielectric layer having a porosity of 0, (b) graph showing light transmittance of a dielectric layer having a porosity of 12%, (c) graph showing light transmittance of a dielectric layer having a porosity of 28%, and (d) graph showing light transmittance of a dielectric layer having a porosity of 30%.
As can be seen from the figure: the light transmittance of the dielectric layer gradually decreases with the increase of the porosity.
Therefore, in practical situations, the porosity in the dielectric layer can be adjusted according to the requirements on light transmittance and sensitivity to meet the requirements of application scenarios, and the flexibility of design is improved.
In summary, the dielectric layer between the first electrode and the second electrode is set as the elastic body, so that the young modulus of the dielectric layer can be reduced, the deformation resistance of the dielectric layer can be reduced, and the stress can be detected under a small stress.
Furthermore, by adding the conductive substance and/or the pores in the elastic body and adjusting the type, the pore size and the porosity of the conductive substance, the Young modulus of the dielectric layer can be further adjusted, the deformation resistance of the dielectric layer can be further adjusted, the required pressure test range and test sensitivity can be obtained, and the pressure sensor with the structure has wide applicability.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. A pressure sensor, comprising: the device comprises a first electrode, a second electrode and a medium layer, wherein the first electrode and the second electrode are oppositely arranged, and the medium layer is positioned between the first electrode and the second electrode;
the dielectric layer is an elastomer comprising conductive substances and/or pores.
2. The pressure sensor of claim 1, wherein the dielectric layer has a light transmittance of not less than 40%;
the first electrode and the second electrode are both made of transparent flexible materials.
3. The pressure sensor of claim 2, wherein the elastomer is made of a material comprising: silica gel aliphatic aromatic random copolyester or polydimethylsiloxane;
the conductive substance includes: metal nanowires and/or conductive particles.
4. The pressure sensor of claim 3, wherein the elastomer includes the conductive substance;
the mass ratio of the conductive substance doped in the elastomer is 1% to 8%.
5. The pressure sensor of claim 3, wherein the elastomer includes the aperture;
the porosity is 8% -65%.
6. The pressure sensor of any of claims 1-5, wherein the pores have a diameter of 30 microns to 500 microns.
7. The pressure sensor of claim 2, wherein the first electrode comprises: the first transparent flexible substrate and the first conducting layer are positioned on the surface of the first flexible substrate, and the first conducting layer is positioned on one side, facing the second electrode, of the first transparent flexible substrate;
the second electrode includes: the second transparent flexible substrate and a second conducting layer are positioned on the surface of the second flexible substrate, and the second conducting layer is positioned on one side, facing the first electrode, of the second transparent flexible substrate;
the first conducting layer and the second conducting layer are made of the same material.
8. The pressure sensor of claim 7, wherein the material from which the first transparent flexible substrate and the second transparent flexible substrate are made each comprises one or more of: polyethylene terephthalate, parylene, polydimethylsiloxane, polyethylene naphthalate, and polyimide;
the material for manufacturing the first conductive layer comprises: graphene and/or metal nanofibers.
9. The pressure sensor of claim 8, wherein the number of layers of graphene is 5 to 10.
10. The pressure sensor of any of claims 1-9, wherein the dielectric layer has a thickness of 500 microns to 800 microns.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113693555A (en) * | 2021-08-31 | 2021-11-26 | 华中科技大学 | Flexible sensor for hardness detection and preparation method and application thereof |
| CN114383761A (en) * | 2021-11-26 | 2022-04-22 | 北京纳米能源与系统研究所 | Pressure sensor with single-direction conduction function and preparation method and application thereof |
| CN114469033A (en) * | 2021-11-11 | 2022-05-13 | 煤炭科学研究总院 | Heart rate detection sensor, protective clothing and manufacturing method of sensor |
-
2020
- 2020-08-06 CN CN202010782754.2A patent/CN111928978A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113693555A (en) * | 2021-08-31 | 2021-11-26 | 华中科技大学 | Flexible sensor for hardness detection and preparation method and application thereof |
| CN113693555B (en) * | 2021-08-31 | 2023-09-01 | 华中科技大学 | Flexible sensor for hardness detection and preparation method and application thereof |
| CN114469033A (en) * | 2021-11-11 | 2022-05-13 | 煤炭科学研究总院 | Heart rate detection sensor, protective clothing and manufacturing method of sensor |
| CN114383761A (en) * | 2021-11-26 | 2022-04-22 | 北京纳米能源与系统研究所 | Pressure sensor with single-direction conduction function and preparation method and application thereof |
| CN114383761B (en) * | 2021-11-26 | 2023-10-27 | 北京纳米能源与系统研究所 | Pressure sensor with unidirectional conductive function and preparation method and application thereof |
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