CN219998174U - Pod conveying and opening device for pod - Google Patents

Abstract

The utility model discloses a pod conveying and box opening device, which comprises a first supporting component, a driving component, a driven supporting component, a second supporting component, a limiting component, a pressure sensing component, a scanning identification component and a fixing component, wherein the first supporting component supports the driving component and the second supporting component, and the driving component drives the driven supporting component; the second support assembly comprises an outer support and an inner support, the outer support supports the inner support, and the outer support can support the driven support assembly in the box closing state. The wafer boat frame has the beneficial effects that the driving assembly can drive the wafer boat conveying box on the driven supporting assembly to move up and down, the wafer boat conveying box is driven to be opened or closed, various data analysis can be carried out on the wafers on the wafer boat frame in the opening or rising process, and the robot arm can clamp the wafers on the wafer boat frame after the wafer boat conveying box is opened.

Description

Pod conveying and opening device for pod

Technical Field

The utility model relates to the technical field of wafer of a wafer boat, in particular to a pod wafer boat conveying and opening device.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor circuit, and the original material of the wafer is silicon; dissolving high-purity polycrystalline silicon, doping a silicon crystal seed crystal, and slowly pulling out to form cylindrical monocrystalline silicon; the silicon crystal bar is ground, polished and sliced to form a silicon wafer, namely the wafer; domestic wafer lines are mainly 8 inches and 12 inches.

The operation mode of the currently used wafer boat conveying box opening device is complex and complicated, full-automatic operation cannot be realized, the pod wafer boat conveying box is inconvenient to replace, the replacement operation is time-consuming, whether the pod wafer boat conveying box is placed in place or not is judged manually, and whether the pod wafer conveying box is placed correctly or not is judged manually, and wafers are crushed or are not placed in place due to other reasons easily in the process of opening or closing the pod, so that the wafer boat frame or the wafer boat is damaged, and serious safety risks are caused.

Disclosure of Invention

This section is intended to outline some aspects of embodiments of the utility model and to briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section as well as in the description of the utility model and in the title of the utility model, which may not be used to limit the scope of the utility model.

The present utility model has been made in view of the above-mentioned or existing problems occurring in the prior art.

Therefore, an object of the present utility model is to provide a pod cassette transfer and opening apparatus capable of fully automatically opening a cassette, monitoring a wafer state in a cassette in real time by a scan recognition assembly during the process of opening or closing the cassette, preventing the cassette from crushing wafers, and rapidly replacing the cassette.

In order to solve the technical problems, the utility model provides the following technical scheme: the pod conveying and opening device comprises a first supporting component, a driving component, a driven supporting component, a second supporting component, a limiting component, a pressure sensing component, a scanning identification component and a fixing component;

the first supporting component supports the driving component and the second supporting component, and the driving component drives the driven supporting component;

the second supporting component comprises an outer supporting piece and an inner supporting piece, the outer supporting piece supports the inner supporting piece, and the outer supporting piece can support the driven supporting component in the box closing state;

be provided with spacing subassembly on the interior support piece, be provided with scanning identification component on the driven support component, be provided with fixed subassembly on the driven support component, fixed subassembly is fixed driven support component.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the driving assembly comprises a motor, a coupler and a connecting rod;

the motor is vertically fixed on the side surface of the first supporting component, the motor is connected with the connecting rod through a coupler, and the coupler is arranged at the output end of the upper side of the motor.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the driven support assembly comprises a sliding plate, a lifting frame plate, a wafer boat conveying box and a sliding block;

slide one side and slider fixed connection, slide opposite side and connecting rod fixed connection, slider and the vertical sliding connection of first supporting component, crane and slide connection, the up end fixedly connected with lifting frame plate of crane, the up end of lifting frame plate is provided with the wafer boat transport box.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the outer support piece comprises an outer support frame and a support bottom plate;

the outer support frame is fixedly connected with the first support component, the support bottom plate is arranged on the outer support frame, and the outer support frame is fixedly connected with the support bottom plate.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the inner support piece comprises an inner support frame, a wafer boat support plate and a wafer boat frame;

the inner support frame is arranged on the upper end face of the support bottom plate, the upper end face of the inner support frame is connected with a wafer boat support plate, and a wafer boat frame is arranged above the wafer boat support plate.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the pressure sensing assembly comprises a pressure sensor and a light source induction sensor which are arranged on the wafer boat supporting plate, and the pressure sensor and the light source induction sensor are used for judging whether the wafer boat conveying box is placed correctly or in place.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the fixed component comprises a fixed motor, a pressing sheet and a pressing sheet cavity;

the fixed motor is vertically fixed on the lower end face of the lifting frame plate, a cavity for accommodating the pressing sheet is formed in the pressing sheet cavity, round holes are formed in the lifting frame plate and the pressing sheet cavity, and the extending end of the fixed motor penetrates through the round holes and is connected with the pressing sheet.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the step is arranged on the wafer boat conveying box, so that the step is convenient to press and fix, and the wafer boat conveying box cannot move in the lifting process.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the guide assembly is arranged on the upper end surface of the lifting frame plate;

the guide assembly comprises a guide block and a guide slope;

