CN112946673B - Laser ranging method, focusing method, laser ranging system and focusing system - Google Patents
Laser ranging method, focusing method, laser ranging system and focusing system Download PDFInfo
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- CN112946673B CN112946673B CN202110127353.8A CN202110127353A CN112946673B CN 112946673 B CN112946673 B CN 112946673B CN 202110127353 A CN202110127353 A CN 202110127353A CN 112946673 B CN112946673 B CN 112946673B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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Abstract
The invention relates to the field of distance measurement, and discloses a laser distance measurement method, a focusing method, a laser distance measurement system and a focusing system, which comprise the following steps: transmitting an incident light ray alpha with an incident angle delta to the reflector, wherein the incident light ray alpha is reflected by the reflector to generate a first reflected light ray beta, and the first reflected light ray beta irradiates an object to be measured; a second reflected light ray theta is captured and generates a laser image on a laser imaging surface, and the second reflected light ray theta is a return light ray gamma generated after the first reflected light ray beta irradiates the surface of the object to be detected and is generated by reflection of a reflector; the measurement distance a is calculated according to the geometric trigonometric theorem based on the laser image. The height of the base of a triangle formed by taking the connecting line L of the emission point of the incident light ray alpha and the receiving point of the second reflected light ray theta as the base and the intersection angle of the incident light ray alpha and the extension line of the second reflected light ray theta as the vertex angle is equal to the measurement distance A. The laser light path is changed through the reflector, the distance measurement is not affected, the laser distance measurement device is suitable for indirect distance measurement in narrow space, the precision is high, and the consumed time is short.
Description
Technical Field
The invention relates to the technical field of distance measurement, in particular to a laser distance measurement method, a focusing method, a laser distance measurement system and a focusing system.
Background
Laser distance measuring (laser distance measuring) measures distance using a laser as a light source. Because of its flexibility, high efficiency and high precision, it has wide application in the field of measurement.
According to different principles, laser ranging can be mainly divided into pulse laser ranging, phase laser ranging, interference laser ranging, feedback laser ranging and triangulation laser ranging.
The pulse method laser ranging method comprises the steps that the space propagation time of a transmitted pulse signal and a received target reflection signal is utilized to determine the target distance; phase laser ranging detects a distance by detecting a phase difference occurring when emitted light and reflected light propagate in a space; the laser ranging method by the interference method is a method for carrying out precise measurement by using the interference principle of light by taking laser as a light source and taking laser wavelength or laser frequency as a reference; the feedback method laser ranging adopts the technology of mutual conversion of distance and transmission time, transmission time and oscillation frequency to measure the laser transmission time, thereby achieving the purpose of laser ranging.
The triangulation laser ranging method is characterized in that light rays emitted by a laser device are focused by a converging lens and then enter the surface of an object to be measured, a receiving lens receives return light rays from an incident light point and images the return light rays on a sensitive surface of a photoelectric position detector, and when the object moves, the relative distance of the object moving is calculated through displacement of a light spot on an imaging surface.
As shown in table 1, table 1 is a comparison table of the range and accuracy of various laser ranging methods.
TABLE 1 ranging Range and accuracy comparison Table for various laser ranging methods
| Distance measuring method | Range of measurement | Accuracy of range finding |
| Pulse method laser ranging | Hundreds of meters to thousands of kilometers | Meter-scale meter |
| Phase type laser ranging | Several meters to several kilometers | Millimeter level |
| Laser ranging by interferometry | Centimeter level | Micron scale |
| Laser ranging by feedback method | Several meters to several centimeters | Centimeter level |
| Trigonometry laser ranging | Millimeter level | Micron-scale |
Among a plurality of laser ranging methods, the triangulation laser ranging method is widely applied to focusing of most of microscopic instrument and equipment due to high ranging precision, short ranging time and suitability for short-distance testing. However, in the triangular laser ranging, light is focused by a converging lens and then directly enters the surface of an object to be measured, a receiving lens receives return light from an incident light point and images the return light on a sensitive surface of a photoelectric position detector, when the object moves, the relative moving distance of the object can be calculated through the displacement of a light spot on the imaging surface, and the distance between the object to be measured and the triangular laser ranging is calculated by directly emitting laser to the surface of the object to be measured according to the similar distance of a triangle; in practical application, due to the limitation of narrow installation environment or arrangement position, the triangular laser measurer cannot be arranged, so that the triangular laser measurer cannot directly emit laser to the surface of an object, and the use of the triangulation laser ranging is limited. And the other laser ranging method is generally adopted, but the ranging precision is greatly reduced, and the testing speed is difficult to ensure.
Disclosure of Invention
The invention aims to provide a laser ranging method which is high in testing precision, short in time consumption and suitable for indirect ranging in a narrow space.
In order to achieve the purpose, the invention adopts the following technical scheme:
a laser ranging method comprises the following steps:
emitting an incident light ray alpha with an incident angle delta to a reflecting surface of a reflector, wherein the incident light ray alpha is reflected by the reflector to generate a first reflected light ray beta, and the first reflected light ray beta irradiates an object to be measured;
a second reflected light ray theta is shot and generates a laser image on a laser imaging surface, wherein the second reflected light ray theta is a return light ray gamma generated after the first reflected light ray beta irradiates the surface of the object to be detected and is generated by reflection of the reflecting surface of the reflector; and
calculating according to a geometric trigonometric theorem based on the laser image to obtain a measurement distance A;
the height of the base of a triangle formed by taking a connecting line L of the emission point of the incident light ray alpha and the receiving point of the second reflected light ray theta as a base and the intersection angle of the incident light ray alpha and the extension line of the second reflected light ray theta as a vertex angle is equal to the measurement distance A.
Optionally, an included angle epsilon between a connecting line L between the emitting point of the incident light ray α and the receiving point of the second reflected light ray θ and the incident light ray α is a known constant, and an included angle between the connecting line L and the second reflected light ray θ is ζ;
ζ = arcsin (X/(X) 2 +Y 2 ) 1/2 )；
X represents the distance between the receiving point and the laser imaging surface;
and Y represents the distance between a perpendicular line which passes through the receiving point and is perpendicular to the laser imaging surface and the laser image generated on the laser imaging surface by the second reflected light ray theta.
Optionally, the object to be measured is a transparent slide, the transparent slide comprises an upper surface and a lower surface, and the thickness of the transparent slide is equal to the measurement distance a corresponding to the upper surface u And a measured distance A corresponding to the lower surface l The difference of (a).
Optionally, the flatness of the transparent slide is determined based on the thickness of the transparent slide at different locations.
