CN219930220U - Evaporation device and vacuum coating equipment - Google Patents

Abstract

The utility model relates to the technical field of vacuum coating, and particularly discloses an evaporation device and vacuum coating equipment. The device comprises an evaporation source material frame, a lifting assembly and a feeding device, wherein the evaporation source material frame is rotationally connected with a plurality of mounting base plates which are circumferentially distributed around a switching axis, a first evaporation source is fixedly connected on the mounting base plates, the mounting base plates can swing between a base plate evaporation position and a base plate feeding position relative to the evaporation source material frame, when the mounting base plates are positioned at the base plate evaporation position, the mounting base plates are propped against the evaporation source material frame, and when the mounting base plates are positioned at the base plate feeding position, a feeding included angle is formed between the mounting base plates and the evaporation source material frame; the evaporation source material rack can drive each mounting bottom plate to pass through the lifting position; the lifting assembly can push the mounting bottom plate positioned at the lifting position; the feeding device can feed materials to the first evaporation source connected with the installation base plate which is positioned at the lifting position and is positioned at the feeding position of the base plate. The device realizes the supplement of a single feeding device to a plurality of first evaporation sources through the cooperation of the evaporation source material frame and the lifting component.

Description

Evaporation device and vacuum coating equipment

Technical Field

The utility model relates to the technical field of vacuum coating, in particular to an evaporation device and vacuum coating equipment.

Background

In the prior art, when the evaporation device is used for continuously coating films for an ultra-long time, if a single feeding mode is adopted, the material quantity is generally difficult to meet the use requirement; if the vacuum coating chamber is opened for feeding, the coating efficiency of the substrate is seriously affected by vacuum breaking, and the stability of the coating quality is possibly affected by vacuum breaking. In the prior art, a charging mode of providing each evaporation source with a corresponding charging device can be adopted, but the equipment cost is increased, the fault risk is increased, and meanwhile, the occupied space is increased.

In view of the foregoing, there is a need for an evaporation device. The equipment needs to rapidly add materials to an evaporation source and then carry out coating operation. And the adverse effect caused by vacuum breaking is reduced as much as possible during the process, so that the coating equipment is always in a high vacuum state. Meanwhile, the corresponding relation between the evaporation source and the feeding device is considered, so that the number of the feeding devices is reduced, and the structure of the vacuum coating equipment is optimized.

Disclosure of Invention

The utility model aims to provide an evaporation device and vacuum coating equipment, and the aim of position switching of a first evaporation source is fulfilled by matching an evaporation source material frame and a lifting assembly, so that the supplementation of a single feeding device to a plurality of first evaporation sources is realized.

To achieve the purpose, the utility model adopts the following technical scheme:

the evaporation device comprises an evaporation source material frame, a lifting assembly and a feeding device; the evaporation source material frame is rotationally connected with a plurality of mounting bottom plates which are circumferentially distributed around a switching axis, a first evaporation source is fixedly connected to the mounting bottom plates, the mounting bottom plates can swing between a bottom plate evaporation position and a bottom plate feeding position relative to the evaporation source material frame, when the mounting bottom plates are positioned at the bottom plate evaporation position, the mounting bottom plates are propped against the evaporation source material frame, and when the mounting bottom plates are positioned at the bottom plate feeding position, a feeding included angle is formed between the mounting bottom plates and the evaporation source material frame; the evaporation source material frame can drive each mounting bottom plate to pass through a lifting position; the lifting assembly can push the mounting baseplate in the lifting position so as to enable the mounting baseplate to be positioned at the baseplate loading position; the feeding device can feed the first evaporation source connected with the installation base plate which is positioned at the lifting position and the feeding position of the base plate.

As an optimal technical scheme of the evaporation device, the evaporation source material frame comprises an evaporation source material frame main body and an evaporation source lifting material frame which is matched with the evaporation source material frame main body in a sliding manner, the installation base plate is rotationally connected with the evaporation source material frame main body, and the evaporation source material frame main body can rotate around the switching axis so as to drive the installation base plate; the material frame rotary driving unit is used for driving the evaporation source material frame main body, the output end of the material frame lifting driving unit is connected with the evaporation source lifting material frame, and the evaporation source lifting material frame can drive the evaporation source material frame main body to move along the switching axis.

