CN219997114U - Automatic focusing detection system - Google Patents
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Abstract
The utility model relates to an automatic focusing detection system, which belongs to the technical field of electronic scanning, can measure the distance between a sample and an objective lens, realizes automatic focusing, not only improves the detection efficiency, but also avoids small errors caused by manual operation; the system comprises an electron source for generating a laser beam, an electron accelerating electrode, an objective lens, a ranging unit, a PC end, a motion control unit and a sample stage; the electron source, the electron accelerating electrode, the objective lens and the sample table are sequentially arranged from top to bottom; the motion control unit is arranged below the sample table and is connected with the sample table; the distance measuring unit is fixedly arranged at the lower part of the objective lens; the distance measuring unit and the motion control unit are connected with the PC end; the ranging unit comprises a point spectrum transmitting end, a point spectrum receiving end and a spectrum analyzer; the point spectrum transmitting end, the upper surface of the sample to be detected and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
Description
Technical Field
The utility model relates to the technical field of electronic scanning, in particular to an automatic focusing detection system.
Background
In recent years, with the development of precision manufacturing industry, requirements for precision detection technology are increasing. Displacement detection technology is used as the basis of geometric quantity precision detection, not only needs ultra-high detection precision, but also needs wide adaptability to environment and materials, and gradually tends to real-time and high-efficiency detection.
In micro-nano scale mechanical test, the operation of a focused ion beam-scanning electron microscope system is very complex, and the focused ion beam-scanning electron microscope system can be achieved only by professional training and certain experience if the skilled operation is to be mastered. Before micro-nano mechanical test, focusing an electron microscope to enable a sample to be clearly seen is needed, and the process is commonly called focusing. In the current stage of focusing, manual adjustment is generally adopted, and in the focusing process, even people with abundant experience are used for manually adjusting the focal length, no specific standard exists, so that the working time is long, and small errors caused by artificial factors cannot be avoided.
In the prior art, automatic focusing is adopted, and mainly comprises infrared ranging automatic focusing, laser automatic focusing and ultrasonic ranging automatic focusing, and the three automatic focusing modes have own defects.
The principle of infrared ranging automatic focusing is as follows: the camera actively emits infrared rays as a ranging light source, and the focusing distance is calculated by the geometric relationship formed by the infrared light emitting diodes. The defects are: the sample to be measured is required to be kept completely horizontal; the material of the sample to be measured is required, and under the conditions of the same material and equal height, the heights are the same, and the final feedback height information is different due to different red light absorption degrees of different materials; the sample to be measured of the mirror surface cannot be used.
The principle of laser automatic focusing is as follows: the object is irradiated to the surface of the object to be measured through the objective lens, and the surface to be measured and the laser focusing plane have three opposite states: firstly, the measured surface is above the focusing plane and is called positive defocus; secondly, the measured surface coincides with the focusing plane, which is called focusing; thirdly, the measured surface is below the focusing plane and is called negative defocus. When auxiliary focusing is carried out by adopting a semicircular laser beam, the relative relation between a measured surface and a focusing plane is positive defocus, focusing and negative defocus, the corresponding laser spot shapes are right semicircle, small dots and left semicircle respectively, and the spot radius and the defocus amount are in linear relation; therefore, the imaging sensor can determine the direction and distance of the measured surface relative to the focusing surface by detecting the shape and the size of the light spot. The disadvantages are: infrared rays are also used as light sources in general, so that the sample to be measured needs to be kept completely horizontal; the material of the sample to be measured is required, and under the conditions of the same material and equal height, the heights are the same, and the final feedback height information is different due to different red light absorption degrees of different materials; the sample to be measured of the mirror surface cannot be used.
The principle of ultrasonic ranging automatic focusing is as follows: the distance measurement is mainly performed according to the time that ultrasonic waves directly travel between the camera and the photographed subject. The disadvantages are: is not matched with the scanning electron microscope equipment, and influences the acquisition result of the scanning electron microscope.
In addition, the auto-focusing schemes are also improved in chinese patents CN115330859a and TW202220012a, respectively. CN115330859a proposes an automatic focusing and automatic centering method and system based on machine vision, by controlling the stage to move within the imaging distance interval of the electron microscope, and obtaining the images scanned by the electron microscope when the stage is at different imaging distances, calculating the image definition of the stage image by the gray value of each pixel in the stage image, determining the imaging distance when the image definition value is highest, and controlling the stage to move to the position, thereby achieving accurate focusing based on machine vision; after the accurate focusing is completed, an image which can clearly show the arrangement relation between the pressure head and the sample on the objective table is obtained through the electron microscope, and the central lines of the pressure head area and the sample area are aligned, so that the accurate centering based on machine vision is realized, the problems of low efficiency and poor precision existing in manual focusing and centering are avoided, and the focusing and centering efficiency is improved. The drawbacks of this patent are: not applicable to all materials, such as materials with relatively high reflectivity, or materials with relatively significant differences in surface height. TW202220012A presents a multiple particle beam microscope and related method with fast auto-focus near adjustable working distance, the system having one or more fast auto-focus correction lenses for adjusting focus, position, landing angle and rotation of individual particle beams at incidence on the wafer surface in a high frequency manner during wafer inspection; fast auto-focusing can be achieved in a similar way in the secondary path of the particle beam system. The accuracy can be further improved by means of a fast aberration correction device in the form of a deflector and/or an astigmatic device. The drawbacks of this patent are: the detection efficiency is low, the focusing speed is not fast enough, and the method is not suitable for materials with obvious surface height differences.