Another objective of the present invention is to provide a focusing method, which has high precision of focusing distance measurement and short time consumption, and the laser distance measurement method adopted by the present invention makes the arrangement of the triangulation laser distance measurement related device more flexible through the reflector, and can be applied to indirect distance measurement in a narrow space to assist in completing the focusing of the objective lens.
In order to achieve the purpose, the invention adopts the following technical scheme:
a focusing method based on the laser ranging method comprises the following steps:
determining a target object distance C 0 ；
Determining a measurement distance A; wherein the reflector is arranged between the objective lens and an object to be measured;
obtaining a first distance C between the objective lens and the reflector along the axial direction 1 And based on the measured distance A, obtaining a second distance C between the reflector and the object to be measured along the axial direction of the objective lens according to a distance conversion formula 2 ；
Calculating to obtain the actual distance C between the object to be measured and the objective lens;
adjusting and making the actual distance C between the objective lens and the object to be measured equal to the target object distance C 0 。
Optionally, the object to be measured includes a sample, and when the first reflected light β is directly irradiated onto the sample surface, the actual distance C = C between the object to be measured and the objective lens 1 +C 2 The distance conversion formula is as follows:
A＝D+C 2 ；
the first reflected light ray beta and the return light ray gamma are coaxial or parallel to the axis of the objective lens relative to the normal of the object to be measured, D represents the distance from the intersection point of the height of the base of the triangle formed by using the connecting line L of the emission point of the incident light ray alpha and the receiving point of the second reflected light ray theta as the base angle and the intersection angle of the extension lines of the incident light ray alpha and the second reflected light ray theta as the vertex angle to the base edge.
Optionally, the object to be measured includes a sample and a transparent slide, and when the first reflected light β is irradiated onto the surface of the sample through the transparent slide, the actual distance C = C between the object to be measured and the objective lens 1 +C 2 +C 3 The distance conversion formula is as follows:
A＝D+C 2 ；
wherein the first reflected light ray beta and the return light ray gamma are coaxial or parallel to the axis of the objective lens relative to the normal of the object to be measured, C 3 Being transparent slidesAnd D represents the distance from the intersection point of the height of the bottom side of the triangle formed by taking the connecting line L of the emission point of the incident ray alpha and the receiving point of the second reflected ray theta as the bottom side and the intersection angle of the incident ray alpha and the extension line of the second reflected ray theta as the vertex angle to the bottom side, wherein the height of the bottom side of the triangle is intersected with the reflector.
Still another object of the present invention is to provide a laser ranging system, which has high measurement accuracy and short time consumption, and can be applied to indirect ranging in a narrow space.
In order to achieve the purpose, the invention adopts the following technical scheme:
a laser ranging system employing the laser ranging method as described above, comprising:
a mirror;
the laser emission mechanism is used for emitting incident light rays alpha with an incident angle delta to the reflection surface of the reflector, the incident light rays alpha are reflected to generate first reflection light rays beta, and the first reflection light rays beta irradiate the surface of the object to be measured to generate return light rays gamma;
a laser receiving mechanism for receiving a second reflected light ray θ generated by reflection of the return light ray γ by the reflection surface and generating a laser image;
and the calculation module is used for calculating and obtaining the measurement distance A according to a geometric trigonometric theorem based on the laser image.
Optionally, the laser receiving mechanism includes:
a laser imaging surface parallel to a connecting line L of the emission point of the incident ray alpha and the receiving point of the second reflected ray theta;
the receiving lens is used for receiving the second reflected light ray theta and projecting the second reflected light ray theta to the laser imaging surface, the included angle between the second reflected light ray theta and the laser imaging surface is zeta, and the included angle epsilon between the connecting line L of the emitting point of the incident light ray alpha and the receiving point of the second reflected light ray theta and the incident light ray alpha is a known constant;
ζ = arcsin (X/(X) 2 +Y 2 ) 1/2 )；
X represents the distance between the receiving point and the laser imaging surface;
and Y represents the distance between a perpendicular line which passes through the receiving point and is perpendicular to the laser imaging surface and the generated laser image of the second reflected light ray theta on the laser imaging surface.
The invention further aims to provide a focusing system which has high focusing distance measurement testing precision and short time consumption, adopts a laser distance measurement method to enable the arrangement of a triangulation laser distance measurement related device to be more flexible through a reflector, and can be suitable for indirect distance measurement in a narrow space to assist in completing the focusing of an objective lens.
In order to achieve the purpose, the invention adopts the following technical scheme:
a focusing system, which adopts the focusing method as described above, includes the laser ranging system as described above, and further includes:
a focus displacement mechanism;
the objective lens is arranged on the focusing displacement mechanism, and the focusing displacement mechanism can enable the objective lens to move relative to the object to be measured along the axis direction so as to realize automatic focusing.
Optionally, the mirror is a half mirror.
Optionally, the first reflected light ray β and the return light ray γ are coaxial with an axis of the objective lens with respect to a normal of the object to be measured.
Optionally, the reflector is disposed at an avoidance position on one side of the objective lens close to the object to be measured, so as to avoid the objective lens, and the focusing system further includes:
the object to be detected is placed on the carrying platform;
the stage driving mechanism can drive the stage to move so that an object to be measured on the stage can selectively move to a distance measuring station or an observation station, the distance measuring station faces the reflector along the axial direction of the objective lens, the observation station faces the objective lens, and the distance measuring station and the observation station are both positioned in a plane perpendicular to the axis of the objective lens;
when the object to be measured is located at the distance measuring station, the focusing system can measure and acquire the measuring distance A, when the object to be measured is located at the observation station, the focusing system can automatically focus, or when the object to be measured is located at the observation station, the measuring distance A is acquired, and the focusing system can automatically focus.
Optionally, the method further comprises:
a control module electrically connected to the laser emitting mechanism, the laser receiving mechanism, the focus displacement mechanism and the calculating module, and configured to obtain the target object distance C 0 Measuring the distance A, and calculating to obtain the actual distance C between the object to be measured and the objective lens so as to control the movement of the focusing displacement mechanism, so that the actual distance C between the objective lens and the object to be measured is equal to the target object distance C 0 。
Optionally, the reflecting mirror is inclined at 45 degrees from the horizontal plane, and the incident light ray α is located in the horizontal plane.
Optionally, the thickness of the reflector is 650nm, and the wavelength of the incident light ray α is 655nm.
Optionally, the method further comprises:
the tube lens is coaxially arranged on one side of the objective lens, which is far away from the reflector;
the camera is arranged at one end, far away from the objective lens, of the tube lens and used for shooting an object to be detected through the objective lens and the tube lens.
Optionally, the method further comprises:
a bright field light source for generating bright field light.