As the preferable technical scheme of the evaporation device, the evaporation source material rack main body is communicated with lifting avoidance ports, and the number of the lifting avoidance ports is the same as that of the mounting bottom plate and corresponds to that of the mounting bottom plate one by one; the lifting assembly comprises a lifting driving unit and a lifting rotating wheel, the lifting rotating wheel is rotationally connected to the output end of the lifting driving unit, and the lifting driving unit can drive the lifting rotating wheel to penetrate through the lifting avoiding opening and to be propped against the mounting bottom plate.

As the preferable technical scheme of evaporation device, the mounting bottom plate with elastic connection has reset spring between the evaporation source work or material rest, reset spring is used for driving the mounting bottom plate towards the bottom plate evaporation position swing.

The vacuum coating equipment comprises a feeding chamber, a coating chamber for coating the substrate jig and the evaporation device, wherein the feeding chamber is selectively communicated with the coating chamber, the evaporation source material rack is rotatably arranged in the coating chamber, the feeding device is arranged in the feeding chamber, and the feeding device can partially extend into the coating chamber.

As the preferable technical scheme of vacuum coating equipment, the feedway includes feed module, feed sharp module and feed module drive unit, the feed module slides and locates on the feed sharp module, feed module drive unit is used for driving the feed module is followed the length direction of feed sharp module is in the reciprocal motion between feed position and the reinforced position, works as the feed module is in when the feed position, the feedway is whole to be located in the reinforced chamber, works as the feed module is in when the reinforced position, the feed module part stretches into in the coating film chamber, just the output of feed module just is located the position the mounting baseplate of lifting connects the first evaporation source.

As a preferable technical scheme of the vacuum coating equipment, the feeding chamber is communicated with the coating chamber through a separation opening, and when the feeding module is positioned at the feeding position, the feeding module stretches into the coating chamber from the separation opening; the charging chamber is also provided with a separation door which selectively opens and closes the separation opening.

As a preferable technical scheme of the vacuum coating equipment, a feeding port is formed in the top of the feeding chamber, the feeding chamber is communicated with the external environment through the feeding port, a feeding device is arranged above the feeding chamber, and the feeding device feeds materials to the feeding module at the feeding position from the feeding port; and the feeding chamber is also provided with a feeding door, and the feeding door selectively opens and closes the feeding opening.

As a preferable technical scheme of the vacuum coating equipment, the first evaporation source is also connected with a second evaporation source, and the second evaporation source is used for accommodating a second material which is different from the first material accommodated by the first evaporation source; the feeding device comprises two feeding modules which are respectively arranged on the two feeding linear modules in a sliding mode, one feeding module is used for providing the first material, the other feeding module is used for providing the second material, and the feeding device comprises a first feeding barrel used for supplementing the first material and a second feeding barrel used for supplementing the second material.

As the preferred technical scheme of vacuum coating equipment, feed supplement device still includes removal feeding platform, the straight line module of platform and platform module drive unit, first feed cylinder with the second feed cylinder all rigid coupling in on the removal feeding platform, remove feeding platform slide locates on the straight line module of platform, platform module drive unit is used for driving remove feeding platform is followed the length direction reciprocating motion of straight line module of platform.

The utility model has the beneficial effects that:

this evaporation device can drive every mounting plate through the design of lifting the position with the help of the evaporation source work or material rest for every first evaporation source homoenergetic is corresponding with feedway, causes all first evaporation sources to utilize same feedway to carry out first material complementary operation, above design has reduced the demand that feedway set up quantity, has reduced evaporation device's cost, has reduced evaporation device trouble's risk, has still reduced evaporation device occupied space simultaneously. The mounting bottom plate and the lifting component which are rotatably connected to the evaporation source material frame are matched, so that the swing of the mounting bottom plate between the evaporation position of the bottom plate and the loading position of the bottom plate is realized, and the first evaporation source connected to the mounting bottom plate is ensured to be positioned at a position for receiving the first material or evaporating. By controlling the lifting assembly, the switching of the working state of the first evaporation source can be realized. The above improvement realizes the first material replenishment operation and the first material evaporation operation for the first evaporation source. The improvement is beneficial to reducing adverse effects caused by vacuum breaking, ensures that the evaporation device is always in a high vacuum state, and simultaneously reduces the number of the feeding devices by considering the corresponding relation between the first evaporation source and the feeding devices, and optimizes the structure of the vacuum coating equipment.