the guide block is fixedly connected with the upper end face of the lifting frame plate, and the upper end face of the guide block is provided with a guide slope, so that the wafer boat conveying box can be quickly and correctly placed at a designated position.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the guide blocks are arranged in four groups and are arranged at the intersection of four edges and corners of the wafer boat conveying box.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the upper end face of the lifting frame plate is provided with a second notch, and the second notch is internally provided with a wafer boat supporting plate.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the middle of the outer supporting piece is a cavity, the upper end of the outer supporting piece is provided with a first notch, and the lifting frame plate is accommodated in the first notch.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the crane is arranged above the supporting bottom plate.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the limiting component comprises a rotary cylinder and a pin shaft;

the rotary cylinder is connected with the lower end face of the wafer boat supporting plate, a pin shaft is arranged in the wafer boat supporting plate and connected with the rotary cylinder, the rotary cylinder can drive the pin shaft to do transverse telescopic motion, a pin shaft groove is formed in the inner side of the wafer boat conveying box, and the pin shaft extends out of the pin shaft groove which can be inserted into the wafer boat conveying box, so that the wafer boat conveying box is prevented from moving due to misoperation.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the scanning identification component comprises a protection box identification sensor, a wafer lug scanning sensor, a wafer box in-place detection sensor, a wafer box protrusion detection sensor and a wafer scanning sensor;

the protective box identification sensor is arranged on the upper end surface of the lifting frame plate and is used for scanning ID information of the wafer boat conveying box;

the wafer lug scanning sensor is arranged on the lower end face of the lifting frame plate and is used for scanning whether the wafer protrudes out;

the wafer box on-site detection sensor is arranged on the inner side below the lifting frame and is used for detecting whether the wafer boat frame is at a specific position or not;

the wafer box protrusion detection sensor is arranged on the lower end surface of the lifting frame plate and is used for detecting whether the wafer boat frame is displaced or not;

the wafer scanning sensor is arranged on the lower end face of the lifting frame plate and is used for detecting whether the wafer is on the wafer boat frame or not.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the protective box identification sensor is arranged at the front end or the rear end or both the front end and the rear end of the lifting frame plate; the wafer lug scanning sensors are arranged in two groups and are arranged at the front end and the rear end of the lower end face of the lifting frame plate; the two groups of the in-situ detection sensors are arranged at the left end and the right end of the lifting frame; the wafer box protrusion detection sensors and the wafer scanning sensors are arranged into two groups, the wafer box protrusion detection sensors are arranged at the left end and the right end of the lower end face of the lifting frame plate, and the wafer scanning sensors are arranged at the front end and the rear end of the lower end face of the lifting frame plate.

As a preferable scheme of the pod conveying and opening device, the pod conveying and opening device comprises the following components: the first support component comprises a side support frame, a bottom side support frame, a sensing door, a robot hand sensing sensor, a guide rail and rollers;

the side of side support frame is provided with the guide rail, and the guide rail carries out sliding connection with the slider, and side support frame carries out fixed connection with outer support frame, and the bottom side support frame sets up in the below of outer support frame and is connected with the side support frame, is provided with the induction door on the side support frame, and the induction door sets up the side at the wafer boat frame, and the induction door downside is provided with robot inductive sensor, and bottom side support frame below is connected with the gyro wheel.

The pod conveying and opening device has the beneficial effects that: according to the utility model, the drive assembly can drive the wafer boat conveying box on the driven support assembly to move up and down, the wafer boat conveying box is driven to be opened or closed, various data analysis can be carried out on wafers on the wafer boat frame in the opening or rising process, and the robot arm can clamp the wafers on the wafer boat frame after the wafer boat conveying box is opened.

The utility model also provides a wafer scanning operation method which comprises a pod wafer boat conveying and box opening device, and the method can be used for carrying out scanning operation on the wafers in the wafer boat, monitoring specific states and conveying the specific states to a control center in real time.

As a preferred embodiment of the wafer scanning operation method of the present utility model, the method comprises: step of opening cassette

S1, a central control system controls a rotary cylinder to rotate a pin shaft so as to open limit of a wafer boat conveying box;

s2, controlling a motor by a central control system to drive a connecting rod to drive a sliding block on a sliding plate to ascend along a guide rail, driving a lifting frame by the sliding plate, and driving a lifting frame plate to ascend by the lifting frame to protect box liquid to ascend along with the lifting frame plate;

s3, in the ascending process, the wafer scanning sensor successively scans the wafer state of each layer on the wafer boat frame, the wafer lug scanning sensor scans whether the wafer protrudes, the wafer box on-site detection sensor detects whether the wafer boat frame is at a specific position, the wafer box protrusion detection sensor detects whether the wafer boat frame is displaced, and the result is sequentially transmitted to the central control system for analysis processing by the central processing system;

s4: when the wafer boat conveying box reaches a designated position, the motor stops moving, and the central control system controls the induction door to be opened;

and S5, the wafer on the wafer boat frame is sent by the robot arm, and after the robot arm is detected to enter by the robot arm induction sensor, a result is sent to the central control system, the central control system controls the motor to prohibit rotation, so that the wafer boat is prevented from being pressed to the robot arm by the wafer boat conveying box, and the wafer boat is prevented from being pressed to the wafer. .