Accordingly, there is a need to develop an autofocus detection system that addresses the deficiencies of the prior art to solve or mitigate one or more of the problems described above.
Disclosure of Invention
In view of the above, the present utility model provides an autofocus detection system that can measure the distance between a sample and an objective lens, achieve autofocus, not only improve detection efficiency, but also avoid minor errors caused by manual operations.
The utility model provides an automatic focusing detection system, which comprises an electron source for generating a laser beam, an electron acceleration electrode, an objective lens, a ranging unit, a PC end, a motion control unit and a sample stage;
the electron source, the electron accelerating electrode, the objective lens and the sample stage are sequentially arranged from top to bottom; the motion control unit is arranged below the sample table and is connected with the sample table;
the distance measuring unit is fixedly arranged at the lower end of the objective lens;
the distance measuring unit and the motion control unit are connected with the PC end.
In aspects and any possible implementation manner as described above, there is further provided an implementation manner, where the ranging unit includes a point spectrum transmitting end, a point spectrum receiving end, and a spectrum analyzer;
the point spectrum transmitting end and the point spectrum receiving end are both fixedly arranged on the inner end face of the outer shell at the bottom of the objective lens and are in an extending state along the direction of the outer shell;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
In aspects and any possible implementation manner as described above, there is further provided an implementation manner, where the ranging unit includes a point spectrum transmitting end, a point spectrum receiving end, a total reflection mirror, and a spectrum analyzer;
the point spectrum transmitting end, the point spectrum receiving end and the total reflection mirror are fixedly arranged on the lower surface of the outer shell at the bottom of the objective lens and are close to the outer side of the objective lens; the point spectrum transmitting end and the point spectrum receiving end are arranged on the same side and are opposite to the total reflection mirror;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table, the total reflection mirror and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
In aspects and any possible implementation manner as described above, there is further provided an implementation manner, where the ranging unit includes a point spectrum transmitting end, a point spectrum receiving end, and a spectrum analyzer;
the point spectrum transmitting end and the point spectrum receiving end are fixedly arranged on the lower surface of the outer shell at the bottom of the objective lens and are close to the outer side of the objective lens;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
In aspects and any possible implementation manner as described above, there is further provided an implementation manner, where the ranging unit includes a point spectrum transmitting end, a point spectrum receiving end, and a spectrum analyzer;
the point spectrum transmitting end and the point spectrum receiving end are both fixedly arranged in a detection port of the objective lens;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
In aspects and any possible implementation manner as described above, there is further provided an implementation manner, where the ranging unit includes a point spectrum transmitting end, a point spectrum receiving end, and a spectrum analyzer;
the point spectrum transmitting end and the point spectrum receiving end are fixedly arranged on the side wall of the inner shell of the objective lens, which is close to one side of the laser beam, and are close to the bottom end of the objective lens;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
In accordance with aspects and any one of the possible implementations described above, there is further provided an implementation, the system further including a condenser lens disposed between the electron acceleration electrode and the objective lens.
In aspects and any one of the possible implementations described above, there is further provided an implementation, the system further including a SE detector and a deflection coil;
the SE detector and the deflection coil are both arranged on the inner side of the inner annular wall of the objective lens, the SE detector is close to the top of the inner annular wall, and the deflection coil is close to the bottom of the inner annular wall.
In the aspect and any possible implementation manner as described above, there is further provided an implementation manner, in which the deflection coil is disposed at a higher height than the ranging unit.
In aspects and any one of the possible implementations described above, there is further provided an implementation, the point spectrum emission end includes a visible light source and a color-coded sensing head that produces axial dispersion of the visible light; the point spectrum receiving end is an optical fiber coupler.
The method for using the automatic focusing detection system according to any one of the above embodiments of the present utility model includes the steps of:
s1, placing a sample to be detected on a sample table;
s2, setting imaging parameters of electronic scanning;
s3, ranging is carried out through a ranging unit;
s4, the PC end analyzes the ranging data and sends a control instruction to the motion control unit according to the ranging data analysis result;
s5, the motion control unit controls the sample table to move up and down and left and right according to the received control instruction;
s6, repeating the steps S3-S5 until the condition of stopping ranging is met.
Compared with the prior art, one of the technical schemes has the following advantages or beneficial effects: the utility model adopts the principle of spectral confocal displacement based on the point light source to measure the distance, and can effectively realize automatic focusing in the electronic scanning process;
the other technical scheme has the following advantages or beneficial effects: according to the utility model, the distance measurement is carried out by the distance measurement unit based on the spectrum confocal displacement principle of the point light source, the material requirement of the sample to be measured is low, the effective measurement can be realized for the sample to be measured of transparent or semitransparent material, the radian of the surface of the sample to be measured or the sensitivity of the rotation angle of the sample is low, the application range of an automatic focusing function is expanded, the operation of frequently adjusting the posture of the sample to be measured is avoided, and the method has obvious practical effect in practical electronic scanning application.
