CN219917064U - VST scanning electron microscope sample stage - Google Patents
VST scanning electron microscope sample stage Download PDFInfo
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- CN219917064U CN219917064U CN202321063601.8U CN202321063601U CN219917064U CN 219917064 U CN219917064 U CN 219917064U CN 202321063601 U CN202321063601 U CN 202321063601U CN 219917064 U CN219917064 U CN 219917064U
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- rod
- lifting
- fixed
- groove
- vst
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- 238000001179 sorption measurement Methods 0.000 claims abstract description 15
- 230000000149 penetrating effect Effects 0.000 claims abstract description 7
- 230000003028 elevating effect Effects 0.000 claims description 6
- 230000001154 acute effect Effects 0.000 claims description 4
- 238000005070 sampling Methods 0.000 abstract description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model discloses a VST scanning electron microscope sample stage, which comprises: the lifting platform is positioned in the lifting groove and slides up and down with the lifting groove, and the middle part of the lifting platform is communicated with the suction groove; the bottom surface of the workbench is provided with a limiting component for fixing the position of the sample on the lifting platform and a driving component for driving the lifting platform to lift; the spacing subassembly includes: a lifting frame and a piston; the lifting frame is fixedly connected with the lifting table, a round groove communicated with the adsorption groove is formed in the middle of the lifting frame in a penetrating manner, the piston is arranged in the round groove, one end of the piston is fixedly provided with a push rod, and one end of the push rod is fixed on the driving assembly; according to the utility model, the piston is matched with the circular groove to form pressure difference, so that the sample on the lifting table can be quickly fixed and taken, and the condition of sample fracture during sampling is avoided.
Description
Technical Field
The utility model relates to the field of scanning electron microscopy, in particular to a VST scanning electron microscopy sample stage.
Background
Scanning electron microscope (Scanning Electron Microscope, SEM) is an electron microscope which uses the scattering and reflection principle of electron beam to focus electron beam on the sample surface, receives the signal generated by the reflected and scattered electron through detector, so as to obtain the high resolution image of the appearance, structure and composition distribution of the sample surface, compared with the traditional optical microscope, the scanning electron microscope has higher resolution and depth, can observe smaller detail structure, and can directly observe non-conductive sample, therefore, the scanning electron microscope has wide application in the fields of material science, biology, geology and chemistry;
at present, in scanning electron microscope detection, a sample is generally fixed on a sample table through carbon conductive adhesive, but for some lithium niobate, wafer and other easy fragments, the problem of sample fracture is easily caused during sampling after the sample is fixed by the carbon conductive adhesive.
Accordingly, there is a need for an improvement over the deficiencies in the prior art to address the above-described problems.
Disclosure of Invention
The utility model overcomes the defects of the prior art and provides a VST scanning electron microscope sample stage.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a VST scanning electron microscope sample stage comprising: the lifting device comprises a workbench, a lifting table and a lifting groove formed in the workbench, wherein the lifting table is positioned in the lifting groove and slides up and down with the lifting groove, and an adsorption groove is formed in the middle of the lifting table in a penetrating manner;
the bottom surface of the workbench is provided with a limiting component for fixing the position of the sample on the lifting platform and a driving component for driving the lifting platform to lift;
the spacing subassembly includes: a lifting frame and a piston; the lifting frame is fixedly connected with the lifting table, a round groove communicated with the adsorption groove is formed in the middle of the lifting frame in a penetrating mode, the piston is installed in the round groove, a push rod is fixed to one end of the piston, and one end of the push rod is fixed to the driving assembly.
In a preferred embodiment of the present utility model, the lifting platform is formed by intersecting the middle positions of a plurality of connecting rods.
In a preferred embodiment of the present utility model, the driving assembly includes: a fixed rod, a movable rod and connecting rods positioned at two sides of the movable rod; one end of the fixed rod is fixedly connected with the inner wall of the workbench, one end of the movable rod is spliced with the fixed rod, the connecting rods are positioned on two sides of the movable rod, one end of each connecting rod is hinged with the movable rod, and the other end of each connecting rod is hinged with the lifting frame;
and a fixing piece positioned in the fixing rod.
In a preferred embodiment of the present utility model, the fixing member includes: a spring, a limit rod and a limit groove; the spring is located between the movable rod and the fixed rod, the limiting rod is installed on one side of the fixed rod and hinged to the fixed rod, the limiting groove is formed in one side of the movable rod, and the limiting rod is fixedly provided with a protruding block and located in the limiting groove.
In a preferred embodiment of the present utility model, the moving rod includes: a support rod and a support ring; the support ring is positioned at the position right below the lifting table, and the support rods are positioned at the two ends of the support ring and fixed with the support ring.
