CN219946165U - Seed crystal accommodating tool - Google Patents
Seed crystal accommodating tool Download PDFInfo
- Publication number
- CN219946165U CN219946165U CN202321139132.3U CN202321139132U CN219946165U CN 219946165 U CN219946165 U CN 219946165U CN 202321139132 U CN202321139132 U CN 202321139132U CN 219946165 U CN219946165 U CN 219946165U
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- China
- Prior art keywords
- seed crystal
- base
- bearing plate
- holes
- tool according
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- 239000013078 crystal Substances 0.000 title claims abstract description 104
- 239000004677 Nylon Substances 0.000 claims description 4
- 229920001778 nylon Polymers 0.000 claims description 4
- 238000003860 storage Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000012797 qualification Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 229920000742 Cotton Polymers 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a seed crystal storage tool, which relates to the technical field of semiconductor manufacturing and comprises the following components: a base; the support plate is fixedly arranged on the base and provided with a plurality of through holes for the seed crystal to pass through; wherein, the interval between base and the bearing board is less than the length of seed crystal. The utility model can not only store a large number of seed crystals, but also avoid the mutual collision between adjacent seed crystals, ensure the quality of the seed crystals and greatly improve the qualification rate of the seed crystals before use.
Description
Technical Field
The utility model relates to the technical field of semiconductor manufacturing, in particular to a seed crystal accommodating tool.
Background
At present, seed crystal storage is mainly carried out by combining a plastic basket with pearl cotton. The storage mode mainly has the following three defects: 1. with long-time use, silicon mud and residues are left in holes formed in the pearl cotton, so that the pearl cotton is not easy to clean; 2. silicon mud or residues adhered to holes formed in pearl cotton can damage the surface of seed crystals stored later; 3. the pearl cotton is softer, so that the seed crystal is easy to collide with the seed crystal, and the quality of the seed crystal is affected.
Disclosure of Invention
The utility model aims to solve the technical problem of overcoming the defects of the prior art and providing a seed crystal accommodating tool.
In order to solve the technical problems, the technical scheme of the utility model is as follows:
a seed crystal receiving tool comprising:
a base;
the support plate is fixedly arranged on the base and provided with a plurality of through holes for the seed crystal to pass through;
wherein, the interval between base and the bearing board is less than the length of seed crystal.
As a preferable scheme of the seed crystal accommodating tool, the seed crystal accommodating tool comprises the following components: the base is provided with a plurality of positioning grooves for the end parts of the seed crystals to extend in.
As a preferable scheme of the seed crystal accommodating tool, the seed crystal accommodating tool comprises the following components: the positioning grooves are consistent with the through holes in number and in one-to-one correspondence, and the axis of any through hole is coincident with the axis of the corresponding positioning groove.
As a preferable scheme of the seed crystal accommodating tool, the seed crystal accommodating tool comprises the following components: the upper end face of the bearing plate is positioned at each through hole and provided with a placing groove, the shape of the placing groove is matched with the shape of the connecting conical surface on the seed crystal, and the axis of any placing groove coincides with the axis of the corresponding through hole.
As a preferable scheme of the seed crystal accommodating tool, the seed crystal accommodating tool comprises the following components: the base is fixedly provided with a support column, and the bearing plate is fixedly arranged at the upper end of the support column.
As a preferable scheme of the seed crystal accommodating tool, the seed crystal accommodating tool comprises the following components: the upper end of the bearing plate is fixedly provided with a stand column, and the upper end of the stand column is hinged with a handle.
As a preferable scheme of the seed crystal accommodating tool, the seed crystal accommodating tool comprises the following components: the cross section of the bearing plate is circular;
the through holes are divided into a plurality of groups of through holes, the through holes in each group of through holes are uniformly distributed on the same circumference, and the circle center of the circumference coincides with the circle center of the bearing plate.
As a preferable scheme of the seed crystal accommodating tool, the seed crystal accommodating tool comprises the following components: the axes of the upright post and the supporting column are coincident with the axis of the bearing plate.
As a preferable scheme of the seed crystal accommodating tool, the seed crystal accommodating tool comprises the following components: the base and the bearing plate are both made of nylon materials.
The beneficial effects of the utility model are as follows:
(1) According to the utility model, the seed crystal can be arranged on the bearing plate in a penetrating way through the through hole formed in the bearing plate, and the seed crystal is limited in the horizontal direction through the through hole in the bearing plate, so that the seed crystal is stored, the seed crystal is conveniently stored, collision damage and the like can not be generated between adjacent seed crystals, meanwhile, a hollow structure is adopted between the bearing plate and the base, and the tool is conveniently cleaned, so that the quality of the seed crystal is ensured.