Drawings

Fig. 1 is a top view of a feeding device, an evaporation source holder and a first evaporation source provided by an embodiment of the utility model;

fig. 2 is a side view of a feeding device, an evaporation source holder and a first evaporation source provided by an embodiment of the utility model;

fig. 3 is a schematic structural diagram of a feeding device, an evaporation source material frame and a first evaporation source provided by an embodiment of the utility model;

FIG. 4 is a schematic view of a mobile charging platform, a first charging barrel and a second charging barrel according to an embodiment of the present utility model;

FIG. 5 is a cross-sectional side view of a first cartridge provided by an embodiment of the present utility model;

FIG. 6 is a schematic view of a feed module according to an embodiment of the present utility model;

FIG. 7 is a cross-sectional side view of a feed module provided by an embodiment of the present utility model;

FIG. 8 is a cross-sectional side view of a feed device provided in an embodiment of the utility model;

fig. 9 is a cross-sectional side view of an evaporation source holder and a first evaporation source provided by an embodiment of the utility model;

fig. 10 is a schematic structural diagram of a vacuum coating apparatus according to an embodiment of the present utility model.

In the figure:

110. a first evaporation source; 120. a second evaporation source;

210. a film plating chamber; 220. a charging chamber;

300. a feeding device; 310. a storage tank; 311. a trough switching valve;

410. feeding augers; 420. a feeding slide block;

510. moving a charging platform; 511. a platform straight line module; 512. a platform module driving unit; 520. a first barrel; 521. a first stirring unit; 522. a charging cover; 523. a feed cylinder guide nozzle; 524. a feed cylinder switch valve; 525. a first barrel rotating shaft; 526. a cylinder lifting unit; 530. a second barrel; 531. a second stirring unit; 541. a feeding linear module; 542. a feed module driving unit; 550. a feed supplement door; 560. a partition door;

600. an evaporation device; 611. a material rack rotation driving unit; 612. a work rest lifting driving unit; 613. an evaporation source material rack main body; 614. an evaporation source lifting material rack; 620. a lifting assembly; 621. a lifting driving unit; 622. lifting the connecting block; 623. lifting the runner; 630. a mounting base plate; 631. an evaporation source fixing frame; 640. a return spring;

700. a substrate fixture.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first location" and "second location" are two distinct locations and wherein the first feature is "above," "over" and "over" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is level above the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

As shown in fig. 1 to 10, a substrate to be coated can be placed on the substrate jig 700.

The embodiment provides vacuum coating equipment, which comprises a coating chamber 210 for coating a substrate jig 700 and an evaporation device 600, wherein the evaporation device 600 in the vacuum coating equipment comprises an evaporation source material frame, a lifting component 620 and a feeding device 300; the evaporation source material frame is rotationally connected with a plurality of mounting base plates 630 which are circumferentially distributed around the switching axis, the mounting base plates 630 are fixedly connected with first evaporation sources 110, the mounting base plates 630 can swing between a base plate evaporation position and a base plate feeding position relative to the evaporation source material frame, when the mounting base plates 630 are positioned at the base plate evaporation position, the mounting base plates 630 are propped against the evaporation source material frame, and when the mounting base plates 630 are positioned at the base plate feeding position, a feeding included angle is formed between the mounting base plates 630 and the evaporation source material frame; the evaporation source material frame can drive each mounting bottom plate 630 to pass through the lifting position; the lifting assembly 620 can push the mounting baseplate 630 in the lifted position to place the mounting baseplate 630 in the baseplate loading position; the feeding device 300 can feed the first evaporation source 110 connected to the mounting base 630 located at the raised position and at the base feeding position. Specifically, the mounting baseplate 630 is provided with three; the feeding included angle is 30 degrees.