Optionally, the object to be measured includes a sample and a transparent slide, the sample is carried on the transparent slide, and the focusing system further includes:
the microscope carrier is arranged on the transparent slide glass, a light transmission hole is formed in the microscope carrier, the first reflected light ray beta can penetrate through the light transmission hole, irradiates the lower surface of the transparent slide glass, and is reflected by the lower surface of the transparent slide glass to generate the return light ray gamma.
Optionally, the object to be measured includes a sample and a transparent slide, the sample is carried on the transparent slide, and the focusing system further includes:
and the first reflected light ray beta is directly irradiated on the upper surface of the sample and is reflected by the upper surface of the sample to generate the return light ray gamma.
The invention has the beneficial effects that:
compared with the existing triangulation laser ranging method, the laser ranging method does not directly emit laser to the surface of the object to be measured, but generates incident light rays alpha through reflection of the reflecting mirror, so that the first reflected light rays beta irradiate the object to be measured, the received second reflected light rays theta are generated by reflecting the return light rays gamma generated after the first reflected light rays beta irradiate the surface of the object to be measured through the reflecting surface of the reflecting mirror, the mirror imaging principle and the geometric trigonometric theorem are ingeniously utilized to realize indirect ranging of the object to be measured, and the measured distance A obtained according to the geometric trigonometric theorem actually takes the connecting line L of the emission point of the incident light rays alpha and the receiving point of the second reflected light rays theta as the bottom side and takes the intersection angle of the incident light rays alpha and the extension line of the second reflected light rays theta as the top angle, so that the height of the bottom side of the triangle is formed. Its advantage lies in that the measuring accuracy is high, weak point consuming time, makes the relevant device of triangle range finding arrange more in a flexible way through the speculum, can be applicable to the indirect range finding in narrow and small space.
Compared with the existing triangulation laser ranging system, the laser emitting mechanism of the laser ranging system emits the incident light alpha with the incident angle delta to the reflecting surface of the reflector, the incident light alpha is reflected to generate the first reflected light beta, and the first reflected light beta irradiates the surface of the object to be measured to generate the return light gamma; the laser receiving mechanism receives a second reflected light ray theta generated by reflecting the return light ray gamma by the reflecting surface and generates a laser image; the calculation module calculates and obtains the measurement distance A according to the geometric trigonometric theorem based on the laser image.
According to the invention, the reflector is additionally arranged, so that the incident light alpha is reflected by the reflector to irradiate the surface of the object to be measured, and the return light gamma is reflected by the reflector to be captured by the laser receiving mechanism, thereby realizing the bending change of the laser light path and enabling the position arrangement of the laser emitting mechanism and the laser receiving mechanism to be more flexible. According to the mirror imaging and reflection principle, although the laser light path is bent and changed, the distance measurement according to the geometric triangle theorem is not influenced, the distance measurement calculation can still be carried out in a manner similar to the geometric triangle, the test precision is high, the consumed time is short, the triangular distance measurement arrangement is more flexible through the reflector, and the laser distance measurement device can be suitable for indirect distance measurement in narrow space.
Compared with the existing focusing method, the focusing method is provided based on the laser ranging method, and the target object distance C is firstly determined 0 (ii) a Then, determining a measurement distance A based on the laser ranging method; wherein the reflector is arranged between the objective lens and the object to be measured; then, a first distance C between the objective lens and the reflector along the axial direction is obtained 1 And based on the measured distance A, obtaining a second distance C between the reflector and the object to be measured along the axial direction of the objective lens 2 (ii) a Further, calculating to obtain the actual distance C between the object to be measured and the objective lens; finally, the actual distance C between the objective lens and the object to be measured can be adjusted to be equal to the target object distance C 0 . Finally, the laser ranging method realizes real-time calculation and obtaining of the actual distance C in the focusing process, effectively assists in realizing real-time focusing adjustment of the objective lens, has high testing precision and short time consumption, enables the arrangement of the related devices of the triangular laser ranging to be more flexible through the reflector, and can be suitable for indirect ranging in narrow space.
The focusing system provided by the invention has high test precision and short time consumption, and the laser ranging method adopted by the focusing system enables the arrangement of the triangulation laser ranging to be more flexible through the reflector, and can be suitable for indirect ranging in a narrow space.
Drawings
FIG. 1 is a schematic perspective view of a laser ranging method according to the present invention;
FIG. 2 is a second perspective view illustrating a distance measurement method according to the present invention;
FIG. 3 is a schematic structural diagram of a focusing system provided in the present invention;
FIG. 4 is a schematic diagram illustrating the distance relationship of the focusing system according to the present invention during automatic focusing;
FIG. 5 is a schematic diagram of a circuit relationship of a focusing system provided in the present invention;
FIG. 6 is a schematic structural diagram of another embodiment of a focusing system provided in the present invention;
FIG. 7 is a schematic diagram illustrating the distance relationship of the focusing system in FIG. 6 during auto-focusing;
fig. 8 is a schematic structural diagram of a focusing system according to still another embodiment of the present invention, wherein an object to be measured horizontally moves to a distance measuring station.
In the figure:
100. an object to be measured; o, normal;
1. a mirror; 2. a laser emitting mechanism; 3. a laser receiving mechanism; 31. a laser imaging plane; 32. a receiving lens; 4. a focus displacement mechanism; 5. an objective lens; 6. a tube mirror; 7. a camera; 8. a bright field light source; 9. a laser range finder; 10. a calculation module; 11. a control module; 12. carrying platform; 13. and a stage driving mechanism.
Detailed Description
In order to make the technical problems solved, the technical solutions adopted and the technical effects achieved by the present invention clearer, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings.
In the description of the present invention, unless otherwise explicitly specified or limited, the terms "connected," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used based on the orientations and positional relationships shown in the drawings only for convenience of description and simplification of operation, and do not indicate or imply that the referred device or element must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to be limiting.
As shown in fig. 1 to 4, the present embodiment provides a laser ranging method, which can implement bending change of a laser light path without affecting distance measurement, has high distance measurement accuracy and short time consumption, can be applied to indirect ranging in a narrow space, can assist in implementing objective focusing in a focusing method, and is particularly applicable to real-time indirect measurement of an object distance when objective focusing is performed in a microscopic device. Meanwhile, a focusing method based on the laser ranging method, a laser ranging system adopting the laser ranging method and a focusing system adopting the focusing method and comprising the laser ranging system are also provided.