In a preferred embodiment of the present utility model, a button is fixed to the support rod at a side far from the fixing rod.
In a preferred embodiment of the present utility model, the driving assembly further comprises a pull rod; the pull rod is sleeved on the support rod and slides with the support rod, and two ends of the pull rod are fixedly connected with the inner wall of the workbench.
In a preferred embodiment of the utility model, the included angle between the pull rod and the support rod is an acute angle.
In a preferred embodiment of the present utility model, a long rod is fixed between the pull rods, and the push rod is located on the long rod and fixedly connected with the long rod.
In a preferred embodiment of the present utility model, a flexible rubber pad is disposed on the upper surface of the lifting platform, and the flexible rubber pad is installed at the outer side of the adsorption groove.
The utility model solves the defects existing in the background technology, and has the following beneficial effects:
(1) According to the utility model, the movable rod is moved by pressing the button, the position of the movable rod is fixed by the fixing piece, the lifting table is driven to move upwards, and the piston is matched with the circular groove, so that a sample arranged on the lifting table is adsorbed by adsorption force, and the sample is rapidly fixed.
(2) According to the utility model, the piston is matched with the circular groove to form pressure difference, so that the sample on the lifting table can be quickly fixed and taken, and the condition of sample fracture during sampling is avoided.
Drawings
The utility model is further described below with reference to the drawings and examples;
FIG. 1 is a schematic front view of a preferred embodiment of the present utility model;
FIG. 2 is a schematic view in section A-A of FIG. 1 in accordance with a preferred embodiment of the present utility model;
FIG. 3 is a side elevation schematic view of the internal structure of a preferred embodiment of the present utility model;
fig. 4 is an exploded view of the fastener structure of the preferred embodiment of the present utility model.
In the figure: 1. a work table; 2. a lifting table; 3. a lifting groove; 4. an adsorption tank; 5. a lifting frame; 6. a piston; 7. a circular groove; 8. a push rod; 9. a fixed rod; 10. a moving rod; 11. a connecting rod; 12. a spring; 13. a limit rod; 14. a limit groove; 15. a support rod; 16. a support ring; 17. a pull rod; 18. a long rod; 19. a button.
Detailed Description
The utility model will now be described in further detail with reference to the drawings and examples, which are simplified schematic illustrations of the basic structure of the utility model, which are presented only by way of illustration, and thus show only the structures that are relevant to the utility model.
As shown in fig. 1, 2 and 3, a VST scanning electron microscope sample stage includes: the lifting device comprises a workbench 1, a lifting table 2 and a lifting groove 3 formed in the workbench 1, wherein the lifting table 2 is positioned in the lifting groove 3 and slides up and down with the lifting groove 3, and an adsorption groove 4 is formed in the middle of the lifting table 2 in a penetrating manner;
the bottom surface of the workbench 1 is provided with a limiting component for fixing the position of the sample on the lifting table 2 and a driving component for driving the lifting table 2 to lift;
the spacing subassembly includes: a lifting frame 5 and a piston 6; the lifting frame 5 is fixedly connected with the lifting table 2, a round groove 7 communicated with the adsorption groove 4 is formed in the middle of the lifting frame 5 in a penetrating mode, the piston 6 is installed in the round groove 7, a push rod 8 is fixed at one end of the piston 6, and one end of the push rod 8 is fixed on the driving assembly.
In the initial state, the bottom surface of the lifting table 2 is attached to the bottom surface of the lifting groove 3, and the end surface of the lifting table 2 is higher than the end surface of the workbench 1, so that the sample can be conveniently taken out;
considering that when a fragile sheet sample such as a fragile wafer is taken after being fixed on a sample table through carbon conductive adhesive, the taking force is difficult to control, so that the sample is easy to break on the sample table, and the cleaning is troublesome;
through control drive assembly, drive elevating platform 2 upwards moves in elevating groove 3, because of the position of piston 6 is unchangeable, and circular slot 7 and adsorption groove 4 intercommunication, when elevating platform 2 upwards moves, just can adsorb the sample on the adsorption groove 4 to fix the position of sample on elevating platform 2, avoided the removal of sample, and fix the sample through pressure differential, take to the sample when conveniently taking, the effectual cracked condition of appearance appears when taking to the sample.
In a preferred embodiment of the present utility model, the lifting platform 2 is formed by intersecting the middle positions of a plurality of connecting rods.
It should be noted that, through a plurality of connecting rods crossing, the middle part of connecting rod just can constitute the plane, makes things convenient for placing of sample, and then there is the clearance between the tip of adjacent connecting rod, makes things convenient for placing and taking the sample.