Of course, it is not necessary for any of the products embodying the utility model to achieve all of the technical effects described above at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of an autofocus detection system according to embodiment 1 of the present utility model;
fig. 2 is a schematic diagram of an autofocus detection system according to embodiment 2 of the present utility model;
FIG. 3 is a schematic diagram of an autofocus detection system according to embodiment 3 of the present utility model;
FIG. 4 is a schematic diagram of an autofocus detection system according to embodiment 4 of the present utility model;
FIG. 5 is a schematic diagram of an autofocus detection system according to embodiment 5 of the present utility model;
fig. 6 is a flowchart of an autofocus detection method according to an embodiment of the present utility model.
Wherein, in the figure:
1. an electron source; 2. an electron beam; 3. an electron accelerating electrode; 4. a condenser lens; 5. a SE detector; 6. an objective lens; 7. a deflection yoke; 8. a point spectrum emission end; 9. a point spectrum receiving end; 10. a sample; 11. a total reflection mirror; 12. a PC end; 13. a motion control unit; 14. a sample stage.
Detailed Description
For a better understanding of the technical solution of the present utility model, the following detailed description of the embodiments of the present utility model refers to the accompanying drawings.
It should be understood that the described embodiments are merely some, but not all, embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The utility model provides an automatic focusing detection system and an automatic focusing detection method for pre-navigation, which realize the function of pre-navigation, can calibrate the detection position in advance and automatically focus the detection position. The detection efficiency is improved, small errors caused by manual operation are avoided, the operation is simplified and intelligent, and meanwhile, the pre-navigation result and the scanning result can be combined for integrated analysis.
The autofocus detection system includes:
a sample;
scanning electron microscope system:
an electron source: for generating an electron beam;
accelerating electrode: for accelerating the emitted electron beam;
condenser lens: reducing the diameter of the electron beam;
electron detector (e.g. SE detector): electrons are subjected to the magnetic field, and the rotation rising is absorbed by the detector;
an objective lens: for focusing an initial electron beam onto the sample to form a converging beam spot;
deflection yoke: generating a magnetic field to influence the motion track of the electron beam;
the distance measuring unit is used for detecting distance data between the objective lens and the sample by adopting a point spectrum technology and transmitting the distance data to the PC end; the light emitted by the white light LED light source can be approximately regarded as a point light source after passing through the optical fiber coupler, spectral dispersion occurs after being focused by the collimating and dispersing objective lens, continuous monochromatic light focuses are formed on the optical axis, and the distances from each monochromatic light focus to the measured object are different. When the measured object is positioned at a certain position in the measuring range, only light with a certain wavelength is focused on the measured surface, the light with the certain wavelength can be reflected from the surface of the measured object back to the optical fiber coupler and enter the spectrometer due to the fact that the confocal condition is met, the light with other wavelengths is in a defocused state on the surface of the measured object, the distribution of the reflected light at the light source is far greater than the diameter of the optical fiber core, and therefore most light cannot enter the spectrometer; decoding by a spectrometer to obtain a wavelength value at the maximum light intensity, thereby measuring a distance value corresponding to the target; because the confocal technology is adopted in the distance measurement, the method has good chromatographic characteristics, improves the resolution and is insensitive to the characteristics of the measured object and stray light;
PC end: the SEM adopts a computer to display and record images, receives distance data detected by the distance measuring unit and controls the action of the sample stage according to the distance data so as to realize automatic focusing.
Example 1:
as shown in fig. 1, the autofocus detection system provided in this embodiment includes: an electron source 1, an electron accelerating electrode 3, a condenser lens 4, a SE detector 5, an objective lens 6, a deflection coil 7, a point spectrum transmitting end 8, a point spectrum receiving end 9, a spectrum analyzer, a PC end 12, a motion control unit 13 and a sample stage 14. The electron source 1 is arranged at the very top for generating an electron beam 2. An electron acceleration electrode 3, a condenser lens 4, an objective lens 6 and a sample stage 14 are sequentially arranged below the electron source 1, an SE detector 5 is arranged at the upper half part of the inner side of the objective lens 6, and a deflection coil 7 is arranged at the lower half part.
The inner end surface of the bottom shell of the objective lens 6 is provided with a group of point spectrum transmitting ends 8 and point spectrum receiving ends 9 in an extending manner, and the point spectrum transmitting ends 8 and the point spectrum receiving ends 9 are correspondingly arranged; the extensibility means extending along the outer casing toward the inside of the objective lens.
The sample 10 is arranged on a sample table 14, a motion control unit 13 is arranged below the sample table 14 and connected with the sample table 14, and the motion control unit 13 is used for controlling the sample table to move along x, y and z axes and rotate along the x and y axes. The single movement distance along the x, y and z axes is between 1nm and 2m, and 1nm is the minimum movement precision; the angles of rotation along the x and y axes are between-45 deg. and 45 deg.. The motion control unit 13 is connected to the PC terminal 12, and the PC terminal 12 transmits a control signal to control the motion of the motion control component.