As shown in fig. 1 to 5, in the present embodiment, the laser ranging system includes a reflector 1, a laser emitting mechanism 2, a laser receiving mechanism 3, and a computing module 10. In this embodiment, the laser emitting mechanism 2 and the laser receiving mechanism 3 both belong to the internal structure of the laser range finder 9 based on the triangular laser ranging principle, and the laser range finder 9 is the existing threeAn angular laser ranging device. In the laser ranging system, a laser emitting mechanism 2 is used for emitting an incident light ray α with an incident angle δ to a reflecting surface of a reflector 1, the incident light ray α is reflected to generate a first reflected light ray β, and the first reflected light ray β irradiates the surface of an object 100 to be measured to generate a return light ray γ; the laser receiving mechanism 3 is configured to receive a second reflected light ray θ generated by reflecting the return light ray γ by the reflecting surface, and generate a laser image; more specifically, as shown in fig. 1-2, in the present embodiment, the laser light receiving mechanism 3 includes a laser light imaging surface 31 and a receiving lens 32. The laser imaging surface 31 is parallel to a connecting line L between the emission point of the incident light ray α and the receiving point of the second reflected light ray θ. The receiving lens 32 is configured to receive the second reflected light θ and project the second reflected light θ to the laser imaging surface 31, where an included angle ζ between the second reflected light θ and the laser imaging surface 31; an included angle epsilon between a connecting line L of the emitting point of the incident ray alpha and the receiving point of the second reflected ray theta and the incident ray alpha is a known constant; wherein, ζ = arcsin (X/(X)) 2 +Y 2 ) 1/2 ). The calculation module 10 is configured to calculate and obtain the measurement distance a according to the geometric trigonometric theorem based on the laser image. Specifically, in order to further understand the calculation process, in the present embodiment, the formula for calculating the measurement distance a for the laser distance meter 9 is:
A＝B/2*X/Y；
wherein, the height of the base of a triangle formed by taking a connecting line L of the emitting point of the incident light ray alpha and the receiving point of the second reflected light ray theta as the base and the intersection angle of the incident light ray alpha and the extension line of the second reflected light ray theta as the vertex angle is equal to the measuring distance A;
b represents a distance between an emission point of the incident light ray α and a reception point of the second reflected light ray θ; specifically, in the present embodiment, as shown in fig. 1-2, a triangle formed by connecting the emission point of the laser emission mechanism 2 (i.e., the emission point of the incident light ray α), the receiving point of the laser receiving mechanism 3 (i.e., the receiving point of the second reflected light ray θ), and the mirror symmetry imaging point of the object 100 to be measured in the reflector 1 (i.e., the vertex of the vertex angle of the extension line of the incident light ray α and the second reflected light ray θ, which is not marked in the figure) is an isosceles triangle; wherein, the length of a connecting line L between the emitting point of the laser emitting mechanism 2 and the receiving point of the laser receiving mechanism 3 is B.
X represents the distance between the receiving point and the laser imaging surface 31;
y represents a distance between a perpendicular line passing through the reception point and perpendicular to the laser imaging surface 31 and the laser image generated on the laser imaging surface 31 by the second reflected light ray θ; therefore, on the premise that the triangle is an isosceles triangle, a = B/2 × x/Y.
Further, for the convenience of understanding, it should be noted that, in the present embodiment, the laser imaging surface 31 is parallel to the connecting line L between the emitting point of the incident light ray α and the receiving point of the second reflected light ray θ; meanwhile, the reflection of the incident ray α on the mirror 1, the reflection of the first reflected ray β on the object 100 to be measured to generate the return ray γ, and the reflection of the return ray γ by the mirror 1 to generate the second reflected ray θ all follow the principle of specular reflection of light (i.e., the incident angle is equal to the reflection angle). Therefore, the mirror symmetry imaging point of the object 100 to be measured in the reflector 1 and the point of the first reflected light β irradiated on the object 100 to be measured are in mirror symmetry imaging relation with respect to the reflector 1. The emitting point of the incident light ray alpha, the receiving point of the second reflected light ray theta and the crossed intersection point of the incident light ray alpha and the extension line of the second reflected light ray theta are sequentially connected to form an isosceles triangle, and the base side of the isosceles triangle is a connecting line L between the emitting point of the incident light ray alpha and the receiving point of the second reflected light ray theta; the length of the bottom side is equal to the sum of the distance from the reflection point of the first reflected light ray β on the object 100 to the mirror 1 along the normal direction of the first reflected light ray β and the return light ray γ with respect to the object 100 to be measured and the distance from the intersection of the normal and the mirror 1 to the midpoint of the connecting line L. The height of the base of the isosceles triangle divides the isosceles triangle into two right triangles, and a triangle formed by the receiving point, the intersection point where the passing point is perpendicular to the laser imaging surface 31, and the intersection point where the second reflected light ray theta passes the receiving point and is directly incident on the laser imaging surface 31 follows the geometric triangle theorem with the triangle.
Therefore, when the distance between the receiving point and the laser imaging surface 31 (i.e., X), the distance between the perpendicular line that passes through the receiving point and is perpendicular to the laser imaging surface 31 and the generated laser image of the second reflected light ray θ on the laser imaging surface 31 (i.e., Y), and the length of the connecting line L between the emitting point of the laser emitting mechanism 2 and the receiving point of the laser receiving mechanism 3 (i.e., B) are known, the measured distance a calculated according to the geometric trigonometric theorem, i.e., a = B/2X/Y; and then according to different range finding demands, can be with measuring distance A in the middle of the actual range finding scene.
In the present embodiment, the triangle is an isosceles triangle, and the reflection of the incident light ray α on the mirror 1, the reflection of the first reflected light ray β on the object 100 to be measured to generate the return light ray γ, and the reflection of the return light ray γ on the mirror 1 to generate the second reflected light ray θ all follow the principle of specular reflection of light (i.e., the incident angle is equal to the reflection angle). In other embodiments, the triangle may not be an isosceles triangle, and the return ray γ may also be a diffuse reflection ray of the first reflected ray β, i.e. the incident angle is not equal to the reflection angle. At this time, the measurement distance a can still be calculated according to the geometric trigonometric theorem, and the specific calculation formula is a conventional calculation formula, so that the detailed description is omitted.
In addition, according to the geometric trigonometric theorem, as described above, when it is known that the angle between the second reflected light beam θ and the laser imaging surface 31 is ζ, the angle ∈ between the line L connecting the emitting point of the incident light beam α and the receiving point of the second reflected light beam θ and the incident light beam α, and the length B between the emitting point of the laser emitting mechanism 2 and the receiving point of the laser receiving mechanism 3 are both known, the measurement distance a may also be obtained according to the geometric trigonometric theorem, and further, it is not necessary to calculate using a = B/2 × x/Y in this embodiment, and the calculation process is a routine calculation, and thus, it is not described again.