This evaporation plant 600 can drive every mounting plate 630 through the design of lifting the position with the help of the evaporation source work or material rest for every first evaporation source 110 homoenergetic is corresponding with feedway 300, makes all first evaporation sources 110 can utilize same feedway 300 to carry out first material complementary operation, and above design has reduced the demand that feedway 300 set up quantity, has reduced evaporation plant 600's cost, has reduced evaporation plant 600 trouble's risk, has still reduced evaporation plant 600 occupied space simultaneously. The mounting base 630 rotatably connected to the evaporation source rack is matched with the lifting assembly 620, so that the mounting base 630 swings between the evaporation position of the base and the loading position of the base, and the first evaporation source 110 connected to the mounting base 630 is ensured to be positioned at a position for receiving the first material or evaporating. By controlling the lifting assembly 620, switching of the operation state of the first evaporation source 110 can be achieved. The above improvement realizes the first material replenishing operation and the first material evaporating operation to the first evaporation source 110. The improvement helps to reduce adverse effects caused by vacuum breaking, ensures that the evaporation device 600 is always in a high vacuum state, and also reduces the number of the feeding devices 300 and optimizes the structure of the vacuum coating equipment by considering the corresponding relationship between the first evaporation source 110 and the feeding devices 300.

In this embodiment, the evaporation source rack includes an evaporation source rack main body 613 and an evaporation source lifting rack 614 slidably matched with the evaporation source rack main body 613, the mounting base plate 630 is rotatably connected to the evaporation source rack main body 613, and the evaporation source rack main body 613 can rotate around a switching axis to drive the mounting base plate 630; the rack rotation driving unit 611 is used for driving the evaporation source rack main body 613, the output end of the rack lifting driving unit 612 is connected with the evaporation source lifting rack 614, and the evaporation source lifting rack 614 can drive the evaporation source rack main body 613 to move along the switching axis. The split design of evaporation source rack main part 613 and evaporation source lift work or material rest 614 for the rotation action of evaporation source rack main part 613 around self axis and the action that evaporation source lift work or material rest 614 drove evaporation source rack main part 613 to rise and fall can both be accomplished smoothly, above design makes every first evaporation source 110 all can be smoothly around lifting the position, and can make the mounting plate 630 that is in the bottom plate material loading position remove towards feedway 300, in order to reduce the risk that first material is unrestrained because of the accident, above design has not only reduced the loss of first material, still guaranteed that the environment in the coating film room 210 is clean and tidy.

Further, the evaporation source material frame main body 613 is penetrated with lifting avoidance openings, and the number of the lifting avoidance openings is the same as that of the mounting bottom plate 630 and corresponds to that of the mounting bottom plate one by one; the lifting assembly 620 includes a lifting driving unit 621 and a lifting runner 623, the lifting runner 623 is rotatably connected to an output end of the lifting driving unit 621, and the lifting driving unit 621 can drive the lifting runner 623 to pass through the lifting avoiding opening and press against the mounting bottom plate 630. The setting of the lifting avoidance port optimizes the specific structure and the stress relation of the evaporation source material frame, reduces the difficulty of lifting the mounting bottom plate 630 by the lifting assembly 620, and improves the structural compactness of the evaporation source material frame.

Specifically, the lifting driving unit 621 is fixedly connected to the chamber housing through the lifting connection block 622, and the main body of the lifting driving unit 621 is located outside the coating chamber 210, and the output end of the lifting driving unit 621 extends into the coating chamber 210.

Illustratively, a return spring 640 is elastically connected between the mounting base plate 630 and the evaporation source rack, and the return spring 640 is used for driving the mounting base plate 630 to swing towards the base plate evaporation position. The arrangement of the reset spring 640 enables the mounting baseplate 630 to stop at the baseplate evaporation position without being driven by the lifting assembly 620, achieves the purpose of resetting the mounting baseplate 630, avoids the situation that the mounting baseplate 630 cannot be accurately positioned due to accidents, and limits the swinging of the mounting baseplate 630 between the baseplate evaporation position and the baseplate loading position.