The point spectrum transmitting end 8, the point spectrum receiving end 9 and the spectrum analyzer form a ranging unit of the embodiment. The test light is emitted to the sample surface by the point spectrum emission end 8, and the sample surface is reflected to the point spectrum receiving end 9 and received by the point spectrum receiving end. The point spectrum emission end comprises a visible light source and a color coding sensing head, and the color coding lens enables the visible light to generate axial dispersion output. The point optical spectrum receiving end comprises an optical fiber coupler, and the optical fiber coupler is an optical device for realizing distribution or combination of optical signal power among different optical fibers. The optical fiber coupler is connected with the spectrum analyzer, and the spectrum analyzer is connected with the PC end. The point spectrum is a device for obtaining distance information by establishing a corresponding relation between distance and wavelength through an optical dispersion principle and decoding spectrum information by utilizing a spectrometer. The point spectrum emission end 8 is a beam of white light (or multi-wavelength mixed light) which passes through a small hole, focuses different wavelengths on an optical axis through a lens, dispersedly forms a rainbow-shaped distribution belt, irradiates the sample 10, and reflects part of reflected light back; light which does not irradiate at the intersection point of the optical axis and the surface of the object passes through the light splitting component, irradiates around the other small hole and is blocked, cannot irradiate to the spectrum analyzer, and does not interfere detection; the light irradiated on the intersection point of the optical axis and the object surface passes through the light-splitting member and is irradiated to the spectrum analyzer through the aperture. The point spectrum transmitting end and the point spectrum receiving end are both existing equipment, and the utility model does not limit the specific model of the equipment too much. The distance between the lens and the object to be measured, in particular the distance between the surface of the detection sample and the bottom surface of the objective lens, can be obtained according to the wavelength calculation.
The spectrum emission end 8 in the detection process irradiates from multiple parties, detects coaxially and returns a small amount of light. For a film made of semitransparent materials and glass to wait for detecting a sample, light around a light spot is blocked by a small hole and cannot return to a spectrometer, so that detection cannot be influenced. The transparent surface of the sample to be tested also reflects a portion of the light and is thus detectable, even in multiple layers. In the range, the light of the effective wavelength is always in the focus, the light spot is tiny, and the resolution and the precision can be maintained in the whole range.
The distance measuring unit is connected with a spectrum analyzer, and the spectrum analyzer is connected with a PC end 12. The spectral data obtained by scanning the sample surface through the point spectral transmitting end 8 is received and analyzed by the spectral analyzer, the obtained distance value is sent to the PC end 12, the PC end 12 controls the motion control unit 13 to act through the information, the distance between the sample surface and the objective lens is adjusted, and finally high-speed accurate focusing of the objective lens is realized. After accurate focusing, the scanning of the sample image information can be controlled by the PC end 12, so that the high-resolution image information can be simply, conveniently, quickly and efficiently obtained.
The scanning system of the present utility model is suitable for highly reflective, specular, transparent, curved, slanted, high contrast, flexible, fragile and porous materials, and even can detect transparent coating thickness and air gaps. Is widely applied to quality inspection of materials such as glass, polymer/plastic, metal, composite material, ceramic, biological material and the like.
Example 2:
as shown in fig. 2, the autofocus detection system provided in this embodiment includes: an electron source 1, an electron accelerating electrode 3, a condenser lens 4, an SE detector 5, an objective lens 6, a deflection coil 7, a point spectrum transmitting end 8, a point spectrum receiving end, a total reflection mirror 11, a spectrum analyzer, a PC end 12, a motion control unit 13 and a sample stage 14. The electron source 1 is arranged at the very top for generating an electron beam 2. An electron acceleration electrode 3, a condenser lens 4, an objective lens 6 and a sample stage 14 are sequentially arranged below the electron source 1, an SE detector 5 is arranged at the upper half part of the inner side of the objective lens 6, and a deflection coil 7 is arranged at the lower half part.
The lower surface of the bottom shell of the objective lens 6 is fixedly provided with a point spectrum transmitting end 8, a point spectrum receiving end and a total reflection mirror 11. The point spectrum transmitting end 8 and the point spectrum receiving end are disposed on the same side (the point spectrum receiving end is not shown in fig. 2), the total reflection mirror 11 is disposed on the opposite side, the point spectrum transmitting end 8 transmits the test light to the sample surface, the sample surface is reflected to the total reflection mirror 11, the total reflection mirror 11 reflects the test light to the point spectrum receiving end, and the distance is received and calculated by the point spectrum receiving end. Further, a point spectrum emission end 8, a point spectrum reception end, and a total reflection mirror 11 are provided at the outer end of the lower surface of the objective lens housing, i.e., the end far from the laser beam.
The sample 10 is arranged on a sample table 14, a motion control unit 13 is arranged below the sample table 14 and connected with the sample table 14, and the motion control unit 13 is used for controlling the sample table to move along x, y and z axes and rotate along the x and y axes. The single movement distance along the x, y and z axes is between 1nm and 2m, and 1nm is the minimum movement precision; the angles of rotation along the x and y axes are between-45 deg. and 45 deg.. The motion control unit 13 is connected to the PC terminal 12, and the PC terminal 12 transmits a control signal to control the motion of the motion control component.