The wafer scanning operation method has the beneficial effects that: the utility model can scan the state of each layer of wafer through the wafer scanning sensor when the conveying box is opened or closed, and scan whether the wafer protrudes through the wafer lug scanning sensor, the wafer box in-place detecting sensor detects whether the wafer boat frame is at a specific position, the wafer box protrusion detecting sensor detects whether the wafer boat frame is displaced, and the result is sequentially transmitted to the central control system, and the central processing system analyzes and processes the result, thereby issuing a command.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Wherein:

FIG. 1 is an overall schematic diagram of a pod carrier and pod opener.

FIG. 2 is a schematic view of a hidden cassette for pod carrier opening.

FIG. 3 is a schematic view of a hidden boat frame of a pod carrier opening apparatus.

FIG. 4 is an enlarged view of the pod carrier open apparatus at F.

FIG. 5 is a schematic view of a hidden outer support frame of a pod carrier opening apparatus.

FIG. 6 is a schematic view of hidden lifting frames and lifting frame plates of the pod carrier opening device.

FIG. 7 is a top view of the pod carrier and open cassette apparatus.

FIG. 8 is a front view of the pod carrier and open cassette apparatus.

FIG. 9 is a cross-sectional view at A-A of the pod carrier and open cassette apparatus.

FIG. 10 is a bottom perspective partial schematic view of the pod carrier and open cassette apparatus.

FIG. 11 is a schematic view of a hidden bottom support plate of the pod carrier opening apparatus in bottom view.

Fig. 12 is a flow chart of a wafer scanning operation method.

In the figure, 100, a first support assembly, 200, a driving assembly, 300, a driven support assembly, 400, a second support assembly, 500, a limit assembly, 600, a pressure sensing assembly, 700, a scanning identification assembly, 800, a fixing assembly, 900, a guide assembly, 201, a motor, 202, a coupling, 203, a connecting rod, 301, a slide plate, 302, a lifting frame, 303, a lifting frame plate, 304, a boat transfer box, 305, a slider, 401, an outer support, 402, an inner support, 401a, an outer support, 401b, a support base, 402a, an inner support, 402b, a boat support, 402c, a boat support, 601, a pressure sensor, 602, a light source induction sensor, 801, a fixed motor, 802, a pressing sheet, 803, a pressing sheet chamber, 901, a guide block, 902, a guide slope, 501, a rotary cylinder, 701, a protective box identification sensor, 702, a wafer tab scanning sensor, 703, a wafer box detection sensor, 704, a protrusion detection sensor, 705, a wafer scanning sensor (705), 101, a side support, 102, a side support, a bottom support, 104, a machine guide rail, a sensor for sensing touch, and the like.

Detailed Description

In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, but the present utility model may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present utility model is not limited to the specific embodiments disclosed below.

Further, reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic can be included in at least one implementation of the utility model. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments.

Example 1

Referring to fig. 1 to 11, in a first embodiment of the present utility model, a pod carrier box opening device is provided, which includes a first support assembly 100, a driving assembly 200, a driven support assembly 300, a second support assembly 400, a limiting assembly 500, a pressure sensing assembly 600, a scan recognition assembly 700, a fixing assembly 800, and a guiding assembly 900, wherein the driven support assembly 300 can be driven by the driving assembly 200, the driven support assembly 300 can be limited to move by the limiting assembly 500, the pod carrier box 304 can be placed in place by the pressure sensing assembly 600, the pod carrier box 304 can be accurately and rapidly placed by the guiding assembly 900, the pod carrier box 304 can be fixed by the fixing assembly 800, the driven support assembly 300 in a closed box state can be supported by the second support assembly 400, and the second support assembly 400, the driven support assembly 300, and the driving assembly 200 can be supported by the first support assembly 100.

Specifically, the device comprises a first supporting component 100, a driving component 200, a driven supporting component 300, a second supporting component 400, a limiting component 500, a pressure sensing component 600, a scanning and identifying component 700 and a fixing component 800;

the first support assembly 100 supports the driving assembly 200 and the second support assembly 400, and the driving assembly 200 drives the driven support assembly 300;

the second support assembly 400 includes an outer support 401 and an inner support 402, the outer support 401 supporting the driven support assembly 300 in the closed box state;

the inner support 402 is provided with a limiting assembly 500, the driven support assembly 300 is provided with a scanning and identifying assembly 700, the driven support assembly 300 is provided with a fixing assembly 800, and the fixing assembly 800 fixes the driven support assembly 300.

In summary, the first support assembly 100 can support the driving assembly 200, the driven support assembly 300 and the second support assembly 400, the driving assembly 200 can lift the driven support assembly 300, the boat transfer box 304 on the driven support assembly 300 can open or close the boat frame 402c along with the lifting, and the robot arm can clamp the wafers on the boat frame 402c in the open state, and the scan recognition assembly 700 can scan and analyze the wafers on the boat frame during the lifting of the driven support assembly 300, and send the result to the control center and issue corresponding commands.