Specifically, the evaporation source holder is rotatably disposed in the coating chamber 210.

Further, the feeding device 300 includes a feeding module, a feeding linear module 541 and a feeding module driving unit 542, the feeding module is slidably disposed on the feeding linear module 541, the feeding module driving unit 542 is configured to drive the feeding module to reciprocate between a feeding position and a feeding position along a length direction of the feeding linear module 541, when the feeding module is in the feeding position, the feeding device 300 is located in the feeding chamber 220, and when the feeding module is in the feeding position, the feeding module extends into the coating chamber 210, and an output end of the feeding module is located in the first evaporation source 110 connected to the mounting base 630 at the lifting position. By means of the design that the feeding module can move relative to the feeding linear module 541, the output end of the feeding module can be opposite to the first evaporation source 110 connected to the mounting base plate 630 located at the lifting position, so that the feeding operation of the first evaporation source 110 is achieved.

In this embodiment, the evaporation source fixing frames 631 are fixedly connected to the upper plate surface of the mounting base plate 630, the number of the evaporation source fixing frames 631 is the same as that of the first evaporation sources 110, and each first evaporation source 110 is fixedly connected to one evaporation source fixing frame 631.

Still further, the feeding chamber 220 is in communication with the coating chamber 210 through a separation port, and when the feeding module is in the feeding position, the feeding module extends into the coating chamber 210 from the separation port; the charging chamber 220 is further provided with a partition door 560, and the partition door 560 selectively opens and closes the partition opening. The cooperation of the separating opening and the separating door 560 realizes the selective communication between the feeding chamber 220 and the coating chamber 210, ensures the sealing capability of the feeding chamber 220 and the coating chamber 210, is beneficial to maintaining the high vacuum state in the coating chamber 210, ensures the film forming quality of the substrate on the substrate jig 700, and improves the film coating efficiency of the substrate on the substrate jig 700.

The reset action of the feed module can avoid position conflict at the separation opening, and ensure that the separation door 560 can smoothly seal the feed chamber 220, thereby ensuring the smooth operation of the vacuum coating equipment.

Illustratively, a feeding port is formed at the top of the feeding chamber 220, the feeding chamber 220 is communicated with the external environment through the feeding port, a feeding device is installed above the feeding chamber 220, and the feeding device feeds materials to a feeding module at a feeding position from the feeding port; the charging chamber 220 is further provided with a feeding gate 550, and the feeding gate 550 selectively opens and closes the feeding port. The feed supplement port can be matched with the feed supplement door 550 to realize the selective communication between the feed chamber 220 and the external environment, the sealing capability of the feed chamber 220 is guaranteed by the design, the influence of the vacuum breaking condition in the feed chamber 220 on the coating chamber 210 is reduced, the high vacuum state in the coating chamber 210 is maintained, the influence of the air pressure on the coating chamber 210 when being communicated with the feed chamber 220 is reduced, the film forming quality of the substrate on the substrate jig 700 in the coating chamber 210 is guaranteed, and the film coating efficiency of the substrate on the substrate jig 700 is improved.

In this embodiment, the first evaporation source 110 is further connected to a second evaporation source 120, and the second evaporation source 120 contains a second material, which is different from the first material contained in the first evaporation source 110; the feeding device 300 includes two feeding modules slidably provided on two feeding linear modules 541, respectively, one for supplying a first material and the other for supplying a second material, and the feeding device includes a first cylinder 520 for replenishing the first material and a second cylinder 530 for replenishing the second material.

In the present embodiment, the first evaporation source 110 and the second evaporation source 120 are regarded as one body, and the relative positions of the first evaporation source 110 and the second evaporation source 120 are determined. The specific application scenario of the whole is the same as that of the first evaporation source 110 provided above, and can be directly replaced, which is not repeated here.