The point spectrum transmitting end 8, the point spectrum receiving end, the total reflection mirror 11 and the spectrum analyzer form a ranging unit of the embodiment. The point spectrum emission end comprises a visible light source and a color coding sensing head, and the color coding lens enables the visible light to generate axial dispersion output. The point optical spectrum receiving end comprises an optical fiber coupler, and the optical fiber coupler is an optical device for realizing distribution or combination of optical signal power among different optical fibers. The optical fiber coupler is connected with the spectrum analyzer, and the spectrum analyzer is connected with the PC end. The point spectrum is a device for obtaining distance information by establishing a corresponding relation between distance and wavelength through an optical dispersion principle and decoding spectrum information by utilizing a spectrometer. The point spectrum emission end 8 is a beam of white light (or multi-wavelength mixed light) which passes through a small hole, focuses different wavelengths on an optical axis through a lens, dispersedly forms a rainbow-shaped distribution belt, irradiates the sample 10, and reflects part of reflected light back; light which does not irradiate at the intersection point of the optical axis and the surface of the object passes through the light splitting component, irradiates around the other small hole and is blocked, cannot irradiate to the spectrum analyzer, and does not interfere detection; the light irradiated on the intersection point of the optical axis and the object surface passes through the light-splitting member and is irradiated to the spectrum analyzer through the aperture. And obtaining the distance from the lens to the measured object according to the wavelength calculation.
The spectrum emission end 8 in the detection process irradiates from multiple parties, detects coaxially and returns a small amount of light. When the sample to be detected is in a relatively large bending or tilting angle, the detection can be completed only by returning a small part of light, and the model or the installation angle of the point spectrum transmitting end and the receiving end does not need to be changed. For a film made of semitransparent materials and glass to wait for detecting a sample, light around a light spot is blocked by a small hole and cannot return to a spectrometer, so that detection cannot be influenced. The transparent surface of the sample to be tested also reflects a portion of the light and is thus detectable, even in multiple layers. In the range, the light of the effective wavelength is always in the focus, the light spot is tiny, and the resolution and the precision can be maintained in the whole range.
The distance measuring unit is connected with a spectrum analyzer, and the spectrum analyzer is connected with a PC end 12. The spectral data obtained by scanning the sample surface through the point spectral transmitting end 8 is received and analyzed by the spectral analyzer, the obtained distance value is sent to the PC end 12, the PC end 12 controls the motion control unit 13 to act through the information, the distance between the sample surface and the objective lens is adjusted, and finally high-speed accurate focusing of the objective lens is realized. After accurate focusing, the scanning of the sample image information can be controlled by the PC end 12, so that the high-resolution image information can be simply, conveniently, quickly and efficiently obtained.
In this embodiment, the point spectrum emission end 8 emits detection light to be reflected to the surface of an object to be received, or reflected back through the total reflection mirror 11 to be received, and only monochromatic light meeting the confocal condition can be sensed by the spectrometer through the small hole. The distance value is obtained by calculating the wavelength of the sensed focus.
Example 3:
as shown in fig. 3, the autofocus detection system provided by this embodiment includes: an electron source 1, an electron accelerating electrode 3, a condenser lens 4, a SE detector 5, an objective lens 6, a deflection coil 7, a point spectrum transmitting end 8, a point spectrum receiving end 9, a spectrum analyzer, a PC end 12, a motion control unit 13 and a sample stage 14. The electron source 1 is arranged at the very top for generating an electron beam 2. An electron acceleration electrode 3, a condenser lens 4, an objective lens 6 and a sample stage 14 are sequentially arranged below the electron source 1, an SE detector 5 is arranged at the upper half part of the inner side of the objective lens 6, and a deflection coil 7 is arranged at the lower half part.
The lower surface of the outer shell at the bottom of the objective lens 6 is provided with a point spectrum transmitting end 8 and a point spectrum receiving end 9, and the point spectrum transmitting end 8 and the point spectrum receiving end 9 are correspondingly arranged. Further, a point spectrum transmitting end 8 and a point spectrum receiving end 9 are provided at the outer end of the lower surface of the objective lens housing body, i.e., the end remote from the laser beam.
The sample 10 is arranged on a sample table 14, a motion control unit 13 is arranged below the sample table 14 and connected with the sample table 14, and the motion control unit 13 is used for controlling the sample table to move along x, y and z axes and rotate along the x and y axes. The single movement distance along the x, y and z axes is between 1nm and 2m, and 1nm is the minimum movement precision; the angles of rotation along the x and y axes are between-45 deg. and 45 deg.. The motion control unit 13 is connected to the PC terminal 12, and the PC terminal 12 transmits a control signal to control the motion of the motion control component.
The point spectrum transmitting end 8, the point spectrum receiving end 9 and the spectrum analyzer form a ranging unit of the embodiment. The test light is emitted to the sample surface by the point spectrum emission end 8, and the sample surface is reflected to the point spectrum receiving end 9 and received by the point spectrum receiving end. The point spectrum emission end comprises a visible light source and a color coding sensing head, and the color coding lens enables the visible light to generate axial dispersion output. The point optical spectrum receiving end comprises an optical fiber coupler, and the optical fiber coupler is an optical device for realizing distribution or combination of optical signal power among different optical fibers. The optical fiber coupler is connected with the spectrum analyzer, and the spectrum analyzer is connected with the PC end. The point spectrum is a device for obtaining distance information by establishing a corresponding relation between distance and wavelength through an optical dispersion principle and decoding spectrum information by utilizing a spectrometer. The point spectrum emission end 8 is a beam of white light (or multi-wavelength mixed light) which passes through a small hole, focuses different wavelengths on an optical axis through a lens, dispersedly forms a rainbow-shaped distribution belt, irradiates the sample 10, and reflects part of reflected light back; light which does not irradiate at the intersection point of the optical axis and the surface of the object passes through the light splitting component, irradiates around the other small hole and is blocked, cannot irradiate to the spectrum analyzer, and does not interfere detection; the light irradiated on the intersection point of the optical axis and the object surface passes through the light-splitting member and is irradiated to the spectrum analyzer through the aperture. And obtaining the distance from the lens to the measured object according to the wavelength calculation.