Example 2

Referring to fig. 1 to 11, in the above embodiment, the pod carrier box opening device according to the second embodiment of the present utility model includes a first support assembly 100, a driving assembly 200, a driven support assembly 300, a second support assembly 400, a limiting assembly 500, a pressure sensing assembly 600, a scan recognition assembly 700, a fixing assembly 800, and a guide assembly 900, wherein the driven support assembly 300 can be driven by the driving assembly 200, the driven support assembly 300 can be limited to move by the limiting assembly 500, the pod carrier box 304 can be sensed by the pressure sensing assembly 600 to be placed in place, the pod carrier box 304 can be accurately and rapidly placed by the guide assembly 900, the pod carrier box 304 can be fixed by the fixing assembly 800, the driven support assembly 300 in the closed box state can be supported by the second support assembly 400, and the second support assembly 400, the driven support assembly 300, and the driving assembly 200 can be supported by the first support assembly 100.

Specifically, the device comprises a first supporting component 100, a driving component 200, a driven supporting component 300, a second supporting component 400, a limiting component 500, a pressure sensing component 600, a scanning and identifying component 700 and a fixing component 800;

the first support assembly 100 supports the driving assembly 200 and the second support assembly 400, and the driving assembly 200 drives the driven support assembly 300;

the second support assembly 400 includes an outer support 401 and an inner support 402, the outer support 401 supporting the driven support assembly 300 in the closed box state;

the inner support 402 is provided with a limiting assembly 500, the driven support assembly 300 is provided with a scanning and identifying assembly 700, the driven support assembly 300 is provided with a fixing assembly 800, and the fixing assembly 800 fixes the driven support assembly 300.

Further, the driving assembly 200 comprises a motor 201, a coupler 202 and a connecting rod 203;

the motor 201 is vertically fixed on the side surface of the first support assembly 100, the motor 201 and the connecting rod 203 are connected through a coupler 202, and the coupler 202 is arranged at the output end of the upper side of the motor 201. The connecting rod 203 is a telescopic rod, and the motor 201 can drive the connecting rod 203 to perform lifting motion through the coupler 202.

Further, the driven support assembly 300 includes a slide plate 301, a lift frame 302, a lift frame plate 303, a boat cassette 304, and a slider 305;

slide 301 one side and slider 305 fixed connection, slide 301 opposite side and connecting rod 203 fixed connection, slider 305 and first supporting component 100 vertical sliding connection, crane 302 are connected with slide 301, and the up end fixedly connected with crane plate 303 of crane 302, the up end of crane plate 303 is provided with boat conveying box 304. The slider 305 is slidably connected to the guide rail 105 on the side support 101.

Preferably, the motor 201 can drive the connecting rod 203 to lift through the coupling 202, the connecting rod 203 drives the sliding block of the sliding plate 301 to move up and down along the guide rail 105 on the side supporting frame 101, the sliding plate 301 drives the lifting frame 302 and the lifting frame plate 303 to move, and the lifting frame plate 303 drives the boat conveying box 304 to move up and down.

Further, the outer support 401 includes an outer support 401a and a support base 401b;

the outer support frame 401a is fixedly connected with the first support assembly 100, and the support base plate 401b is arranged on the outer support frame 401a, and the outer support frame 401a is fixedly connected with the support base plate 401 b. The outer support frame 401a is fixedly connected with the side support frame 101, the outer support frame 401a is arranged on the side of the side support frame 101, the support bottom plate 401b is arranged on the bottom side of the outer support frame 401a, and the support bottom plate 401b is fixedly connected with the outer support frame 401 a.

Further, the inner support 402 includes an inner support frame 402a, a boat support plate 402b, and a boat frame 402c;

the inner support frame 402a is disposed on the upper end surface of the support bottom plate 401b, the upper end surface of the inner support frame 402a is fixedly connected with a wafer boat support plate 402b, a wafer boat frame 402c is disposed above the wafer boat support plate 402b, the inner support frame 402a is fixedly connected with the support bottom plate 401b, and wafers can be accommodated in the wafer boat frame 402 c.

Preferably, the pressure sensing assembly 600 includes a pressure sensor 601 and a light source sensor 602 disposed on the boat support plate 402b, and the pressure sensor 601 and the light source sensor 602 are used to determine whether the boat cassette 304 is properly placed or in place. The pressure sensor 601 is used to determine whether the boat-transferring cassette 304 is placed, and the light source sensor 602 is used to determine whether the boat-transferring cassette 304 is placed correctly, and if a light source can be detected, it is verified that the boat-transferring cassette 304 is not placed correctly.

Further, the fixing assembly 800 comprises a fixing motor 801, a pressing piece 802 and a pressing piece chamber 803;

the fixed motor 801 is vertically fixed on the lower end surface of the lifting frame plate 303, a cavity for accommodating the pressing piece 802 is formed in the pressing piece cavity 803, round holes are formed in the lifting frame plate 303 and the pressing piece cavity 803, and the extending end of the fixed motor 801 penetrates through the round holes to be connected with the pressing piece 802.

Preferably, the fixing assemblies 800 are arranged in two groups symmetrically, so that the boat transfer box 304 can be better fixed.