In a preferred embodiment of the present utility model, the driving assembly comprises: a fixed rod 9, a movable rod 10, and a connecting rod 11 positioned at both sides of the movable rod 10; one end of the fixed rod 9 is fixedly connected with the inner wall of the workbench 1, one end of the movable rod 10 is spliced with the fixed rod 9, the connecting rods 11 are positioned on two sides of the movable rod 10, one end of each connecting rod 11 is hinged with the movable rod 10, and the other end of each connecting rod 11 is hinged with the lifting frame 5;
and also comprises a fixing part positioned in the fixing rod 9.
In a preferred embodiment of the present utility model, the moving rod 10 comprises: a support bar 15 and a support ring 16; the support ring 16 is located at a position right below the lifting table 2, and the support rods 15 are located at two ends of the support ring 16 and fixed with the support ring 16.
In a preferred embodiment of the present utility model, a button 19 is fixed to the support rod 15 on the side remote from the fixing rod 9.
It should be noted that, in the process of moving the moving rod 10 toward the fixed rod 9, the included angle between the connecting rod 11 and the plane of the supporting ring 16 is gradually increased;
when the sample on the lifting platform 2 is required to be fixed, the moving rod 10 moves towards the direction of the fixed rod 9 by pressing the button 19, and the lifting frame 5 is fixed with the lifting platform 2, and the lifting frame 5 is hinged with the supporting ring 16 through the connecting rod 11, so that when the moving rod 10 moves towards the direction of the fixed rod 9, the lifting frame 5 is driven to move upwards, the limiting component is matched, the sample on the lifting platform 2 is fixed, and meanwhile, the moving rod 10 is matched with a fixing piece in the fixed rod 9 to fix the position of the moving rod 10, so that the position of the lifting platform 2 is kept fixed.
As shown in fig. 4, in a preferred embodiment of the present utility model, the fixing member includes: a spring 12, a limit rod 13 and a limit groove 14; the spring 12 is located between the movable rod 10 and the fixed rod 9, the limiting rod 13 is installed on one side of the fixed rod 9 and hinged with the fixed rod 9, the limiting groove 14 is formed in one side of the movable rod 10, and the limiting rod 13 is fixedly provided with a protruding block and located in the limiting groove 14.
It should be noted that, the specific structure of the limiting slot 14 may refer to the guiding slot structure of the self-locking structure in the memory card of the mobile phone;
when the movable rod 10 is driven to move towards the fixed rod 9, the movable rod 10 can squeeze the spring 12, and the limiting rod 13 and the fixed rod 9 are hinged, so that the protruding blocks on the limiting rod 13 can move in the limiting grooves 14 to be matched with each other, the movable rod 10 is fixed, when a sample on the lifting table 2 needs to be taken, the movable rod 10 is driven to move towards the fixed rod 9 again until the movable rod 10 cannot move, the movable rod 10 is not driven any more, the spring 12 is reset, and the movable rod 10 is driven to reset.
In a preferred embodiment of the utility model, the drive assembly further comprises a pull rod 17; the pull rod 17 is sleeved on the support rod 15 and slides with the support rod 15, and both ends of the pull rod 17 are fixedly connected with the inner wall of the workbench 1.
The movable rod 10 is supported by the arrangement of the tie rod 17.
In a preferred embodiment of the present utility model, the angle between the pull rod 17 located below the support rod 15 and the support rod 15 is an acute angle.
The tie rod 17 forms an acute angle with the support rod 15, and the stability of the movable rod 10 is enhanced.
In a preferred embodiment of the present utility model, a long rod 18 is fixed between the pull rods 17, and the push rod 8 is located on the long rod 18 and fixedly connected with the long rod 18.
In a preferred embodiment of the present utility model, a flexible rubber pad is provided on the upper surface of the lifting table 2, and the flexible rubber pad is installed at the outer side of the adsorption tank 4.
Through the setting of flexible rubber pad, strengthened the leakproofness between sample and the adsorption tank 4 when the sample is placed on elevating platform 2.
When the utility model is used, a sample is firstly placed on the lifting platform 2, the button 19 is pressed, the movable rod 10 is driven to move towards the direction of the fixed rod 9, and the position of the movable rod 10 is fixed by the fixed piece, because the lifting frame 5 is hinged with the supporting ring 16 through the connecting rod 11, and the included angle between the connecting rod 11 and the plane of the supporting ring 16 is in a trend of gradually increasing in the process of moving the movable rod 10 towards the direction of the fixed rod 9, the lifting platform 2 is driven to move upwards, and because the position of the piston 6 is fixed and is matched and sealed with the circular groove 7, the pressure between the piston 6 and the sample is smaller than the pressure of the outside, the sample is adsorbed, and the position of the sample is fixed;
when the detection of the sample is completed, the movable rod 10 is driven to move towards the direction of the fixed rod 9 again, the fixed part does not fix the movable rod 10, the movable rod 10 is reset, the lifting table 2 is driven to reset, the pressure between the piston 6 and the sample is restored to a normal pressure value, and the fixation of the sample is released.