The spectrum emission end 8 in the detection process irradiates from multiple parties, detects coaxially and returns a small amount of light. When the sample to be detected is in a relatively large bending or tilting angle, the detection can be completed only by returning a small part of light, and the model or the installation angle of the point spectrum transmitting end and the receiving end does not need to be changed. For a film made of semitransparent materials and glass to wait for detecting a sample, light around a light spot is blocked by a small hole and cannot return to a spectrometer, so that detection cannot be influenced. The transparent surface of the sample to be tested also reflects a portion of the light and is thus detectable, even in multiple layers. In the range, the light of the effective wavelength is always in the focus, the light spot is tiny, and the resolution and the precision can be maintained in the whole range.
The distance measuring unit is connected with a spectrum analyzer, and the spectrum analyzer is connected with a PC end 12. The spectral data obtained by scanning the sample surface through the point spectral transmitting end 8 is received and analyzed by the spectral analyzer, the obtained distance value is sent to the PC end 12, the PC end 12 controls the motion control unit 13 to act through the information, the distance between the sample surface and the objective lens is adjusted, and finally high-speed accurate focusing of the objective lens is realized. After accurate focusing, the scanning of the sample image information can be controlled by the PC end 12, so that the high-resolution image information can be simply, conveniently, quickly and efficiently obtained.
The arrangement mode of the embodiment only needs one set of spectral confocal sensing system, so that the cost can be saved; and the occupied space is smaller, and the space advantage is achieved.
Example 4:
as shown in fig. 4, the autofocus detection system provided by this embodiment includes: an electron source 1, an electron accelerating electrode 3, a condenser lens 4, a SE detector 5, an objective lens 6, a deflection coil 7, a point spectrum transmitting end 8, a point spectrum receiving end 9, a spectrum analyzer, a PC end 12, a motion control unit 13 and a sample stage 14. The electron source 1 is arranged at the very top for generating an electron beam 2. An electron acceleration electrode 3, a condenser lens 4, an objective lens 6 and a sample stage 14 are sequentially arranged below the electron source 1, an SE detector 5 is arranged at the upper half part of the inner side of the objective lens 6, and a deflection coil 7 is arranged at the lower half part.
The detection port of the objective lens 6 is provided with a point spectrum transmitting end 8 and a point spectrum receiving end 9, and the point spectrum transmitting end 8 and the point spectrum receiving end 9 are correspondingly arranged.
The sample 10 is arranged on a sample table 14, a motion control unit 13 is arranged below the sample table 14 and connected with the sample table 14, and the motion control unit 13 is used for controlling the sample table to move along x, y and z axes and rotate along the x and y axes. The single movement distance along the x, y and z axes is between 1nm and 2m, and 1nm is the minimum movement precision; the angles of rotation along the x and y axes are between-45 deg. and 45 deg.. The motion control unit 13 is connected to the PC terminal 12, and the PC terminal 12 transmits a control signal to control the motion of the motion control component.
The point spectrum transmitting end 8, the point spectrum receiving end 9 and the spectrum analyzer form a ranging unit of the embodiment. The test light is emitted to the sample surface by the point spectrum emission end 8, and the sample surface is reflected to the point spectrum receiving end 9 and received by the point spectrum receiving end. The point spectrum emission end comprises a visible light source and a color coding sensing head, and the color coding lens enables the visible light to generate axial dispersion output. The point optical spectrum receiving end comprises an optical fiber coupler, and the optical fiber coupler is an optical device for realizing distribution or combination of optical signal power among different optical fibers. The optical fiber coupler is connected with the spectrum analyzer, and the spectrum analyzer is connected with the PC end. The point spectrum is a device for obtaining distance information by establishing a corresponding relation between distance and wavelength through an optical dispersion principle and decoding spectrum information by utilizing a spectrometer. The point spectrum emission end 8 is a beam of white light (or multi-wavelength mixed light) which passes through a small hole, focuses different wavelengths on an optical axis through a lens, dispersedly forms a rainbow-shaped distribution belt, irradiates the sample 10, and reflects part of reflected light back; light which does not irradiate at the intersection point of the optical axis and the surface of the object passes through the light splitting component, irradiates around the other small hole and is blocked, cannot irradiate to the spectrum analyzer, and does not interfere detection; the light irradiated on the intersection point of the optical axis and the object surface passes through the light-splitting member and is irradiated to the spectrum analyzer through the aperture. And obtaining the distance from the lens to the measured object according to the wavelength calculation.
The spectrum emission end 8 in the detection process irradiates from multiple parties, detects coaxially and returns a small amount of light. When the sample to be detected is in a relatively large bending or tilting angle, the detection can be completed only by returning a small part of light, and the model or the installation angle of the point spectrum transmitting end and the receiving end does not need to be changed. For a film made of semitransparent materials and glass to wait for detecting a sample, light around a light spot is blocked by a small hole and cannot return to a spectrometer, so that detection cannot be influenced. The transparent surface of the sample to be tested also reflects a portion of the light and is thus detectable, even in multiple layers. In the range, the light of the effective wavelength is always in the focus, the light spot is tiny, and the resolution and the precision can be maintained in the whole range.