Further, the wafer boat transfer box 304 is provided with a step, so that the pressing piece 802 is convenient to fix the step, and therefore the wafer boat transfer box 304 cannot move in the lifting process. Steps are arranged around the bottom side of the wafer boat conveying box 304

Preferably, the fixing motor 801 drives the pressing piece 802 to rotate 90 ° through the connecting rod, and the pressing piece 802 extends out of the cavity, so that the pressing piece 802 is clamped above the step of the wafer boat conveying box 304, the wafer boat conveying box 304 is fixed, and sliding displacement is prevented in the lifting process.

Further, the lifting frame plate 303 comprises a guide assembly 900 arranged on the upper end surface of the lifting frame plate 303;

the guide assembly 900 comprises a guide block 901 and a guide slope 902;

the guide block 901 is fixedly connected with the upper end surface of the lifting frame plate 303, and a guide slope 902 is arranged on the upper end surface of the guide block 901, so that the wafer boat conveying box 304 can be quickly and correctly placed at a designated position.

Further, the guide blocks 901 are arranged in four groups, and the guide blocks 901 are arranged at the intersections of four edges and corners of the wafer boat conveying box 304. The guide blocks 901 may also function to prevent the cassette transfer case 304 from moving.

Preferably, the guide slope 902 on the guide block 901 is convenient for quick placement when placing the cassette 304, so as to avoid the situation that the cassette cannot be placed.

Further, a second notch is formed in the upper end surface of the lifting frame plate 303, and a boat support plate 402b is accommodated in the second notch.

Further, the middle of the outer support member 401 is a cavity, and the upper end of the outer support member is provided with a first notch, and the lifting frame plate 303 is accommodated in the first notch.

Further, the lifting frame 302 is disposed above the support base 401 b. The supporting base plate 401b may perform a certain supporting and limiting function, and the cassette 304 is in a closed state.

Further, the limiting assembly 500 comprises a rotary cylinder 501 and a pin shaft;

the rotary cylinder 501 is connected with the lower end face of the wafer boat supporting plate 402b, a pin shaft is arranged in the wafer boat supporting plate 402b and connected with the rotary cylinder 501, the rotary cylinder 501 can drive the pin shaft to do transverse telescopic motion, a pin shaft groove is formed in the inner side of the wafer boat conveying box 304, and the pin shaft extends out of the pin shaft groove which can be inserted into the wafer boat conveying box 304, so that the wafer boat conveying box 304 is prevented from moving due to misoperation.

Preferably, the rotary cylinder 501 can drive the pin shaft to move, so that the pin shaft extends out of the left end and the right end of the wafer boat supporting plate 402b, and the pin shaft is not shown in the pin shaft diagram and is clamped into the pin shaft groove diagram on the inner side of the wafer boat conveying box 304, so that the wafer boat conveying box 304 can be prevented from moving.

Further, the scan identification assembly 700 includes a protection cassette identification sensor 701, a wafer tab scan sensor 702, a cassette in-situ detection sensor 703, a cassette protrusion detection sensor 704, and a wafer scan sensor 705;

the protective cassette recognition sensor 701 is disposed on an upper end surface of the lifting frame plate 303, and the protective cassette recognition sensor 701 is configured to scan the ID information of the cassette 304, and to scan to confirm whether the cassette 304 is correctly placed.

The wafer tab scanning sensor 702 is fixedly arranged on the lower end surface of the lifting frame plate 303, and the wafer tab scanning sensor 702 is used for scanning whether the wafer protrudes out;

the wafer cassette in-situ detection sensor 703 is fixedly arranged on the inner side below the lifting frame 302, and the wafer cassette in-situ detection sensor 703 is used for detecting whether the wafer boat frame 402c is at a specific position;

the cassette protrusion detection sensor 704 is fixedly arranged on the lower end surface of the lifting frame plate 303, and the cassette protrusion detection sensor 704 is used for detecting whether the wafer boat frame 402c is displaced or not;

the wafer scanning sensor 705 is fixedly disposed on the lower end surface of the lifting frame plate 303, and the wafer scanning sensor 705 is used to detect whether a wafer is on the wafer boat frame 402 c.

Further, the protective case identification sensor 701 is disposed at the front end or the rear end or both of the lifting frame plate 303; the wafer tab scanning sensors 702 are arranged in two groups and are arranged at the front end and the rear end of the lower end surface of the lifting frame plate 303; the two sets of the cassette in-situ detection sensors 703 are arranged at the left end and the right end of the lifting frame 302; the cassette bulge detecting sensor 704 and the wafer scanning sensor 705 are both provided in two groups, the cassette bulge detecting sensor 704 is provided at the left and right ends of the lower end face of the lifter plate 303, and the wafer scanning sensor 705 is provided at the front and rear ends on the lower end face of the lifter plate.

Further, the first support assembly 100 includes a side support frame 101, a bottom side support frame 102, an induction door 103, a machine touch sensor 104, a guide rail 105, and a roller 106;

the side of side support frame 101 is fixed and is provided with guide rail 105, and guide rail 105 carries out sliding connection with slider 305, and side support frame 101 carries out fixed connection with outer support frame 401a, and bottom side support frame 102 sets up in the below of outer support frame 401a and is connected with side support frame 101, is provided with induction door 103 on the side support frame 101, and induction door 103 sets up in the side of wafer boat frame 402c, and induction door 103 downside is provided with robot sensor 104, is connected with gyro wheel 106 below the bottom side support frame 102.