(2) The positioning groove is formed in the base, the positioning groove can position the lower end of the seed crystal in the horizontal direction, and the positioning groove cooperates with the through hole to limit the upper part of the seed crystal in the horizontal direction, so that the placement stability of the seed crystal can be effectively improved, and shaking is reduced; meanwhile, a placing groove is further formed in the bearing plate, and the placing groove is matched with the connecting conical surface on the seed crystal, so that the placing stability of the seed crystal is further improved.
(3) According to the utility model, the upright post is fixedly arranged on the bearing plate, the lifting handle is hinged to the upper end of the upright post, and an operator can lift the tool through the lifting handle, so that the tool is convenient to move, and the transportation of seed crystals is realized.
(4) In the utility model, the base and the bearing plate are both made of nylon, and the base and the bearing plate cannot pollute seed crystals. Meanwhile, the hardness of the material meets the storage requirement of the seed crystal, so that the seed crystal is not damaged by collision while the storage stability is ensured.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a seed crystal accommodating tool provided by the utility model;
FIG. 2 is a front view of a carrier plate in the seed crystal receiving tool provided by the utility model;
wherein: 1. a base; 2. a bearing plate; 3. a through hole; 4. a positioning groove; 5. a placement groove; 6. a support column; 7. a column; 8. a handle; 9. and (5) seed crystal.
Description of the embodiments
In order that the utility model may be more readily understood, a more particular description thereof will be rendered by reference to specific embodiments that are illustrated in the appended drawings.
Fig. 1 is a schematic structural diagram of a seed crystal accommodating tool according to an embodiment of the present utility model. The tool comprises a base 1 and a bearing plate 2. The bearing plate 2 is fixedly arranged at the upper end of the base 1. Seed crystal 9 can wear to establish on carrier plate 2, realizes accomodating seed crystal 9.
Specifically, a support column 6 is fixedly mounted on the base 1. The bearing plate 2 is fixedly arranged at the upper end of the supporting column 6 and is parallel to the plane of the base 1. Referring to fig. 1, a plurality of through holes 3 penetrating the support plate 2 in the thickness direction are formed in the support plate 2. Seed crystal 9 can be worn to establish on the bearing board 2 through above-mentioned through-hole 3, realizes depositing of seed crystal 9.
The distance between the susceptor 1 and the support plate 2 is smaller than the length of the seed crystal 9. Thus, when the seed crystal 9 is penetrated on the bearing plate 2, the lower end of the seed crystal 9 is abutted on the base 1, and the upper end of the seed crystal extends to the upper side of the bearing plate 2. At this time, the through hole 3 can limit the seed crystal 9 in the horizontal direction, so that the seed crystal 9 can be stored.
Preferably, a plurality of positioning grooves 4 are formed in the base 1. When the seed crystal wears to establish on the bearing board 2, the lower extreme of seed crystal can stretch to in the constant head tank 4, and the constant head tank 4 can carry out the horizontal direction to the lower extreme of seed crystal 9 and fix a position, cooperates through-hole 3 to carry out the spacing of horizontal direction to the upper portion of seed crystal 9, can effectively improve the stability of placing of seed crystal 9, reduces and rocks.
It should be noted that the number of positioning grooves 4 on the base 1 is identical to the number of through holes 3 on the supporting plate 2, and each positioning groove 4 is aligned with one through hole 3. The axis of any through hole 3 coincides with the axis of the corresponding positioning groove 4. The lower end of the seed crystal extending into any through hole 3 can extend into the positioning groove 4, so that the placement stability of the seed crystal 9 is ensured.
Referring to fig. 1, a placement groove 5 is provided on the upper end surface of the support plate 2 at each through hole 3. The shape of the placing groove 5 is matched with the shape of the connecting conical surface on the seed crystal 9. In this embodiment, the placement groove 5 is substantially in the shape of an inverted truncated cone. The lower end of each placement groove 5 is communicated with the corresponding through hole 3, and the axis of each placement groove 5 is coincident with the axis of the corresponding through hole 3. When the seed crystal is placed on the tool, the smaller-diameter end part of the seed crystal 9 penetrates through the through hole 3 and stretches into the positioning groove 4 on the base 1, the larger-diameter end part of the seed crystal 9 is positioned above the bearing plate 2, and the connecting conical surface of the seed crystal 9 is positioned in the placing groove 5.
A vertical column 7 extending in the vertical direction is fixedly installed at the upper end of the bearing plate 2. A handle 8 is hinged at the upper end of the upright post 7. Operator accessible handle 8 is mentioned the frock, is convenient for remove the frock, realizes the transportation to the seed crystal.