The distance measuring unit is connected with a spectrum analyzer, and the spectrum analyzer is connected with a PC end 12. The spectral data obtained by scanning the sample surface through the point spectral transmitting end 8 is received and analyzed by the spectral analyzer, the obtained distance value is sent to the PC end 12, the PC end 12 controls the motion control unit 13 to act through the information, the distance between the sample surface and the objective lens is adjusted, and finally high-speed accurate focusing of the objective lens is realized. After accurate focusing, the scanning of the sample image information can be controlled by the PC end 12, so that the high-resolution image information can be simply, conveniently, quickly and efficiently obtained.
Example 5:
as shown in fig. 5, the autofocus detection system provided by this embodiment includes: an electron source 1, an electron accelerating electrode 3, a condenser lens 4, a SE detector 5, an objective lens 6, a deflection coil 7, a point spectrum transmitting end 8, a point spectrum receiving end 9, a spectrum analyzer, a PC end 12, a motion control unit 13 and a sample stage 14. The electron source 1 is arranged at the very top for generating an electron beam 2. An electron acceleration electrode 3, a condenser lens 4, an objective lens 6 and a sample stage 14 are sequentially arranged below the electron source 1, an SE detector 5 is arranged at the upper half part of the inner side of the objective lens 6, and a deflection coil 7 is arranged at the lower half part.
The inner side of the inner shell of the objective lens 6, specifically below the deflection coil 7, is provided with a point spectrum transmitting end 8 and a point spectrum receiving end 9, and the point spectrum transmitting end 8 and the point spectrum receiving end 9 are correspondingly arranged.
The sample 10 is arranged on a sample table 14, a motion control unit 13 is arranged below the sample table 14 and connected with the sample table 14, and the motion control unit 13 is used for controlling the sample table to move along x, y and z axes and rotate along the x and y axes. The single movement distance along the x, y and z axes is between 1nm and 2m, and 1nm is the minimum movement precision; the angles of rotation along the x and y axes are between-45 deg. and 45 deg.. The motion control unit 13 is connected to the PC terminal 12, and the PC terminal 12 transmits a control signal to control the motion of the motion control component.
The point spectrum transmitting end 8, the point spectrum receiving end 9 and the spectrum analyzer form a ranging unit of the embodiment. The test light is emitted to the sample surface by the point spectrum emission end 8, and the sample surface is reflected to the point spectrum receiving end 9 and received by the point spectrum receiving end. The point spectrum emission end comprises a visible light source and a color coding sensing head, and the color coding lens enables the visible light to generate axial dispersion output. The point optical spectrum receiving end comprises an optical fiber coupler, and the optical fiber coupler is an optical device for realizing distribution or combination of optical signal power among different optical fibers. The optical fiber coupler is connected with the spectrum analyzer, and the spectrum analyzer is connected with the PC end. The point spectrum is a device for obtaining distance information by establishing a corresponding relation between distance and wavelength through an optical dispersion principle and decoding spectrum information by utilizing a spectrometer. The point spectrum emission end 8 is a beam of white light (or multi-wavelength mixed light) which passes through a small hole, focuses different wavelengths on an optical axis through a lens, dispersedly forms a rainbow-shaped distribution belt, irradiates the sample 10, and reflects part of reflected light back; light which does not irradiate at the intersection point of the optical axis and the surface of the object passes through the light splitting component, irradiates around the other small hole and is blocked, cannot irradiate to the spectrum analyzer, and does not interfere detection; the light irradiated on the intersection point of the optical axis and the object surface passes through the light-splitting member and is irradiated to the spectrum analyzer through the aperture. And obtaining the distance from the lens to the measured object according to the wavelength calculation.
The spectrum emission end 8 in the detection process irradiates from multiple parties, detects coaxially and returns a small amount of light. When the sample to be detected is in a relatively large bending or tilting angle, the detection can be completed only by returning a small part of light, and the model or the installation angle of the point spectrum transmitting end and the receiving end does not need to be changed. For a film made of semitransparent materials and glass to wait for detecting a sample, light around a light spot is blocked by a small hole and cannot return to a spectrometer, so that detection cannot be influenced. The transparent surface of the sample to be tested also reflects a portion of the light and is thus detectable, even in multiple layers. In the range, the light of the effective wavelength is always in the focus, the light spot is tiny, and the resolution and the precision can be maintained in the whole range.
The distance measuring unit is connected with a spectrum analyzer, and the spectrum analyzer is connected with a PC end 12. The spectral data obtained by scanning the sample surface through the point spectral transmitting end 8 is received and analyzed by the spectral analyzer, the obtained distance value is sent to the PC end 12, the PC end 12 controls the motion control unit 13 to act through the information, the distance between the sample surface and the objective lens is adjusted, and finally high-speed accurate focusing of the objective lens is realized. After accurate focusing, the scanning of the sample image information can be controlled by the PC end 12, so that the high-resolution image information can be simply, conveniently, quickly and efficiently obtained.