In use, the boat-holding cassette 304 moves: the intelligent transfer robot can quickly put the boat transfer box 304 on the upper end surface of the lifting frame plate 303 through the guide slope 902 on the guide block 901, the pressure sensor 601 and the light source induction sensor 602 on the lifting frame plate 303 can sense whether the transfer box is correctly placed or not, and the protection box recognition sensor 701 can recognize the ID information of the boat transfer box 304 to judge whether the model of the boat transfer box 304 is correctly placed or not;

then the central control system issues a command to fix the boat transfer box 304, the fixed motor 801 drives the pressing sheet 802 to rotate 90 degrees through the connecting rod, the pressing sheet 802 stretches out of the cavity, the pressing sheet 802 is clamped above the step of the boat transfer box 304, the boat transfer box 304 and the lifting frame plate 303 are fixed together, and sliding displacement is prevented in the lifting process;

the pin shafts can be driven to horizontally move again through the rotary air cylinder 501, so that the pin shafts extend out of the left end and the right end of the wafer boat supporting plate 402b, the pin shafts are not shown in the pin shaft diagram and are clamped into the pin shaft groove diagram on the inner side of the wafer boat conveying box 304, and the wafer boat conveying box 304 and the lifting frame plate 303 can be prevented from moving.

Opening the boat cassette 304: firstly, the control system controls the rotary air cylinder 501 to enable the pin shaft to be far away from the pin shaft groove on the inner side of the wafer boat conveying box 304, so that the lifting frame plate 303 can be free to lift; the motor 201 is utilized to drive the connecting rod 203 to ascend through the coupler 202, the connecting rod 203 drives the sliding block of the sliding plate 301 to slide upwards along the guide rail 105 on the side supporting frame 101, the sliding plate 301 drives the lifting frame 302 and the lifting frame plate 303 to move upwards, the lifting frame plate 303 drives the boat conveying box 304 to move upwards, when the boat conveying box 304 ascends to a specific position, the boat frame 402c in the boat conveying box 304 can be completely leaked out, the control system can control the sensing door 103 to be opened, the mechanical arm can penetrate into the boat frame 402c, the wafers in the boat frame 402c are clamped, the motor 201 is prevented from rotating after the mechanical arm sensing sensor 104 detects that the mechanical arm enters, and the boat conveying box 304 is prevented from suddenly descending, so that the mechanical arm is smashed, and the wafers in the boat frame 402c are further smashed.

Scanning detection motion during the lifting of the cassette 304: when the lifting frame 302 and the lifting frame plate 303 move up and down, the lifting frame plate 303 drives the front and back groups of wafer lug scanning sensors 702 to scan the wafer state on the wafer boat frame 402c; the cassette in-situ detection sensor 703 on the lifting frame 302 is used to detect whether the cassette holder 402c is at a specific position; the cassette protrusion detection sensor 704 on the lifting frame plate 303 is used to detect whether the cassette holder 402c is displaced; the wafer scan sensor 705 is used to detect whether a wafer is on the wafer boat 402c; and the result is transmitted to a central control system in real time, and the system analyzes and issues a command.

In summary, the present utility model can quickly place the boat-transferring cassette 304 on the lifting frame plate 303 through the guiding assembly 900, can quickly fix the boat-transferring cassette 304 and the lifting frame plate 303 together through the fixing assembly 800, and can lift the driven supporting assembly 300 through the rotation driving assembly 200, so as to open or close the boat-transferring cassette 304, and the scan recognition assembly 700 can scan the wafer state in the boat frame 402c during the lifting process of the driven supporting assembly 300, and send the result to the central control system for data analysis and command.

Example 3

Referring to FIG. 12, a third embodiment of the present utility model provides a wafer scanning method, which includes the steps of opening a cassette 304

S1, a central control system controls a rotary cylinder 501 to rotate a pin shaft so as to open the limit of a wafer boat conveying box 304;

s2, then the central control system controls the motor 201 to drive the connecting rod 203 to drive the sliding block 305 on the sliding plate 301 to ascend along the guide rail 105, the sliding plate 301 drives the lifting frame 302, the lifting frame 302 drives the lifting frame plate 303 to ascend, and the boat conveying box 304 ascends along with the lifting frame plate;

s3, in the ascending process, the wafer scanning sensor 705 sequentially scans the wafer state of each layer on the wafer boat frame 402c, the wafer lug scanning sensor 702 scans whether the wafer protrudes, the wafer box in-situ detection sensor 703 detects whether the wafer boat frame 402c is at a specific position, the wafer box protrusion detection sensor 704 detects whether the wafer boat frame 402c is displaced, and the result is sequentially transmitted to the central control system, and is analyzed and processed by the central processing system;

s4: when the boat-transferring cassette 304 reaches a designated position, the motor 201 stops moving, and the central control system controls the sensing door 103 to open;

and S5, the wafer on the wafer boat frame 402c is sent by the robot arm, and after the robot arm is detected to enter by the robot arm induction sensor 104, the result is sent to the central control system, and the central control system controls the motor to prohibit rotation, so that the wafer boat transfer box 304 is prevented from being pressed to the robot arm and then the wafer is prevented from being pressed.