The above-described preferred embodiments according to the present utility model are intended to suggest that, from the above description, various changes and modifications can be made by the person skilled in the art without departing from the scope of the technical idea of the present utility model. The technical scope of the present utility model is not limited to the description, but must be determined according to the scope of claims.
Claims (10)
1. A VST scanning electron microscope sample stage comprising: the lifting device comprises a workbench (1), a lifting table (2) and a lifting groove (3) formed in the workbench (1), and is characterized in that the lifting table (2) is positioned in the lifting groove (3) and slides up and down with the lifting groove (3), and an adsorption groove (4) is formed in the middle of the lifting table (2) in a penetrating manner;
the bottom surface of the workbench (1) is provided with a limiting component for fixing the position of a sample on the lifting table (2) and a driving component for driving the lifting table (2) to lift;
the spacing subassembly includes: a lifting frame (5) and a piston (6); the lifting frame (5) is fixedly connected with the lifting table (2), a round groove (7) communicated with the adsorption groove (4) is formed in the middle of the lifting frame (5) in a penetrating mode, the piston (6) is installed in the round groove (7), a push rod (8) is fixed at one end of the piston (6), and one end of the push rod (8) is fixed on the driving assembly.
2. The VST scanning electron microscope sample stage of claim 1, wherein: the lifting table (2) is formed by mutually crossing the middle positions of a plurality of connecting rods.
3. The VST scanning electron microscope sample stage of claim 1, wherein: the drive assembly includes: a fixed rod (9), a movable rod (10) and connecting rods (11) positioned at two sides of the movable rod (10); one end of the fixed rod (9) is fixedly connected with the inner wall of the workbench (1), one end of the movable rod (10) is inserted into the fixed rod (9), the connecting rods (11) are positioned on two sides of the movable rod (10), one end of each connecting rod (11) is hinged with the movable rod (10), and the other end of each connecting rod is hinged with the lifting frame (5);
also comprises a fixing piece positioned in the fixing rod (9).
4. A VST scanning electron microscope sample stage of claim 3, characterized by: the fixing member includes: a spring (12), a limit rod (13) and a limit groove (14); the spring (12) is located between the moving rod (10) and the fixed rod (9), the limiting rod (13) is installed on one side of the fixed rod (9) and hinged to the fixed rod (9), the limiting groove (14) is formed in one side of the moving rod (10), and the limiting rod (13) is fixedly provided with a protruding block and located in the limiting groove (14).
5. A VST scanning electron microscope sample stage of claim 3, characterized by: the moving lever (10) includes: a support rod (15) and a support ring (16); the support ring (16) is positioned at the position right below the lifting table (2), and the support rods (15) are positioned at the two ends of the support ring (16) and are fixed with the support ring (16).
6. The VST scanning electron microscope sample stage of claim 5, further comprising: a button (19) is fixed on the support rod (15) at one side far away from the fixed rod (9).
7. The VST scanning electron microscope sample stage of claim 5, further comprising: the drive assembly further comprises a pull rod (17); the pull rod (17) is sleeved on the support rod (15) and slides with the support rod (15), and two ends of the pull rod (17) are fixedly connected with the inner wall of the workbench (1).
8. The VST scanning electron microscope sample stage of claim 7, wherein: the included angle between the pull rod (17) positioned below the support rod (15) and the support rod (15) is an acute angle.
9. The VST scanning electron microscope sample stage of claim 7, wherein: a long rod (18) is fixed between the pull rods (17), and the push rod (8) is positioned on the long rod (18) and fixedly connected with the long rod.
10. The VST scanning electron microscope sample stage of claim 1, wherein: the upper surface of elevating platform (2) is equipped with flexible rubber pad, just flexible rubber pad installs in the outside of adsorption tank (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321063601.8U CN219917064U (en) | 2023-05-06 | 2023-05-06 | VST scanning electron microscope sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321063601.8U CN219917064U (en) | 2023-05-06 | 2023-05-06 | VST scanning electron microscope sample stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219917064U true CN219917064U (en) | 2023-10-27 |
Family
ID=88467964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321063601.8U Active CN219917064U (en) | 2023-05-06 | 2023-05-06 | VST scanning electron microscope sample stage |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219917064U (en) |
-
2023
- 2023-05-06 CN CN202321063601.8U patent/CN219917064U/en active Active
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