The laser ranging system and the laser ranging method of the embodiment adopt the reflector 1 to reflect the incident light ray alpha to the surface of the object 100 to be measured through the reflector 1, and reflect the return light ray gamma through the reflector 1 to be captured by the laser receiving mechanism 3, so that the bending change of the laser light path is realized, and the position arrangement of the laser emitting mechanism 2 and the laser receiving mechanism 3 is more flexible. According to the mirror imaging and reflection principle, although the laser light path is bent and changed, the distance measurement through the geometric triangle theorem is not influenced, the indirect distance measurement calculation can still be carried out through the geometric triangle theorem, the test precision is high, the consumed time is short, the laser distance measurement device can be suitable for the indirect distance measurement in narrow and small space, and the laser distance measurement device has wide application prospect.
The embodiment also provides a method and a system for measuring the thickness of the transparent slide based on the laser ranging method of the embodiment. The transparent slide comprises an upper surface and a lower surface, both of which respectively reflect the first reflected light ray β, so as to form two light spots on the laser imaging surface 31. The triangular laser range finder 9 can obtain the measured distances a corresponding to the upper surface based on the two light spots respectively u And a measured distance A corresponding to the lower surface l . The thickness of the transparent slide is equal to the measured distance A corresponding to the upper surface u And a measured distance A corresponding to the lower surface l The difference of (a). Further, the thickness of the transparent slide at different positions can be measured, and the flatness of the transparent slide can be further judged. By applying the method or the system, the transparent slide with better flatness can be screened for microscopic observation of the sample, and the quality of a microscopic image is improved.
Meanwhile, the embodiment also provides a focusing method based on the laser ranging method and a corresponding focusing system. As shown in fig. 1 to 5, in the present embodiment, the laser ranging method based on the focusing method of the present embodiment includes the following steps:
first, a target object distance C is determined 0 Object distance C 0 Is the focal length of the objective lens 5; as shown in fig. 3 to 5 in particular, the objective lens 5 is arranged directly below the object 100 to be measured in the vertical direction.
Then, determining a measurement distance A; the reflector 1 is arranged between the objective lens 5 and the object 100 to be measured, and is opposite to the objective lens 5 along the axial direction of the objective lens 5; the calculation method of the measurement distance a is as described in the above laser ranging method, and is not described herein again.
Then, a first distance C of the objective lens 5 from the reflector 1 in the axial direction is obtained 1 And based on the measured distance A, the axis of the reflector 1 along the objective lens 5 is obtained according to a distance conversion formulaTo a second distance C from the object 100 to be measured 2 ；
The first distance C is 1 Is a value that can be obtained from the actual position of the objective lens 5; the specific mode is that the moving distance of the objective lens 5 along the vertical direction can be measured and calculated through a grating ruler, and when the objective lens 5 is calibrated to be located at the initial position, the distance from the objective lens 5 to the reflector 1 along the axial direction of the objective lens 5 is an initial known measured value, so that the current distance between the objective lens 5 and the reflector 1 can be calculated according to the actual position of the objective lens 5 and the data of the grating ruler and the initial known measured value, namely the first distance C is obtained 1 。
Further, the actual distance C between the object 100 and the objective lens 5 can be calculated. Specifically, as shown in fig. 3 to 5, in the focusing method in the present embodiment, the object to be measured 100 includes a sample (not shown in the drawings, the sample may be an object to be measured such as a biological cell) and a transparent slide (not shown in the drawings). The first reflected light beam beta is transmitted through the transparent slide to irradiate the surface of the sample. Since the transparent slide has an upper surface and a lower surface, the two surfaces can respectively reflect the first reflected light β, and then two light spots can be formed on the laser imaging surface 31. However, the imaging light spot on the laser imaging surface 31 of the laser range finder 9 after the reflection of the upper surface of the transparent slide is weaker, and the calculation error of the imaging light spot is larger than that of the light spot formed by the lower surface. Therefore, in order to measure more accurately, in this embodiment, an imaging spot on the laser imaging surface 31 of the laser range finder 9 after being reflected by the lower surface of the transparent slide is used (in practical applications, a spot formed by the upper surface can also be used for calculation, and the error is within an allowable range). Thus, in this embodiment, C = C 1 +C 2 +C 3 ，C 3 A known thickness of a transparent slide;
finally, the actual distance C between the objective 5 and the object 100 can be adjusted to be equal to the target distance C 0 。
More specifically, as shown in fig. 1 to 4, in the present embodiment, the distance conversion formula is: a = D + C 2 ；
Wherein D is a constant, and D represents a distance from an intersection point formed by the intersection of the height of the base of the triangle formed by using the connecting line L of the emission point of the incident light ray α and the reception point of the second reflected light ray θ as the base and the intersection angle of the extension line of the incident light ray α and the second reflected light ray θ as the vertex angle, and the reflector 1, and the measured distance a is a value directly measured by the laser range finder 9.
When the measurement distance a is determined by the laser range finder system, since the positional relationship between the laser range finder 9 and the reflecting mirror 1 is fixed, D is also a known measurement constant, and further C can be calculated 2 At C 3 、C 2 And C 1 Under certain conditions, the actual distance C between the objective lens 5 and the object 100 can be directly obtained, so that the actual distance C and C can be obtained 0 Up or down, the position of the objective lens 5 is adjusted finally so that C = C 0 And focusing is realized.
Further, as shown in fig. 3-5, this embodiment further provides a focusing system based on the laser ranging system of this embodiment, and the focusing system performs focusing by using the foregoing focusing method, which is not described in detail again. The focusing system comprises a reflector 1, a laser emitting mechanism 2, a laser receiving mechanism 3 and a calculating module 10, and also comprises a focusing displacement mechanism 4, an objective lens 5, a tube lens 6 and a stage 12, wherein the object 100 to be measured is placed on the stage 12. The objective lens 5 is arranged on the focusing displacement mechanism 4, the objective lens 5 is positioned on one side of the reflector 1 back to the object 100 to be measured, and the focusing displacement mechanism 4 can enable the objective lens 5 to move along the axial direction relative to the object 100 to be measured so as to automatically focus; the tube lens 6 is coaxially arranged on the side of the objective lens 5 far away from the reflector 1. Specifically, the focus displacement mechanism 4 automatically drives the objective lens 5 to focus. The focusing system further comprises a control module 11, the control module 11 is electrically connected with the laser emitting mechanism 2, the laser receiving mechanism 3, the focusing displacement mechanism 4 and the calculating module 10, and the control module 11 is configured to obtain the target object distance C 0 Measuring the distance A, calculating to obtain the actual distance C between the object 100 and the objective lens 5, and controlling the focusing displacement mechanism 4 to move so that the actual distance C between the objective lens 5 and the object 100 is equal to the target object distance C 0 . In particular, it controls the laser of the laser rangefinder 9The emitting mechanism 2 and the laser receiving mechanism 3 calculate the measurement distance a based on the geometric trigonometric theorem according to the laser ranging method and the laser image through the calculation module 10, and accordingly obtain the actual distance C between the surface of the object 100 to be measured and the objective lens 5 through the focusing method, and further control the movement of the focusing displacement mechanism 4 to automatically focus the objective lens 5.