The first evaporation source 110 is connected with the second evaporation source 120, so that vacuum coating operation can be performed on the first material and the second material simultaneously in the coating process, thereby being beneficial to improving and expanding the coating capability of the vacuum coating equipment. The two feeding modules are arranged, and the first feeding barrel 520 and the second feeding barrel 530 are distinguished, so that the first evaporation source 110 and the second evaporation source 120 are respectively provided with a feeding line, and hidden danger of feeding mixing and feeding errors is greatly reduced.

Specifically, the first evaporation source 110 and the second evaporation source 120 are respectively adjusted, and position parameters are individually set according to the positions of each group of arrangement, so that the requirements of different positions are met. The specific adjustment method is a conventional technical means in the field, and is well known to those skilled in the art, and is not repeated here.

Further, the feeding device further comprises a movable feeding platform 510, a platform linear module 511 and a platform module driving unit 512, wherein the first charging barrel 520 and the second charging barrel 530 are fixedly connected to the movable feeding platform 510, the movable feeding platform 510 is slidably arranged on the platform linear module 511, and the platform module driving unit 512 is used for driving the movable feeding platform 510 to reciprocate along the length direction of the platform linear module 511. The design that the movable charging platform 510 can move relative to the platform linear module 511 enables the feeding positions of the first charging barrel 520 and the second charging barrel 530 to be adjustable, and the above design improves the working flexibility of the feeding device and is beneficial to realizing the cooperation between the feeding device and different types of feeding devices 300.

Specifically, the first barrel 520 further includes a charging cover 522 capable of selectively opening and closing an opening of the first barrel 520, a barrel guide 523 as an output end of the first barrel 520, a barrel switch valve 524 for controlling an on-off state of the barrel guide 523, a first barrel rotating shaft 525 for stirring a first material in the first barrel 520, and a first stirring unit 521 for driving the first barrel rotating shaft 525; the first charging barrel 520 is fixedly connected with a charging barrel lifting unit 526, and the output end of the charging barrel lifting unit 526 is fixedly connected with the movable charging platform 510. The second cartridge 530 further includes a second cartridge rotating shaft for stirring the second material in the second cartridge 530, and a second stirring unit 531 for driving the second cartridge rotating shaft.

In this embodiment, the feeding module includes a storage tank 310 for storing materials and a feeding auger 410 for feeding materials, the storage tank 310 can selectively feed materials to the feeding auger 410 through a tank switch valve 311, a feeding slider 420 is fixedly connected to the bottom of the feeding auger 410, and the feeding module is slidably arranged on a feeding linear module 541 through the feeding slider 420.

Specifically, the storage tank 310 is an equal-part storage bin mechanism and comprises three vacuum side storage bins, wherein each vacuum side storage bin is provided with a side storage bin valve, and the side storage bin valve is used for controlling the opening and closing of the corresponding vacuum side storage bin. The feeding device is located in the external environment and can be used for respectively adding the same parts of first materials into the three vacuum side bins. The above design allows the storage tank 310 to add all of the first material in one vacuum side bin at a time during the charging operation, so that the storage tank 310 can add the same amount every time during the three addition operations.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. An evaporation apparatus, comprising:

the evaporation source material frame is rotationally connected with a plurality of mounting base plates (630) circumferentially distributed around a switching axis, a first evaporation source (110) is fixedly connected to the mounting base plates (630), the mounting base plates (630) can swing between a base plate evaporation position and a base plate feeding position relative to the evaporation source material frame, when the mounting base plates (630) are positioned at the base plate evaporation position, the mounting base plates (630) are pressed against the evaporation source material frame, and when the mounting base plates (630) are positioned at the base plate feeding position, a feeding included angle is formed between the mounting base plates (630) and the evaporation source material frame; the evaporation source material frame can drive each mounting bottom plate (630) to pass through a lifting position;

a lifting assembly (620) capable of pushing the mounting baseplate (630) in the lifted position to place the mounting baseplate (630) in the baseplate loading position;

and the feeding device (300) can feed the first evaporation source (110) connected with the installation base plate (630) which is positioned at the lifting position and the feeding position of the base plate.