A step of closing the cassette 304,

s6, firstly, the robot arm stretches out of the sensing door 103, and the sensing door 103 is controlled to be closed;

s7: then the central control system controls the motor 201 to drive the connecting rod 203 to drive the sliding block 305 on the sliding plate 301 to descend along the guide rail 105, the sliding plate 301 drives the lifting frame 302 to move, the lifting frame 302 drives the lifting frame plate 303 to descend, and the boat conveying box 304 descends along with the lifting frame plate;

s8: in the descending process, the wafer scanning sensor 705 sequentially scans the wafer state of each layer on the wafer boat frame 402c, the wafer tab scanning sensor 702 scans whether the wafer protrudes, the wafer box in-place detecting sensor 703 detects whether the wafer boat frame 402c is at a specific position, the wafer box protrusion detecting sensor 704 detects whether the wafer boat frame 402c is displaced, and the result is sequentially transmitted to the central control system for analysis processing by the central processing system;

s9: when the boat-transferring cassette 304 reaches the designated position, the motor 201 stops moving after the boat-transferring cassette 304 completely covers the inner boat frame 402 c.

S10: finally, the central control system controls the rotary air cylinder 501 to drive the pin shaft to horizontally move, so that the pin shaft extends out of the left end and the right end of the wafer boat supporting plate 402b, the pin shaft is clamped into the pin shaft groove at the inner side of the wafer boat conveying box 304, and the wafer boat conveying box 304 and the lifting frame plate 303 can be prevented from moving.

In summary, the present utility model reads the inner wafer boat frame 402c and the wafers on the wafer boat frame 402c by the scanning and identifying assembly 700 during the lifting process of the driven support assembly 300, detects whether the wafers have inclined wafers, stacked wafers, and the like, can identify various wafers at the same time, and sends the results to the central control system for analysis in time, and issues instructions.

It is important to note that the construction and arrangement of the utility model as shown in the various exemplary embodiments is illustrative only. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications are possible (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, values of parameters (e.g., temperature, pressure, etc.), mounting arrangements, use of materials, colors, orientations, etc.) without materially departing from the novel teachings and advantages of the subject matter described in this application. For example, elements shown as integrally formed may be constructed of multiple parts or elements, the position of elements may be reversed or otherwise varied, and the nature or number of discrete elements or positions may be altered or varied. Accordingly, all such modifications are intended to be included within the scope of present utility model. The order or sequence of any process or method steps may be varied or re-sequenced according to alternative embodiments. In the claims, any means-plus-function clause is intended to cover the structures described herein as performing the recited function and not only structural equivalents but also equivalent structures. Other substitutions, modifications, changes and omissions may be made in the design, operating conditions and arrangement of the exemplary embodiments without departing from the scope of the present utility models. Therefore, the utility model is not limited to the specific embodiments, but extends to various modifications that nevertheless fall within the scope of the appended claims.

Furthermore, in order to provide a concise description of the exemplary embodiments, all features of an actual implementation may not be described (i.e., those not associated with the best mode presently contemplated for carrying out the utility model, or those not associated with practicing the utility model).

It should be appreciated that in the development of any such actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort might be complex and time consuming, but would nevertheless be a routine undertaking of design, fabrication, and manufacture for those of ordinary skill having the benefit of this disclosure.

It should be noted that the above embodiments are only for illustrating the technical solution of the present utility model and not for limiting the same, and although the present utility model has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the present utility model may be modified or substituted without departing from the spirit and scope of the technical solution of the present utility model, which is intended to be covered in the scope of the claims of the present utility model.

Claims (10)

1. The utility model provides a pod wafer boat conveys and opens box device which characterized in that: the device comprises a first supporting component, a driving component, a driven supporting component, a second supporting component, a limiting component, a pressure sensing component, a scanning identification component and a fixing component;

the first supporting component supports the driving component and the second supporting component, and the driving component drives the driven supporting component;

the second supporting component comprises an outer supporting piece and an inner supporting piece, the outer supporting piece supports the inner supporting piece, and the outer supporting piece can support the driven supporting component in a box closing state;

be provided with spacing subassembly on the interior support piece, be provided with scanning identification subassembly on the driven support subassembly, be provided with fixed subassembly on the driven support subassembly, fixed subassembly is fixed driven support subassembly.

2. The pod carrier open apparatus of claim 1, wherein: the driving assembly comprises a motor, a coupler and a connecting rod;

the motor is vertically fixed on the side surface of the first supporting component, the motor is connected with the connecting rod through a coupler, and the coupler is arranged at the output end of the upper side of the motor;

the driven support assembly comprises a sliding plate, a lifting frame plate, a wafer boat conveying box and a sliding block;

slide one side and slider fixed connection, slide opposite side and connecting rod fixed connection, the slider with the vertical sliding connection of first supporting component, the crane with slide connection, the up end fixedly connected with crane plate of crane, the up end of crane plate is provided with the wafer boat transport box.