More specifically, taking this embodiment as an illustration, the object distance between the surface of the object 100 to be measured and the objective lens 5 is the actual distance between the objective lens 5 and the surface of the object 100 to be measured, and the focal length of the objective lens 5 (in this embodiment, C is used as the focal length) 0 ) The fixed value is known, so in order to obtain a clear object image, it is only necessary to adjust the object distance between the surface of the object 100 to be measured and the objective lens 5 to be within 1-2 times of the focal distance range of the objective lens 5, which is 1-time focal distance position in this embodiment, that is, the actual distance C is equal to the focal distance. It is contemplated that in other embodiments, the target object distance C 0 It may also be 1-2 times the focal length of the objective lens 5.
Further, as shown in fig. 3 to 5, in the present embodiment, the mirror 1 is a half mirror, the first reflected light ray β and the return light ray γ are coaxial with the axis of the objective lens 5 with respect to the normal of the object 100 to be measured, the mirror 1 is disposed to be inclined at 45 degrees from the horizontal plane, the incident light ray α is located in the horizontal plane, and the incident angle of the incident light ray α is δ (the normal O in the drawing is a line perpendicular to the mirror 1). The reflector 1 is directly designed at a position facing between the objective lens 5 and the object 100 to be measured, and simultaneously the first reflected light ray β and the return light ray γ are kept coaxial with the axis of the objective lens 5 with respect to the normal of the object 100 to be measured, so that the distance from the reflection point of the first reflected light ray β on the object 100 to the reflector 1 along the direction of the first reflected light ray β and the return light ray γ with respect to the normal of the object 100 to be measured can be directly equal to the distance from the reflector 1 to the lower surface of the object 100 to be measured along the direction of the axis of the objective lens 5, that is, C = C is ensured 1 +C 2 +C 3 . It should be noted that the half-transmitting and half-reflecting of the reflector 1 are to ensure that light can pass through the reflector 1, so as to reduce the interference and influence of the reflector 1 on the objective lens 5 as much as possible, ensure sufficient luminous flux, and further ensure that the objective lens 5 can observe and observe the object 1 to be measured00. The present embodiment has the advantage that the reflector 1 is designed at this position, so that the objective lens 5 can be observed and simultaneously, the focusing can be synchronously performed in real time, and the observation efficiency can be greatly improved.
Further, the thickness of the mirror 1 is 650nm, and the wavelength of the incident light α is 655nm. In addition, because the distance measuring principle of the embodiment is realized based on the triangle geometric similarity principle, the reflector 1 can only be placed on one side of the objective lens 5 facing the object 100 to be measured, so as to ensure that the rays emitted by the laser distance measuring system are not interfered by the objective lens 5; for example, if the reflector 1 is disposed between the objective lens 5 and the tube lens 6 and faces the objective lens 5, or faces a side of the tube lens 6 away from the objective lens 5, the radiation emitted by the laser ranging system cannot be used for ranging due to the refraction effect of the lens of the objective lens 5 and the tube lens 6.
As shown in fig. 3-5, in order to more clearly understand the focusing process, the specific focusing process of the embodiment is: in actual microscopic observation, various objects 100 to be measured are sequentially placed on the stage 12 so as to be observed through the objective lens 5. Since the surfaces of various objects 100 to be measured may be uneven and the surfaces of different positions of the same object 100 to be measured may also be uneven, the actual distance C may become larger or smaller without changing the position of the objective lens 5, thereby causing an unclear object image. At this time, the actual distance C is measured at the same time; and when the actual distance C is larger than the target distance C 0 Then, the control module 11 controls the focus displacement mechanism 4 to drive the objective lens 5 to approach the object 100 to be measured until the actual distance C is equal to the target distance C 0 And when the actual distance C is less than the target distance C 0 In the meantime, the control module 11 controls the focus displacement mechanism 4 to drive the objective lens 5 to be far away from the object 100 to be measured until the actual distance C is equal to the target object distance C 0 And further, clear object images can be always obtained.
Further, as shown in fig. 3 to 5, in the present embodiment, the focusing system further includes a camera 7. The camera 7 is arranged at one end, far away from the objective lens 5, of the tube lens 6, the camera 7 is used for shooting the object to be measured 100 through the objective lens 5 and the tube lens 6, and then under the condition that real-time focusing is achieved, the photographing function can be achieved. Specifically, the camera 7 is in control connection with the control module 11, and the control module 11 can brake and start the camera 7 to shoot when confirming that focusing is completed, so that the automation of shooting is realized, the working efficiency is improved, and the manual operation is reduced.
In addition, to ensure sufficient brightness of the visual field. As shown in fig. 3-5, the focusing system further includes a bright field light source 8. In this embodiment, the bright field light source 8 is disposed on one side of the reflector 1 facing the object 100 to be detected, the object 100 to be detected is located between the bright field light source 8 and the reflector 1, and the bright field light source 8 is configured to generate bright field light, so as to implement light supplement. Likewise, the bright field light source 8 is in control connection with the control module 11 to control the bright field light source 8.
In addition, as shown in fig. 3 to 5, in combination with the focusing method, in the embodiment, the object 100 to be measured includes a sample and a transparent slide, the sample is carried on the transparent slide, and the transparent slide is placed on the upper surface of the stage 12. Meanwhile, the microscope stage 12 is provided with a light hole, the first reflected light β can pass through the light hole, irradiate the lower surface of the transparent slide, and is reflected by the lower surface of the transparent slide to generate a return light γ, thereby ensuring that focusing can be performed by the above-mentioned focusing method.
Further, the focusing system further includes a stage driving mechanism 13. The stage drive mechanism 13 is drivingly connected to the stage 12, and the stage drive mechanism 13 can drive the stage 12 to move horizontally. The stage driving mechanism 13 is an existing linear mechanism, and is not described in detail. The stage driving mechanism 13 is in control connection with the control module 11 to control the operation of the stage driving mechanism 13.
In addition, as shown in fig. 6 to 7, in another embodiment based on the focusing system provided in this embodiment, the objective lens 5 may be disposed directly above the object 100 to be measured, the reflector 1 is still disposed between the objective lens 5 and the object 100 to be measured, and other structures are not modified with respect to the objective lens 5. At this time, the first reflected light β is directly irradiated onto the sample surface of the object 100 to be measured, and thus the thickness C of the transparent slide is not considered 3 To (3) is described. Therefore, the actual distance C = C between the object 100 and the objective lens 5 1 +C 2 The distance conversion formula is still: a = D + C 2 . The improved fruitThe embodiments may be applied in application scenarios that allow the objective lens 5 to be arranged directly above the object 100 to be measured.