In this embodiment, the cross section of the carrier plate 2 is circular. Referring to fig. 2, a plurality of through holes 3 formed in the support plate 2 are divided into three groups of through holes 3, a plurality of through holes 3 in each group of through holes 3 are uniformly distributed on the same circumference, and the center of the circumference coincides with the center of the support plate 2. The diameters of circumferences surrounded by the groups of through holes 3 are sequentially reduced. Therefore, a plurality of seed crystals 9 can be placed in the fixture in order, and adjacent seed crystals 9 are not interfered with each other, so that collision damage can not be generated. And simultaneously, the seed crystal 9 is convenient to take out from the fixture.
Correspondingly, the cross section of the base 1 is also circular. The axis of the support column 6 coincides with the axis of the base 1. Simultaneously, the axis of the bearing plate 2 and the base 1 also coincide, so that the support column 6 is supported at the middle part of the bearing plate 2, and the installation stability of the bearing plate 2 is improved. The axis of the upright 7 coincides with the axis of the bearing plate 2. Thus, when an operator lifts the lifting handle 8, the tool can be stably and horizontally lifted, and the stability of the seed crystal 9 in the moving process of the tool is ensured.
In this embodiment, the base 1 and the support plate 2 are made of nylon, which does not pollute the seed crystal. Meanwhile, the hardness of the seed crystal meets the storage requirement of the seed crystal 9, so that the seed crystal is not damaged by collision while the placement stability is ensured.
Therefore, the technical scheme of the utility model not only can store a large number of seed crystals, but also can avoid mutual collision between adjacent seed crystals, ensures the quality of the seed crystals, and greatly improves the qualification rate of the seed crystals before use.
In addition to the above embodiments, the present utility model may have other embodiments; all technical schemes formed by equivalent substitution or equivalent transformation fall within the protection scope of the utility model.
Claims (9)
1. Seed crystal accomodates frock, its characterized in that: comprising the following steps:
a base (1);
the support plate (2) is fixedly arranged on the base (1), and a plurality of through holes (3) for the seed crystals (9) to pass through are formed in the support plate (2);
wherein the distance between the base (1) and the bearing plate (2) is smaller than the length of the seed crystal (9).
2. The seed crystal receiving tool according to claim 1, wherein: a plurality of positioning grooves (4) for the end parts of the seed crystals (9) to extend in are formed in the base (1).
3. The seed crystal receiving tool according to claim 2, wherein: the positioning grooves (4) are consistent with the through holes (3) in number and correspond to each other one by one, and the axis of any through hole (3) coincides with the axis of the corresponding positioning groove (4).
4. The seed crystal receiving tool according to claim 1, wherein: the upper end face of the supporting plate (2) is located at each through hole (3) and is provided with a placing groove (5), the shape of the placing groove (5) is matched with the shape of a connecting conical surface on the seed crystal, and the axis of any placing groove (5) coincides with the axis of the corresponding through hole (3).
5. The seed crystal receiving tool according to claim 1, wherein: the base (1) is fixedly provided with a support column (6), and the bearing plate (2) is fixedly arranged at the upper end of the support column (6).
6. The seed crystal receiving tool according to claim 5, wherein: the upper end of the bearing plate (2) is fixedly provided with a stand column (7), and the upper end of the stand column (7) is hinged with a handle (8).
7. The seed crystal receiving tool according to claim 6, wherein: the cross section of the bearing plate (2) is circular;
the through holes (3) are divided into a plurality of groups of through holes (3), the through holes (3) in each group of through holes (3) are uniformly distributed on the same circumference, and the circle center of the circumference coincides with the circle center of the supporting plate (2).
8. The seed crystal receiving tool according to claim 7, wherein: the axes of the upright post (7) and the supporting column (6) are coincident with the axis of the bearing plate (2).
9. The seed crystal receiving tool according to claim 1, wherein: the base (1) and the bearing plate (2) are both made of nylon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321139132.3U CN219946165U (en) | 2023-05-12 | 2023-05-12 | Seed crystal accommodating tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321139132.3U CN219946165U (en) | 2023-05-12 | 2023-05-12 | Seed crystal accommodating tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219946165U true CN219946165U (en) | 2023-11-03 |
Family
ID=88544310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321139132.3U Active CN219946165U (en) | 2023-05-12 | 2023-05-12 | Seed crystal accommodating tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219946165U (en) |
-
2023
- 2023-05-12 CN CN202321139132.3U patent/CN219946165U/en active Active
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