The autofocus specific steps of the autofocus detection system of the present utility model are shown in fig. 6, comprising:
1) Placing a sample in a sample chamber of a scanning electron microscope;
2) Setting imaging parameters of a scanning/transmission electron microscope;
3) Starting an automatic focusing unit, collecting height information of a sample focusing position, and uploading the height information to an information processing unit, namely a PC end;
4) The information processing unit sends the processed information instruction to the motion control unit, and the motion control unit drives the sample stage to move after receiving the information instruction;
5) And stopping the sample stage after reaching the instruction position, and continuously imaging the sample by the scanning electron microscope.
The above description is provided in detail for an autofocus detection system and method according to an embodiment of the present utility model. The above description of embodiments is only for aiding in the understanding of the method of the present utility model and its core ideas; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in accordance with the ideas of the present utility model, the present description should not be construed as limiting the present utility model in view of the above.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a product or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such product or system. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a commodity or system comprising such elements. By "substantially" is meant that within an acceptable error range, a person skilled in the art is able to solve the technical problem within a certain error range, substantially achieving the technical effect.
The terminology used in the embodiments of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used in this application and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. In the present utility model, the terms "upper", "lower", "left", "right", "inner", "outer", "middle", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings. In addition to the above terms may be used to denote orientation or positional relationships, other meanings may be used, such as the term "upper" may also be used in some cases to denote some sort of attachment or connection. The specific meaning of these terms in the present utility model will be understood by those of ordinary skill in the art according to the specific circumstances. The term "and/or" as used herein is merely one association relationship describing the associated object, meaning that there may be three relationships, e.g., a and/or B, may represent: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.
Claims (10)
1. An autofocus detection system comprising an electron source for generating a laser beam, an electron acceleration electrode, an objective lens, a ranging unit, a PC side, a motion control unit, and a sample stage;
the electron source, the electron accelerating electrode, the objective lens and the sample stage are sequentially arranged from top to bottom; the motion control unit is arranged below the sample table and is connected with the sample table;
the distance measuring unit is fixedly arranged at the lower part of the objective lens;
the distance measuring unit and the motion control unit are connected with the PC end.
2. The autofocus detection system of claim 1, wherein the ranging unit comprises a point spectrum transmitting end, a point spectrum receiving end, and a spectrum analyzer;
the point spectrum transmitting end and the point spectrum receiving end are both fixedly arranged on the inner end face of the outer shell at the bottom of the objective lens and are in an extending state along the direction of the outer shell;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
3. The autofocus detection system of claim 1, wherein the ranging unit comprises a point spectrum transmitting end, a point spectrum receiving end, a total reflection mirror, and a spectrum analyzer;
the point spectrum transmitting end, the point spectrum receiving end and the total reflection mirror are fixedly arranged on the lower surface of the outer shell at the bottom of the objective lens and are close to the outer side of the objective lens; the point spectrum transmitting end and the point spectrum receiving end are arranged on the same side and are opposite to the total reflection mirror;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table, the total reflection mirror and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
4. The autofocus detection system of claim 1, wherein the ranging unit comprises a point spectrum transmitting end, a point spectrum receiving end, and a spectrum analyzer;
the point spectrum transmitting end and the point spectrum receiving end are fixedly arranged on the lower surface of the outer shell at the bottom of the objective lens and are close to the outer side of the objective lens;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
5. The autofocus detection system of claim 1, wherein the ranging unit comprises a point spectrum transmitting end, a point spectrum receiving end, and a spectrum analyzer;
the point spectrum transmitting end and the point spectrum receiving end are both fixedly arranged in a detection port of the objective lens;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
6. The autofocus detection system of claim 1, wherein the ranging unit comprises a point spectrum transmitting end, a point spectrum receiving end, and a spectrum analyzer;
the point spectrum transmitting end and the point spectrum receiving end are fixedly arranged on the side wall of the inner shell of the objective lens, which is close to one side of the laser beam, and are close to the bottom end of the objective lens;
the point spectrum transmitting end, the upper surface of the sample to be detected fixedly arranged on the sample table and the point spectrum receiving end are sequentially and optically connected; the point spectrum receiving end, the spectrum analyzer and the PC end are sequentially connected.
7. The autofocus detection system of claim 1, further comprising a condenser lens disposed between the electron accelerating electrode and the objective lens.
8. The autofocus detection system of claim 1, wherein said system further comprises an SE detector and a deflection coil;
the SE detector and the deflection coil are both arranged on the inner side of the inner annular wall of the objective lens, the SE detector is close to the top of the inner annular wall, and the deflection coil is close to the bottom of the inner annular wall.
9. The autofocus detection system of claim 8, wherein the deflection coil is disposed at a height that is higher than the ranging unit.
10. The autofocus detection system of any one of claims 2-6, wherein said point spectrum emission end comprises a visible light source and a color coded sensing head that produces axial dispersion of the visible light; the point spectrum receiving end is an optical fiber coupler.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320641699.4U CN219997114U (en) | 2023-03-28 | 2023-03-28 | Automatic focusing detection system |
| PCT/CN2023/096654 WO2024198067A1 (en) | 2023-03-28 | 2023-05-26 | Autofocus inspection system and method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202320641699.4U CN219997114U (en) | 2023-03-28 | 2023-03-28 | Automatic focusing detection system |
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| CN219997114U true CN219997114U (en) | 2023-11-10 |
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