Also, it is conceivable that, as shown in fig. 8, in still another embodiment based on the focusing system provided in the present embodiment, the mirror 1 may be disposed at an escape position on the side of the objective lens 5 close to the object 100 to be measured for escaping the objective lens 5. As described above, the focusing system still further includes the stage 12 and the stage driving mechanism 13. The object 100 to be measured is placed on the stage 12; the stage driving mechanism 13 is in driving connection with the stage 12, and the stage driving mechanism 13 can drive the stage 12 to move, so that the object 100 to be measured on the stage 12 can selectively move to the ranging station or the observation station, and along the axial direction of the objective lens 5, the ranging station faces the reflector 1, the observation station faces the objective lens 5, and the ranging station and the observation station are both located in a plane perpendicular to the axial line of the objective lens 5.
When the object 100 to be measured is located at the distance measuring station, the focusing system can measure and obtain the measurement distance a by the laser distance measuring method described above; when the object 100 to be measured is located at the observation station, the focusing system can complete automatic focusing according to the laser ranging method and the focusing method described above. The design has the advantages that the interference of the reflector 1 on the observation of the objective lens 5 can be avoided, the reflector 1 does not need to adopt a half-transmitting and half-reflecting mirror, and the thickness of the reflector is not limited. However, during actual focusing, the object 100 to be measured can only complete the measurement of the measurement distance a at the distance measurement station; then, the object 100 to be measured is stopped at the observation station by the driving of the stage driving mechanism 13, and then focusing can be performed. Therefore, compared with the embodiment of fig. 3, the error is larger (but within the allowable range for the system), the working efficiency is also affected, and the observation and focusing actions cannot be performed synchronously.
For this reason, in other embodiments, when the object 100 is located at the observation station, the part facing the observation station is defined as E of the object 100 1 Where (not shown in FIG. 8), the portion facing the measurement station is E of the object 100 to be measured 2 Where (not shown in FIG. 8), direct synchronous use is made of a measuring station E 2 Measured distance A instead of E 1 A distance A ofAnd performing automatic focusing (without moving the object 100 to be measured to the measuring station for distance measurement and then to the observation station for focusing). Although a certain error exists, the error is within the allowable range of the system, and synchronous ranging and focusing are realized.
The above description is only a preferred embodiment of the present invention, and for those skilled in the art, the present invention should not be limited by the description of the present invention, which should be interpreted as a limitation.
Claims (20)
1. A laser ranging method is characterized by comprising the following steps:
emitting an incident light ray alpha with an incident angle delta to a reflecting surface of a reflector (1), wherein the incident light ray alpha is reflected by the reflector (1) to generate a first reflected light ray beta, and the first reflected light ray beta irradiates an object to be measured (100);
a second reflected light ray theta is shot and generates a laser image on a laser imaging surface (31), wherein the second reflected light ray theta is a return light ray gamma generated after the first reflected light ray beta irradiates the surface of the object to be measured (100), and is generated by reflecting through the reflecting surface of the reflector (1); and
calculating according to a geometric trigonometric theorem based on the laser image to obtain a measuring distance A;
the height of the base of a triangle formed by taking a connecting line L of the emission point of the incident light ray alpha and the receiving point of the second reflected light ray theta as a base and the intersection angle of the incident light ray alpha and the extension line of the second reflected light ray theta as a vertex angle is equal to the measuring distance A.
2. The laser ranging method according to claim 1, wherein an angle e between a line L connecting an emitting point of the incident light ray α and a receiving point of the second reflected light ray θ and the incident light ray α is a known constant, and an angle ζ is an angle between the line L and the second reflected light ray θ;
ζ = arcsin (X/(X) 2 +Y 2 ) 1/2 )；
X represents the distance between the receiving point and the laser imaging surface (31);
y represents the distance between a perpendicular line which passes through the receiving point and is perpendicular to the laser imaging surface (31) and a laser image generated on the laser imaging surface (31) by the second reflected light ray theta.
3. The laser ranging method of claim 1, characterized in that said object (100) to be measured is a transparent slide comprising an upper surface and a lower surface, said transparent slide having a thickness equal to the measured distance a corresponding to said upper surface u And a measured distance A corresponding to the lower surface l The difference of (a).
4. The laser ranging method of claim 3, wherein the flatness of the transparent slide is determined based on the thickness of the transparent slide at different locations.
5. A focusing method based on the laser ranging method as claimed in any one of claims 1 to 4, comprising the steps of:
determining a target object distance C 0 ；
Determining a measurement distance A; wherein the reflector (1) is arranged between the objective lens (5) and the object (100) to be measured;
obtaining a first distance C between the objective lens (5) and the reflector (1) along the axial direction 1 And based on the measured distance A, obtaining a second distance C between the reflector (1) and the object (100) to be measured along the axial direction of the objective lens (5) according to a distance conversion formula 2 ；
Calculating to obtain the actual distance C between the object (100) to be measured and the objective lens (5);
adjusting and making the actual distance C between the objective (5) and the object (100) equal to the target object distance C 0 。
6. The focusing method of claim 5, wherein the object (100) to be measured comprises a sample, and when the first reflected light beam β directly irradiates the surface of the sampleThe actual distance C = C between the object (100) to be measured and the objective (5) 1 +C 2 The distance conversion formula is as follows:
A＝D+C 2 ；
the first reflected light ray beta and the return light ray gamma are coaxial or parallel to the axis of the objective lens (5) relative to the normal of the object (100) to be measured, D represents the distance from the intersection point of the bottom side of the triangle formed by using the connecting line L of the emission point of the incident light ray alpha and the receiving point of the second reflected light ray theta as the bottom side and the intersection angle of the extension lines of the incident light ray alpha and the second reflected light ray theta as the top angle to the bottom side, wherein the intersection point of the height of the bottom side of the triangle and the intersection point of the reflector (1).
7. The focusing method according to claim 5, wherein the object (100) to be measured comprises a specimen and a transparent slide, and when the first reflected light β is irradiated onto the specimen surface through the transparent slide, the actual distance C = C between the object (100) to be measured and the objective lens (5) 1 +C 2 +C 3 The distance conversion formula is as follows:
A＝D+C 2 ；
wherein the first reflected light ray beta and the return light ray gamma are coaxial or parallel to the axis of the objective lens (5) with respect to the normal of the object (100) to be measured, C 3 D represents the distance from the intersection point of the height of the bottom side of the formed triangle and the intersection point of the reflector (1) to the bottom side by taking the connecting line L of the emission point of the incident light ray alpha and the receiving point of the second reflected light ray theta as the bottom side and the intersection angle of the incident light ray alpha and the extension line of the second reflected light ray theta as the vertex angle.