3. The pod carrier open apparatus of claim 2, wherein: the outer support piece comprises an outer support frame and a support bottom plate;

the outer support frame is fixedly connected with the first support component, and the support bottom plate is arranged on the outer support frame and is fixedly connected with the support bottom plate;

the inner support piece comprises an inner support frame, a wafer boat support plate and a wafer boat frame;

the inner support frame is arranged on the upper end face of the support bottom plate, the upper end face of the inner support frame is connected with a wafer boat support plate, and a wafer boat frame is arranged above the wafer boat support plate.

4. The pod carrier open cassette apparatus of claim 3, wherein: the pressure sensing assembly comprises a pressure sensor and a light source induction sensor which are arranged on the wafer boat supporting plate, and the pressure sensor and the light source induction sensor are used for judging whether the wafer boat conveying box is placed correctly or in place;

the fixing component comprises a fixed motor, a pressing sheet and a pressing sheet cavity;

the fixed motor is vertically fixed on the lower end face of the lifting frame plate, a cavity for accommodating the pressing sheet is formed in the pressing sheet cavity, round holes are formed in the lifting frame plate and the pressing sheet cavity, and the extending end of the fixed motor penetrates through the round holes to be connected with the pressing sheet;

the wafer boat conveying box is provided with steps, so that the pressing sheets are convenient to fix the steps, and the wafer boat conveying box cannot move in the lifting process.

5. The pod carrier open cassette apparatus of claim 4, wherein: the guide assembly is arranged on the upper end face of the lifting frame plate;

the guide assembly comprises a guide block and a guide slope;

the guide block is fixedly connected with the upper end face of the lifting frame plate, and a guide slope is arranged on the upper end face of the guide block, so that the wafer boat conveying box can be quickly and correctly placed at a designated position;

the guide blocks are arranged in four groups, and the guide blocks are arranged at the intersection of four edges and corners of the wafer boat conveying box.

6. The pod carrier open cassette apparatus of claim 5, wherein: a second notch is formed in the upper end face of the lifting frame plate, and a wafer boat supporting plate is accommodated in the second notch;

the middle of the outer supporting piece is a cavity, the upper end of the outer supporting piece is provided with a first notch, and the lifting frame plate is accommodated in the first notch;

the lifting frame is arranged above the supporting bottom plate.

7. The pod carrier open cassette apparatus of claim 6, wherein: the limiting assembly comprises a rotary cylinder and a pin shaft;

the rotary air cylinder is connected with the lower end face of the wafer boat supporting plate, a pin shaft is arranged in the wafer boat supporting plate and connected with the rotary air cylinder, the rotary air cylinder can drive the pin shaft to do transverse telescopic motion, a pin shaft groove is formed in the inner side of the wafer boat conveying box, and the pin shaft extends out of the pin shaft groove and can be inserted into the wafer boat conveying box, so that the wafer boat conveying box is prevented from moving due to misoperation.

8. The pod carrier open cassette apparatus of claim 7, wherein: the scanning and identifying assembly comprises a protection box identifying sensor, a wafer lug scanning sensor, a wafer box in-situ detection sensor, a wafer box protrusion detection sensor and a wafer scanning sensor;

the protection box identification sensor is arranged on the upper end face of the lifting frame plate and is used for scanning ID information of the wafer boat conveying box;

the wafer lug scanning sensor is arranged on the lower end face of the lifting frame plate and is used for scanning whether the wafer protrudes out;

the wafer box in-situ detection sensor is arranged on the inner side below the lifting frame and is used for detecting whether the wafer boat frame is at a specific position or not;

the wafer box protrusion detection sensor is arranged on the lower end face of the lifting frame plate and is used for detecting whether the wafer boat frame is displaced or not;

the wafer scanning sensor is arranged on the lower end face of the lifting frame plate and is used for detecting whether the wafer is on the wafer boat frame or not.

9. The pod carrier open cassette apparatus of claim 8, wherein: the protective box identification sensor is arranged at the front end or the rear end or both the front end and the rear end of the lifting frame plate; the wafer lug scanning sensors are arranged in two groups and are arranged at the front end and the rear end of the lower end face of the lifting frame plate; the wafer box in-situ detection sensors are arranged in two groups and are arranged at the left end and the right end of the lifting frame; the wafer box protrusion detection sensors and the wafer scanning sensors are arranged in two groups, the wafer box protrusion detection sensors are arranged at the left end and the right end of the lower end face of the lifting frame plate, and the wafer scanning sensors are arranged at the front end and the rear end of the lower end face of the lifting frame plate.

10. The pod carrier open cassette apparatus of claim 9, wherein: the first support component comprises a side support frame, a bottom side support frame, a sensing door, a robot hand sensing sensor, a guide rail and rollers;

the side of side support frame is provided with the guide rail, the guide rail with sliding connection is carried out to the slider, the side support frame with outer support frame carries out fixed connection, the bottom side support frame sets up the below of outer support frame and with the side support frame is connected, be provided with the induction door on the side support frame, the induction door sets up the side at the wafer boat frame, the induction door downside is provided with the robot inductive sensor, bottom side support frame below is connected with the gyro wheel.