2. The evaporation apparatus according to claim 1, wherein the evaporation source rack comprises an evaporation source rack body (613) and an evaporation source lifting rack (614) slidably matched with the evaporation source rack body (613), the mounting base plate (630) is rotatably connected to the evaporation source rack body (613), and the evaporation source rack body (613) is rotatable around the switching axis to drive the mounting base plate (630); the material rack rotary driving unit (611) is used for driving the evaporation source material rack main body (613), the output end of the material rack lifting driving unit (612) is connected with the evaporation source lifting material rack (614), and the evaporation source lifting material rack (614) can drive the evaporation source material rack main body (613) to move along the switching axis.

3. The evaporation device according to claim 2, wherein the evaporation source material rack main body (613) is penetrated with lifting avoidance openings, and the number of the lifting avoidance openings is the same as that of the mounting base plate (630) and corresponds to one; the lifting assembly (620) comprises a lifting driving unit (621) and a lifting rotating wheel (623), the lifting rotating wheel (623) is rotationally connected to the output end of the lifting driving unit (621), and the lifting driving unit (621) can drive the lifting rotating wheel (623) to penetrate through the lifting avoiding opening and be propped against the mounting bottom plate (630).

4. A vaporization apparatus according to any one of claims 1-3, characterized in that a return spring (640) is elastically connected between the mounting base plate (630) and the vaporization source rack, the return spring (640) being adapted to drive the mounting base plate (630) to swing towards the base plate vaporization position.

5. Vacuum coating equipment, characterized in that, including feeding room (220), be used for carrying out coating film room (210) and the evaporation plant of any one of claims 1-4 to base plate tool (700), feeding room (220) selectivity intercommunication coating film room (210), evaporation source work or material rest rotate set up in coating film room (210), feeding device (300) are located in feeding room (220), just feeding device (300) can partly stretch into coating film room (210).

6. The vacuum coating apparatus according to claim 5, wherein the feeding device (300) comprises a feeding module, a feeding linear module (541) and a feeding module driving unit (542), the feeding module is slidably arranged on the feeding linear module (541), the feeding module driving unit (542) is configured to drive the feeding module to reciprocate between a feeding position and a feeding position along a length direction of the feeding linear module (541), when the feeding module is in the feeding position, the feeding device (300) is all located in the feeding chamber (220), when the feeding module is in the feeding position, the feeding module part extends into the coating chamber (210), and an output end of the feeding module is opposite to the first evaporation source (110) connected to the mounting base plate (630) located in the lifting position.

7. The vacuum coating apparatus of claim 6, wherein the feed chamber (220) is in communication with the coating chamber (210) through a partition, the feed module extending from the partition into the coating chamber (210) when the feed module is in the feed position; and a separation door (560) is further arranged on the charging chamber (220), and the separation door (560) selectively opens and closes the separation opening.

8. The vacuum coating apparatus according to claim 6, wherein a feed port is provided at a top of the feed chamber (220), the feed chamber (220) is communicated with an external environment through the feed port, a feed device is installed above the feed chamber (220), and the feed device feeds the feed module at the feed position from the feed port; and a feed supplementing door (550) is further arranged on the feed adding chamber (220), and the feed supplementing door (550) selectively opens and closes the feed supplementing opening.

9. The vacuum coating apparatus according to claim 8, wherein a second evaporation source (120) is further connected to the first evaporation source (110), and the second evaporation source (120) contains a second material different from the first material contained in the first evaporation source; the feeding device (300) comprises two feeding modules which are respectively arranged on two feeding linear modules (541) in a sliding mode, one feeding module is used for providing the first material, the other feeding module is used for providing the second material, and the feeding device comprises a first feeding cylinder (520) for supplementing the first material and a second feeding cylinder (530) for supplementing the second material.

10. The vacuum coating apparatus according to claim 9, wherein the feeding device further comprises a movable feeding platform (510), a platform linear module (511) and a platform module driving unit (512), the first charging barrel (520) and the second charging barrel (530) are fixedly connected to the movable feeding platform (510), the movable feeding platform (510) is slidably arranged on the platform linear module (511), and the platform module driving unit (512) is used for driving the movable feeding platform (510) to reciprocate along the length direction of the platform linear module (511).