8. A laser ranging system employing the laser ranging method of any one of claims 1 to 4, comprising:
a mirror (1);
the laser emission mechanism (2) is used for emitting incident light rays alpha with an incident angle delta to the reflection surface of the reflector (1), the incident light rays alpha are reflected to generate first reflection light rays beta, and the first reflection light rays beta irradiate the surface of the object to be measured (100) to generate return light rays gamma;
a laser light receiving mechanism (3) for receiving a second reflected light ray (theta) generated by reflecting the return light ray (gamma) by the reflection surface and generating a laser light image;
a calculation module (10), the calculation module (10) being configured to calculate the measured distance A according to the geometric trigonometric theorem based on the laser image.
9. Laser ranging system according to claim 8, characterized in that said laser receiving means (3) comprise:
a laser imaging surface (31) parallel to a line L connecting an emission point of the incident light ray alpha and a receiving point of the second reflected light ray theta;
a receiving lens (32) for receiving the second reflected light ray θ and projecting the second reflected light ray θ onto the laser imaging surface (31), wherein an included angle between the second reflected light ray θ and the laser imaging surface (31) is ζ, and an included angle ε between a connecting line L between an emission point of the incident light ray α and a receiving point of the second reflected light ray θ and the incident light ray α is a known constant;
ζ = arcsin (X/(X) 2 +Y 2 ) 1/2 )；
X represents the distance between the receiving point and the laser imaging surface (31);
y represents the distance between the perpendicular line which passes through the receiving point and is perpendicular to the laser imaging surface (31) and the generated laser image of the second reflected light ray theta on the laser imaging surface (31).
10. A focusing system using the focusing method of any one of claims 5 to 7, comprising the laser ranging system of any one of claims 6 to 7, further comprising:
a focus displacement mechanism (4);
and the objective lens (5) is arranged on the focusing displacement mechanism (4), and the focusing displacement mechanism (4) can enable the objective lens (5) to move relative to the object to be measured (100) along the axial direction so as to realize automatic focusing.
11. Focusing system according to claim 10, characterized in that the mirror (1) is a half mirror.
12. The focusing system of claim 10, characterized in that the first reflected ray β and the return ray γ are coaxial with the axis of the objective lens (5) with respect to the normal of the object (100) to be measured.
13. The focusing system according to claim 10, wherein the mirror (1) is arranged at an evasion position at a side of the objective lens (5) close to the object (100) to be measured for evading the objective lens (5), the focusing system further comprising:
the device comprises a platform (12), wherein an object (100) to be detected is placed on the platform (12);
the stage driving mechanism (13) is in driving connection with the stage (12), the stage driving mechanism (13) can drive the stage (12) to move, so that an object (100) to be measured on the stage (12) can selectively move to a ranging station or an observation station, the ranging station faces the reflector (1) along the axial direction of the objective lens (5), the observation station faces the objective lens (5), and the ranging station and the observation station are both located in a plane perpendicular to the axis of the objective lens (5);
when the object (100) to be measured is located at the distance measuring station, the focusing system can measure and acquire the measuring distance A, when the object (100) to be measured is located at the observation station, the focusing system can automatically focus, or when the object (100) to be measured is located at the observation station, the measuring distance A is acquired, and the focusing system can automatically focus.
14. The focusing system of claim 10, further comprising:
a control module (11) electrically connected with the laser emitting mechanism (2), the laser receiving mechanism (3), the focusing displacement mechanism (4) and the computing module (10)And the control module (11) is configured to be able to obtain the target object distance C 0 Measuring the distance A, calculating and obtaining the actual distance C between the object to be measured (100) and the objective lens (5) so as to control the focusing displacement mechanism (4) to move, and enabling the actual distance C between the objective lens (5) and the object to be measured (100) to be equal to the target object distance C 0 。
15. Focusing system according to claim 10, characterized in that the mirror (1) is arranged inclined at 45 degrees to the horizontal plane, the incoming ray α lying in the horizontal plane.
16. The focusing system according to claim 10, characterized in that the thickness of the mirror (1) is 650nm and the wavelength of the incident light ray a is 655nm.
17. The focusing system of claim 10, further comprising:
the tube lens (6) is coaxially arranged on one side, far away from the reflector (1), of the objective lens (5);
camera (7), set up in tube lens (6) are kept away from the one end of objective (5), camera (7) are used for through objective (5) and tube lens (6) are shot and are awaited measuring object (100).
18. The focusing system of claim 10, further comprising:
a bright field light source (8), the bright field light source (8) for generating bright field light.
19. The focusing system of claim 10, wherein the object (100) to be measured comprises a specimen and a transparent slide, the specimen being carried on the transparent slide, the focusing system further comprising:
the microscope carrier (12) is used for placing a transparent slide glass on the microscope carrier (12), the microscope carrier (12) is provided with a light transmission hole, and the first reflected light ray beta can penetrate through the light transmission hole, irradiate the lower surface of the transparent slide glass and is reflected by the lower surface of the transparent slide glass to generate the return light ray gamma.
20. The focusing system of claim 10, characterized in that the object (100) to be measured comprises a sample and a transparent slide on which the sample is carried, the focusing system further comprising:
and the carrier (12), the transparent slide is placed on the carrier (12), and the first reflected light ray beta is directly irradiated on the upper surface of the sample and is reflected by the upper surface of the sample to generate the return light ray gamma.
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| CN202110127353.8A CN112946673B (en) | 2021-01-29 | 2021-01-29 | Laser ranging method, focusing method, laser ranging system and focusing system |
| EP22745001.2A EP4273581A1 (en) | 2021-01-29 | 2022-01-05 | Laser distance measuring method, focusing method, laser distance measuring system, focusing system, and auto-focusing analysis device |
| PCT/CN2022/070283 WO2022161123A1 (en) | 2021-01-29 | 2022-01-05 | Laser distance measuring method, focusing method, laser distance measuring system, focusing system, and auto-focusing analysis device |
| US18/362,931 US20230375341A1 (en) | 2021-01-29 | 2023-07-31 | Methods and systems for laser distance measuring, fousing methods and systems, and devices for auto-focusing analysis |
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| CN114063094A (en) * | 2021-11-16 | 2022-02-18 | 上海索迪龙自动化有限公司 | Photoelectric sensor based laser sensing distance method and photoelectric sensor |
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